EP0754310A1 - Combination splitting device composed of strip waveguides and uses thereof - Google Patents

Abstract

An integrated optical combination splitting device, in particular for applications in the wavelength range of visible light, which ensures a spatial, broadband concentration of light in a wavelength range DELTA lambda greater than approximately 75 nm (valid for short-wave visible light). For a useful wavelength range comprising all visible light, a white-light splitting device is provided. The combination splitting device consists of at least three strip waveguides, at least one of which being a single-mode integrated optical broadband strip waveguide (EOBSW). Two strip waveguides (2, 3) each have an entry point (E1, E2) and are joined at their exit points (A1, A2) in a coupling point (6) to become a joint EOBSW (5) having a common light exit (AM) at its end. This broadband combination splitting device can be used as a wavelength-selective or wavelength-independent switch or modulator in interferometric and photometric arrangements, sensors and microsystem solutions.

Description

 description

1 Name of the invention

Connection splitters made of strip waveguides and uses

2 Technical area

The invention relates to a connection splitter which is used for the spatial merging or splitting of light of different wavelengths or different wavelength ranges from a comparatively large wavelength spectrum. If required, this broadband connection splitter is used for switching, deflecting or for modulating light. The invention further relates to uses of this broadband connection splitter

The single-mode strip waveguides used for the broadband connection splitter are single-mode integrated-optical broadband strip waveguides or white light strip waveguides, which are described in the patent application filed on the same day "Strip waveguides and uses". The invention is furthermore in Relation to the same day patent application "Color Imaging Systems and Uses"

In these documents, light means visible and invisible (infrared and ultraviolet) electromagnetic radiation, but in particular discrete wavelengths or wavelength ranges of visible radiation in the wavelength spectra from 400 nm to 760 nm. Stripe waveguides are waveguides that are based on the principle of total reflection of light, caused by an increase in the refractive index in the waveguiding area, based on the surrounding medium 3 State of the art

Connection splitters for a bandwidth of less than 95 nm (information applies to short-wave visible light) are known. Discrete strip waveguides are combined for the purpose of combining light by the principle of two-mode interference known per se

- Use of a Y-branch

- Use of an integrated optical switching or distribution element, such as an X-coupler, directional coupler, parallel strip coupler or BOA

(see W Karthe, R Muller, Integnerte Optik, Academic Publishing Company Gee & Portig K -G, Leipzig, 1991 and A Neyer "Integnert-Optical Components for Optical Night Technology", Habilitationsschπft Umv Dortmund 1990) BOA is a French-language term (bifurcation optique active) for a group of integrated optical components (see M Papuchon, A Roy, DB Ostrowsky, "Electπcally active optical bifurcation BOA", Appl Phys Lett, Vol 31 (1977) pp 266-267)

The efficiency of the connection splitting - with simultaneous demand for efficient modulability and / or switchability of the light - is dependent on the single-mode of the strip waveguide, which form the inputs and outputs of the connection splitter, single-mode is in known strip waveguides for wavelength ranges with a bandwidth large about 130 nm (information applies to short-wave visible light) not given

Different wavelengths of light require different values of the characteristic parameters of the strip waveguide, such as refractive index of the substrate, refractive index of the superstrate, refractive index or one- or two-dimensional refractive index profile of the strip waveguide, cross-sectional shape (for example width and depth) and position of the strip waveguide in or on the substrate This generally requires the use of different stripe waveguides for different wavelengths of the guided light In the case of connection splitting based on known strip waveguides, for example the titanium-diffused strip waveguide in LιNbθ3, the usable wavelength range is reduced by about 35 nm compared to that of the associated single-mode strip waveguide, since in connection splitters based on two-mode interference, such as Y-splitters, directional couplers, parallel-strip couplers, X-couplers or BOA, the oscillation of the second mode in the lateral direction in the connection or splitting area must be avoided.This is the prerequisite for a constant division ratio of the light output during splitter operation in the entire usable wavelength range

For the efficient splitting of light of a wavelength range greater than 95 nm, the use of one and the same single-mode strip waveguide is necessary, which technically, effectively transmits all wavelengths with a bandwidth greater than about 130 nm (information applies to short-wave visible light) Technically sufficient effectiveness means that the effective refractive index N _eτj of the mode guided in the strip waveguide must be at least 5x10 ^" ^ above the refractive index of the surrounding material n _s . This is a prerequisite for low values of the waveguide attenuation in the range of 1 dB / cm Technically effective also means that the waveguide attenuation and the efficiency of a coupling between the strip waveguide and a single-mode optical fiber should not change by more than about 30% in the entire wavelength range which can be driven by emmodig because there is usually light with Hi The single-mode optical fibers are coupled into strip waveguides

With conventional strip waveguides, it is not possible, for example, to red and blue light emmodig in one and the same strip waveguide with technically sufficient effectiveness

So far, no arrangement is known for emitting light of different wavelengths with a bandwidth of approximately 95 nm (specification applies to short-wave visible light) in one and the same waveguide structure, as well as deflecting it efficiently or separately, or modulating it together, to switch and merge or split spatially For this purpose, requirements have to be met that have not yet been realized in this form together with known modulation mechanisms, such as using the electro-optical effect

According to patent application DE 43 27 103 A1, an interferometric tunable optical filter is known. The optical filter splits an input signal into several waveguide branches. The amplitude and the phase of the signal are individually controlled in each branch. The signals are then recombined in a waveguide

The filter element serves as a demultiplexer for wavelength division multiplexing in communications technology for wavelengths between 800 nm and 1.6 μm with a comparatively small bandwidth

4 Object of the invention

The present invention has for its object to spatially merge or split light radiation of a wide wavelength spectrum or a plurality of discrete wavelengths with a large wavelength distance and, if necessary, to modulate, deflect and / or switch the radiation s light before it is merged or when merging or after merging contain several wavelengths or wavelength ranges, in particular all wavelengths or specific wavelength ranges of a bandwidth Δλ> 95 from the spectrum of visible light.This means that for the implementation of broadband connection splitters, broadband strip waveguides are also necessary which have an emmodem controllable wavelength range of at least 130 nm (information applies to short-wave visible light)

For the broadband splitter, known fields of application are to be developed in such a way that a comparatively simple construction of optical arrangements is possible. The aim is to create integrated optical components which are able to transmit light over a wide wavelength range in a fashionable manner , modulate and / or split (spatially split or unite spatially) 5. Essence of the invention

The problem is solved according to the invention by a connection splitter made of strip waveguides with the features of main claim 1.

Subclaims 2 to 6 characterize geometric and optical configurations of the connection splitter according to the features of main claim 1. Subclaims 7 to 20 are advantageous configurations of main claim 1. The broadband connection splitter is used according to the invention according to the features of claims 21, 22, 23, 27 , 34, or 35. Subclaims 24 to 26 are configurations of main claim 23. Subclaims 28 to 33 are configurations of main claim 27. Subclaim 36 is a configuration of main claim 35.

According to the invention, at least two single-mode integrated optical strip waveguides, which do not necessarily have to be broadband, but should advantageously be, are brought together in such a way that a subsequent single-mode integrated broadband optical waveguide - hereinafter referred to as EOBSW - spatially merges Light passes on. The EOBSW is structured according to the patent application filed on the same day "Strip Waveguides and Uses".

This EOBSW is able to transmit light broadband and single mode. Broadband means that radiation of different wavelengths, in particular of visible light, with a bandwidth

Δλ _w > 0.48 λ - 85 nm

(with the specification of λ and Δλ _w in nm), can be transferred in a single mode with a technically sufficient effectiveness.

For visible light this means, for example, a bandwidth of the EOBSW greater than about 105 nm, based on the wavelength λ = 400 nm, and a bandwidth of the

EOBSW greater than 130 nm, based on λ = 450 nm (Figure 10).

One mode means that for any given wavelength, one and only one effective refractive index, namely the effective refractive index NQQ of the basic mode in the EOBSW. is assignable (Figure 9).

£ REPLACEMENT LEAF (RULE 26) Usually and also in these documents, the counting of the mode order zero begins, for example basic mode NQQ, first lateral mode NQI and so on.

Light is understood here in the sense of visible and invisible (infrared and ultraviolet) electromagnetic radiation. Transmission with technically sufficient effectiveness means that the effective refractive index N _e ff of the mode carried out in EOBSW must be at least 5x10 ^" ^ above the refractive index of the surrounding material n _s , where n _{s is} the larger value of the substrate index n- _| or the superstrate index This is a necessary prerequisite for achieving low waveguide attenuation values in the range of 1 dB / cm and thus realizing a strip waveguide that can be used efficiently in technology.

An effective refractive index, ie the effective refractive index of the basic mode NQO ', can be assigned to any given wavelength in the range between λ _a and λ _a + Δλ _w . The range of the single mode is characterized, on the one hand, by the technically efficient oscillation of the basic mode NQQ at the wavelength λ _a + Δλ _w and, technically, by the efficient oscillation of the first mode i lateral direction NQ - | or the first mode in the depth direction N -J at the

Wavelength λ _a determined on the other hand. The values of λ _a and λ _a + Δλ _w are determined by the geometrical-material parameters of the strip waveguide itself and of the media surrounding the strip waveguide. In principle, the minimum

Value of the usable wavelength λ _m j _n and the maximum value of the usable

Wavelength λ _max determined by the optical transmission range of the materials used.

For the crystal material KTiOPθ4, for example, the minimum value of the transmission range is about 350 nm and the maximum value is about 4 μm. Technically effective also means that the waveguide attenuation and the efficiency of the optical coupling between the EOBSW and an emmode optical fiber should not change by more than 30% in the entire single-mode wavelength range, since light with the aid of emmode optical fibers is generally used in the EOBSW Coupling is not possible with conventional stripe waveguides e.g. red and blue light can be guided in one and the same stripe waveguide with one single mode and with sufficient technical effectiveness The parameters of the EOBSW refractive index of the substrate, refractive index of the superstrate, refractive index or one or two-dimensional The refractive index profile of the EOBSW, cross-sectional shape (for example width and depth) and position of the EOBSW in or on the substrate are dimensioned in such a way that single-mode operation of the EOBSW is ensured in a large wavelength range, especially in the entire range of visible light (see general dimensioning requirements) for integrated optical strip waveguides in W Karthe, R Muller, Integrated Optik, Akademische Verlagsgesellschaft Geest & Portig K -G, Leipzig, 1991)

In particular, light waves of the entire visible wavelength range can be guided. The guidance of the light waves in one and the same EOBSW is single-mode over the entire visible range and takes place, technically with the same effectiveness. Thus, there is a real single-mode white-light strip waveguide

The novel EOBSW are by specifically adapted method - _^ their preparation and by their specific properties characterized Physical requirements of the Substratmateπal consist narrowly limited in the Feasible e ^• lateral stripe waveguide structures (for example, by utilizing em - diffusion anisotropy in ion exchange), and / or a wavelength dependent * " ^• (dispersion) of the refractive index increase necessary for the waveguide (and related to the material surrounding the EOBSW) - n _s according to αe formula

- "'≥ 0 with n _s = n- _j if n ₁ > n ₃ or n _s = n if n ₃ > n

where 1-2 denotes the surface refractive index of the waveguiding region itself

The EOBSW is manufactured using one of the following processes:

ion exchange or ion diffusion in dielectric crystals, such as KTiOPθ4 (KTP), LiNbOß and LiTaÜß,

- ion exchange in glass,

- injection molding, embossing or centrifugal processes with polymers on suitable substrates, such as Si, this creates ridge or inverted ridge or Petermann waveguides,

EOBSW in II-VI or III-V semiconductor materials, produced by epitaxial deposition processes on suitable substrates, such as S1O2,

- EOBSW in II-VI or III-V semiconductor materials, produced by doping or alloy,

- EOBSW in heterostructures of ternary or quaternary II-VI or III-V semiconductor materials,

- ridge or inverted ridge or Petermann waveguide in ll-VI or Ill-V semiconductor materials,

EOBSW in and on a suitable substrate material, preferably Si, by combining Si, S1O2 and SiON and / or other oxidic and / or nitride layers,

- Sol-gel processes on suitable substrate materials,

- Ion implantation in all of the aforementioned materials.

The methods for producing optical strip waveguides, in particular ion exchange or ion diffusion in dielectric crystals or ion exchange in glass, can advantageously be combined with the method of ion implantation in order to obtain narrowly limited structures.

To produce a broadband connection splitter according to the invention, at least three strip waveguides, of which at least one EOBSW, are brought together in such a way that a bringing together, splitting, switching, deflection or modulation of light is possible. This can be done using integrated optical components based on two-mode interference such as Y-splitters, X-couplers, directional couplers, parallel-strip couplers or BOA (in: W. Karthe, R Müller. Integnerte Optik, Akademische Verlagsgesellschaft Geest & Portig K -G. , Leipzig, 1991).

♦ ' ^{• ■} / Furthermore, integrated optical or micro-optical reflectors (mirrors, gratings, prisms) can be used to split the connections. The at least one EOBSW of the broadband splitter must be designed so that light corresponds to a wide wavelength range

Δλ _w > 0.48 x λ - 85 nm

(with the specification of λ and Δλ in nm) is performed in one mode, in particular light of discrete wavelengths or discrete narrow wavelength ranges from the entire visible spectrum.

The broadband connection splitter is dimensioned by its geometric and optical parameters so that an efficient function over a wide wavelength range accordingly

Δλ _v > 0.27 x λ - 34 nm

(with the specification of λ and Δλ _v in nm) is guaranteed. Based on the wavelength λ = 400 nm, this means, for example, an efficient connection splitting in a wavelength range Δλ _v > 75 nm.

With suitable broadband connection splitters, it is preferably possible to split the light of the entire visible wavelength range efficiently, especially blue and red light at the same time. In the case of a bandwidth which can be split up and which corresponds to the entire visible wavelength range of light, there is a real white light splitter.

In integrated optical components based on the two-mode interference, a second criterion with regard to the determination of the broadband bandwidth compared to the EOBSW occurs, which limits the usable bandwidth. To function efficiently, i.e. e.g. To ensure a constant divider ratio in the splitter mode or a high extinction ratio in the connector mode in integrated optical interferometers when the wavelength is varied, the oscillation of the second lateral mode NQ2 in the broadened coupling area must be prevented.

The usable bandwidth Δλ | s | of the connection splitter is consequently determined by the smaller value of the difference in the wavelengths of the oscillation of the basic mode NQQ in the strip waveguide and the first lateral or depth mode (NQI or N ^ Q). O 96/24869 PCI7EP96 / 00493

10

in the stripe waveguide (Δλ _w ) on the one hand and the difference in the oscillation of the basic mode NQO ^{ιm the} stripe waveguide and the second lateral mode ^{NQ2 ιm} broadened coupling area (Δλ _v ) on the other hand, i.e. by the smaller value of Δ

and Δλ _w , determined (FIG. 9)

The broadband connection splitter according to the invention is advantageously used to combine light from a wide spectral range, in particular the total visible spectral range of light, in a common EOBSW. In an advantageous embodiment of the invention, all the strip waveguides of the Breitb connection splitter are EOBSW

If necessary, the coupling point can be actively influenced.To this end, the coupling point controllable unit is designed for beam combination and / or beam deflection.The broadband connection splitter contains a modulation device for converting a suitable, generally electrical input signal into an optical amplitude or intensity signal, which has a separate active one Control of the light of two or more light sources or wavelengths up to very high control frequencies (according to the current state of the art up to the GHz range)

The amplitude or intensity modulation of the light is carried out according to one of the following principles

- electro-optical modulation of the light using an integrated optical interferometer structure,

- acousto-optical modulation of light using an integrated optical interferometer structure,

- thermo-optical modulation of the light with the help of an integrated optical interferometer structure,

- magneto-optical modulation of light using an integrated optical interferometer structure,

- Opto-optical modulation of light using an integrated optical interferometer structure - photothermal modulation of the light with the help of an integrated optical interferometer structure,

Change in the effective refractive index by injection or depletion of free charge carriers in semiconductor materials in connection with an integrated optical interferometer structure,

- Electro-optical, acousto-optical, thermo-optical, magneto-optical, opto-optical or photothermal modulation using the Fabry-Perot effect

Modulation by changing the effective refractive index as a result of injection or depletion of free charge carriers in semiconductor materials using the Fabry-Perot effect,

- electro-optical, acousto-optical, thermo-optical, magneto-optical, opto-optical or photothermal cut-off modulation

- Cut-off modulation due to the change in the effective refractive index by injection or depletion of free charge carriers in semiconductor materials

- controllable waveguide amplification,

controllable polarization rotation in connection with a polarizing component or polarizing waveguide,

- conduction mode change,

- electro absorption modulation,

- Modulation using an integrated optical switching or distribution element such as an X-coupler, parallel strip coupler, directional coupler or BOA

- Modulation of the light source itself or

- Modulation by changing the coupling effectiveness of the light source-waveguide

In the passive case, a spatial merging and / or splitting and / or deflection of light components and / or beam deflection takes place in the passive case and, in the active case, there is additionally modulation or switching of the light components

The broadband connection splitter can advantageously be operated in such a way that light from light sources of different wavelengths is coupled successively into the respective strip waveguide or EOBSW, the light components are spatially combined in the coupling point and the temporally successive light components are modulated in the common EOBSW (time-division multiplex operation) In principle, all materials in which EOBSW can be produced with the abovementioned requirements and which, if necessary, have the possibility of converting a modulating input signal into a modulated optical amplitude or intensity signal are suitable as substrate materials

The invention relates to the use of the broadband splitter in arrangements which require simultaneous guidance of light of several wavelengths within a usable wavelength range of a few 100 nm in an EOBSW and in which a control possibility of the light amplitude or the intensity is required for the purpose of Color mixing, the measuring technology, the Sensoπk, the photometπe and the spectroscopy, eg using interferometric methods, whereby the basis for a new multifunctional microsystem component family is given

The use of EOBSW in connection with the modulation mechanisms lays the foundation for new integrated optical detection and spectroscopy methods, which work eg interferometrically, and creates the possibility of the simultaneous or sequential use of several wavelengths from a wide wavelength range in an EOBSW, the application is not limited to the visible range of electromagnetic radiation. The advantages of the invention consist in the possibility of producing devices and, for example, electro-optical modules that can be manufactured using mass production processes and that can be miniaturized in their dimensions. With the help of the invention, light sources, connection splitting and / or to integrate connection, control and detection monolithically or hybrid on a carrier

The integrated optical implementation of the measuring arrangements favors a miniaturized structure in analytical measuring devices, in addition, the smallest sample quantities are sufficient for analysis These smallest sample quantities can be used with high measuring accuracy since the measuring window only has to be a little wider than the EOBSW and the length of the measuring window can be in the millimeter range

With the aid of the measuring arrangements, it is possible to measure all physical, biological and chemical quantities of gases, liquids and solids which influence the behavior of the guided light or the behavior of the strip waveguide itself, for example as detection of the change in absorption, refractive index or scatter in the EOBSW

With a given measuring arrangement which contains a broadband connection splitter, the free selection of several wavelengths or at least one wavelength range from a wide wavelength spectrum is possible

The broadband splitter according to the invention offers the following advantages

- single-mode broadband transmission of light,

- in a technical sense, the effective modulation and / or switchability of the light up to the GHz range (according to the current state of the art),

- Depending on the requirements, the selection of a wavelength-dependent modulation arrangement or a wavelength-independent modulation arrangement (eg electro-absorption modulation, modulation of the light source Graukeil) is possible,

low electro-optical modulation voltages (a few volts) compared to the volume-optical Pockels or Kerr cell (a few 100 volts), so that they can be combined well with methods, structures and components of microelectronics,

- When using KT1OPO4 (KTP) as substrate material in the EOBSW, high feasible optical power densities without disturbing phase changes, that is, a high resistance of the material to chemical-induced changes in refractive index BRIEF DESCRIPTION OF THE DRAWINGS The invention is explained below with the aid of figures. FIGS. 1 to 4 show basic arrangements of the broadband connection splitter. FIG. 5 shows the structure and the refractive index curve in a Ti LiNbOß strip waveguide. FIG. 6 bandwidth of the Ti.LiNbO connection splitter

Figure 7 Representation of the structure and the refractive index curve in one

Rb KTP-EOBSW Figure 8 Bandwidth of the Rb KTP broadband splitter

Figure 9 General representation of the technically relevant

Wavelength range for the efficient splitting of connections Figure 10 Representation of the wavelength dependency more efficiently

Connection splitting Figure 11 broadband connection splitter with modulation devices

FIG. 12 broadband connection splitter with Mach-Zehnder

Interferometer modulators Figure 13 broadband connection splitter from parallel strip couplers with controllable light sources Figure 14 to 17 embodiments of the broadband connection splitter Figure 18 broadband connection splitter with controllable units for

Beam union and / or beam deflection as a 2x1 matrix Figure 19 Broadband splitter with passive units for

Beam union and / or beam deflection and modulators as a 3x1 matrix Figure 20 Broadband splitter with controllable units for

Beam union and / or beam deflection as mxn-Matπx Figure 21 photometer arrangement with separate measuring cuvette

Figure 22 Photometer arrangement with measuring window

Figure 23 broadband connection splitter for time division multiplexing

24 to 26 broadband connection splitters with phase modulators in the

Input branches Figure 27 Wavelength sensor Figure 28 Wavelength selective amp modulator

Figure 29 refractive index sensor

FIG. 30 broadband connection splitter with frequency converters for the spatial convergence of light components. FIG. 31 broadband connection splitter for generating light components of different wavelengths from light of one wavelength. FIG. 32 broadband connection splitter for generating light components of different wavelengths from light of a wavelength with spatial convergence. FIGS. 33 to 35 sensors for measuring long and crushed-tooth landings

7 ways to practice the invention

Figures 1 to 4 show basic embodiments of a broadband

Connection splitter The characteristics of a well-known titanium-diffused

Strip waveguide in LiNbOß and a conventional connection splitter based on such strip waveguides are illustrated in FIG. 5 and FIG. 6. In contrast, the characteristics of a single-mode integrated optical broadband strip waveguide (EOBSW) according to the invention and a broadband according to the invention are illustrated -Connector splitter with regard to their bandwidths using a Rubιdιum <→ Kalιum ion-exchanged strip waveguide in

KT1OPO4 (KTP) shown in Figure 7 and in Figure 8

In FIG. 6 and in FIG. 8, the form of representation of the effective

Refractive index N _e ff 2 of the mode in the strip waveguide, based on the value of the

Refractive index of the substrate n- _j , chosen as a function of the wavelength λ Everyone

The mode of the strip waveguide can have an effective refractive index N _e f between the

Surface refractive index n and the larger value of n and n (refractive index of the

Superstrates)

The value of N _e f depends on the wavelength, the substrate, superstrate and

Depending on the waveguide refractive indices or refractive index profiles and the waveguide geometry Each mode with the index ik (i, k> 0, integer) is thus represented in the diagrams with its effective refractive index as line Nj | <, where i symbolizes the order of the deep modes and k the order of the lateral modes.

The strip waveguide is single-mode, if at a given wavelength there is a wavelength range and only one effective refractive index - namely the effective one

Refractive index NQQ of the basic mode - can be assigned.

For a technically sufficient guidance of the light, the effective one

Refractive index of the respective mode is at least 5 x 10 ^" ^ over n _| and / or n ₃

The bandwidth can thus be read directly.

FIG. 9 is a generalized representation of the technically, single-mode, efficiently feasible wavelength range in the strip waveguide and the

Wavelength range of an efficient connection splitting in one

Connection splitter.

FIG. 10 shows the wavelength range of the strip waveguide which can be carried out in one mode and the wavelength range of the efficient splitting of the connection for the case of the EOBSW according to the invention in Rubidiurrκ → potassium ion-exchanged KTΪOPO4

(KTP) and in the case of conventional titanium diffused strip waveguides in

LiNbO ₃ , depending on the wavelength λ itself.

In addition, the area of the EOBSW and broadband connection splitters according to the invention is generally delimited in FIG. 10 in the general form of strip waveguides and connection splitters which correspond to the prior art.

Figures 1 to 4 first show basic embodiments of a broadband connection splitter.

FIGS. 1 to 4 show single-mode integrated optical broadband strip waveguides (hereinafter referred to as EOBSW) 2, 3 and 5, which are introduced into a substrate material 1. Di EOBSW 2 and 3 each have an input E- _| and E2. At their exits A < _| and A they are brought together in a coupling point 6 and are led as a united EOBSW to a common exit A ^. According to Figure 1, the coupling point is designed in the Y-shape. The Y shape is not mandatory. Other devices for two-mode interference, such as parallel strip couplers according to FIG. 2, X-couplers according to FIG. 3, directional couplers or BOA can also be implemented. If necessary, the coupling point 6 can be actively influenced. For this purpose, the coupling point 6 is designed as a controllable unit for beam combination and / or beam deflection 7. In the example, all stripe waveguides (EOBSW) 2, 3 and 5 are of the same type and carry light over a large wavelength range, greater than approximately 130 nm (specification applies to short-wave visible light), single-mode, in order to light with a wavelength range greater than approximately 95 nm to be able to split connections efficiently (see FIGS. 3, 5 and 6). The property of the coupling-in strip waveguide 2 and 3 to be EOBSW is not mandatory, but is advantageous for an application in any case. The first EOBSW 2 is at its input E- _| with light of wavelength λ- _| or the wavelength range Δλ- _| acted upon. The second EOBSW 3 is exposed to light of the wavelength λ ₂ or the wavelength range Δλ at its input E. At the common output A ^ of the EOBSW 5, spatially combined light is available, which is referred to as a mixed signal M. The broadband connection splitter can also be operated in the opposite direction, that is to say in the splitting direction, in order to split a light signal into light portions which can be individually controlled in EOBSW 2 and 3 if necessary. According to FIG. 4, the EOBSW is combined by integrated optical reflectors R. The EOBSW 2 is deflected into the EOBSW 8 via a 90 ° reflector R. At the point where EOBSW 3 and EOBSW 8 meet e - arranged second reflector R2, which spatially combines the light components in EOBSW 2 and 3 and / oα - - (coupling point 6) and forwards them in EOBSW 5. If required, 3 * ^■ reflectors R can be designed as controllable reflectors.

FIGS. 5 and 6 first explain the conditions using the example of a conventional titanium-diffused strip waveguide in LiNbO ₃ .

FIG. 5 shows a conventional strip waveguide 17 in a substrate material 1. To produce the conventional strip waveguide, X-cut lithium niobate (LiNbO) (X = crystallographic X axis, corresponds to the y-axis in FIG. 5) titanium diffusion was carried out (RV Schmidt, I. Kaminow, Appl. Phys. Lett. Vol. 25 (1974), No. 8, pp. 458-460). For this purpose, a titanium strip 18 is found on the substrate surface! At temperatures above 950 ° C, the titanium diffuses into the LiNbθ3 crystal, which increases the refractive index in the substrate material. In the lateral direction, the diffusion constant is approximately twice as large as in the depth direction, which is why the concentration distribution of the titanium widens considerably in the crystal. The resulting refractive index _{profile has} a shape after the diffusion time t _ςj and the initial _{stripe width} w, which is described by the following formulas.

Titanium-diffused strip waveguides in LiNbO ₃ are not able to guide light with a bandwidth of several 100 nm in one mode. The waveguide 17 is designed as a geometrically limited trench with the width a and the depth t. The trench has a refractive index distribution n _w = f (x, y), with the surface refractive index ⁿ 2 ^{= n} w ^{(χ = υ} - y ^{= υ)} _'the n with respect to the refractive index | of the surrounding substrate material is increased. The diagrams in FIG. 5 show the qualitative course of the refractive index in the x direction and in the y direction. Typical is the continuous transition of the refractive index curve in the x direction (the direction x ^{"is shown} ) and in the y direction (the direction y ^{'" is shown} ).

FIG. 6 shows the wavelength range (bandwidth) of efficient connection splitting of a Ti: LiNbO connection splitter and the wavelength range (bandwidth) of single-mode guidance of light in a titanium-diffused strip waveguide in LiNbO by way of example and without restriction of the generality for a reference wavelength of the calculation of 500 nm .

The curves show the effective refractive index for Z-polarized light (N _e ff,

Z = crystallographic Z axis, corresponds to the x axis in FIG. 5) of the basic mode N and the first mode N _j i in the lateral direction for the width a of the strip waveguide itself and the second mode NQ2 in the lateral direction for the double width 2a of a strip waveguide, ie corresponding to the increased width of the waveguiding region at the branching point of a Y splitter, BOA or X coupler. A w = 3.0 μm wide, 15 nm thick sputtered titanium strip serves as the diffusion source, which widens in the branching region down to 2w (6.0 μm). The diffusion temperature is 1000 ° C, the diffusion time 3 hours. The ratio of the diffusion constants of the titanium ions in LiNbO ₃ is D _x / D _y «2. The depth profile is calculated according to n _w = ⁿ 1 ⁺ ( ⁿ 2 ^{" n} l) ^{* eχ} P ( ^" (y ^'" ) ² ' ^a y ² )> the lateral refractive index profile is calculated according to n _w = n- | + (n ₂ - nj) ^* 0.5 [erf ((2x ^'" + w) / 2a _x ) - erf ((2x ^'" - w) / 2a _x )].

Here, a _x = 2 (D _X t ^ ^and d corresponds to the width a / 2 in FIG. 5, furthermore ay = 2 (Dy t, j) ^1/2 and corresponds to the depth t in FIG. 5 and is 2 μm.

At λ = 500 nm, nj = 2.2492; ri2 - n- _| = 0.0080; the well-known

Wavelength dependence (dispersion) of the substrate index n- _| is less than zero. The

Wavelength dependence (dispersion) of (n2-n- |) is known and also smaller

Zero. The symbol t _ς j denotes the diffusion time, erf is the error function (cf. J.

Ctyroky, M. Hofman, J. Janta, J. Schröfel, "3-D Analysis ofLiNbO ^ Ti Channel

Waveguides and Directional Couplers ", IEEE J. of Quantum Electron., Vol. QE-20

(1984), No. 4, pp. 400-409).

The strip waveguide described leads in the wavelength range from 490 nm to

620 nm - in a technically efficient sense - only the basic mode Ngo, i.e. the

Bandwidth of the strip waveguide is Δλyy = 130 nm. For efficient connection splitting, it is necessary to start the second lateral mode

To prevent NQ2 in the entire widened connector or splitter area. For this reason, only the wavelength range between the oscillation of the

Basic mode NQO of the strip waveguide of width a (corresponds to the original one

Stripe width w) at λ = 620 nm and the start of the second lateral mode NQ2 in the part of the connection splitter widened to 2a (corresponds to the original stripe width 2w) at λ = 525 nm. Thus, the efficiently usable bandwidth Δλ _j s _{j of} the connection splitter is reduced by 35 nm to the value Δλ _v = 95 nm. The effective refractive indices were determined using the effective index method (GB Hocker, WK Bums "Mode dispersion in diffused Channel waveguides by the effective index method ". Appl. Optics. Vol. 16 (1977). No. 1, pp. 113-118).

REPLACEMENT (RULE 26) FIG. 7 shows the single-mode integrated optical broadband strip waveguide (EOBSW) 2 according to the invention in the substrate material 1, in the example Z-cut potassium titanyl phosphate (KT1OPO4, KTP) (Z = crystallographic Z axis, corresponds to the y axis in FIG. 7 ) (M. Rottschalk, J.-P. Ruske, K. Hornig, A. Rasch, "Fabhcation and

Characterization of Singlemode Channel Waveguides and Modulators in KHOPO4 for the Short Visible Wavelength Region ", SPIE 2213, International Symposium on Integrated Optics, (1994), pp. 152-163).

The substrate material 1 is provided with a mask which leaves a gap free only at the future position of the strip waveguide. The ion exchange takes place in a melt of rubidium nitrate with parts of barium nitrate and potassium nitrate. Diffusion occurs almost exclusively in the depth direction, with the refractive index profile described below being formed. In the lateral direction, this results in a step profile of the refractive index. The manufacturability of laterally sharply delimited narrow structures is ensured, since the transfer from the mask into the waveguide takes place in a ratio of 1: 1 due to the almost lack of side diffusion. The EOBSW 2 is designed as a geometrically sharply defined trench with the width a and the depth t. The trench has a refractive index distribution n _w = f (x, y), with the surface refractive index n2 = n _w (-a <x ^" <0, y ^" = 0), compared to the refractive index n- _| surrounding substrate material 1 is increased.

The diagrams in FIG. 7 show the qualitative course of the refractive index in the x direction and in the y direction. Typical is the sharp jump in the refractive index curve in the x direction (the direction x ^{"is shown} ) and the comparatively strong increase αe refractive index from n- _j to n2 in the y direction (the direction y ^{'is shown} ).

FIG. 8 shows the wavelength range (bandwidth) of efficient connection splitting of an Rb: KTP splitter as well as the wavelength range (bandwidth) of single-mode guidance of light in a rubidium → potassium ion-exchanged strip waveguide in KTP as an example and without restriction of generality for a reference wavelength of the calculation of 500 nm.

REPLACEMENT SHEET (RULE 26) | The curves show the effective refractive index for Z-polarized light (N _e f χ, Z - crystallographic Z-axis, corresponds to the y-axis in FIG. 4) of the basic mode NQO and the first mode NQI in the lateral direction for the width a of the strip - Waveguide itself and the second mode NQ2 in the lateral direction for twice the width (2a) of a strip waveguide, ie corresponding to the increased width of the waveguiding area at the branching point of a Y-splitter, X-coupler or BOA At λ = 500 nm, n is n - _| = 1, 9010, the known wavelength dependence (dispersion) of the substrate index n < _| is less than zero (described in LP Shi, Application of crystals of the KTιOPθ4-type in the field of integrated optics, dissertation Umv Köln

(1992)) Furthermore n2 - n < _| applies = 0.0037 = const for the whole

Wavelength range D _X / D _y ~ 10 ^" ^ applies to the diffusion constants

The lateral refractive index profile is therefore a step profile (cf. FIG. 4) with the width a = 4.0 μm or 2a (8.0 μm) for the maximum width in the branching area

The depth profile is calculated according to n _w = n < _| + (n2 - n- ^) * erfc (-y ^' Vt) with t = 4.0 μm, erfc = complementary error function The EOBSW described in the example performs in

Range from 470 nm to 870 nm, in a technically efficient sense, excluding the

Basic mode Noo. h the bandwidth of the strip waveguide is λ ^ = 400 nm

For efficient connection splitting, it is necessary to prevent the second lateral mode N02 from starting to vibrate in the widened connector or splitter area

For this reason, only the wavelength range between the oscillation of the

Basic mode NQO of the strip waveguide of width a at λ = 870 nm and that

Swinging up of the second lateral mode Nfj2 in the part of the widened to 2a

Connection splitter usable at λ = 485 nm Thus, the efficiently usable bandwidth ΔλN of the connection splitter according to the invention is reduced slightly by 15 nm to the value Δλ _v = 385 nm

The effective refractive indices were calculated using the effect iven index method FIG. 9 shows a general illustration of the technically relevant, usable wavelength range for the single-mode waveguide in a strip waveguide and for an efficient connection splitting in a connection splitter. Technically relevant in connection with this figure means that the effective one

Refractive index N _e ff must be at least 5x10 ^" ^ over n _s , where n _s denotes the larger value of the substrate index n- | or of the superstrate index n in order to ensure a sufficiently low waveguide attenuation, for example 1 dB / cm

For any given wavelength in the range Δλw, the stripe waveguide is only one effective refractive index, that is, the effective refractive index NQQ of

Basic mode, assignable

The range of the single-mode of the stripe waveguide is determined by the technically efficient oscillation of the basic mode NQO at the wavelength λ _a + Δλ _w and the technically efficient oscillation of the first mode in the lateral direction NQ-J or the first mode in the depth direction N- | Q determined at the wave length λ _a on the other hand For efficient connection splitting it is necessary to

Prevent oscillation of the second lateral mode NQ2 in the broadened connector or splitter area, i.e. the coupling area with an increased, for example doubled, waveguide width

This results in a further criterion that restricts the usable bandwidth of the connection splitter compared to that of the strip waveguide, namely the spectral width Δλ _v , i.e. the wavelength range between the start of the basic mode NQO of the strip waveguide of simple width at λ _a + Δλ _w and the oscillation of the second lateral mode NQ2 i broadened coupling range, eg double width, at the wavelength λ ^ For this reason the usable bandwidth Δλ | sj of the efficient connection splitting is equal to the smaller of the values of Δλ _w or Δλ _v FIG. 10 shows the single-mode transmissible wavelength ranges of the strip waveguide corresponding to the prior art (consisting of titanium diffused in

LiNbO ₃ , Ti: LiNbO ₃ ) and the EOBSW according to the invention (consisting of

Rubidiuιτκ- »Potassium ion-exchanged KTiOPθ4, Rb: KTP) and the

Wavelength ranges of efficient connection splitting of the connection splitter corresponding to the prior art and of the broadband connection splitter according to the invention, in each case as a function of the wavelength λ. Of the at least three strip waveguides which form the broadband connection splitter, at least that strip waveguide which is intended to transmit a broad wavelength range must be an EOBSW. The effective refractive indices used to determine the single-mode transmissible wavelength ranges were calculated using the effective index method.

On the basis of the known wavelength dependency (dispersion), the increase in refractive index required for the waveguide and the wavelength dependency (dispersion) of the substrate index, the waveguide depth, then the waveguide width, were first used in the calculation, based on the specific reference wavelength λ _a , until the first mode started to oscillate and finally the wavelength varies until the basic mode disappears.

The upper limit of the single-mode transmissible wavelength range Δλ _w is therefore

the wavelength λ _a + Δλ _w , at which the effective refractive index NQQ of the basic mode of the strip waveguide 5χ10 ^"5 lies above the substrate index.

The single-mode transmissible wavelength range of an EOBSW according to the invention lies in FIG. 10 above the straight line with the equation

Δλ _w = 0.48 x λ - 85 nm

(with specification of λ and Δλ _w in nm).

For an efficient connection splitting, it is necessary to prevent the second lateral mode NQ2 from starting to oscillate in the entire widened connector or splitter area. For this reason, only the wavelength range between the start of the basic mode NQO of the strip waveguide of width a at the wavelength λ _a + Δλ _w and the start of the second lateral mode NQ2 in the part of the splitter broadened to 2a can be used at the wavelength λ ^.

In addition to the curves representing the bandwidth of the strip waveguides Δλ _w

the curves describing the bandwidth of the connection splitters Δλ _v are shown. It can be derived from the prior art that the size of the area of efficient connection splitting Δλ _{v is} the inequality

Δλ _v > 0.27 x λ - 34 nm

(with the specification of λ and Δλ _v in nm) in order to characterize a broadband connection splitter. The area which corresponds to a broadband connection splitter is marked in gray in FIG. 10. In principle, d

_{Range of} efficient connection _splitting by the lower (λ _mjn ) and the upper

Limit (λ _max ) of the optical transmission range of the waveguide material is limited (see FIG. 9). Using suitable other waveguide materials, the two inequalities can also be calculated for _shorter or longer wavelengths than for λ _mjn or λ _{max of} the and

Use the described substrate material KTΪOPO4 (KTP).

FIGS. 11 to 17 show first exemplary embodiments of broadband connection splitters.

In the exemplary embodiment shown in FIG. 11, light from three light sources of different wavelengths λ- _j , λ2 and λ is coupled into one of three EOBSW 2, 3 and 4, combined at the coupling points 6 and spatially combined in the EOBSW 8 and EOBS 5 , forwarded and made available at output A ^ of EOBSW 5 as mixed signal M. The light of each light source can be selectively modulated to control the amplitude or the intensity of the light components in the individual EOBSW. In the example, this is done by the signals S < _| , S2 and S ₃ , the controllable amplitude or intensity modulators AM- _j , AM2 and AM _{3 are} supplied. The controllable amplitude modulators or intensity modulators AM < _| , AM2 and AM are arranged on the individual EOBSW 2, 3, and 4. Depending on the control signals, the modulated intensities of the individual wavelengths result in a mixed signal M from the spatially superimposed light components, the intensity of which can be adjusted by means of the amplitude modulators of the individual wavelengths. The mixed signal M is perceptible as a subjective color impression in the wavelength range of visible light. Due to the possibility of electro-optical modulation up to the GHz range (current state of the art), the arrangement can be used to generate rapidly changing light intensities and by combining light spatially to rapidly change the physiological mixture of colors in the human eye.

FIG. 12 shows an embodiment of a broadband connection splitter in a KTiOPÜ4 (KTP) substrate 1 with amplitude modulators or intensity modulators, which are designed as Mach-Zehnder interferometer modulators MZI- _j , MZI2 and MZI. By applying control voltages U- _| , U2 and U ₃ to the electrodes, the propagation constant of the light in the two branches of a Mach-Zehnder interferometer is changed differently via the linear electro-optical effect in the electro-optically active material. At the point of merging in the Mach-Zehnder interferometer, there is constructive or destructive interference depending on the phase position of the light components. The amplitude of the light components in the EOBSW 2, 3 and 4 is thus regulated with the control voltages (see also FIG. 18).

According to FIG. 13, there is another possibility of amplitude or intensity modulation in the modulation of the light sources L- _| , L2 and L ₃ itself, which by means of the control signals S- _| , S2 and S ₃ , for example in the case of laser diodes via the diode current. Additional amplitude modulators are then not absolutely necessary on the EOBSW. The broadband connection splitter has coupling points 6, which are designed here as parallel strip couplers

FIGS. 14 to 17 represent broadband connection splitters ar, the coupling points 6 or 6 ^{'of which} split more than twice or merge more than twice. The solutions described in the preceding figures can also be applied to broadband connection splitters whose coupling points have more than 2 inputs or outputs . The light is not necessarily split into equal amounts of light in the direction of splitting

FIG. 14 shows broadband connection splitters in which the input EOBSW in the coupling point 6 ^' in the form of a Y splitter is split into three EOBSW 2 ^' , 3 ^' and 4 ^' or in the coupling point 6 in the form of a Y- Connector three EOBSW 2, 3, 4, are merged

FIG. 15 shows triple wide band splitter, the coupling points of which is constructed with parallel strip couplers, in splitter or connector operation. FIG. 16 shows triple broad band splitter, the coupling points of which is constructed with integrated optical reflectors, in principle in splitter or connector operation it is possible to combine or split any number of waveguides in a coupling point 6 (Figure 17) Limits are set by the technological controllability of the manufacturing processes and the design of the coupling point. In the splitter operation of the broadband connection splitter, the light of the wavelength Q or the wavelength range is set Δλ divided into each EOBSW There is coherent light in each EOBSW, provided that the incident light is coherent

In connector operation, the light components of the same or different waves are spatially combined. The light components do not influence each other

FIGS. 18 to 20 show further integrated optical implementation variants of the broadband connection splitter, in which the coupling points 6 are generated by waveguide crossings The crossing points behave, as required, as completely passive crossing points or they are coupling points 6 for the spatial combination of light components or they are controllable units for spatial beam combination and / or beam deflection 7, i.e. as elements that switch, modulate or deflect light and can merge spatially, trained. The controllable units for spatial beam combination and / or beam deflection 7 operate on the basis of the two-mode interference as an X-coupler, directional coupler or BOA.

Figure 18 shows the crossing of two EOBSW 2 and 3 with another EOBSW 5 as a 2x1 matrix. The intersections (coupling points 6) are constructed as controllable units for spatial beam combination and / or beam deflection 7 ^' and 7 ^" . Light of two wavelengths λ ^ and λ is coupled into one of the EOBSW 2 and 3 each. The active coupling points act as selective light gates, which allow the light in the common EOBSW 5 to pass completely unaffected in the direction of the mixed signal M, but the light components of the wavelengths λ- _j and λ ₂ in the EOBSW 2 and 3, depending on the applied control signals S- _| and S _2, differ in intensity electrooptically divert the direction of the EOBSW 5, the light components in the EOBSW 5 being spatially combined and being available as a mixed signal M at the output A. The light components which are not completely redirected are continued in the EOBSW 2 and 3 to blind outputs B.

Each controllable unit for spatial beam combination and / or beam deflection 7 ^' and 7 "is dimensioned such that it acts as a modulator for the respectively selected wavelength λ ^ or λ ₂ and at the same time deflects the light component and spatially combines it with the other light component. The other Wavelength is not or only slightly influenced by the modulator.

If the controllable units for spatial beam combination and / or beam deflection 7 ^' and 7 ^" still have mutual influence, the degree of mutual influence is compensated for by active control of the control signals and / or the light sources. This arrangement can advantageously be operated in a time-multiplexed manner, so that the problems with the decoupling of the controllable units for spatial beam unification 7 ^' and 7 ^" are eliminated. As a result of the possible very high control frequency, this can be easily achieved.

REPLACEMENT BLADE (RULE 26) Furthermore, a third light component with the wavelength λ _{3 can be} coupled into an input E _{3 of} the EOBSW 5. This light component can be spatially combined with the light components which are guided in the EOBS and 3

FIG. 19 shows a further integrated-optical implementation variant of the broadband connection splitter as a 3x1 matrix. The EOBSW 2, 3 and 4 cross another EOBSW 5. The crossings are passive coupling points 6, the light components in the EOSBW bringing together modulators AM- _| , AM ₂ , and AM are arranged on each of the EOBSW 2, 3 and 4 to modulate the light components light of three wavelengths λ- _| , λ2 and λ ₃ are coupled into one of the EOBSW 2, 3 and 4. The coupling points 6 act as a light beam combiner and light deflector. The spatially combined light is coupled out from the EOBSW 5 as a mixed signal M. The EOBSW 2, 3 and 4 have electro-optical modulators AM - _j , AM2 and AM ₃ arranged, which the light components of the wavelengths λ- _| , λ ₂ and λ depending on the applied control signals S- _| , S2 and S ₃ pass through with different intensity Furthermore, a light component with the wavelength λ ₄ can also be coupled into an input E4 of the EOBSW 5. This light component can be spatially combined with the light components that are guided in the EOBS 3 and 4

If three light components are used, one of the EOBSW 2, 3, or 4 with the associated modulators and coupling points can alternatively be dispensed with

FIG. 20 shows a further integrated optical implementation variant of the broadband connection splitter as a 3x4 matrix. The intersections are either locations that Lic transmits in the EOBSW completely unaffected (passive intersection) or passive coupling points 6 or controllable units for spatial beam union and / or beam deflection 7

Light of three wavelengths λ- _j , λ2 and λ is coupled into one of the EOBSW 2, 3 and 4. The EOBSW 2, 3 and 4 cross the four EOBSW 8 ^' , 8 ^" , 8 ^'" and 5 The crossing points are shown in the form of a matrix to explain the function. In the crossing points, which are determined by the column rows 1-1, 2-2 and 3-3, actively controllable units for spatial beam union and / or beam deflection 7 are arranged. These units are used to modulate the three light components.

Passive coupling points 6, which spatially unite and / or deflect light components, are arranged in the column rows 1-4, 2-4 and 3-4. The coupling points 6 are not controlled here. They are used for the spatial combination of the light components to form the mixed signal M in the common EOBSW 5. The light components that are not required are fed into the blind outputs B of the EOBSW 2, 3, 4, 8 ^' , 8 ^" and 8 ^"" .

Furthermore, further light components can be coupled and controlled into the inputs E4, E5 and E5 of the EOBSW 8 ^' , 8 ^" and 8 ^'" . These light components can be spatially combined with the light components that are used in EOBSW 2, 3 and 4.

FIGS. 21 and 22 show arrangements for determining the concentration of a specific substance by means of a photometric measurement. The integrated optical implementation of the measuring arrangement with the aid of broadband connection splitters enables a miniaturization of the sample quantity, while at the same time increasing the bandwidth that can be used for the measurement compared to conventional solutions.

In FIG. 21, the absorption of a measuring medium 16 (liquids or gases) located in a separate measuring cell 14 is determined with a photoreceiver 12. These measurements in transmission can also be carried out on a solid body (not shown). Reflection measurements are also possible (not shown).

Light of three different wavelengths is coupled into an EOBSW 2, 3 and 4, spatially combined and then shines through a measuring cuvette 14 in which a measuring liquid 16 is located between the output AM of the common EOBSW 5 and the photoreceiver 12. There is advantageously between the measuring cell 14 and the waveguide output A _| ^ A decoupling arrangement 11 arranged for coupling out light and beam shaping.

REPLACEMENT BLADE (RULE 26) The measurement can be carried out according to one of the methods described below: a) The individual light components at the waveguide output A ^ are time-multiplexed out. There is a direct measurement (without filter) of the absorption of the respective wavelength.

With the help of the modulators AM < _| , AM2 and AM ₃ in each EOBSW 2, 3 and 4 you can switch the control signals Si, S2 and S ₃ the light components or the light sources themselves are switched.

When measuring the fluorescence, however, filters Fi are advantageously located between the measuring cell 14 and the photoreceiver 12 in order to separate the excitation light and the measuring light. b) There is a simultaneous coupling of all light components into the respective inputs of the EOBSW and a simultaneous coupling of the light components at the output of the EOBSW A _| \ / _| , The measurement wavelength is selected by swiveling a filter Fi between the measurement cell 14 and the photoreceiver 12 (without modulators).

Amplitude modulation of the light components is advantageous in itself for all measurements, since higher measurement accuracies can generally be achieved with dynamic measurement methods.

The number of wavelengths used is not necessarily three, but the number can be two or more depending on the intended use.

According to FIG. 22, the absorbing effect of measuring media 16 (gaseous, solid) on the evanescent field of the guided wave located in the superstrate is measured

For this purpose, the covered common EOBSW 5 is provided with a defined measuring window ^r to which the measuring medium 16 is applied.

The light components of the wavelengths λ- _| , λ2 and λ ₃ are represented by the

Amplitude modulators AM < _| , AM ₂ and AM ₃ modulated.

By the absorption of the measuring medium itself or by changing the

Surface scattering leads to a change in the waveguide attenuation, which changes in egg

Change in the photocurrent l _pn expresses. This variant takes advantage of the fact that in the light of an i

Strip waveguide guided mode part of the electrical or magnetic

Field outside the EOBSW itself (evanescent field).

REPLACEMENT SHEET (REGE 26) These field components can therefore be reached and influenced from outside the EOBSW. If there is an absorbing medium on the EOBSW, the evanescent field itself, depending on the absorption, is damped or the surface scatter of the EOBSW is changed by the presence of a medium that is not necessarily absorbent. Both have the consequence that the waveguide attenuation changes, which can be measured with the photoreceiver 12. With the exception of the measurement window 15, the surface of the substrate which comes into contact with the measurement medium is covered with a buffer layer (eg SiÜ2) so that the evanescent field is only accessible in the area of the measurement window. In addition, a precisely defined measuring length is determined (since the total absorption depends on the length of the measuring window). With the help of the measuring arrangement, the measurement of, for example, absorption, refractive index or scattering makes it possible to determine the influence of physical, biological and chemical quantities of gases, liquids and solids, which cause a change in the behavior of the guided light or the strip waveguide itself.

A further implementation variant consists in coating the measuring window 15 with a substance which reacts to physical, chemical or biological external influences and which influences the behavior of the guided light or the EOBSW itself when an external influence occurs.

The integrated optical implementation of the measuring arrangement favors a miniaturized structure. The smallest sample quantities can be used, since the measuring window only has to be a little wider than the waveguide and the length can be in the millimeter range.

FIG. 23 shows a broadband connection splitter which is operated in a time-multiplexed manner. Signals are applied to inputs E _j and E2 mutually constant amplitude and, after the spatial association of the light components corresponding to the plitudenmodulator to the AM A _| applied signals S modulated in their amplitude. The left diagram shows the amplitude profile of the time-multiplexed signal of the wavelengths λ- _j and λ2- The middle diagram shows the profile of the signal S for modulating the light components.

SPARE BLADE (RULE 26) The diagram on the right shows the course of the combined light components (mixed signal M) available at output A ^

FIGS. 24 to 26 show broadband connection splitters according to the invention, at least one EOBSW 2 and / or 3 having an electrode structure 10 for

Phase modulation is provided

The electrodes 10 have an effective electrode length L of a few millimeters to a few centimeters and an electrode distance d of a few μm

The possibility of modulating the light is through the use of a

Substrate material met, which allows a possibility to influence the phase of an optical mode guided in a strip waveguide

In the example, KT1OPO4 (KTP) is used as the substrate material. The input signal is a discrete wavelength λ or a wavelength range Δλ

FIG. 24 shows a broadband connection splitter, the EOBSW 2 of which is provided with an electrode 10 for phase modulation

When the inputs E- | and E2 with the same wavelength λ- _| comes in the case of the use of coherent light in the coupling point 6, depending on the phase position, constructive or destructive interference. The effective electrode length in the single waveguide 2 is L here

FIG. 25 shows a broadband connection splitter, the two EOBSW 2 and 3 of which are each provided with electrodes 10 for phase modulation, which operate in push-pull mode when the inputs E- | and E2 with the same wavelength, if coherent light is used in the coupling point 6, depending on the phase position, constructive or destructive interference occurs. The effective electrode length in each individual waveguide 2 or 3 is U2 when input E- _{| is applied} and E2 with λ- _j is the total effective electrode length L, since in the example the electrodes U2 are long, but work in push-pull, as a result of which the lengths add up. The phase position can be controlled with the modulation voltage U. Using EOBSW the function is over ensures a wide wavelength range

SPARE BLADE (RULE 26) A broadband connection splitter in the splitting direction can be used to provide the interference-capable light required in the coupling point 6 in FIG. 24 or in FIG. 25 (FIG. 26)

Light of a wavelength λ or a wavelength range Δλ is fed to an input E of an EOBSW 5 ^'. The EOBSW 5 ^' is split into the EOBSW 2 and 3 in the coupling point 6 ^'. Each of the EOBSW 2 and 3 then conducts interference-capable light

FIG. 26 thus represents a Mach-Zehnder interferometer (MZI) modulator from EOBSW. This broadband modulator works in a wavelength-selective manner

FIG. 27 shows the broadband connection splitter from FIG. 26 with the provision of interference-capable light by a broadband connection splitter in the splitting direction. An MZI structure is produced from EOBSW, which is used as a wavelength sensor due to its broadband nature. Light of the wavelength λ to be determined is input E of the EOBSW 5 ^' , to which the integrated optical MZI structure is connected. Both branches are provided with phase modulators that work in push-pull (electrodes 10). This results in the possibility of phase modulation of the light components carried in the interferometer arms when one is changed the electrodes 10 applied voltage U changes due to the electro-optical effect, the phase of the light in the interferometer arms and thus the amplitude or intensity of the outcoupled light at the output A. The modulated light is detected by a measuring device 9

In the example, the light falls on a photo receiver 12, with the aid of which the guided light output is determined. The measuring device consists of a decoupling arrangement 11, which bundles the modulated light onto the photo receiver 12. A display device 13 shows the light output which is measured by means of the photo receiver 12

ERSÄTZBLÄTT (RULE 26) The relationship between electrical modulation voltage and phase of the guided optical mode in the case of an electro-optical modulator in

Z-cut KTP and TM light (ie the surface normal of the substrate, the direction of the electric field vector of the guided linearly polarized light correspond to the stallographic Z axis) is determined by

U = - (Δφ λ d) / (π L n _z ³ r ₃₃ r) (1)

The half-wave voltage U _π corresponds to a phase shift of π

U _π = - (λ d) / (L n _z ³ r ₃₃ r) (2)

If you apply a ramp voltage (Figure 27, left diagram) to the electrodes, the photocurrent changes in accordance with the guided power of the light at the modulator output (Figure 27, right diagram)

From this, U _π (voltage between a minimum of guided power and an adjacent maximum) or a multiple of U _π can be determined. Corresponding (2), U _{π is} dependent on the wavelength using a calibration curve U _π = f (λ ) can thus be measured by measuring the

Half-wave voltage determine the wavelength of light - in connection with the use of the broadband connection splitter according to the invention - the photo element must ensure detectability over the entire wavelength range. The light source must not emit broadband light, because the line width determines the resolution of the measuring arrangement, i.e. if if the resolution is to be fully utilized, the line width must be in or below the order of magnitude of the resolution. Instead of the Mach-Zehnder interferometer structure, integrated optical interferometer structures, for example Michelson interferometers, can also be used. The functional principle is analog

FIG. 28 shows a broadband optical filter which filters out a part from a wavelength range Δλ ^. This is due to the wavelength selectivity of the Mach-Zehnder interferometer structure used in the example. The wavelength range Δλ ^ coupled out at the output contains the remaining part of the wavelength range Δλ ^ If the wavelength range Δλ ^ is white light, the decoupled wavelength range Δλ corresponds to the complementary color of the filtered light component.

FIG. 29 shows a miniaturized sensor for the spectral determination of refractive indices, which can be operated over a wide band. Light of different wavelengths is spatially combined using a broadband connection splitter and then guided through a Mach-Zehnder interferometer structure. The amplitude or intensity modulators AM _j are used to select the desired wavelength. One arm of the Mach-Zehnder interferometer MZI is provided, analogously to FIG. 22, with a measuring window 15, the length of which determines the amount of the phase shift when the measuring medium is applied; the other branch can be provided with a phase modulator to increase the measuring accuracy and to determine the direction of the refractive index difference between the superstrate without or with measuring medium 16. When the measuring medium 16 is applied, the propagation constant of the guided wave is changed due to the changed refractive index of the superstrate, which causes a phase change that can be determined interferometrically. The interferometer converts the phase change into an amplitude signal or intensity signal. The differences in refractive index can also be used to infer substances or their concentration. The number of inputs is determined by the number of different wavelengths of permanently coupled light sources. When using a light source that can selectively provide light of several wavelengths, only one input is required

Figures 30 to 32 show arrangements with EOBSW, which are suitable for generating light components of different wavelengths and their spatial combination.

If laser diodes have to be used as light sources, the blue and green light cannot currently be provided in this form. The principle of generating the second harmonic can be used for this purpose, if non-linear optically active materials are used (e.g. KTP). Phase matching must be achieved between the pump wave and the second harmonic. The principle of quasi-phase matching (QPM) is used in KTP.

SPARE BLADE (RULE 26) For this purpose, a piece of the waveguide is segmented in order to bring about a ferroelectric domain reversal. In this way, a phase adjustment between pump light wave and harmonic light wave is achieved. Pump light of sufficient power can then generate light of half the wavelength, ie, for example, the laser diode of the wavelength 830 nm becomes light of the wavelength 415 nm. Further higher harmonics can be generated, for example light of the wavelength λ / 4. Another variant for frequency conversion is the sum (Sum frequency generation (SFG)) or difference frequency formation. Both variants can be carried out in KTP (e.g. ML Sundheimer, A. Villeneuve, Gl Stegemann and JD Bierlein, "Simultaneous generation of red, green and blue light in a segmented KTP waveguide using a single source", Electronics letters, 9th June 1994, vol. 30, No. 12, pp. 975-976) Both variants can be used, for example, to convert infrared light into visible light of different discrete wavelengths.

According to FIG. 30, elements for frequency conversion FU are used in one EOBSW 3 and 4 each. The wavelength λ2 is transformed to the wavelength λ4, the wavelength λ _{3 is} transformed to the wavelength λ5. The wavelengths λ < _| , λ4 and λ $ are available at the mixed signal output A ^ as spatially combined light. Depending on the intended use of the broadband splitter, it depends on which and how many EOBSW are equipped with elements for frequency conversion FU.

According to FIG. 31 and FIG. 32, light of the wavelength λg reaches broadband connection splitters which are operated in the splitter mode. Light components with the wavelength λ ₀ reach the EOBSW 2 ^' , 3 ^' and 4 ^' . An element for frequency conversion FU is arranged in each of the EOBSW 2 ^' , 3 ^' and 4 ^' .

One element for frequency conversion FU generates the wavelength λ- | , λ2 and λ ₃ . In Figure 31, the light components of the wavelengths λ- _| , λ and λ can be coupled out. In FIG. 32, these light components are spatially combined in the following broadband connection splitter in the connector operation. At the output A ^ there is spatially combined light of the wavelengths λ < _| , λ2 and λ ₃ are available.

REPLACEMENT BLADE (RULE 26) FIGS. 33 to 35 represent integrated optical sensors for measuring changes in length and / or changes in refractive index. The sensors are implemented with an integrated optical Michelson interferometer structure, which EOBSW uses as a waveguide.

Figure 33 uses two individual Y broadband link splitters.

Figure 34 uses a directional coupler and Figure 35 uses an X-coupler or a BOA.

The principle of operation of the sensor for measuring changes in length is the same in each of the examples. Light of a wavelength λ * is coupled into the input E of the EOBSW 2 ^' . In the coupling point 6 ^' (FIG. 33) or in the coupling point 6 (FIGS. 34 and 35), the light is divided into two waveguide arms and coupled out at the detector outputs D- _j and D ₂ . This light is directed onto two mirrors by means of the decoupling optics 11. A mirror Sp (f) is stationary. Instead of this mirror, a waveguide end surface can also be mirrored or an integrated optical reflector can be arranged in the EOBSW in front of the waveguide output. The second mirror Sp (b) is attached to the movable measurement object.

The light components are transferred to the waveguide outputs D- _| by means of the mirrors and D _{2 are} reflected back and are brought to interference on their second path through the waveguide structure in the coupling point 6 ^' (FIG. 33) or in the coupling point 6 (FIGS. 34 and 35).

The superimposed light is split up again and can be coupled out at output A and input E. The light that can be coupled out from output A is directed onto a photoreceiver 12, in which a photocurrent L ^ is generated. If the optical path length in the coupling-out branch between D and Sp (b) is now changed, the phase position between the two reflected and coupled-in light components also changes, and thus also the amplitude and the intensity of the signal applied to the photoreceiver. A change in position of λ / 2 of the mirror Sp (b) in the beam direction corresponds to full modulation of the photocurrent l _pn .

REPLACEMENT BLADE (RULE 26) In the case of an additional use of a phase modulator in the waveguide branches provided in FIGS. 33 to 35, which is implemented in the example by the electrode arrangement 10 applied to the EOBS, and / or simultaneous coupling in of light of two wavelengths λ < _| and λ2 in the EOBSW 2 ^' and wavelength-selective measurement, a direction detection of the phase change is made possible. By using EOBSW, the resolution can be increased further by using shorter wavelengths. So far, no strip waveguide is known in which light of the wavelength range of blue light or even shorter wavelengths can be guided and modulated in one mode.

When the mirror Sp (b) is stationary and a measuring medium is introduced between the mirror Sp (b) and the detector output D _{2, there} is a sensor for determining the refractive index of the measuring medium.

SPARE BLADE (RULE 26) Reference sign

1 substrate

2 EOBSW or strip waveguides

3 EOBSW or strip waveguides

4 EOBSW or strip waveguides

5 joint EOBSW

6 coupling point

7 controllable unit for spatial beam union and / or beam deflection

8 EOBSW or strip waveguide

9 measuring device

10 electrodes

11 Auskoppelanordπung

12 photo receivers

13 display device

14 measuring cell

15 measurement windows

16 measuring medium

17 Ti LιNbO ₃ stripes wave guide

18 titanium strips

"-1. L _2. L ₃ light sources

MZI I-,, MZI ₂ , MZI ₃ Mach-Zehnder interferometer

AM 1, AM ₂ ,

AM 3 AM4 amp modulators

E, E ₁ , E ₂ , E ₃ light inputs

A, A ₁ , A ₂ , A ₃ light outputs

Si - s ₂ s ₃ control signals

Ul - u ₂ , u ₃ control voltages

RF ^R 1> ^R 2 integrated optical or micro-optical reflectors

M mixed signal AM mixed signal output

U electrode voltage lp _n photocurrent

Δφ electro-optically generated phase change d electrode spacing

L total electrode length n _z refractive index for Z-polarized light r ₃₃ element of the electro-optical tensor r _{| k} , which the

Mediation of an electrical field in the Z direction with the

Refractive index for Z-polarized light causes r overlap factor between the external electrical field d electrodes and the internal electrical field of the guided optical mode

T time interval t _| / _j measuring time (axis)

ST wavelength selective beam splitter

Sp (f) fixed mirror

Sp (b) movable mirror

D- _j , D2 detector outputs (waveguide outputs)

D _x , Dy, D _z diffusion constants

NQO effective refractive index of the basic mode

Ngi effective refractive index of the 1 mode in the lateral direction

N- _{j Q} effective refractive index of the 1 mode in the depth direction

NQ2 effective refractive index of the 2 mode in the lateral direction

N _e f effective refractive index of the mode in the strip waveguide

N _e ff z effective refractive index of the Z-polarized mode of the

Strip waveguide a _x intermediate value of a length in the x direction a _y intermediate value of a length in the y direction a Width of the structure or of the refractive index profile t Depth (height) of the structure or of the refractive index profile w Initial width of the titanium strip during diffusion t, _j Diffusion time xyz coordinate system n _w Refractive index distribution in the waveguiding area n _w = f (x, y) n ^ Refractive index of the substrate n2 Refractive index of the waveguiding area on the surface n ₃ Refractive index of the superstrate n _s Refractive index of the Substrates if n- _| > n ₃ or

Refractive index of the superstrate if n ₃ > n- _j d (n2 - n _s ) / dλ wavelength dependence (dispersion) of the refractive index Z crystal (or c axis) necessary for the waveguide

XQ,, λg wavelengths λ _a wavelength which, if the single-mode is specified

Wavelength range the short-wave conclusion of the single-mode

Wavelength range in the stripe waveguide corresponds to λ _D wavelength at which in the broadened coupling range of

Connection splitter the second lateral mode Nrj2 swings

λ _m m minimum value of the optical transmission range of a

Substrate material λmax maximum value of the optical transmission range of a

Substrate material λ | discrete wavelength

Δλ, Δλ, wavelength ranges

Δλ _y bandwidth of the strip waveguide Δλ _v wavelength difference between the start of the

Basic mode Noo in the strip waveguide and the oscillation

of the second lateral mode Nrj2 in the widened coupling area

Connection splitter Δλ _j s _j efficiently usable wavelength range of

Connection splitter Δλ _j : bandwidth (spectrum) of light at the waveguide output

Δλ ^ bandwidth (spectrum) of light at the waveguide output

Kjj Matrix element that designates the crossing point

Claims

claims

1 splitter of strips of waveguides for spatial merging or splitting or switching or deflection or modulation of light, in particular for applications in the wavelength range of visible light, consisting of at least three strip waveguides, characterized by

- At least one single-mode integrated optical broadband strip waveguide (EOBSW), in which a channel-shaped structure can be produced in or on a flat substrate material (1) by a method for changing the refractive index or a channel-shaped structure made of a suitable material can be applied Geometric-material parameters of the resulting strip waveguide, depending on the wavelength range to be transmitted, are set in the UV, visible and / or IR range so that, based on the wavelength (λ), the minimum width of the wavelength range for a single-mode guide of light through the equation

Δλ _w = 0 48 λ - 85 nm

is given (with the specification of λ and Δλ _w in nm) where the parameters refractive index of the substrate (n- _| ), refractive index of the superstrate (n ₃ ) refractive index of the refractive index distribution (f (x, y)) on the surface (n ₂ ), Refractive index distribution in the waveguiding area (n _w = f (x, y)), cross-sectional shape (width a and depth t) of the strip waveguide and its position in and / or on the substrate are dimensioned such that single-mode operation of the strip Waveguide in the wavelength range

Δλ _w > 0 48 - λ - 85 nm

(with the specification of λ and Δλ in nm) is guaranteed, i.e. for any given

Wavelength (λ) in the range between λ _a and λ _a + Δλ _w eιn and only one effective

Refractive index, ie the effective refractive index of the basic mode (N ₀ o) _> can be assigned and the range of the single mode due to the technically efficient oscillation of the basic mode (Noo) at the wavelength λ _a + Δλ _w on the one hand and the technically efficient oscillation of the first mode in the lateral direction (NQI) or the first mode in depth (NJ Q) is determined on the other hand at the wavelength λ _a , where

Transmission with technically sufficient effectiveness means that the effective

Refractive index N _er f of the mode guided in the strip waveguide must be at least 5x10 above the refractive index of the surrounding material n _s , where n _s denotes the respectively larger value of the substrate index n- _j or the superstrate index n ₃ and the minimum possible value of the usable wavelength (λ _mιn ) and the maximum possible value of the usable wavelength (λ _max ) by the optical

Transmission range of the materials used are determined, and thus the strip waveguide as a single-mode, integrated-optical broadband strip

Waveguide (EOBSW) is defined and continues to be characterized by

- The combination and connection of the at least three strip waveguides in which the geometric-material parameters of the strip waveguide itself and the media surrounding the strip waveguide are set as a function of the wavelength range to be transmitted in the UV, visible or IR region that related to the wavelength (λ), the minimum width of the wavelength range for an efficient function of the splitter by the equation

Δλ _v = 0.27 λ - 34 nm

(with the specification of λ and Δλ _v in nm) where the parameters refractive index of the substrate (π- _j ), refractive index of the superstrate (n) refractive index of the refractive index distribution (f (x, y)) on the surface (n ₂ ) , Refractive index distribution in the waveguiding area (n _w = f (x, y)), geometry of the splitter and its position in and / or on the substrate are dimensioned such that an efficient function of the splitter at least in the wavelength range Δλ _v > 0.27 x λ - 34 nm

(with the specification of λ and Δλ _v in nm), is guaranteed, the usable

Wavelength range Δλ _j v _j which, in a technical sense, functions efficiently of the splitter due to the smaller value either

- the difference between the wavelength λ _a + Δλ _w des, technically speaking,

efficient oscillation of the basic mode in the strip waveguide (NQO) and

the wavelength λ _{a of} the, technically speaking, efficient oscillation of the first

Mode in the lateral (NQI) or the first mode in the depth direction (N- | Q) in the strip waveguide or

- the difference between the wavelength λ _a + Δλ _w des, technically speaking,

efficient oscillation of the basic mode in the strip waveguide (NQO) and

the wavelength λ ^ of the, technically speaking, efficient oscillation of the second mode in the lateral direction in the coupling area of the splitter (NQ2) widened compared to the strip waveguide, ie

((λ _a + Δλ _w ) - λ _a = Δλ _w

Δλ _N <^ i (λ _a + Δλ _w ) - λb = Δλ _v

is, and thus the connection splitter, consisting of at least three strip waveguides, including at least one EOBSW, is defined as an integrated optical broadband connection splitter. (Figures 9, 10)

SPARE BLADE RULE 26 2 splitter according to claim 1, wherein

- At least two strip waveguides (2, 3) each have an input (E- _j , E ₂ ) into which light can be coupled, and

- Which are brought together at their outputs (A- _| and A ₂ ) in a coupling point (6) to form a common strip waveguide and

- The common strip waveguide is a single-mode integrated optical broadband strip waveguide, ie an EOBSW (5), which has a common usable light exit (A _| \ / _| ) for spatially combined light

(Figures 1,

2, 11, 12, 13, 14, 15)

3 splitter according to claim 1, wherein

- At least one strip waveguide (2) is crossed by at least one further strip waveguide (3) and the at least one crossing point a) is completely passive or b) is a coupling point (6) for the spatial convergence of light components or c) a controllable one Unit for spatial beam union and / or beam deflection (7) is still

- Light can be coupled into each strip waveguide (2, 3) and

- The common strip waveguide is a single-mode integrated optical broadband strip waveguide, that is to say an EOBSW (5), which has a common usable light exit (A ^) for spatially combined light (FIGS. 3 18 19 20)

4 splitter according to claim 1 in the

- At least two strip waveguides (2, 3) each have an input (E- \, E2) into which light can be coupled, and

- The at least two strip waveguides (2, 3) have an intersection

- At the intersection of the strip waveguide (2) with the strip waveguide

(3) an integrated optical reflector (R2) is arranged, which

Coupling point (6) forms, and

- The common strip waveguide is a single-mode integrated optical broadband strip waveguide, ie an EOBSW (5), which has a common usable light exit (A _| y _| ) for spatially combined light (FIGS. 4, 16)

5 splitter according to claims 1 or 2 or 3 or 4, in which all strip waveguides are designed as a single-mode, integrated-optical broadband strip waveguide (EOBSW)

6 splitter according to claim 1, in which there is at least one strip waveguide made of Rubιdιum <-> Kalιum ion-exchanged potassium titanyl phosphate (KTiOPθ4, KTP), in which the geometrical-material parameters are adjustable so that a single-mode operation of the strip waveguide in the wavelength range

Δλ _w > 0.48 x λ - 85 nm

(with the specification of λ and Δλ _w in nm), this strip waveguide is therefore an EOBSW, the minimum possible value of the usable wavelength (λ _m ι _n about 350 nm) and the maximum possible value of the usable wavelength (λ _max about 4 μm) are determined by the optical transmission range of KT1OPO4, and in particular the wavelength range (Δλ _w ) of the EOBSW to be transmitted in the visible mode

Wavelength range of the light comprises a wavelength range greater than 350 nm and the EOBSW is thus defined as a single-mode white light stripe waveguide and with two further stripe waveguides a broadband integrated optical

Connection splitter forms and in particular the usable wavelength range ΔλN of the efficient function of the

Connection splitter in the visible wavelength range of light one

Wavelength range larger than 300 nm and the connection splitter is thus defined as a white light connection splitter

7 splitter according to claim 1, in which at least two strip waveguides (2, 3, ...) at each input (E- _j , E2, ...) each with a light source (L- _| , L2, ..) are connected and each light source emits light of a different wavelength (λ < _| , λ2, •••) or mutually different wavelength ranges (Δλ- ₎ , Δλ2, ..).

8. A splitter according to claim 1, wherein at least one strip waveguide (2, 3,., 5) at its input (E- _j , E2, ...) or at its output (A ^) with at least one light source ( L- _j , L2, ..) is connected u the light source emits light of at least one wavelength (λ- _| , λ2,) or at least one wavelength range (Δλ- _j , Δλ2, • •) in at least one strip waveguide.

9. A splitter according to claim 1, in which at least one strip waveguide (2, 3, 5) is provided with a modulation device (AM) which modulates the amplitude or intensity and / or the polarization of the light components as a function of the wavelength or independently of the wavelength

10 splitter according to claim 1, wherein

- At least one of the light sources (L) itself can be modulated in performance and / oα

- The modulation by changing the coupling effectiveness between the light source and the strip waveguide or

- Modulation by light attenuators (e.g. gray wedge) or

- phase shifter (e.g. Pockels cell) or

- Polarization rotator in connection with a polarizing component or polarizing strip waveguide can be carried out

11 splitter according to claim 1, wherein the coupling point (6), which is created by the union of the outputs (A- _j , A2) of the strip waveguide (2, 3), a controllable unit for spatial beam union and / or beam deflection (7 ) with which at least one of the light components (λ < _| , λ2) can be connected and / or modulated on the common EOBSW (5) (FIGS. 1 to 4)

12 splitter according to claim 1, in which light components of at least two wavelengths (λ- _| , λ2,) can be coupled as light pulses one after the other into a strip waveguide (2, 3, 4), in which coupling point (6) can be spatially brought together, Furthermore, the spatially combined light components in the common EOBSW (5) can be controlled by a modulation device (amplitude modulator ÄM) in the pulse cycle (tent multiplex operation) (FIG. 23)

13 splitter according to claim 11 and claim 12, wherein the at least one coupling point (6) is a controllable unit for spatial beam union and / or beam deflection (7) with which the light pulses can be synchronously modulated and brought together in the common EOBSW (5)

14 splitter according to claim 9 or claim 11, wherein the modulation device (AM) and / or the controllable unit for spatial beam combining and / or beam deflection (7) is based on one of the following principles

Modulation by electrical fields, i.e. electro-optical modulation of the light with the aid of an integrated optical interferometer structure,

- modulation by pressure waves, i.e. acousto-optical modulation of the light with the help of an integrated optical interferometer structure,

- modulation by heat, i.e. thermo-optical modulation of the light with the help of an integrated optical interferometer structure,

- Modulation by magnetic fields, i.e. magneto-optical modulation of the light with the help of an integrated optical interferometer structure,

Modulation by light radiation, ie opto-optical modulation of the light with the aid of an integrated optical interferometer structure, - Modulation by heat radiation, i.e. photothermal modulation of light using an integrated optical interferometer structure,

- Modulation by electrical charge carriers, i.e. Change of the effective refractive index by injection or depletion of free charge carriers in semiconductor materials in connection with an integrated optical interferometer structure,

- electro-optical, acousto-optical, thermo-optical. magneto-optical, opto-optical or photothermal modulation using the Fabry-Perot effect,

Modulation by changing the effective refractive index by injection or depletion of free charge carriers in semiconductor materials using the Fabry-Perot effect,

- electro-optical. acousto-optical, thermo-optical. magneto-optical, opto-optical or photothermal cut-off modulation,

- cut-off modulation due to the change in the effective refractive index by injection or depletion of free charge carriers in semiconductor material

controllable waveguide amplification,

controllable polarization rotation in connection with a polarizing component or polarizing strip waveguide,

- waveguide mode conversion,

- electro absorption modulation or

- Modulation using an integrated optical switching or distribution element such as an X coupler. Parallel strip coupler, directional coupler or BOA

15 splitter according to claim 1, wherein the union and / or branching of the strip waveguide is carried out according to at least one of the following principles

- Use of a Y-branch or

- Use of an integrated optical switching and distribution element, such as X-coupler or directional coupler or parallel coupler, or

- Use of an arrangement for two-mode interference in the stripe waveguide (BO

- Or use an integrated optical or micro-optical reflector (mirror, grating, prism).

16 splitter according to claim 1, in which on the flat substrate at least two strip waveguides run parallel in one direction and at least one further strip waveguide runs in another direction and the crossing points (6) of the strip waveguides form a matrix

17 splitter according to claim 16, wherein the matrix of the crossing points is constructed according to the following principle

- Corresponding to the number m of light components with the wavelengths λ ,, with i = 2 to m, m strip waveguides (2, 3, 4) are guided in parallel and cross one another

EOBSW (8), where

- The crossing points are passive coupling points (6) for spatial beam union and, if necessary, an amplitude modulator (AM) is arranged on each of the m strip waveguides (2, 3, 4) (FIG. 19) or

- The crossing points represent controllable units for spatial beam union and / or beam deflection (7) (FIGS. 18, 20)

18 splitter according to claim 16, wherein the matrix of the crossing points K "is constructed according to the following principle

- Corresponding to the number m of light components with the wavelengths λ ,, with i = 1 to m with m> 2, m strip waveguides (2, 3, 4,) are guided parallel to each other and n-1 further strip waveguides (8 ^' , 8 ^" , 8 ^'" ,) and an EOBSW (5) cross the m strip waveguides and are also guided parallel to one another, the number of which is n = m + 1, and

- The crossing points K "for i = j are controllable units for spatial beam union and / or beam deflection (7),

- The crossing points K "for i = 1 to m and j = n = m + 1 passive coupling points (6) and

- The other crossing points are completely passive, still

- The j = 1 to n -1 strip waveguides (8 ^' , 8 ^" , 8 ^" ,) are blind outputs and

- The j = m strip waveguide is the common EOBSW (5) for the spatially combined light (FIG. 20)

19 splitter according to claim 8, wherein an operation in the splitting direction is provided in that the common EOBSW (5 ^' ) is coupled to a light source which emits light of the wavelength λg or light of a spectral range (Δλ), the common EOBSW (5 ^' ) merges into a coupling point (6 ^' ) and at least two strip waveguides (2, 3) emanate from the coupling point (6 ^' ), in which coherent light of the wavelength λg or of the spectral range (Δλ) can be guided (FIGS. 14, 15, 17, 24, 25, 26)

20 splitter according to claim 1, in which in at least one strip waveguide (2, 3, 4) in front of the coupling point (6) for spatial light convergence a frequency converter (FU) is arranged on the basis of non-linear optical effects (Figures 30, 31, 32 )

21 Use of the broadband connection splitter as an arrangement for spatially combining light of at least two different wavelengths (λ,) or wavelength ranges (Δλ,) for generating rapidly changing spectral light compositions, in particular for color mixing, in a usable spectral range of large 75 nm, in which the at least two light components are coupled into a strip waveguide each and are coupled out from a common EOBS (5) as spatially combined light (FIGS. 1 to 4 and

22 Use of the broadband connection splitter as an arrangement for splitting light (λ ,, Δλ,) into at least two light components in a usable spectral range greater than 75 nm, in which at least one light component is coupled into an EOBSW (5) and consists of at least two strip Waveguides light components that have the same spectral composition and phase position as the coupled light are coupled out (FIGS. 12, 26, 27, 28, 29, 31, 32)

23 Use of the broadband connection splitter as a wavelength-selective or wavelength-independent broadband switch or broadband modulator of the amplitude or intensity of light of at least one wavelength or a wavelength range for generating rapidly changing light intensities and / or spectral light compositions in a usable spectral range greater than 75 nm, in which Light is coupled into at least one strip waveguide and is coupled out at a common EOBSW (5) as spatially combined modulated light (FIGS. 1, 12, 13, 18, 19, 20, 28)

24 Use of the broadband connection splitter according to claim 23 as a wavelength-selective broadband switch or broadband modulator, in particular as a controllable color filter, which is implemented on the basis of one of the following principles

- electro-optical modulation,

- acousto-optical modulation,

- thermo-optical modulation,

- magneto-optical modulation,

- opto-optical modulation,

- photothermal modulation,

Change in the effective refractive index due to injection or depletion of free charge carriers in semiconductor materials,

- electro-optical, acousto-optical, thermo-optical magneto-optical, opto-optical or photothermal modulation using the Fabry-Perot effect,

Modulation by changing the effective refractive index by injection or depletion of free charge carriers in semiconductor materials using the Fabry-Perot effect,

- electro-optical, acousto-optical, thermo-optical magneto-optical, opto-optical or photothermal cut-off modulation,

cut-off modulation due to the change in the effective refractive index due to injection or depletion of free charge carriers in semiconductor materials,

- controllable waveguide amplification,

- controllable polarization rotation - Waveguide mode conversion or still

- phase shifter (e.g. Pockels cell) or

- Polarization rotator in connection with a polarizing component or with a polarizing waveguide as an external component.

25. Use of the broadband connection splitter according to claim 23 in an arrangement as a wavelength-independent broadband switch or broadband modulator, in which the modulation is implemented on the basis of one of the following principles:

- electro absorption modulation,

- change in coupling efficiency light source - waveguide,

- Modulation of the light source itself or continues

- Light attenuator (e.g. gray wedge) as an external component.

26. Use of the broadband connection splitter according to claim 23 in an arrangement as a broadband interferometer arrangement, in particular as a broadband Mach-Zehnder interferometer arrangement, in which light of a wavelength or a wavelength range is coupled into a common EOBSW (5 ^' ) and the light EOBSW (5 ^' ) is split in a coupling point (6 ^' ) and forwarded in separate EOBSW (2 and 3), the light in the EOBSW (2 and 3) continues in a coupling point (spatially combined and at the output (A ^) of the common EOBSW (5) is decoupled, an electric field being generated by electrodes (10) in the area of the separately guided EOBSW (2, 3) with which the light in at least one EOBSW (2, 3) is in phase and / or Amplitude and / or direction of polarization is influenced. (Figures 12, 24, 25, 26, 27, 28, 29)

27. Use of the broadband splitter in an arrangement as a measuring device for physical, chemical and biological parameters in which

- a light component in a strip waveguide or EOBSW (2, 3) or

- The spatially merged light (M) in a common EOBSW (5) or

ERSÄTZBLÄTT (RULE 26) - The spatially combined light (M) available at the output (A ^) of the EOBSW (5) or

- The waveguide in one of the strip waveguides or EOBSW (2, 3) or EOBSW (5) are influenced by a parameter and the spatially combined light components (M) after the output (A ^) of the common EOBSW (5) measured photometrically become

28 Use of the broadband connection splitter according to claim 27 in an arrangement as a distance difference meter, in which displacements of a measurement object are measured by means of an interferometric method (FIGS. 33, 34, 35)

29 Use of the broadband connection splitter according to claim 27 in a photometric arrangement in which spatially merged light components at least two wavelengths correspond simultaneously or chronologically in succession to a measuring medium and the changes in light intensity due to the change in, for example, reflection, transmission or scattering for each wavelength used for the light components be measured (Figures 21, 22, 29)

30 Use of the broadband connection splitter according to claim 27 in an arrangement as a wavelength sensor in the

Light of an unknown wavelength is coupled into the common EOBSW (5 ^' ), the common EOBSW (5 ^' ) is split into two EOBSW (2 and 3) and these EOBSW (2, 3) are spatially combined in a common EOBSW (5) , and thus there is an integrated optical interferometer structure and the light intensity is measured at the output (AM) of the common EOBSW (5) and

Electrodes are suitably attached to the EOBSW (2, 3) and the level of the voltage applied to the electrodes, which causes a change in the light output at the output (A _{j |} ) from maximum to an adjacent minimum or vice versa for the wavelength of light (Figure 27)

SPARE BLADE (RULE 26) if

31 Use of the broadband connection splitter according to claim 27 in an arrangement as a sensor in which the substrate surface, which carries the strip waveguide or EOBSW, except for a measuring window (15), the measuring window (15) covers the EOBSW (5) and

- The measuring medium (16) is brought into direct contact with the EOBSW (5) via the measuring window (15) or

- A specific sensitive material is applied to the surface of the measuring window (15), which is in contact with the measuring medium (16), and parameters of the light are measured at the output of the common EOBSW (5), the specific properties of the sample medium (16) characterize (Figure 22)

32 Use of the broadband connection splitter according to claim 31, in which Li at least two wavelengths (λ,) are spatially combined in the broadband connection splitter and the common EOBSW (5) is only freely available in one measurement window (15) (FIG. 22)

33 Use of the broadband connection splitter according to claim 31 in an arrangement for determining the refractive index, in which light of at least two wavelengths (λ,) is spatially combined in the broadband connection splitter and then the spatially combined light (M) of a Mach-Zehnder interferometer structure (MZI) is supplied, in whose one waveguide branch electrodes (10) for phase modulation are arranged and on the other waveguide branch a measuring window (15) is arranged (FIG. 29)

34 Use of the broadband connection splitter as a wavelength-selective or wavelength-independent broadband switch or broadband modulator of the phase position and / or the polarization direction of light of at least one wavelength (λ,) or a wavelength range (Δλ,) for generating rapidly changing phase positions and / or polarization directions, in a usable spectral range greater than 75 nm, in which light is coupled into at least one EOBSW (2, 3) and is coupled out at an output (^) of the common EOBSW (5) as spatially combined modulated light (M) 35 Use of the broadband splitter in an arrangement as a frequency converter, in which at least one element for frequency conversion (FU) is arranged in at least one strip waveguide, in which the wavelength of the light component coupled into the strip waveguides (2, 3) is changed and at the output of the common EOBSW (5), merged light components with at least one changed wavelength are present (FIGS. 30, 31, 32)

36 Use of the broadband connection splitter according to claim 35, in which light of a wavelength is coupled into a common EOBSW (5 ^' ), the common EOBSW (5 ^' ) is split into at least two strip waveguides or EOBSW (2, 3), in an element for frequency conversion (FU) is arranged in each waveguide branch and the converted light components are brought together spatially and are present at the output (A ^) of the common EOBSW (5)