EP0884480A3 - Vacuum pump - Google Patents

Vacuum pump Download PDF

Info

Publication number
EP0884480A3
EP0884480A3 EP97202409A EP97202409A EP0884480A3 EP 0884480 A3 EP0884480 A3 EP 0884480A3 EP 97202409 A EP97202409 A EP 97202409A EP 97202409 A EP97202409 A EP 97202409A EP 0884480 A3 EP0884480 A3 EP 0884480A3
Authority
EP
European Patent Office
Prior art keywords
vacuum pump
gas
sealing means
rotor group
viceversa
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP97202409A
Other languages
German (de)
English (en)
French (fr)
Other versions
EP0884480A2 (en
Inventor
Fausto Casaro
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Varian SpA
Original Assignee
Varian SpA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Varian SpA filed Critical Varian SpA
Publication of EP0884480A2 publication Critical patent/EP0884480A2/en
Publication of EP0884480A3 publication Critical patent/EP0884480A3/en
Withdrawn legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D23/00—Other rotary non-positive-displacement pumps
    • F04D23/001—Pumps adapted for conveying materials or for handling specific elastic fluids
    • F04D23/005—Pumps adapted for conveying materials or for handling specific elastic fluids of axial-flow type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/08—Sealings
    • F04D29/10—Shaft sealings
    • F04D29/14—Shaft sealings operative only when pump is inoperative
    • F04D29/143—Shaft sealings operative only when pump is inoperative especially adapted for elastic fluid pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
EP97202409A 1997-06-11 1997-08-01 Vacuum pump Withdrawn EP0884480A3 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
IT97TO000510A IT1292764B1 (it) 1997-06-11 1997-06-11 Pompa da vuoto.
ITTO970510 1997-06-11

Publications (2)

Publication Number Publication Date
EP0884480A2 EP0884480A2 (en) 1998-12-16
EP0884480A3 true EP0884480A3 (en) 1999-08-25

Family

ID=11415777

Family Applications (1)

Application Number Title Priority Date Filing Date
EP97202409A Withdrawn EP0884480A3 (en) 1997-06-11 1997-08-01 Vacuum pump

Country Status (2)

Country Link
EP (1) EP0884480A3 (OSRAM)
IT (1) IT1292764B1 (OSRAM)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114352553B (zh) * 2021-12-31 2024-01-09 北京中科科仪股份有限公司 一种旋涡机构及复合分子泵

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4512725A (en) * 1982-02-16 1985-04-23 Compagnie Industrielle Des Telecommunications Cit-Alcatel Rotary vacuum pump
DE3631941A1 (de) * 1985-09-30 1987-04-16 Kraftwerk Union Ag Geblaese zum antrieb eines kontinuierlichen gasstromes
JPS62282195A (ja) * 1986-05-29 1987-12-08 Mitsubishi Electric Corp タ−ボ分子ポンプ

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4512725A (en) * 1982-02-16 1985-04-23 Compagnie Industrielle Des Telecommunications Cit-Alcatel Rotary vacuum pump
DE3631941A1 (de) * 1985-09-30 1987-04-16 Kraftwerk Union Ag Geblaese zum antrieb eines kontinuierlichen gasstromes
JPS62282195A (ja) * 1986-05-29 1987-12-08 Mitsubishi Electric Corp タ−ボ分子ポンプ

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 012, no. 164 (M - 698) 18 May 1988 (1988-05-18) *

Also Published As

Publication number Publication date
ITTO970510A1 (it) 1998-12-11
ITTO970510A0 (OSRAM) 1997-06-11
IT1292764B1 (it) 1999-02-11
EP0884480A2 (en) 1998-12-16

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