EP1021588A4 - Fluid delivery apparatus and method - Google Patents

Fluid delivery apparatus and method

Info

Publication number
EP1021588A4
EP1021588A4 EP98934511A EP98934511A EP1021588A4 EP 1021588 A4 EP1021588 A4 EP 1021588A4 EP 98934511 A EP98934511 A EP 98934511A EP 98934511 A EP98934511 A EP 98934511A EP 1021588 A4 EP1021588 A4 EP 1021588A4
Authority
EP
European Patent Office
Prior art keywords
fluid delivery
delivery apparatus
fluid
delivery
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP98934511A
Other languages
German (de)
French (fr)
Other versions
EP1021588A1 (en
Inventor
Edward A Sturm
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Advanced Technology Materials Inc
Original Assignee
Advanced Technology Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advanced Technology Materials Inc filed Critical Advanced Technology Materials Inc
Publication of EP1021588A1 publication Critical patent/EP1021588A1/en
Publication of EP1021588A4 publication Critical patent/EP1021588A4/en
Withdrawn legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J4/00—Feed or outlet devices; Feed or outlet control devices
    • B01J4/001—Feed or outlet devices as such, e.g. feeding tubes
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Vapour Deposition (AREA)
EP98934511A 1997-07-14 1998-07-14 Fluid delivery apparatus and method Withdrawn EP1021588A4 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US5244297P 1997-07-14 1997-07-14
US52442P 1997-07-14
PCT/US1998/014525 WO1999004060A1 (en) 1997-07-14 1998-07-14 Fluid delivery apparatus and method

Publications (2)

Publication Number Publication Date
EP1021588A1 EP1021588A1 (en) 2000-07-26
EP1021588A4 true EP1021588A4 (en) 2002-11-06

Family

ID=21977635

Family Applications (1)

Application Number Title Priority Date Filing Date
EP98934511A Withdrawn EP1021588A4 (en) 1997-07-14 1998-07-14 Fluid delivery apparatus and method

Country Status (3)

Country Link
EP (1) EP1021588A4 (en)
AU (1) AU8401698A (en)
WO (1) WO1999004060A1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050056216A1 (en) * 2003-09-15 2005-03-17 Intel Corporation Precursor delivery system
US8322571B2 (en) 2005-04-25 2012-12-04 Advanced Technology Materials, Inc. Liner-based liquid storage and dispensing systems with empty detection capability
KR20080039373A (en) 2005-06-06 2008-05-07 어드밴스드 테크놀러지 머티리얼즈, 인코포레이티드 Fluid storage and dispensing systems and processes

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02156085A (en) * 1988-12-08 1990-06-15 Koujiyundo Kagaku Kenkyusho:Kk Method and device for transporting raw liquid material
WO1994021840A1 (en) * 1993-03-18 1994-09-29 Advanced Technology Materials, Inc. Apparatus and method for delivering reagents in vapor form to a cvd reactor
EP0622475A1 (en) * 1993-04-29 1994-11-02 Applied Materials, Inc. Method and apparatus for degassing semiconductor processing liquids

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3035614A (en) * 1959-11-04 1962-05-22 Jr Chester H Kirk Expansion tank
US3524475A (en) * 1968-01-10 1970-08-18 American Tube & Controls Inc Expansion tank
US3741240A (en) * 1971-08-02 1973-06-26 Dresser Ind Fluid compensator valve
US3886733A (en) * 1973-08-24 1975-06-03 Nrg Inc Pneumatic energy source utilizing liquid oxygen
US4132165A (en) * 1976-10-08 1979-01-02 Woodward Governor Company Fuel supply system for a missile or the like
US4341202A (en) * 1978-01-19 1982-07-27 Aptec Corporation Phase-change heat transfer system
US4321014A (en) * 1979-12-31 1982-03-23 Polaroid Corporation Constant flow pumping apparatus
US5330576A (en) * 1990-04-26 1994-07-19 Baldwin-Gegenheimer Gmbh Recirculating coating liquid supply system with viscosity regulation
US5098741A (en) * 1990-06-08 1992-03-24 Lam Research Corporation Method and system for delivering liquid reagents to processing vessels
US5304390A (en) * 1992-06-30 1994-04-19 Union Carbide Chemicals & Plastics Technology Corporation Supercritical ratio control system utilizing a sonic flow venturi and an air-driven positive displacement pump
US5430229A (en) * 1992-12-30 1995-07-04 Hercules Incorporated Chemical process for disposal of rocket propellant containing nitrate ester
US5620524A (en) * 1995-02-27 1997-04-15 Fan; Chiko Apparatus for fluid delivery in chemical vapor deposition systems

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02156085A (en) * 1988-12-08 1990-06-15 Koujiyundo Kagaku Kenkyusho:Kk Method and device for transporting raw liquid material
WO1994021840A1 (en) * 1993-03-18 1994-09-29 Advanced Technology Materials, Inc. Apparatus and method for delivering reagents in vapor form to a cvd reactor
EP0622475A1 (en) * 1993-04-29 1994-11-02 Applied Materials, Inc. Method and apparatus for degassing semiconductor processing liquids

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
DATABASE WPI Derwent World Patents Index; AN 1990-228065 *
PATENT ABSTRACTS OF JAPAN vol. 014, no. 412 (C - 0755) 6 September 1990 (1990-09-06) *
See also references of WO9904060A1 *

Also Published As

Publication number Publication date
WO1999004060A1 (en) 1999-01-28
AU8401698A (en) 1999-02-10
EP1021588A1 (en) 2000-07-26

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