EP0827179A1 - Source d'ion à potentiel unique - Google Patents

Source d'ion à potentiel unique Download PDF

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Publication number
EP0827179A1
EP0827179A1 EP96306329A EP96306329A EP0827179A1 EP 0827179 A1 EP0827179 A1 EP 0827179A1 EP 96306329 A EP96306329 A EP 96306329A EP 96306329 A EP96306329 A EP 96306329A EP 0827179 A1 EP0827179 A1 EP 0827179A1
Authority
EP
European Patent Office
Prior art keywords
ion source
electrode
conical electrode
ion
conical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP96306329A
Other languages
German (de)
English (en)
Other versions
EP0827179B1 (fr
Inventor
Marsbed Hablanian
Asoka Ratnam
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Varian Inc
Original Assignee
Varian Associates Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Varian Associates Inc filed Critical Varian Associates Inc
Priority to EP96306329A priority Critical patent/EP0827179B1/fr
Priority to DE1996617417 priority patent/DE69617417T2/de
Publication of EP0827179A1 publication Critical patent/EP0827179A1/fr
Application granted granted Critical
Publication of EP0827179B1 publication Critical patent/EP0827179B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/08—Ion sources; Ion guns using arc discharge
    • H01J27/14—Other arc discharge ion sources using an applied magnetic field
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/02—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas
    • H01J41/04—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas with ionisation by means of thermionic cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/12—Ion sources; Ion guns using an arc discharge, e.g. of the duoplasmatron type
    • H01J49/126—Other arc discharge ion sources using an applied magnetic field

Definitions

  • Previous ion sources also require proper positioning and placement of electrodes. This becomes more complex as a greater number of precisely positioned electrodes becomes necessary. If any of the electrodes are improperly focussed or positioned, the ion stream created by the ion source may lose focus. The problem of placement is exacerbated by the use of thin sheets of bendable metal for electrodes. Improper handling and installation of these electrodes can result in loss of precision.

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Combustion & Propulsion (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)
EP96306329A 1996-08-30 1996-08-30 Source d'ion à potentiel unique Expired - Lifetime EP0827179B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP96306329A EP0827179B1 (fr) 1996-08-30 1996-08-30 Source d'ion à potentiel unique
DE1996617417 DE69617417T2 (de) 1996-08-30 1996-08-30 Einfach-Potential Ionenquelle

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP96306329A EP0827179B1 (fr) 1996-08-30 1996-08-30 Source d'ion à potentiel unique

Publications (2)

Publication Number Publication Date
EP0827179A1 true EP0827179A1 (fr) 1998-03-04
EP0827179B1 EP0827179B1 (fr) 2001-11-28

Family

ID=8225070

Family Applications (1)

Application Number Title Priority Date Filing Date
EP96306329A Expired - Lifetime EP0827179B1 (fr) 1996-08-30 1996-08-30 Source d'ion à potentiel unique

Country Status (2)

Country Link
EP (1) EP0827179B1 (fr)
DE (1) DE69617417T2 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1180783A2 (fr) * 2000-08-07 2002-02-20 Axcelis Technologies, Inc. Aimant pour la production d'un champ magnétique dans une source d'ions
WO2007097919A2 (fr) * 2006-02-15 2007-08-30 Varian, Inc. Spectromètre de masse destiné à la détection de fuite de gaz en traces à suppression d'ions indésirables

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE689532C (de) * 1936-08-26 1940-03-27 Siemens & Halske Akt Ges Einrichtung zur Erzeugung positiver Ionen
CH480626A (de) * 1968-12-24 1969-12-15 Balzers Patent Beteilig Ag Ionisationsmanometerröhre mit auswechselbarer Glühkathode

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4862032A (en) * 1986-10-20 1989-08-29 Kaufman Harold R End-Hall ion source

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE689532C (de) * 1936-08-26 1940-03-27 Siemens & Halske Akt Ges Einrichtung zur Erzeugung positiver Ionen
CH480626A (de) * 1968-12-24 1969-12-15 Balzers Patent Beteilig Ag Ionisationsmanometerröhre mit auswechselbarer Glühkathode

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1180783A2 (fr) * 2000-08-07 2002-02-20 Axcelis Technologies, Inc. Aimant pour la production d'un champ magnétique dans une source d'ions
EP1180783A3 (fr) * 2000-08-07 2005-06-29 Axcelis Technologies, Inc. Aimant pour la production d'un champ magnétique dans une source d'ions
WO2007097919A2 (fr) * 2006-02-15 2007-08-30 Varian, Inc. Spectromètre de masse destiné à la détection de fuite de gaz en traces à suppression d'ions indésirables
WO2007097919A3 (fr) * 2006-02-15 2008-07-24 Varian Inc Spectromètre de masse destiné à la détection de fuite de gaz en traces à suppression d'ions indésirables

Also Published As

Publication number Publication date
DE69617417T2 (de) 2002-08-08
EP0827179B1 (fr) 2001-11-28
DE69617417D1 (de) 2002-01-10

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