EP1038675A3 - Ink jet recording head and method for manufacturing the same - Google Patents

Ink jet recording head and method for manufacturing the same Download PDF

Info

Publication number
EP1038675A3
EP1038675A3 EP00106532A EP00106532A EP1038675A3 EP 1038675 A3 EP1038675 A3 EP 1038675A3 EP 00106532 A EP00106532 A EP 00106532A EP 00106532 A EP00106532 A EP 00106532A EP 1038675 A3 EP1038675 A3 EP 1038675A3
Authority
EP
European Patent Office
Prior art keywords
ink
metallic layer
pressure generating
generating chamber
recording head
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP00106532A
Other languages
German (de)
French (fr)
Other versions
EP1038675A2 (en
Inventor
Shigeru Umehara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujifilm Business Innovation Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Publication of EP1038675A2 publication Critical patent/EP1038675A2/en
Publication of EP1038675A3 publication Critical patent/EP1038675A3/en
Withdrawn legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14274—Structure of print heads with piezoelectric elements of stacked structure type, deformed by compression/extension and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/1612—Production of print heads with piezoelectric elements of stacked structure type, deformed by compression/extension and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/03—Specific materials used

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)

Abstract

An ink jet recording head (55) may improve the packing efficiency of the ink into the pressure generating chamber (19), and improve the ejection efficiency of the ink through the ink ejection nozzle (41) to realize a high quality gradation expression in printing operations. The recording head (55) comprises: a pressure generating chamber (19) communicating with an ink reservoir (40); a vibrating plate (23) which faces the pressure generating chamber (19) and is provided with an island-like convex portion (18); and, a piezoelectric element (20) arranged so as to be brought into contact with the island-like convex portion (18) of the vibrating plate (23) to vibrate the plate (23), and thereby forcing ink droplets to be ejected from the nozzle (41). The vibrating plate (23) comprises: a first metallic layer or stainless steel member (11) brought into contact with the piezoelectric element (20), a second metallic layer or thin nickel film(15) exposed to the pressure generating chamber (19), and a polymer film (13) of a high polymeric organic compound interposed between the first metallic layer (11) and the second metallic layer (15). The island-like convex portion (18) of the vibrating plate (23) is formed by etching a surface of the first metallic layer (11).
EP00106532A 1999-03-26 2000-03-27 Ink jet recording head and method for manufacturing the same Withdrawn EP1038675A3 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP8406299A JP3339569B2 (en) 1999-03-26 1999-03-26 Inkjet recording head
JP8406299 1999-03-26

Publications (2)

Publication Number Publication Date
EP1038675A2 EP1038675A2 (en) 2000-09-27
EP1038675A3 true EP1038675A3 (en) 2001-04-04

Family

ID=13820021

Family Applications (1)

Application Number Title Priority Date Filing Date
EP00106532A Withdrawn EP1038675A3 (en) 1999-03-26 2000-03-27 Ink jet recording head and method for manufacturing the same

Country Status (2)

Country Link
EP (1) EP1038675A3 (en)
JP (1) JP3339569B2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3833070B2 (en) 2001-02-09 2006-10-11 キヤノン株式会社 Liquid ejecting head and manufacturing method
JP4277477B2 (en) * 2002-04-01 2009-06-10 セイコーエプソン株式会社 Liquid jet head
JP5052810B2 (en) 2006-03-31 2012-10-17 富士フイルム株式会社 Liquid discharge head, image forming apparatus, and method of manufacturing liquid discharge head

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0616890A1 (en) * 1992-06-11 1994-09-28 Seiko Epson Corporation Ink jet head and method of manufacturing ink jet head
US5751313A (en) * 1991-02-04 1998-05-12 Seiko Epson Corporation Hydrophilic ink passage
EP0893262A1 (en) * 1996-04-11 1999-01-27 Citizen Watch Co. Ltd. Ink-jet head and method for manufacturing the same
WO2000012313A1 (en) * 1998-08-27 2000-03-09 Seiko Epson Corporation Hydrophilic structure, ink-jet printing head, method of their production, ink-jet printer, and other structural members
EP1024001A2 (en) * 1999-01-29 2000-08-02 Seiko Epson Corporation Ink jet recording head and method of producing a plate member for an ink jet recording head

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5751313A (en) * 1991-02-04 1998-05-12 Seiko Epson Corporation Hydrophilic ink passage
EP0616890A1 (en) * 1992-06-11 1994-09-28 Seiko Epson Corporation Ink jet head and method of manufacturing ink jet head
EP0893262A1 (en) * 1996-04-11 1999-01-27 Citizen Watch Co. Ltd. Ink-jet head and method for manufacturing the same
WO2000012313A1 (en) * 1998-08-27 2000-03-09 Seiko Epson Corporation Hydrophilic structure, ink-jet printing head, method of their production, ink-jet printer, and other structural members
EP1027988A1 (en) * 1998-08-27 2000-08-16 Seiko Epson Corporation Hydrophilic structure, ink-jet printing head, method of their production, ink-jet printer, and other structural members
EP1024001A2 (en) * 1999-01-29 2000-08-02 Seiko Epson Corporation Ink jet recording head and method of producing a plate member for an ink jet recording head

Also Published As

Publication number Publication date
JP2000272129A (en) 2000-10-03
EP1038675A2 (en) 2000-09-27
JP3339569B2 (en) 2002-10-28

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