EP1129231A2 - Method for vacuum coating metal components - Google Patents

Method for vacuum coating metal components

Info

Publication number
EP1129231A2
EP1129231A2 EP99959190A EP99959190A EP1129231A2 EP 1129231 A2 EP1129231 A2 EP 1129231A2 EP 99959190 A EP99959190 A EP 99959190A EP 99959190 A EP99959190 A EP 99959190A EP 1129231 A2 EP1129231 A2 EP 1129231A2
Authority
EP
European Patent Office
Prior art keywords
metal components
vacuum coating
oxide layer
coating metal
vacuum chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP99959190A
Other languages
German (de)
French (fr)
Other versions
EP1129231B1 (en
Inventor
Lutz Wolkers
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Publication of EP1129231A2 publication Critical patent/EP1129231A2/en
Application granted granted Critical
Publication of EP1129231B1 publication Critical patent/EP1129231B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/32—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer
    • C23C28/321—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer with at least one metal alloy layer
    • C23C28/3215—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer with at least one metal alloy layer at least one MCrAlX layer
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/32—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer
    • C23C28/321—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer with at least one metal alloy layer
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
    • C23C28/345—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with at least one oxide layer
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/02—Pretreatment of the material to be coated
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/08—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases only one element being applied
    • C23C8/10—Oxidising

Definitions

  • the invention relates to a method for vacuum coating metal components, in which the metal components are preheated uniformly in a vacuum chamber to a temperature of approximately 800 ° C. in a vacuum chamber.
  • Such a method is known from German published patent application DE 197 03 338 AI.
  • the known method is used for preheating workpieces in vacuum coating, with which the respective workpiece or metal component can be preheated uniformly using electron beams in a vacuum chamber, in order then to coat it in vacuo.
  • the invention is based on the object of proposing a method for producing a homogeneous oxide layer on metal components with which the oxide layer can be applied in a controlled and reproducible manner.
  • a major advantage of the method according to the invention is that it enables homogeneous oxide layers to be applied and reproduced in a controlled manner to metal components coated with MCrAlY or PtAl, that is to say in their layer thickness and structure can be created in a targeted manner. So there is
  • the turbine blades are accommodated in a chamber which is evacuated. Then, taking into account the mass distribution of the turbine blades, electron irradiation with different doses for the foot, the blade and the top plate of the turbine blades takes place, whereby due to the greater mass in the feet and in the top plate there is a considerably higher dose of electron radiation than for the blade .
  • the method described can be modified in such a way that the metal components to be provided with an oxide layer are acted upon by component-specific gas showers with the oxygen-argon mixture in order to produce a particularly homogeneous oxide layer.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
  • Physical Vapour Deposition (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Turbine Rotor Nozzle Sealing (AREA)

Abstract

The invention relates to a method for generating a homogenous oxide layer on metal components. According to said method, the components are evenly heated in all areas thereof in a vacuum chamber, and once they have reached a predetermined temperature, they are subjected to an oxygenous gas for a predetermined period and at a predetermined pressure.

Description

Beschreibungdescription
Verfahren zum Vakuumbeschichten von MetallbauteilenProcess for vacuum coating metal components
Die Erfindung betrifft ein Verfahren zum Vakuumbeschichten von Metallbauteilen, bei dem die Metallbauteile in allen ihren Bereichen in einer Vakuumkammer mittels Elektronenbestrahlung gleichmäßig auf eine Temperatur von etwa 800°C vorgewärmt werden.The invention relates to a method for vacuum coating metal components, in which the metal components are preheated uniformly in a vacuum chamber to a temperature of approximately 800 ° C. in a vacuum chamber.
Ein solches Verfahren ist aus der deutschen Offenlegungs- schrift DE 197 03 338 AI bekannt. Das bekannte Verfahren dient zur Vorwärmung von Werkstücken bei der Vakuumbeschich- tung, mit dem unter Einsatz von Elektronenstrahlen in einer Vakuumkammer das jeweilige Werkstück bzw. Metallbauteil gleichmäßig vorgewärmt werden kann, um es anschließend im Vakuum zu beschichten.Such a method is known from German published patent application DE 197 03 338 AI. The known method is used for preheating workpieces in vacuum coating, with which the respective workpiece or metal component can be preheated uniformly using electron beams in a vacuum chamber, in order then to coat it in vacuo.
Der Erfindung liegt die Aufgabe zugrunde, ein Verfahren zum Erzeugen einer homogenen Oxidschicht auf Metallbauteilen vorzuschlagen, mit dem sich die Oxidschicht kontrolliert und reproduzierbar aufbringen läßt.The invention is based on the object of proposing a method for producing a homogeneous oxide layer on metal components with which the oxide layer can be applied in a controlled and reproducible manner.
Zur Lösung dieser Aufgabe werden bei einem Verfahren der eingangs angegebenen Art erfindungsgemäß nach Erreichen der vorgegebenen Temperatur zum Erzeugen einer homogenen Oxidschicht auf mit MCrAlY oder PtAl beschichteten Metallbauteilen diese mit einem Sauerstoff-Argon-Gemisch für eine Zeit von etwa 10 Minuten mit einem Druck zwischen lxlO"3 und 8x10"2 mbar beaufschlagt.To achieve this object, in a method of the type mentioned at the outset, after reaching the predetermined temperature for producing a homogeneous oxide layer on metal components coated with MCrAlY or PtAl, these are mixed with an oxygen-argon mixture for a time of about 10 minutes with a pressure between lxlO "3 and 8x10 " 2 mbar applied.
Ein wesentlicher Vorteil des erfindungsgemäßen Verfahrens besteht darin, daß mit ihm homogene Oxidschichten kontrolliert auf mit MCrAlY oder PtAl beschichteten Metallbauteilen auf- bringbar und reproduzierbar sind, also in ihrer Schichtdicke und Struktur gezielt erzeugt werden können. Damit besteht dieA major advantage of the method according to the invention is that it enables homogeneous oxide layers to be applied and reproduced in a controlled manner to metal components coated with MCrAlY or PtAl, that is to say in their layer thickness and structure can be created in a targeted manner. So there is
Möglichkeit, die Oxidationsschicht im Hinblick auf Haftungsund andere mechanische oder chemische Eigenschaften gezielt als eine eigenständige Schicht zu optimieren.Possibility to specifically optimize the oxidation layer with regard to adhesion and other mechanical or chemical properties as a separate layer.
Bei einer bevorzugten Ausführungsform des erfindungsgemäßen Verfahrens zum Erzeugen einer homogenen Oxidschicht auf Turbinenschaufeln, die als Basismaterial Nickel- oder Kobaltbasis aufweisen und mit MCrAlY oder PtAl beschichtet sind, wer- den die Turbinenschaufeln in einer Kammer untergebracht, die evakuiert wird. Danach erfolgt unter Berücksichtigung der Masseverteilung der Turbinenschaufeln eine Elektronenbestrahlung mit unterschiedlicher Dosierung für den Fuß, das Blatt und die Kopfplatte der Turbinenschaufeln, wobei wegen der größeren Masse in den Füßen und in der Kopfplatte dort eine erheblich höhere Dosierung an Elektronenbestrahlung als für das Blatt vorgesehen wird. Hat die Turbinenschaufel überall gleich eine Mindesttemperatur von etwa 750 bis 850°C erreicht, dann wird für eine Mindestzeit von etwa 10 Minuten ein Sauerstoff-Argon-Gemisch mit einem Partialdruck zwischen lxlO-3 und 8xl0"2mbar in die evakuierte Kammer eingefüllt. Ergebnis ist eine Turbinenschaufel, die eine homogene Oxidschicht mit einer Dicke zwischen 0,01 bis 5 μm hat.In a preferred embodiment of the method according to the invention for producing a homogeneous oxide layer on turbine blades which have a nickel or cobalt base material and which are coated with MCrAlY or PtAl, the turbine blades are accommodated in a chamber which is evacuated. Then, taking into account the mass distribution of the turbine blades, electron irradiation with different doses for the foot, the blade and the top plate of the turbine blades takes place, whereby due to the greater mass in the feet and in the top plate there is a considerably higher dose of electron radiation than for the blade . If the turbine blade has reached a minimum temperature of approximately 750 to 850 ° C everywhere, an oxygen-argon mixture with a partial pressure between lxlO -3 and 8xl0 "2 mbar is filled into the evacuated chamber for a minimum of about 10 minutes. Result is a turbine blade that has a homogeneous oxide layer with a thickness between 0.01 and 5 μm.
Das beschriebene Verfahren kann in der Weise abgeändert werden, daß die mit einer Oxidschicht zu versehenden Metallbauteile über spezielle Gasduschen mit dem Sauerstoff-Argon-Gemisch bauteilspezifisch beaufschlagt werden, um eine besonders homogene Oxidschicht zu erzeugen. The method described can be modified in such a way that the metal components to be provided with an oxide layer are acted upon by component-specific gas showers with the oxygen-argon mixture in order to produce a particularly homogeneous oxide layer.

Claims

PatentanspruchClaim
Verfahren zum Vakuumbeschichten von Metallbauteilen, bei demProcess for vacuum coating metal components, in which
- die Metallbauteile in allen ihren Bereichen in einer Vaku- umkammer mittels Elektronenbestrahlung gleichmäßig auf eine- The metal components in all their areas in a vacuum chamber by means of electron radiation evenly on one
Temperatur von etwa 800°C vorgewärmt werden, d a d u r c h g e k e n n z e i c h n e t , daßPreheated to a temperature of around 800 ° C, so that
- nach Erreichen der vorgegebenen Temperatur zum Erzeugen einer homogenen Oxidschicht auf mit MCrAlY oder PtAl be- schichteten Metallbauteilen diese mit einem Sauerstoff-Argon-Gemisch für eine Zeit von etwa 10 Minuten mit einem Druck zwischen lxlO"3 und 8xl0"2 mbar beaufschlagt werden. - After reaching the specified temperature to produce a homogeneous oxide layer on metal components coated with MCrAlY or PtAl, these are pressurized with an oxygen-argon mixture for a time of about 10 minutes with a pressure between lxlO "3 and 8xl0 " 2 mbar.
EP99959190A 1998-09-30 1999-09-30 Method for vacuum coating metal components Expired - Lifetime EP1129231B1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19845803 1998-09-30
DE19845803A DE19845803C2 (en) 1998-09-30 1998-09-30 Process for vacuum coating metal components
PCT/DE1999/003236 WO2000018977A2 (en) 1998-09-30 1999-09-30 Method for vacuum coating metal components

Publications (2)

Publication Number Publication Date
EP1129231A2 true EP1129231A2 (en) 2001-09-05
EP1129231B1 EP1129231B1 (en) 2002-11-20

Family

ID=7883452

Family Applications (1)

Application Number Title Priority Date Filing Date
EP99959190A Expired - Lifetime EP1129231B1 (en) 1998-09-30 1999-09-30 Method for vacuum coating metal components

Country Status (5)

Country Link
US (1) US6589608B2 (en)
EP (1) EP1129231B1 (en)
JP (1) JP2002525435A (en)
DE (2) DE19845803C2 (en)
WO (1) WO2000018977A2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ATE450631T1 (en) 2001-09-10 2009-12-15 Univ Virginia METHOD FOR APPLYING METAL ALLOY COATINGS AND COATED COMPONENT
DE10232289B4 (en) * 2002-07-16 2005-04-14 Von Ardenne Anlagentechnik Gmbh Method and arrangement for producing a homogeneous oxide layer on a metal component
US20050123783A1 (en) * 2003-07-31 2005-06-09 Gregory Otto J. Composite used for thermal spray instrumentation and method for making the same

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6047348B2 (en) * 1980-07-04 1985-10-21 株式会社東芝 heat treatment equipment
US5514482A (en) * 1984-04-25 1996-05-07 Alliedsignal Inc. Thermal barrier coating system for superalloy components
JPS61194168A (en) * 1985-02-20 1986-08-28 Ishikawajima Harima Heavy Ind Co Ltd Treatment for passivation of stainless steel pipe
JP2768952B2 (en) * 1988-08-04 1998-06-25 忠弘 大見 Metal oxidation treatment apparatus and metal oxidation treatment method
US5262245A (en) * 1988-08-12 1993-11-16 United Technologies Corporation Advanced thermal barrier coated superalloy components
JP3037768B2 (en) * 1991-02-18 2000-05-08 大阪酸素工業株式会社 Passivation processing equipment
GB9426257D0 (en) * 1994-12-24 1995-03-01 Rolls Royce Plc Thermal barrier coating for a superalloy article and method of application
DE19703338C2 (en) * 1996-12-27 1998-11-12 Ardenne Anlagentech Gmbh Process for preheating workpieces during vacuum coating

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See references of WO0018977A2 *

Also Published As

Publication number Publication date
JP2002525435A (en) 2002-08-13
DE59903499D1 (en) 2003-01-02
DE19845803C2 (en) 2002-10-17
WO2000018977A2 (en) 2000-04-06
US20010031314A1 (en) 2001-10-18
DE19845803A1 (en) 2000-04-20
US6589608B2 (en) 2003-07-08
WO2000018977A3 (en) 2000-06-08
EP1129231B1 (en) 2002-11-20

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