EP0779108A2 - Wandleranordnung für akustische Abbildung - Google Patents

Wandleranordnung für akustische Abbildung Download PDF

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Publication number
EP0779108A2
EP0779108A2 EP96308744A EP96308744A EP0779108A2 EP 0779108 A2 EP0779108 A2 EP 0779108A2 EP 96308744 A EP96308744 A EP 96308744A EP 96308744 A EP96308744 A EP 96308744A EP 0779108 A2 EP0779108 A2 EP 0779108A2
Authority
EP
European Patent Office
Prior art keywords
array
elements
layer
assembly according
acoustic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP96308744A
Other languages
English (en)
French (fr)
Other versions
EP0779108A3 (de
EP0779108B1 (de
Inventor
Anthony Patrick Needham
Kevin Joseph Lodge
Caroline Elizabeth Millar
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Marconi Caswell Ltd
Original Assignee
GEC Marconi Ltd
Marconi Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by GEC Marconi Ltd, Marconi Co Ltd filed Critical GEC Marconi Ltd
Publication of EP0779108A2 publication Critical patent/EP0779108A2/de
Publication of EP0779108A3 publication Critical patent/EP0779108A3/de
Application granted granted Critical
Publication of EP0779108B1 publication Critical patent/EP0779108B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0644—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element
    • B06B1/0662—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element with an electrode on the sensitive surface
    • B06B1/0681—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element with an electrode on the sensitive surface and a damping structure
    • B06B1/0685—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element with an electrode on the sensitive surface and a damping structure on the back only of piezoelectric elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0607—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
    • B06B1/0622—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements on one surface

Definitions

  • This invention relates to acoustic imaging arrays.
  • a row of acoustic elements in an acoustic imaging system. These are in the form of a one-dimensional (1D) array such as a series of individual elements spaced along a line.
  • the acoustic elements are formed from a piezoelectric material.
  • the elements generate an acoustic signal which propagates through a medium and is reflected by an object in the medium which is to be detected. Signals reflected by the object are detected by the elements and electrical signals are generated which can then be processed.
  • An acoustic imaging system using a 1D array is used in ultrasound imaging to provide internal images of the human body or to image underwater objects.
  • a two-dimensional (2D) image is generated by physically sweeping the 1D array over the region to be imaged.
  • a 2D array may be a plurality of individual elements arranged in a grid. Compared with a 1D array, a 2D array provides improved resolution and better quality image and also eliminates the need for physical focussing or sweeping.
  • the use of 2D arrays has been limited by the difficulty in processing large amounts of data which would be generated by an array of any useful size, for example 10,000 elements in a array of 100x100. Furthermore, it is difficult to make connections to such a large number of elements on a scale of several centimetres squared.
  • the connections and associated connecting tracks are supported by an interconnect layer.
  • the interconnect layer often has an acoustic impedance which differs to that of the elements and acoustic reflections are caused by the mismatch.
  • reflections can be minimised by using materials having a better match of acoustic impedance, problems are encountered as the number of elements in an array is increased. As the number of elements in the array increases the thickness of the interconnect layer must also be increased which increases the amount of acoustic reflections. This degrades the sensitivity of the system.
  • the invention provides an assembly for an acoustic imaging system comprising an array of elements for receiving acoustic energy and converting the energy into electrical signals, a track layer having a plurality of electrically conductive tracks and an absorbing layer for absorbing acoustic energy in which the absorbing layer is disposed between the array and the track layer and comprises a plurality of electrically conducting paths electrically connecting at least one element to at least one track.
  • the elements also generate acoustic energy.
  • the acoustic energy is in the range 0.1 to 20 MHz.
  • the elements comprise piezoelectric material.
  • the piezoelectric material is ceramic. It may be lead zirconate titanate (PZT).
  • the array may comprise a 1-3 composite of elongate members of piezoelectric material embedded in a matrix.
  • the matrix is a polymer material, for example epoxy resin.
  • an advantage of using a filled matrix is that an element may comprise a plurality of elongate members. Therefore, the size (particularly the width) of the elongate members can be much smaller than the usual size of an element. If the elongate members are reduced to a size much smaller than the wavelength of acoustic waves generated and/or detected by the system, acoustic coupling between the members is reduced. Embedding the elongate members in a matrix means that they can be smaller, that is more fragile, because they are supported. In addition the matrix filler reduces cross-coupling and also reduces acoustic impedance of the array of elements. This avoids the need to use additional techniques to reduce cross-coupling, for example supporting individual elements on a diced backing layer.
  • a plurality of elongate members are in electrical contact with each electrically conducting path.
  • the size and shape of the cross section of an electrically conducting path can be chosen to define a particular group of elongate members as an individual element.
  • the elements may be all identical or may differ, for example for different purposes. In one embodiment one element comprises nine elongate members.
  • the array comprises a plurality of sub-arrays.
  • a sub-array comprises 100 elements.
  • outputs from elements of a sub-array are fanned down onto a readout chip.
  • Outputs from a plurality of readout chips, each connected to a sub-array may be multiplexed together to provide an overall array output.
  • the sub-arrays may be designed to transmit and/or receive at different operating frequencies so that the total array may have multi-frequency characteristics.
  • the absorbing layer comprises a polymer having conducting paths in a matrix.
  • the matrix and/or the paths may be loaded to provide suitable properties, for example conductivity and absorption of acoustic energy.
  • a common electrode is in electrical contact with a front face of the array.
  • groups of elongate members are connected to a respective contact pad at a rear face of the array.
  • the contact pads may have shapes to define the shapes of the elements.
  • the common electrode supports a quarter wave matching layer which is matched acoustically to minimise reflections of acoustic waves.
  • the acoustic impedance of the matching layer preferably will be between that of the medium, for example water, and that of the piezoelectric material.
  • the array may be shaped to provide quasi-optical effects, for example focussing.
  • the array may be a linear 1D array or a 2D array.
  • the invention provides an acoustic imaging system comprising an assembly according to the first aspect of the invention and signal processing means for processing the electrical signals to generate an image.
  • Figure 1 shows a known 2D acoustic imaging array 10 comprising a backing layer 12, an interconnect layer 14, an array of acoustic elements 16, a common electrode 18 and matching elements 20 located in positions which correspond to the acoustic elements 16.
  • the acoustic elements 16 comprise a piezoelectric ceramic material such as lead zirconate titanate. They are formed by dicing of a bulk piece of piezoelectric material. Electrical connections are formed on upper and lower faces of the elements to, respectively, the common electrode 18 and contact pads 22 on the interconnect layer 14.
  • the interconnect layer 14 contains a number of metal tracks 24 each of which terminates in one of the contact pads 22. Although in Figure 1 the tracks are shown, conventionally they are contained within the body of the interconnect layer 14. This may be formed by any convenient route such as sintering and firing ceramic tape. Alternatively, it may comprise layers of a polyimide material.
  • the backing layer 12 is a sound absorbent material and may be an epoxy resin.
  • the purpose of the backing layer 12 is to absorb any sound waves which travel through the interconnect layer 14 to prevent sound being reflected back to the elements from underneath. It comprises an array of rods 26 which are formed by dicing of a bulk piece of epoxy resin. The rods 26 all stand on, and are integrally part of, a base or substrate (not shown).
  • the backing layer 12 is formed as a rod-like structure in order to isolate acoustically elements 16 from each other to prevent cross coupling and thus degrade sensitivity.
  • the backing layer 12 has a large number of air gaps.
  • it is constructed such that one matching element 20, one element 16, one contact pad 22 and one rod 26 are all in register in a single stack. This configuration of providing separate stacks for each acoustic element 16 is necessary in order to avoid cross-coupling between adjacent elements 16.
  • Providing isolated rods 26 overcomes the problem of cross coupling to some extent, but further problems are created by the rod-like structure having air gaps. If the array 10 is to be used underwater, water pressure can damage the rod-like structure.
  • a 2D acoustic imaging array 30 according to the invention is shown in Figure 2. It comprises an interconnect layer 32 carrying a backing layer 34 onto which is located a piezoelectric layer 36. A common electrode 38 is present on an upper face 40 of the piezoelectric layer 36. A matching layer 42 is present on an upper face 44 of the common electrode 28.
  • the piezoelectric layer 36 is in the form of a 1-3 composite. This is formed by dicing a sheet of piezoelectric material into elongate members 45 and then backfilling with a filler which forms a matrix supporting the piezoelectric elongate members.
  • the piezoelectric material is a ceramic such as lead zirconate titanate (PZT).
  • the matrix is a polymer such as epoxy resin. It provides rigidity to the piezoelectric material for ease of handling during manufacture and ruggedness in use. In comparison with the known array the array 30 is more pressure resistant which is useful in underwater applications where pressure is to be resisted.
  • the matching layer 42 can be an integral layer rather than a plurality of matching elements.
  • the backing layer 34 has also been formed by dicing of a bulk material and backfilling. In this case it results in an epoxy resin structure having tungsten loaded conductive paths 46 in a matrix of non-loaded insulator 48.
  • the piezoelectric layer 36 is in contact with the backing layer 34. It is important that this contact establishes good electrical contact between the elongate members 45 and the conductive paths 46 and so contact elements (not shown) are located on the back of the piezoelectric layer 36. Since this layer is in bulk rather than as discrete elements in the known array 10, it means that contact elements of any desired shape can be printed on the back of the layer to connect to (and activate) any desired shape of elongate members 45 to define individual elements. This is not possible in the known array 10 since the elements are separated by air gaps and are thus discrete.
  • the conductive paths 46 are electrically connected to the piezoelectric layer 36. If the contact elements were the same size and shape as the ends of the conductive paths 46, the ends as seen in Figure 2 would define the elongate members 45 which comprise an individual element. At another end the conductive paths 46 are electrically connected to contact pads 50 on the interconnect layer.
  • electronics for controlling operation of the acoustic elements may be integrated directly on to the interconnect layer (either in it or underneath it) rather than being located remote from the array as in the known array 10. This gives improved performance as well as weight reduction since the track lengths between the piezoelectric layer and the electronics can be minimised.
  • a number of acoustic elements are grouped into sub-arrays.
  • Figure 3 shows such a sub-array 60 having a backing layer 62 supported on an interconnect layer 64. The figure does not show a piezoelectric layer although, of course, one would be present in a practical embodiment.
  • Tracks 66 running through the interconnect layer connect conductive paths 68 in the backing layer to contacts 70 on a transmit/readout chip 72.
  • the readout chip 72 also carries contacts for input of power and control and output of data.
  • the readout chip 72 may be mounted by a flip-chip solder bonding technique onto the back of the interconnect layer 66. Outputs from the sub-array 60 are connected to the readout chip 72 by fanning down the outputs onto the chip 72.
  • the chip 72 may have 10x10 contacts for a sub-array of 10x10 elements and may be a few millimetres square compared with several centimetres square for a 100x100 array. Signals from the sub-array 60 (which represent a small part of an image detected by the entire array) are multiplexed in a separate multiplexer chip with signals from other sub-arrays to group together outputs of the elements in the entire array, for example 10,000, into a more manageable 100 outputs from 100 chips.
  • This arrangement showing the chips 72 bonded to the back of the interconnect layer 64 is shown in Figure 4.
  • a second interconnect layer connects to a main multiplexer which multiplexes together the outputs from all of the chips 72.
  • the main multiplexer is bonded to the interconnect layer 64. Power is supplied to the chip along line 74 and timing and data outputs are taken from lines 76. Data is supplied by lines 76 to a data processor which can generate images.
  • Typical array dimensions are 1mm 2 elements arranged at a pitch of 1.75mm. The dimensions depend on the operating frequency and required resolution and these values would be suitable for operation at 3MHz. Operation in the frequency range 0.1 to 20MHz is envisaged. The thickness of the backing layer would be about 10mm. The invention would be suitable for fabricating an array of 100x100 although larger arrays are possible, especially when using a modular system having sub-arrays.
  • This embodiment can be used to steer a transmitted beam of acoustic energy. This may be achieved by transmitting a sonic beam which is steered by phasing the array in during transmission. The transmitted beam would be pulsed. An image may then be formed from signals received by the array.
  • the system may comprise external acoustic imaging lenses.
  • the array, backing material and/or interconnect layer may be shaped to provide self-focussing.
  • the invention is particularly suitable for imaging in liquid. It could have civil or other applications and could be used for imaging in unclear water such as in a diver's helmet in conjunction with a head-up display or in a submersible vehicle for guidance or imaging systems. Alternatively, it could be used in a medical imaging system or for non-destructive testing of structures such as solids. Essentially the system may be used in any application to detect differences in acoustic impedances.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)
EP19960308744 1995-12-13 1996-12-03 Wandleranordnung für akustische Abbildung Expired - Lifetime EP0779108B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GBGB9525418.1A GB9525418D0 (en) 1995-12-13 1995-12-13 Acoustic imaging arrays
GB9525418 1995-12-13

Publications (3)

Publication Number Publication Date
EP0779108A2 true EP0779108A2 (de) 1997-06-18
EP0779108A3 EP0779108A3 (de) 1997-10-29
EP0779108B1 EP0779108B1 (de) 2000-02-09

Family

ID=10785319

Family Applications (1)

Application Number Title Priority Date Filing Date
EP19960308744 Expired - Lifetime EP0779108B1 (de) 1995-12-13 1996-12-03 Wandleranordnung für akustische Abbildung

Country Status (4)

Country Link
EP (1) EP0779108B1 (de)
AU (1) AU724201B2 (de)
DE (1) DE69606609T2 (de)
GB (1) GB9525418D0 (de)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2756447A1 (fr) * 1996-11-26 1998-05-29 Thomson Csf Sonde acoustique multielements comprenant une electrode de masse commune
US6467138B1 (en) 2000-05-24 2002-10-22 Vermon Integrated connector backings for matrix array transducers, matrix array transducers employing such backings and methods of making the same
US7230368B2 (en) 2004-04-20 2007-06-12 Visualsonics Inc. Arrayed ultrasonic transducer
EP1677575A3 (de) * 2004-12-20 2008-12-24 Samsung Electronics Co., Ltd. Tonwiedergabeschirm für ein Verfahren zum Umwandeln und Wiedergeben von Ultraschall
US9935254B2 (en) 2008-09-18 2018-04-03 Fujifilm Sonosite, Inc. Methods for manufacturing ultrasound transducers and other components
US10596597B2 (en) 2008-09-18 2020-03-24 Fujifilm Sonosite, Inc. Methods for manufacturing ultrasound transducers and other components

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7901358B2 (en) 2005-11-02 2011-03-08 Visualsonics Inc. High frequency array ultrasound system
US20110144494A1 (en) 2008-09-18 2011-06-16 James Mehi Methods for acquisition and display in ultrasound imaging
US12109591B2 (en) 2019-09-09 2024-10-08 GE Precision Healthcare LLC Ultrasound transducer array architecture and method of manufacture

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1530783A (en) * 1976-01-30 1978-11-01 Emi Ltd Ultra-sonic pickup device
US4801835A (en) * 1986-10-06 1989-01-31 Hitachi Medical Corp. Ultrasonic probe using piezoelectric composite material
US5267221A (en) * 1992-02-13 1993-11-30 Hewlett-Packard Company Backing for acoustic transducer array
US5329498A (en) * 1993-05-17 1994-07-12 Hewlett-Packard Company Signal conditioning and interconnection for an acoustic transducer

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
None

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2756447A1 (fr) * 1996-11-26 1998-05-29 Thomson Csf Sonde acoustique multielements comprenant une electrode de masse commune
WO1998023392A1 (fr) * 1996-11-26 1998-06-04 Thomson-Csf Sonde acoustique multielements comprenant une electrode de masse commune
US6341408B2 (en) 1996-11-26 2002-01-29 Thomson-Csf Method of manufacturing a multiple-element acoustic probe comprising a common ground electrode
US6467138B1 (en) 2000-05-24 2002-10-22 Vermon Integrated connector backings for matrix array transducers, matrix array transducers employing such backings and methods of making the same
US7830069B2 (en) 2004-04-20 2010-11-09 Sunnybrook Health Sciences Centre Arrayed ultrasonic transducer
US7230368B2 (en) 2004-04-20 2007-06-12 Visualsonics Inc. Arrayed ultrasonic transducer
EP1677575A3 (de) * 2004-12-20 2008-12-24 Samsung Electronics Co., Ltd. Tonwiedergabeschirm für ein Verfahren zum Umwandeln und Wiedergeben von Ultraschall
US7912227B2 (en) 2004-12-20 2011-03-22 Samsung Electronics Co., Ltd. Sound reproducing screen for an ultrasonic converting and reproducing method
US9935254B2 (en) 2008-09-18 2018-04-03 Fujifilm Sonosite, Inc. Methods for manufacturing ultrasound transducers and other components
US10596597B2 (en) 2008-09-18 2020-03-24 Fujifilm Sonosite, Inc. Methods for manufacturing ultrasound transducers and other components
US11094875B2 (en) 2008-09-18 2021-08-17 Fujifilm Sonosite, Inc. Methods for manufacturing ultrasound transducers and other components
US11845108B2 (en) 2008-09-18 2023-12-19 Fujifilm Sonosite, Inc. Methods for manufacturing ultrasound transducers and other components
US12029131B2 (en) 2008-09-18 2024-07-02 Fujifilm Sonosite, Inc. Methods for patterning electrodes of ultrasound transducers and other components

Also Published As

Publication number Publication date
AU724201B2 (en) 2000-09-14
GB9525418D0 (en) 1996-07-17
EP0779108A3 (de) 1997-10-29
DE69606609D1 (de) 2000-03-16
EP0779108B1 (de) 2000-02-09
DE69606609T2 (de) 2000-06-08
AU7429396A (en) 1997-06-19

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