EP0822339A3 - Diffusionspumpe und Verfahren zur Herstellung - Google Patents

Diffusionspumpe und Verfahren zur Herstellung Download PDF

Info

Publication number
EP0822339A3
EP0822339A3 EP97305756A EP97305756A EP0822339A3 EP 0822339 A3 EP0822339 A3 EP 0822339A3 EP 97305756 A EP97305756 A EP 97305756A EP 97305756 A EP97305756 A EP 97305756A EP 0822339 A3 EP0822339 A3 EP 0822339A3
Authority
EP
European Patent Office
Prior art keywords
housing
boiler
pump housing
pump
vapor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP97305756A
Other languages
English (en)
French (fr)
Other versions
EP0822339A2 (de
Inventor
Frank Nuzzi
Mohamad Sakhtah
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Varian Inc
Original Assignee
Varian Associates Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Varian Associates Inc filed Critical Varian Associates Inc
Publication of EP0822339A2 publication Critical patent/EP0822339A2/de
Publication of EP0822339A3 publication Critical patent/EP0822339A3/de
Withdrawn legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F9/00—Diffusion pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Jet Pumps And Other Pumps (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
EP97305756A 1996-07-31 1997-07-31 Diffusionspumpe und Verfahren zur Herstellung Withdrawn EP0822339A3 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US69009896A 1996-07-31 1996-07-31
US690098 1996-07-31

Publications (2)

Publication Number Publication Date
EP0822339A2 EP0822339A2 (de) 1998-02-04
EP0822339A3 true EP0822339A3 (de) 1998-06-17

Family

ID=24771074

Family Applications (1)

Application Number Title Priority Date Filing Date
EP97305756A Withdrawn EP0822339A3 (de) 1996-07-31 1997-07-31 Diffusionspumpe und Verfahren zur Herstellung

Country Status (2)

Country Link
EP (1) EP0822339A3 (de)
JP (1) JPH1082400A (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030202874A1 (en) * 2002-04-29 2003-10-30 Marsbed Hablanian Methods and apparatus for controlling power in vapor jet vacuum pumps
US7037091B2 (en) 2003-05-19 2006-05-02 Bristol Compressors, Inc. Crankcase heater mounting for a compressor
WO2016035162A1 (ja) * 2014-09-03 2016-03-10 株式会社シンクロン 油拡散ポンプ

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2074749A1 (en) * 1970-01-23 1971-10-08 Merlin Gerin Vacuum diffusion pump body - and process for casting it
SU1516629A1 (ru) * 1987-04-08 1989-10-23 Предприятие П/Я А-3634 Охлаждаема ловушка дл паромасл ного насоса

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3690151A (en) 1968-07-25 1972-09-12 Norton Co Leak detector
US4499752A (en) 1983-06-22 1985-02-19 Varian Associates, Inc. Counterflow leak detector with cold trap
US4845360A (en) 1987-12-10 1989-07-04 Varian Associates, Inc. Counterflow leak detector with high and low sensitivity operating modes

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2074749A1 (en) * 1970-01-23 1971-10-08 Merlin Gerin Vacuum diffusion pump body - and process for casting it
SU1516629A1 (ru) * 1987-04-08 1989-10-23 Предприятие П/Я А-3634 Охлаждаема ловушка дл паромасл ного насоса

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
DATABASE WPI Week 9031, Derwent World Patents Index; AN 90-237255, XP002063472 *

Also Published As

Publication number Publication date
EP0822339A2 (de) 1998-02-04
JPH1082400A (ja) 1998-03-31

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