EP1093132A3 - Planer trimming resistor, its application and manufacturing process - Google Patents
Planer trimming resistor, its application and manufacturing process Download PDFInfo
- Publication number
- EP1093132A3 EP1093132A3 EP00115803A EP00115803A EP1093132A3 EP 1093132 A3 EP1093132 A3 EP 1093132A3 EP 00115803 A EP00115803 A EP 00115803A EP 00115803 A EP00115803 A EP 00115803A EP 1093132 A3 EP1093132 A3 EP 1093132A3
- Authority
- EP
- European Patent Office
- Prior art keywords
- application
- planer
- manufacturing process
- trimming resistor
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
- H01C7/22—Elongated resistive element being bent or curved, e.g. sinusoidal, helical
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Abstract
Ein Abgleichwiderstand wird hergestellt durch Abscheiden einer Widerstandsschicht (3) auf einem Substrat (1), einer Passivierungsschicht (5) mit Fenstern (4) und einer Kontaktschicht (6), die mit der Widerstandsschicht (3) durch die Fenster (4) in Kontakt steht. Ein Abgleich erfolgt durch Unterbrechen der Kontaktschicht (6) an Engstellen (7). Anwendung für die Herstellung von Hochdrucksensoren. A trimming resistor is produced by depositing a resistance layer (3) on a substrate (1), a passivation layer (5) with windows (4) and a contact layer (6) which is in contact with the resistance layer (3) through the windows (4) stands. A comparison is made by interrupting the contact layer (6) at narrow points (7). Application for the production of high pressure sensors.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19949607A DE19949607A1 (en) | 1999-10-15 | 1999-10-15 | Planar trimming resistor, applications and processes for its manufacture |
DE19949607 | 1999-10-15 |
Publications (3)
Publication Number | Publication Date |
---|---|
EP1093132A2 EP1093132A2 (en) | 2001-04-18 |
EP1093132A3 true EP1093132A3 (en) | 2004-06-02 |
EP1093132B1 EP1093132B1 (en) | 2005-12-28 |
Family
ID=7925674
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP00115803A Expired - Lifetime EP1093132B1 (en) | 1999-10-15 | 2000-07-22 | Planer trimming resistor, its application and manufacturing process |
Country Status (3)
Country | Link |
---|---|
US (1) | US6667683B1 (en) |
EP (1) | EP1093132B1 (en) |
DE (2) | DE19949607A1 (en) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6647614B1 (en) * | 2000-10-20 | 2003-11-18 | International Business Machines Corporation | Method for changing an electrical resistance of a resistor |
KR20050026904A (en) * | 2001-09-10 | 2005-03-16 | 마이크로브리지 테크놀로지스 인크. | Method for trimming resistors |
JP3915586B2 (en) * | 2002-04-24 | 2007-05-16 | 株式会社デンソー | Method for manufacturing mechanical quantity detection device |
US20060039419A1 (en) * | 2004-08-16 | 2006-02-23 | Tan Deshi | Method and apparatus for laser trimming of resistors using ultrafast laser pulse from ultrafast laser oscillator operating in picosecond and femtosecond pulse widths |
US7598841B2 (en) | 2005-09-20 | 2009-10-06 | Analog Devices, Inc. | Film resistor and a method for forming and trimming a film resistor |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2039920A1 (en) * | 1970-08-11 | 1972-02-17 | Siemens Ag | Method for the subsequent lowering of the resistance values of thin-film resistors |
US3996551A (en) * | 1975-10-20 | 1976-12-07 | The United States Of America As Represented By The Secretary Of The Navy | Chromium-silicon oxide thin film resistors |
EP0325234A2 (en) * | 1988-01-20 | 1989-07-26 | Kabushiki Kaisha Toshiba | Trimming element for microelectronic circuit |
DE3919059A1 (en) * | 1989-06-10 | 1991-01-03 | Bosch Gmbh Robert | Pressure sensor esp. for vehicle engine compartment - has sensor resistances on membrane in sensor substrate base body |
JPH0677021A (en) * | 1992-08-27 | 1994-03-18 | Murata Mfg Co Ltd | Adjusting method for resistance value of resistor |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4150366A (en) * | 1976-09-01 | 1979-04-17 | Motorola, Inc. | Trim network for monolithic circuits and use in trimming a d/a converter |
US4200970A (en) * | 1977-04-14 | 1980-05-06 | Milton Schonberger | Method of adjusting resistance of a thermistor |
US4201970A (en) * | 1978-08-07 | 1980-05-06 | Rca Corporation | Method and apparatus for trimming resistors |
US4586988A (en) * | 1983-08-19 | 1986-05-06 | Energy Conversion Devices, Inc. | Method of forming an electrically conductive member |
US5363084A (en) * | 1993-02-26 | 1994-11-08 | Lake Shore Cryotronics, Inc. | Film resistors having trimmable electrodes |
-
1999
- 1999-10-15 DE DE19949607A patent/DE19949607A1/en not_active Withdrawn
-
2000
- 2000-07-22 DE DE50011959T patent/DE50011959D1/en not_active Expired - Lifetime
- 2000-07-22 EP EP00115803A patent/EP1093132B1/en not_active Expired - Lifetime
- 2000-10-13 US US09/687,005 patent/US6667683B1/en not_active Expired - Fee Related
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2039920A1 (en) * | 1970-08-11 | 1972-02-17 | Siemens Ag | Method for the subsequent lowering of the resistance values of thin-film resistors |
US3996551A (en) * | 1975-10-20 | 1976-12-07 | The United States Of America As Represented By The Secretary Of The Navy | Chromium-silicon oxide thin film resistors |
EP0325234A2 (en) * | 1988-01-20 | 1989-07-26 | Kabushiki Kaisha Toshiba | Trimming element for microelectronic circuit |
DE3919059A1 (en) * | 1989-06-10 | 1991-01-03 | Bosch Gmbh Robert | Pressure sensor esp. for vehicle engine compartment - has sensor resistances on membrane in sensor substrate base body |
JPH0677021A (en) * | 1992-08-27 | 1994-03-18 | Murata Mfg Co Ltd | Adjusting method for resistance value of resistor |
Non-Patent Citations (1)
Title |
---|
PATENT ABSTRACTS OF JAPAN vol. 018, no. 324 (E - 1564) 20 June 1994 (1994-06-20) * |
Also Published As
Publication number | Publication date |
---|---|
EP1093132A2 (en) | 2001-04-18 |
US6667683B1 (en) | 2003-12-23 |
EP1093132B1 (en) | 2005-12-28 |
DE50011959D1 (en) | 2006-02-02 |
DE19949607A1 (en) | 2001-04-19 |
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