AU8401698A - Fluid delivery apparatus and method - Google Patents

Fluid delivery apparatus and method

Info

Publication number
AU8401698A
AU8401698A AU84016/98A AU8401698A AU8401698A AU 8401698 A AU8401698 A AU 8401698A AU 84016/98 A AU84016/98 A AU 84016/98A AU 8401698 A AU8401698 A AU 8401698A AU 8401698 A AU8401698 A AU 8401698A
Authority
AU
Australia
Prior art keywords
fluid delivery
delivery apparatus
fluid
delivery
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU84016/98A
Inventor
Edward A. Sturm
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Advanced Technology Materials Inc
Original Assignee
Advanced Technology Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advanced Technology Materials Inc filed Critical Advanced Technology Materials Inc
Publication of AU8401698A publication Critical patent/AU8401698A/en
Abandoned legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J4/00—Feed or outlet devices; Feed or outlet control devices
    • B01J4/001—Feed or outlet devices as such, e.g. feeding tubes
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Vapour Deposition (AREA)
AU84016/98A 1997-07-14 1998-07-14 Fluid delivery apparatus and method Abandoned AU8401698A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US5244297P 1997-07-14 1997-07-14
US60052442 1997-07-14
PCT/US1998/014525 WO1999004060A1 (en) 1997-07-14 1998-07-14 Fluid delivery apparatus and method

Publications (1)

Publication Number Publication Date
AU8401698A true AU8401698A (en) 1999-02-10

Family

ID=21977635

Family Applications (1)

Application Number Title Priority Date Filing Date
AU84016/98A Abandoned AU8401698A (en) 1997-07-14 1998-07-14 Fluid delivery apparatus and method

Country Status (3)

Country Link
EP (1) EP1021588A4 (en)
AU (1) AU8401698A (en)
WO (1) WO1999004060A1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050056216A1 (en) * 2003-09-15 2005-03-17 Intel Corporation Precursor delivery system
KR101312237B1 (en) 2005-04-25 2013-09-26 도쿄엘렉트론가부시키가이샤 Liner-based liquid storage and dispensing systems with empty detection capability
SG162759A1 (en) 2005-06-06 2010-07-29 Advanced Tech Materials Fluid storage and dispensing systems and processes

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3035614A (en) * 1959-11-04 1962-05-22 Jr Chester H Kirk Expansion tank
US3524475A (en) * 1968-01-10 1970-08-18 American Tube & Controls Inc Expansion tank
US3741240A (en) * 1971-08-02 1973-06-26 Dresser Ind Fluid compensator valve
US3886733A (en) * 1973-08-24 1975-06-03 Nrg Inc Pneumatic energy source utilizing liquid oxygen
US4132165A (en) * 1976-10-08 1979-01-02 Woodward Governor Company Fuel supply system for a missile or the like
US4341202A (en) * 1978-01-19 1982-07-27 Aptec Corporation Phase-change heat transfer system
US4321014A (en) * 1979-12-31 1982-03-23 Polaroid Corporation Constant flow pumping apparatus
JPH02156085A (en) * 1988-12-08 1990-06-15 Koujiyundo Kagaku Kenkyusho:Kk Method and device for transporting raw liquid material
US5330576A (en) * 1990-04-26 1994-07-19 Baldwin-Gegenheimer Gmbh Recirculating coating liquid supply system with viscosity regulation
US5098741A (en) * 1990-06-08 1992-03-24 Lam Research Corporation Method and system for delivering liquid reagents to processing vessels
US5304390A (en) * 1992-06-30 1994-04-19 Union Carbide Chemicals & Plastics Technology Corporation Supercritical ratio control system utilizing a sonic flow venturi and an air-driven positive displacement pump
US5430229A (en) * 1992-12-30 1995-07-04 Hercules Incorporated Chemical process for disposal of rocket propellant containing nitrate ester
JP3103596B2 (en) * 1993-03-18 2000-10-30 アドバンスド．テクノロジー．マテリアルズ．インコーポレイテッド Apparatus and method for supplying reagents in vapor form to a CVD reactor
EP0622475A1 (en) * 1993-04-29 1994-11-02 Applied Materials, Inc. Method and apparatus for degassing semiconductor processing liquids
US5620524A (en) * 1995-02-27 1997-04-15 Fan; Chiko Apparatus for fluid delivery in chemical vapor deposition systems

Also Published As

Publication number Publication date
EP1021588A4 (en) 2002-11-06
EP1021588A1 (en) 2000-07-26
WO1999004060A1 (en) 1999-01-28

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase