EP0813221A3 - Herstellungsverfahren einer Nadelelektrode - Google Patents

Herstellungsverfahren einer Nadelelektrode Download PDF

Info

Publication number
EP0813221A3
EP0813221A3 EP97109607A EP97109607A EP0813221A3 EP 0813221 A3 EP0813221 A3 EP 0813221A3 EP 97109607 A EP97109607 A EP 97109607A EP 97109607 A EP97109607 A EP 97109607A EP 0813221 A3 EP0813221 A3 EP 0813221A3
Authority
EP
European Patent Office
Prior art keywords
making
needle electrode
needle
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP97109607A
Other languages
English (en)
French (fr)
Other versions
EP0813221B1 (de
EP0813221A2 (de
Inventor
Terui Denki Kagaku Kogyo K. K. Yoshinori
Tsunoda Katsuyoshi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denka Co Ltd
Original Assignee
Denki Kagaku Kogyo KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Denki Kagaku Kogyo KK filed Critical Denki Kagaku Kogyo KK
Publication of EP0813221A2 publication Critical patent/EP0813221A2/de
Publication of EP0813221A3 publication Critical patent/EP0813221A3/de
Application granted granted Critical
Publication of EP0813221B1 publication Critical patent/EP0813221B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
    • H01J9/025—Manufacture of electrodes or electrode systems of cold cathodes of field emission cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/063—Electron sources
    • H01J2237/06308—Thermionic sources
    • H01J2237/06316—Schottky emission
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Cold Cathode And The Manufacture (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
EP97109607A 1996-06-12 1997-06-12 Herstellungsverfahren einer Nadelelektrode Expired - Lifetime EP0813221B1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP08151137 1996-06-12
JP15113796 1996-06-12
JP151137/96 1996-06-12

Publications (3)

Publication Number Publication Date
EP0813221A2 EP0813221A2 (de) 1997-12-17
EP0813221A3 true EP0813221A3 (de) 1999-11-10
EP0813221B1 EP0813221B1 (de) 2010-11-03

Family

ID=15512184

Family Applications (1)

Application Number Title Priority Date Filing Date
EP97109607A Expired - Lifetime EP0813221B1 (de) 1996-06-12 1997-06-12 Herstellungsverfahren einer Nadelelektrode

Country Status (5)

Country Link
US (1) US5993636A (de)
EP (1) EP0813221B1 (de)
KR (1) KR100264365B1 (de)
DE (1) DE69740034D1 (de)
TW (1) TW341709B (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6555830B1 (en) * 2000-08-15 2003-04-29 Applied Materials, Inc. Suppression of emission noise for microcolumn applications in electron beam inspection
DE60313282T2 (de) * 2003-03-03 2007-12-27 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Vorrichtung für geladene Teilchen mit Reinigungseinheit und Verfahren zu deren Betrieb
US9159527B2 (en) * 2003-10-16 2015-10-13 Carl Zeiss Microscopy, Llc Systems and methods for a gas field ionization source
CN102361002B (zh) * 2006-06-30 2015-07-15 株式会社岛津制作所 电子束控制方法、电子束生成设备、使用该方法的设备,以及发射器
GB2453302B (en) * 2006-06-30 2012-04-18 Shimadzu Corp Electron beam generating apparatus and methods of forming an emitter
DE112009003724B4 (de) * 2008-12-16 2017-07-13 Hitachi High-Technologies Corporation Verwendung eines Elektronenstrahlgeräts
US8779376B2 (en) * 2012-01-09 2014-07-15 Fei Company Determination of emission parameters from field emission sources
JP6014156B2 (ja) 2012-10-12 2016-10-25 株式会社日立ハイテクノロジーズ 電子源の製造方法
CN110696202B (zh) * 2019-09-27 2020-07-10 山西大学 一种用于昆虫的显微注射玻璃针的断针装置及方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1028351A (en) * 1964-01-03 1966-05-04 Mullard Ltd Field-emission cathode
US3711908A (en) * 1970-08-27 1973-01-23 Ibm Method for forming small diameter tips on sintered material cathodes
US4055780A (en) * 1975-04-10 1977-10-25 National Institute For Researches In Inorganic Materials Thermionic emission cathode having a tip of a single crystal of lanthanum hexaboride
US4379250A (en) * 1979-10-19 1983-04-05 Hitachi, Ltd. Field emission cathode and method of fabricating the same

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US761675A (en) * 1904-02-29 1904-06-07 William J Hartwig Electric cut-out.
US3607678A (en) * 1968-12-30 1971-09-21 Sherwin Williams Co Electrocoating
JPS6114125Y2 (de) * 1977-01-31 1986-05-01
US5286355A (en) * 1991-08-12 1994-02-15 The Johns Hopkins University Electrochemical wire sharpening device and method for the fabrication of tips
US5275596A (en) * 1991-12-23 1994-01-04 Laser Centers Of America Laser energy delivery tip element with throughflow of vaporized materials
JPH0612972A (ja) * 1992-06-24 1994-01-21 Denki Kagaku Kogyo Kk 熱電界放射電子銃
US5630932A (en) * 1995-09-06 1997-05-20 Molecular Imaging Corporation Tip etching system and method for etching platinum-containing wire

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1028351A (en) * 1964-01-03 1966-05-04 Mullard Ltd Field-emission cathode
US3711908A (en) * 1970-08-27 1973-01-23 Ibm Method for forming small diameter tips on sintered material cathodes
US4055780A (en) * 1975-04-10 1977-10-25 National Institute For Researches In Inorganic Materials Thermionic emission cathode having a tip of a single crystal of lanthanum hexaboride
US4379250A (en) * 1979-10-19 1983-04-05 Hitachi, Ltd. Field emission cathode and method of fabricating the same

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
MÜLLER, ERWIN W. ET AL.: "Field Ion Microscopy, principles and applications", 1969, AMERICAN ELSEVIER PUBLISHER COMP., INC., NEW YORK, XP002101567 *

Also Published As

Publication number Publication date
EP0813221B1 (de) 2010-11-03
DE69740034D1 (de) 2010-12-16
KR100264365B1 (ko) 2000-08-16
TW341709B (en) 1998-10-01
KR980005148A (ko) 1998-03-30
US5993636A (en) 1999-11-30
EP0813221A2 (de) 1997-12-17

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