EP0728947B1 - Scroll vacuum pump - Google Patents

Scroll vacuum pump Download PDF

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Publication number
EP0728947B1
EP0728947B1 EP96400385A EP96400385A EP0728947B1 EP 0728947 B1 EP0728947 B1 EP 0728947B1 EP 96400385 A EP96400385 A EP 96400385A EP 96400385 A EP96400385 A EP 96400385A EP 0728947 B1 EP0728947 B1 EP 0728947B1
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EP
European Patent Office
Prior art keywords
pump
spiral
disc
projection
movable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP96400385A
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German (de)
French (fr)
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EP0728947A1 (en
Inventor
Daniel Pottier
Rémy Leclaire
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ALEXIS VULLIEZ
ANTOINE VULLIEZ
FLORENCE GAUTIER NEE VULLIEZ
GUILLAUME VULLIEZ
JACQUES VULLIEZ
Original Assignee
S B P V Brevets P Vulliez Ste
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Publication of EP0728947A1 publication Critical patent/EP0728947A1/en
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Publication of EP0728947B1 publication Critical patent/EP0728947B1/en
Anticipated expiration legal-status Critical
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/02—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0042—Driving elements, brakes, couplings, transmissions specially adapted for pumps
    • F04C29/005—Means for transmitting movement from the prime mover to driven parts of the pump, e.g. clutches, couplings, transmissions
    • F04C29/0057—Means for transmitting movement from the prime mover to driven parts of the pump, e.g. clutches, couplings, transmissions for eccentric movement
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01C—ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
    • F01C17/00—Arrangements for drive of co-operating members, e.g. for rotary piston and casing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01C—ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
    • F01C21/00—Component parts, details or accessories not provided for in groups F01C1/00 - F01C20/00
    • F01C21/10—Outer members for co-operation with rotary pistons; Casings
    • F01C21/102—Adjustment of the interstices between moving and fixed parts of the machine by means other than fluid pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/02—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
    • F04C18/0207—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form
    • F04C18/0215—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form where only one member is moving
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/02—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
    • F04C18/0207—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form
    • F04C18/0215—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form where only one member is moving
    • F04C18/0223—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form where only one member is moving with symmetrical double wraps

Definitions

  • the present invention relates to a translation cycle vacuum pump circular.
  • a translation cycle vacuum pump circular comprising a fixed body having a fixed disc which has on at least one of its sides a spiral-shaped projection, an opposite movable disc with fixed disc and also having at least one spiral-shaped projection interspersed with the spiral-shaped projection of the fixed disc and similarly angular amplitude, a mechanism by which the movable disc is connected to said body and supported by it, to command a translational movement circular of the movable disc with respect to said body during operation of the pump, motor means for driving the movable disc by through a pump shaft and make it perform said movement of circular translation, said pump also comprising a limiting device of circular translation deflection guiding the movable disc in its circular translational movement avoiding any twisting.
  • a pump of this type is for example described in FR-A-2 141 402. If such a pump according to this document gives excellent results, it has however the disadvantage of having many parts and being bulky especially radially taking into account in particular the fact that said mechanism consists of three cranks so coupled synchronized with each other and arranged at the periphery of the pump, these cranks ensuring by itself the limitation of the travel of circular translation.
  • a vacuum pump with circular translation cycle comprising a fixed body having at least one fixed disc which has on one of its sides a spiral-shaped projection, a movable disc opposite the disc fixed and also having at least one spiral-shaped projection interspersed with the spiral projection of the fixed disc and of the same angular amplitude, a mechanism by which the movable disc is connected to and supported by said body, to control a circular translational movement of the movable disc by report to said body during operation of the pump, means motors to drive the moving disc through a shaft pump and make it perform said circular translation movement, said pump also comprising a device for limiting the travel circular translation, said mechanism comprising at least one bearing carried by the pump shaft, said pump shaft being in a central position relative to to the fixed body, said mechanism also comprising a crank shaft which is adapted to move in a circular translational movement and which is coupled, by one of its ends, to the mobile disc which it
  • the device for limiting travel travel circular includes projections made at the periphery of the crank shaft which engage in notches formed in a fixed part of the casing. This device has the drawback of increasing the axial size of the pump.
  • a cycle vacuum pump of circular translation is characterized by the fact that the device limiting circular translation travel is a metal bellows, one end of the metal bellows being integral with the fixed body and the other end of the metal bellows being integral with the crank shaft, the metal bellows surrounding the crank tree.
  • the pump comprises a movable disc consisting of two movable trays, the spiral projections of which are on opposite sides movable trays, the movable disc being placed between a fixed disc annular and a flange whose opposite faces carry the spiral projections fixed.
  • the flange has a spiral-shaped projection peripheral extending towards the axis of the pump according to a shaped projection central spiral whose axial height is less than that of the projection peripheral, the two peripheral and central projections having their ends free in the same transverse plane, one of the mobile plates, opposite the flange, being provided, on the one hand, with a projection in the form of an interposed spiral with the peripheral projection of the flange and of the same angular amplitude and, on the other hand, a spiral-shaped projection interspersed with the central projection flange and the same angular amplitude.
  • the two plates of the movable disc are connected by a U-shaped annular crown with thick walls allowing the two plates to move axially, one relative to the other ; a spring placed between the two plates urges them away axial with respect to each other.
  • the plates, their projections and the annular crown are in one piece of a material allowing contact between the disc mobile, on the one hand, and the fixed disc and flange, on the other hand, provided in metal, this contact being at minimum friction; preferably, the projections in spiral of the fixed disc and the spiral projections of the movable disc cooperate in friction during pump operation.
  • crankshaft has a central part of general frustoconical shape with the end located on the side of the small base carries a cylindrical sleeve provided with grooves on its outer surface longitudinal cooperating with complementary longitudinal grooves formed on the inner surface of a skirt carried by the movable plate opposite the flange.
  • the skirt is also made in one piece with the mobile disc.
  • the pump shaft is a hollow shaft having, on the one hand, an external cylindrical bearing surface by which it is supported by the constructed by means of rolling means and, on the other hand, a bore cylindrical receiving the bearing with interposition of a bearing, the bearing external cylindrical being axially offset from the cylindrical bore whose diameter is greater than the diameter of the external cylindrical seat.
  • the metal bellows has two wavy zones placed axially on either side of a cylindrical central zone.
  • a vacuum cycle pump circular translation comprises a fixed body 10 constituted, according to the example represented, by the assembly of four elements 11 to 14, namely a sleeve 11, an intermediate plate 12, a fixed annular disc 13 and a flange 14, successively arranged axially in the order in which they come to be cited; these elements are assembled by screws such as screws 15 circumferentially distributed; annular seals 16 and 17 are interposed between the intermediate plate 12 and the annular disc 13, on the one hand, and between this same annular disc 13 and the flange 14, on the other share, respectively.
  • the annular fixed disc 13 has the side which faces the flange 14 a spiral-shaped projection 23; the flange 14 presents on the side which faces to the annular disc 13 also a spiral-shaped projection 24 peripheral extending towards the axis of the pump according to a shaped projection 25 central spiral whose axial height is less than that of the projection 24 peripheral, the two peripheral 24 and central 25 projections having their free ends in the same transverse plane 18.
  • a movable disc 30 is placed between the annular fixed disc 13 and the flange 14 also fixed;
  • the movable disc 30 has a first plate 31 opposite the fixed disc 13 and provided with a spiral-shaped projection 33 interposed with the projection 23 of the fixed disc 13 and of the same angular amplitude;
  • the movable disc 30 also includes a second plate 32 opposite the flange 14 and provided, on the one hand, with a spiral-shaped projection 34 interposed with the projection 24 of the flange 14 and of the same angular amplitude and, on the other part, of a spiral-shaped projection 35 interposed with the projection 25 of the flange 14 and of the same angular amplitude.
  • the two plates 31, 32 are connected by an annular ring 36 to U-shaped section open to the outside with respect to the pump axis; the thickness of the U-shaped section walls of the annular ring 36 is relatively small so that the plates 31, 32 have a possibility of axial displacement relative to each other; a helical spring 37 placed between the plates 31, 32 biases them in axial distance, one with respect to the other.
  • the plates 31, 32 and their spiral projections 33, 34, 35 as well as the annular crown 36 are produced, by molding and / or machining, with a single part made of a material allowing contact between the movable disc 30, of a part, and the disc 13 and the flange 14 fixed, on the other hand, provided in metal, such than stainless steel or an aluminum alloy, this contact being in friction minimum; such a material is, for example, that which is marketed under the trade name VESCONITE by the company MARLIN INTERNATIONAL ; this material which, as we know, is based on polyethylene terephthalate, contains a silicone fluid and disulfide molybdenum minimizing friction on a metal part; material equivalent other than this can of course be used to perform the moving disc 30; it is also possible to make all the parts in metallic contact and to coat at least one of them, the moving part by example, of a thin thickness, like a few microns, of a resin suitable such as the fluorinated resin sold under the name commercial FLUORIMID
  • a mechanism for connecting the movable disc 30 to the fixed body 10 and bear it; this mechanism comprises a crank shaft 40 having a central part 45 of generally frustoconical shape, the end of which is side of the small base carries a cylindrical sleeve 41 provided on its surface outer of longitudinal grooves 42 cooperating with grooves longitudinal complementary 38 formed on the inner surface of a skirt 39 carried by the second plate 32; the skirt 39 is also made of single piece with the movable disc 30; at its other end, the central part frustoconical 45 of the crank shaft 40 has a flange 43, of diameter larger than that of the large base of the central part 45; the collar 43 extends along a frustoconical end 44 of inverted angle relative to that of the central part 45; this frustoconical end 44 is secured by a screw 46 to a bearing 47 supporting a bearing 48 internally otherwise supported externally by being engaged in the cylindrical bore 51 of a central drive shaft of the pump here a hollow shaft 50 centered on the axis 55 of the pump
  • the span cylindrical outer 52 is axially offset from the bore cylindrical 51 whose diameter is, moreover, greater than the diameter of the external cylindrical surface 52; thanks to this provision, added to that according to which the crank formed by the bearing 47 is placed axially apart fixed 13 and movable 30 discs, the pump advantageously has a small diametral size.
  • the hollow shaft 50 is integral with a drive flange 26 having fingers 27 circumferentially inserted between fingers 28 of a nut 29 secured, thanks to a key 22, to the motor shaft 21 of a motor 20 partially shown in Figure 1.
  • the central part 45 of the crank shaft 40 is, according to the invention, surrounded by a metal bellows 60;
  • the metal bellows 60 has advantageously two corrugated zones 60A, 60C placed axially on the side and other of a central cylindrical area 60B; it is fixed by one of its ends at the flange 43 of the crank shaft 40; the other end of the bellows 60 is fixed at the end of a bell 53 secured to the plate intermediate 12 of the frame 10, as close as possible to the skirt 39 of the second plate 32 of the movable disc 30, so that the bellows 60 is large length: thanks to this arrangement, the bending angle of the bellows 60 in operation is weak, thus limiting the fatigue of the corrugated zones 60A, Bellows 60C 60C; the metal bellows 60 ensures good guidance of the disc mobile 30 in its circular translation movement preventing the shaft 40 to turn on itself, that is to say any undesirable torsional effect.
  • the motor shaft 21 of the motor 20 is centered on the axis 55 of the pump; the axis 65 of the bearing 47, which is also the axis of the crank shaft 40, is eccentric relative to the axis 55 of the pump.
  • a ventilation unit 54 cools the transverse external face of the flange 14 planned relatively massive to absorb the calories produced by pumping and pass them to the cooling air.
  • the last stage of the pump consisting of projections 25 and 35 of small dimensions allows fluid pressure at the exhaust practically equal to atmospheric pressure.

Description

La présente invention concerne une pompe à vide à cycle de translation circulaire.The present invention relates to a translation cycle vacuum pump circular.

Plus précisément, elle concerne une pompe à vide à cycle de translation circulaire comportant un corps fixe ayant un disque fixe qui présente sur au moins un de ses côtés une saillie en forme de spirale, un disque mobile opposé au disque fixe et ayant également au moins une saillie en forme de spirale intercalée avec la saillie en forme de spirale du disque fixe et de même amplitude angulaire, un mécanisme par lequel le disque mobile est relié audit corps et supporté par lui, pour commander un mouvement de translation circulaire du disque mobile par rapport audit corps pendant le fonctionnement de la pompe, des moyens moteurs pour entraíner le disque mobile par l'intermédiaire d'un arbre de pompe et lui faire effectuer ledit mouvement de translation circulaire, ladite pompe comportant également un dispositif limiteur de débattement de translation circulaire guidant le disque mobile dans son mouvement de translation circulaire en évitant toute torsion.More specifically, it relates to a translation cycle vacuum pump circular comprising a fixed body having a fixed disc which has on at least one of its sides a spiral-shaped projection, an opposite movable disc with fixed disc and also having at least one spiral-shaped projection interspersed with the spiral-shaped projection of the fixed disc and similarly angular amplitude, a mechanism by which the movable disc is connected to said body and supported by it, to command a translational movement circular of the movable disc with respect to said body during operation of the pump, motor means for driving the movable disc by through a pump shaft and make it perform said movement of circular translation, said pump also comprising a limiting device of circular translation deflection guiding the movable disc in its circular translational movement avoiding any twisting.

Une pompe de ce type est par exemple décrite dans FR-A-2 141 402. Si une telle pompe selon ce document donne d'excellents résultats, elle présente toutefois l'inconvénient de comporter de nombreuses pièces et d'être encombrante notamment radialement compte tenu en particulier du fait que ledit mécanisme est constitué de trois manivelles accouplées de manière synchronisée les unes avec les autres et disposées à la périphérie de la pompe, ces manivelles assurant par elle-même la limitation du débattement de translation circulaire.A pump of this type is for example described in FR-A-2 141 402. If such a pump according to this document gives excellent results, it has however the disadvantage of having many parts and being bulky especially radially taking into account in particular the fact that said mechanism consists of three cranks so coupled synchronized with each other and arranged at the periphery of the pump, these cranks ensuring by itself the limitation of the travel of circular translation.

Pour éviter ces inconvénient, on a déjà proposé, notamment dans le document FR-A-1 596 943, une pompe à vide à cycle de translation circulaire comportant un corps fixe ayant au moins un disque fixe qui présente sur un de ses côtés une saillie en forme de spirale, un disque mobile opposé au disque fixe et ayant également au moins une saillie en forme de spirale intercalée avec la saillie en forme de spirale du disque fixe et de même amplitude angulaire, un mécanisme par lequel le disque mobile est relié audit corps et supporté par lui, pour commander un mouvement de translation circulaire du disque mobile par rapport audit corps pendant le fonctionnement de la pompe, des moyens moteurs pour entraíner le disque mobile par l'intermédiaire d'un arbre de pompe et lui faire effectuer ledit mouvement de translation circulaire, ladite pompe comportant également un dispositif limiteur de débattement de translation circulaire, ledit mécanisme comprenant au moins un palier porté par l'arbre de pompe, ledit arbre de pompe étant en position centrale par rapport au corps fixe, ledit mécanisme comprenant également un arbre manivelle qui est adapté à se déplacer suivant un mouvement de translation circulaire et qui est attelé, par une de ses extrémités, au disque mobile qu'il entraíne dans son mouvement, tandis que son autre extrémité, proche des moyens moteurs, est supportée par ledit palier.To avoid these drawbacks, it has already been proposed, in particular in the document FR-A-1 596 943, a vacuum pump with circular translation cycle comprising a fixed body having at least one fixed disc which has on one of its sides a spiral-shaped projection, a movable disc opposite the disc fixed and also having at least one spiral-shaped projection interspersed with the spiral projection of the fixed disc and of the same angular amplitude, a mechanism by which the movable disc is connected to and supported by said body, to control a circular translational movement of the movable disc by report to said body during operation of the pump, means motors to drive the moving disc through a shaft pump and make it perform said circular translation movement, said pump also comprising a device for limiting the travel circular translation, said mechanism comprising at least one bearing carried by the pump shaft, said pump shaft being in a central position relative to to the fixed body, said mechanism also comprising a crank shaft which is adapted to move in a circular translational movement and which is coupled, by one of its ends, to the mobile disc which it entrains in its movement, while its other end, close to the motor means, is supported by said bearing.

Selon ce document, le dispositif limiteur de débattement de translation circulaire comprend des saillies ménagées à la périphérie de l'arbre manivelle qui s'engagent dans des encoches ménagées dans une partie fixe du carter. Cette dispositif présente l'inconvénient d'augmenter l'encombrement axial de la pompe.According to this document, the device for limiting travel travel circular includes projections made at the periphery of the crank shaft which engage in notches formed in a fixed part of the casing. This device has the drawback of increasing the axial size of the pump.

Pour éviter cet inconvénient, selon l'invention, une pompe à vide à cycle de translation circulaire est caractérisée par le fait que le dispositif limiteur de débattement de translation circulaire est un soufflet métallique, une extrémité du soufflet métallique étant solidaire du corps fixe et l'autre extrémité du soufflet métallique étant solidaire de l'arbre manivelle, le soufflet métallique entourant l'arbre manivelle.To avoid this drawback, according to the invention, a cycle vacuum pump of circular translation is characterized by the fact that the device limiting circular translation travel is a metal bellows, one end of the metal bellows being integral with the fixed body and the other end of the metal bellows being integral with the crank shaft, the metal bellows surrounding the crank tree.

L'expérience a en effet montré qu'un tel soufflet, connu en soi par exemple par le document US-A-3 817 664, est capable d'assurer la fonction limitation de débattement, ou anti-torsion, lorsque la pompe est dimensionnée pour engendrer des volumes au plus égaux à 25 m3 /heure, et ce sans problème, notamment sans fatigue ; on notera, par ailleurs, qu'un tel soufflet assure en même temps l'isolation totale de l'enceinte de la pompe, où se réalise le vide, par rapport à l'extérieur et au reste de la pompe, ce qui augmente le nombre d'applications possibles d'une telle pompe. Une telle pompe fait ainsi partie des pompes dites sèches dont les parties actives sont isolées de l'extérieur et exemptes de tout lubrifiant, huile ou graisse. On comprendra aisément qu'une telle pompe est d'une grande simplicité, d'un faible encombrement et, par voie de conséquence, d'un faible prix de revient.Experience has indeed shown that such a bellows, known per se for example from document US-A-3 817 664, is capable of ensuring the limitation of travel, or anti-torsion, function when the pump is dimensioned. to generate volumes at most equal to 25 m 3 / hour, and this without problem, in particular without fatigue; it will be noted, moreover, that such a bellows at the same time ensures total insulation of the enclosure of the pump, where the vacuum is produced, with respect to the outside and to the rest of the pump, which increases the number of possible applications of such a pump. Such a pump is thus part of the so-called dry pumps whose active parts are isolated from the outside and free from any lubricant, oil or grease. It will easily be understood that such a pump is very simple, takes up little space and, consequently, has a low cost price.

Avantageusement, la pompe comprend un disque mobile constitué de deux plateaux mobiles dont les saillies en spirale sont sur des faces opposées des plateaux mobiles, le disque mobile étant placé entre un disque fixe annulaire et un flasque dont les faces en regard portent les saillies en spirale fixes.Advantageously, the pump comprises a movable disc consisting of two movable trays, the spiral projections of which are on opposite sides movable trays, the movable disc being placed between a fixed disc annular and a flange whose opposite faces carry the spiral projections fixed.

Avantageusement, le flasque présente une saillie en forme de spirale périphérique se prolongeant vers l'axe de la pompe selon une saillie en forme de spirale centrale dont la hauteur axiale est moindre que celle de la saillie périphérique, les deux saillies périphérique et centrale ayant leurs extrémités libres dans un même plan transversal, l'un des plateaux mobiles, opposé au flasque, étant muni, d'une part, d'une saillie en forme de spirale intercalée avec la saillie périphérique du flasque et de même amplitude angulaire et, d'autre part, d'une saillie en forme de spirale intercalée avec la saillie centrale du flasque et de même amplitude angulaire.Advantageously, the flange has a spiral-shaped projection peripheral extending towards the axis of the pump according to a shaped projection central spiral whose axial height is less than that of the projection peripheral, the two peripheral and central projections having their ends free in the same transverse plane, one of the mobile plates, opposite the flange, being provided, on the one hand, with a projection in the form of an interposed spiral with the peripheral projection of the flange and of the same angular amplitude and, on the other hand, a spiral-shaped projection interspersed with the central projection flange and the same angular amplitude.

De préférence, les deux plateaux du disque mobile sont reliés par une couronne annulaire à section en forme de U dont les parois ont une épaisseur permettant aux deux plateaux de se déplacer axialement l'un par rapport à l'autre ; un ressort placé entre les deux plateaux les sollicite en éloignement axial l'un par rapport à l'autre.Preferably, the two plates of the movable disc are connected by a U-shaped annular crown with thick walls allowing the two plates to move axially, one relative to the other ; a spring placed between the two plates urges them away axial with respect to each other.

Avantageusement, les plateaux, leurs saillies et la couronne annulaire sont d'une seule pièce en une matière autorisant un contact entre le disque mobile, d'une part, et le disque et le flasque fixes, d'autre part, prévus en métal, ce contact étant à frottement minimum ; de préférence, les saillies en spirale du disque fixe et les saillies en spirale du disque mobile coopèrent en frottement lors du fonctionnement de la pompe.Advantageously, the plates, their projections and the annular crown are in one piece of a material allowing contact between the disc mobile, on the one hand, and the fixed disc and flange, on the other hand, provided in metal, this contact being at minimum friction; preferably, the projections in spiral of the fixed disc and the spiral projections of the movable disc cooperate in friction during pump operation.

Avantageusement, l'arbre manivelle présente une partie centrale de forme générale tronconique dont l'extrémité située du côté de la petite base porte un manchon cylindrique muni à sa surface extérieure de cannelures longitudinales coopérant avec des cannelures complémentaires longitudinales ménagées à la surface intérieure d'une jupe portée par le plateau mobile opposé au flasque.Advantageously, the crankshaft has a central part of general frustoconical shape with the end located on the side of the small base carries a cylindrical sleeve provided with grooves on its outer surface longitudinal cooperating with complementary longitudinal grooves formed on the inner surface of a skirt carried by the movable plate opposite the flange.

De préférence, la jupe est également réalisée d'une seule pièce avec le disque mobile.Preferably, the skirt is also made in one piece with the mobile disc.

Avantageusement, l'arbre de pompe est un arbre creux présentant, d'une part, une portée cylindrique externe par laquelle il est supporté par le bâti par l'intermédiaire de moyens de roulement et, d'autre part, un alésage cylindrique recevant le palier avec interposition d'un roulement, la portée cylindrique externe étant décalée axialement par rapport à l'alésage cylindrique dont le diamètre est supérieur au diamètre de la portée cylindrique externe.Advantageously, the pump shaft is a hollow shaft having, on the one hand, an external cylindrical bearing surface by which it is supported by the constructed by means of rolling means and, on the other hand, a bore cylindrical receiving the bearing with interposition of a bearing, the bearing external cylindrical being axially offset from the cylindrical bore whose diameter is greater than the diameter of the external cylindrical seat.

De préférence, le soufflet métallique présente deux zones ondulées placées axialement de part et d'autre d'une zone centrale cylindrique.Preferably, the metal bellows has two wavy zones placed axially on either side of a cylindrical central zone.

Les caractéristiques et avantages de l'invention ressortiront d'ailleurs de la description qui va suivre, à titre d'exemple en référence au dessin annexé sur lequel :

  • La figure 1 est une vue en coupe longitudinale partielle d'une pompe selon l'invention ;
  • la figure 2 est une vue en bout selon II-II de la figure 1 du double-plateau mobile seul.
The characteristics and advantages of the invention will become apparent from the description which follows, by way of example with reference to the appended drawing in which:
  • Figure 1 is a partial longitudinal sectional view of a pump according to the invention;
  • Figure 2 is an end view along II-II of Figure 1 of the movable double plate alone.

En se reportant aux figures 1 et 2, une pompe à vide à cycle de translation circulaire comprend un corps fixe 10 constitué, selon l'exemple représenté, par l'assemblage de quatre éléments 11 à 14 à savoir un manchon 11, un plateau intermédiaire 12, un disque fixe 13 annulaire et un flasque 14, disposés successivement axialement dans l'ordre dans lequel ils viennent d'être cités ; ces éléments sont assemblés par des vis telles que les vis 15 réparties circonférentiellement ; des joints d'étanchéité annulaires 16 et 17 sont interposés entre le plateau intermédiaire 12 et le disque annulaire 13, d'une part, et entre ce même disque annulaire 13 et le flasque 14, d'autre part, respectivement.Referring to Figures 1 and 2, a vacuum cycle pump circular translation comprises a fixed body 10 constituted, according to the example represented, by the assembly of four elements 11 to 14, namely a sleeve 11, an intermediate plate 12, a fixed annular disc 13 and a flange 14, successively arranged axially in the order in which they come to be cited; these elements are assembled by screws such as screws 15 circumferentially distributed; annular seals 16 and 17 are interposed between the intermediate plate 12 and the annular disc 13, on the one hand, and between this same annular disc 13 and the flange 14, on the other share, respectively.

Le disque fixe annulaire 13 présente du côté qui fait face au flasque 14 une saillie en forme de spirale 23 ; le flasque 14 présente du côté qui fait face au disque annulaire 13 également une saillie en forme de spirale 24 périphérique se prolongeant vers l'axe de la pompe selon une saillie en forme de spirale 25 centrale dont la hauteur axiale est moindre que celle de la saillie 24 périphérique, les deux saillies périphérique 24 et centrale 25 ayant leurs extrémités libres dans un même plan transversal 18.The annular fixed disc 13 has the side which faces the flange 14 a spiral-shaped projection 23; the flange 14 presents on the side which faces to the annular disc 13 also a spiral-shaped projection 24 peripheral extending towards the axis of the pump according to a shaped projection 25 central spiral whose axial height is less than that of the projection 24 peripheral, the two peripheral 24 and central 25 projections having their free ends in the same transverse plane 18.

Un disque mobile 30 est placé entre le disque fixe annulaire 13 et le flasque 14 également fixe ; le disque mobile 30 comporte un premier plateau 31 opposé au disque fixe 13 et muni d'une saillie en forme de spirale 33 intercalée avec la saillie 23 du disque fixe 13 et de même amplitude angulaire ; le disque mobile 30 comporte également un second plateau 32 opposé au flasque 14 et muni, d'une part, d'une saillie en forme de spirale 34 intercalée avec la saillie 24 du flasque 14 et de même amplitude angulaire et, d'autre part, d'une saillie en forme de spirale 35 intercalée avec la saillie 25 du flasque 14 et de même amplitude angulaire.A movable disc 30 is placed between the annular fixed disc 13 and the flange 14 also fixed; the movable disc 30 has a first plate 31 opposite the fixed disc 13 and provided with a spiral-shaped projection 33 interposed with the projection 23 of the fixed disc 13 and of the same angular amplitude; the movable disc 30 also includes a second plate 32 opposite the flange 14 and provided, on the one hand, with a spiral-shaped projection 34 interposed with the projection 24 of the flange 14 and of the same angular amplitude and, on the other part, of a spiral-shaped projection 35 interposed with the projection 25 of the flange 14 and of the same angular amplitude.

Les deux plateaux 31, 32 sont reliés par une couronne annulaire 36 à section en forme de U ouvert vers l'extérieur par rapport à l'axe de la pompe ; l'épaisseur des parois à section en forme U de la couronne annulaire 36 est relativement faible de sorte que les plateaux 31, 32 ont une possibilité de déplacement axial l'un par rapport à l'autre ; un ressort hélicoïdal 37 placé entre les plateaux 31, 32 les sollicite en éloignement axial l'un par rapport à l'autre.The two plates 31, 32 are connected by an annular ring 36 to U-shaped section open to the outside with respect to the pump axis; the thickness of the U-shaped section walls of the annular ring 36 is relatively small so that the plates 31, 32 have a possibility of axial displacement relative to each other; a helical spring 37 placed between the plates 31, 32 biases them in axial distance, one with respect to the other.

Les plateaux 31, 32 et leurs saillies en spirale 33, 34, 35 ainsi que la couronne annulaire 36 sont réalisés, par moulage et/ou usinage, d'une seule pièce en une matière autorisant un contact entre le disque mobile 30, d'une part, et le disque 13 et le flasque 14 fixes, d'autre part, prévus en métal, tel que l'acier inoxydable ou un alliage d'aluminium, ce contact étant à frottement minimum ; une telle matière est, par exemple, celle qui est commercialisée sous la dénomination commerciale VESCONITE par la Société MARLIN INTERNATIONAL ; cette matière qui, comme on le sait, est à base de polyethylene téréphtalate, contient un fluide silicone et du disulfide de molybdène minimisant le frottement sur une pièce métallique ; une matière équivalente autre que celle-ci peut bien entendu être utilisée pour réaliser le disque mobile 30 ; il est de même possible de réaliser toutes les pièces en contact métalliques et de revêtir au moins l'une d'elles, la pièce mobile par exemple, d'une faible épaisseur, comme quelques microns, d'une résine adaptée telle que la résine fluorée commercialisée sous la dénomination commerciale FLUORIMID 10P par la société FLUOROTECHNIQUE. Grâce à ces dispositions, le rendement de la pompe est élevé eu égard à sa taille.The plates 31, 32 and their spiral projections 33, 34, 35 as well as the annular crown 36 are produced, by molding and / or machining, with a single part made of a material allowing contact between the movable disc 30, of a part, and the disc 13 and the flange 14 fixed, on the other hand, provided in metal, such than stainless steel or an aluminum alloy, this contact being in friction minimum; such a material is, for example, that which is marketed under the trade name VESCONITE by the company MARLIN INTERNATIONAL ; this material which, as we know, is based on polyethylene terephthalate, contains a silicone fluid and disulfide molybdenum minimizing friction on a metal part; material equivalent other than this can of course be used to perform the moving disc 30; it is also possible to make all the parts in metallic contact and to coat at least one of them, the moving part by example, of a thin thickness, like a few microns, of a resin suitable such as the fluorinated resin sold under the name commercial FLUORIMID 10P by the company FLUOROTECHNIQUE. Thanks to these provisions, the pump efficiency is high considering its size.

Un mécanisme est prévu pour relier le disque mobile 30 au corps fixe 10 et le supporter ; ce mécanisme comprend un arbre manivelle 40 ayant une partie centrale 45 de forme générale tronconique dont l'extrémité située du côté de la petite base porte un manchon 41 cylindrique muni à sa surface extérieure de cannelures longitudinales 42 coopérant avec des cannelures complémentaires longitudinales 38 ménagées à la surface intérieure d'une jupe 39 portée par le second plateau 32 ; la jupe 39 est également réalisée d'une seule pièce avec le disque mobile 30 ; à son autre extrémité, la partie centrale tronconique 45 de l'arbre manivelle 40 présente une collerette 43, de diamètre plus grand que celui de la grande base de la partie centrale 45; la collerette 43 se prolonge selon une extrémité tronconique 44 d'angle inversé par rapport à celui de la partie centrale 45 ; cette extrémité tronconique 44 est solidarisée par une vis 46 à un palier 47 supportant un roulement 48 intérieurement supporté par ailleurs extérieurement en étant engagé dans l'alésage cylindrique 51 d'un arbre central d'entraínement de la pompe ici un arbre creux 50 centré sur l'axe 55 de la pompe ; le palier 47 est centré sur un axe 65 décalé par rapport à l'axe 55 et constitue une manivelle dont est solidaire l'arbre manivelle 40 ; l'arbre creux 50 présente une portée cylindrique externe 52 ; des moyens de roulement 19 sont interposés entre la portée cylindrique externe 52 de l'arbre creux 50 et un alésage cylindrique interne du manchon 11 pour supporter l'arbre creux 50 par rapport au bâti 10. La portée cylindrique externe 52 est décalée axialement par rapport à l'alésage cylindrique 51 dont le diamètre est, par ailleurs, supérieur au diamètre de la portée cylindrique externe 52 ; grâce à cette disposition, ajoutée à celle selon laquelle la manivelle constituée par le palier 47 est placée axialement à l'écart des disques fixe 13 et mobile 30, la pompe présente avantageusement un faible encombrement diamétral.A mechanism is provided for connecting the movable disc 30 to the fixed body 10 and bear it; this mechanism comprises a crank shaft 40 having a central part 45 of generally frustoconical shape, the end of which is side of the small base carries a cylindrical sleeve 41 provided on its surface outer of longitudinal grooves 42 cooperating with grooves longitudinal complementary 38 formed on the inner surface of a skirt 39 carried by the second plate 32; the skirt 39 is also made of single piece with the movable disc 30; at its other end, the central part frustoconical 45 of the crank shaft 40 has a flange 43, of diameter larger than that of the large base of the central part 45; the collar 43 extends along a frustoconical end 44 of inverted angle relative to that of the central part 45; this frustoconical end 44 is secured by a screw 46 to a bearing 47 supporting a bearing 48 internally otherwise supported externally by being engaged in the cylindrical bore 51 of a central drive shaft of the pump here a hollow shaft 50 centered on the axis 55 of the pump; the bearing 47 is centered on an axis 65 offset by relative to axis 55 and constitutes a crank of which the shaft is integral crank 40; the hollow shaft 50 has an outer cylindrical surface 52; rolling means 19 are interposed between the cylindrical seat 52 of the hollow shaft 50 and an internal cylindrical bore of the sleeve 11 to support the hollow shaft 50 relative to the frame 10. The span cylindrical outer 52 is axially offset from the bore cylindrical 51 whose diameter is, moreover, greater than the diameter of the external cylindrical surface 52; thanks to this provision, added to that according to which the crank formed by the bearing 47 is placed axially apart fixed 13 and movable 30 discs, the pump advantageously has a small diametral size.

L'arbre creux 50 est solidaire d'un flasque d'entraínement 26 ayant des doigts 27 intercalés circonférentiellement entre des doigts 28 d'une noix 29 solidaire, grâce à une clavette 22, de l'arbre moteur 21 d'un moteur 20 partiellement représenté sur la figure 1.The hollow shaft 50 is integral with a drive flange 26 having fingers 27 circumferentially inserted between fingers 28 of a nut 29 secured, thanks to a key 22, to the motor shaft 21 of a motor 20 partially shown in Figure 1.

La partie centrale 45 de l'arbre manivelle 40 est, selon l'invention, entourée d'un soufflet métallique 60 ; le soufflet métallique 60 présente avantageusement deux zones ondulées 60A, 60C placées axialement de part et d'autre d'une zone centrale 60B cylindrique ; il est fixé par une de ses extrémités à la collerette 43 de l'arbre manivelle 40 ; l'autre extrémité du soufflet 60 est fixée, en bout d'une cloche 53 solidaire du plateau intermédiaire 12 du bâti 10, le plus près possible de la jupe 39 du second plateau 32 du disque mobile 30, en sorte que le soufflet 60 est de grande longueur : grâce à cette disposition, l'angle de flexion du soufflet 60 en fonctionnement est faible, limitant ainsi la fatigue des zones ondulées 60A, 60C du soufflet 60 ; le soufflet métallique 60 assure un bon guidage du disque mobile 30 dans son mouvement de translation circulaire en empêchant l'arbre 40 de tourner sur lui-même, c'est-à-dire tout effet de torsion indésirable. The central part 45 of the crank shaft 40 is, according to the invention, surrounded by a metal bellows 60; the metal bellows 60 has advantageously two corrugated zones 60A, 60C placed axially on the side and other of a central cylindrical area 60B; it is fixed by one of its ends at the flange 43 of the crank shaft 40; the other end of the bellows 60 is fixed at the end of a bell 53 secured to the plate intermediate 12 of the frame 10, as close as possible to the skirt 39 of the second plate 32 of the movable disc 30, so that the bellows 60 is large length: thanks to this arrangement, the bending angle of the bellows 60 in operation is weak, thus limiting the fatigue of the corrugated zones 60A, Bellows 60C 60C; the metal bellows 60 ensures good guidance of the disc mobile 30 in its circular translation movement preventing the shaft 40 to turn on itself, that is to say any undesirable torsional effect.

L'arbre moteur 21 du moteur 20 est centré sur l'axe 55 de la pompe ; l'axe 65 du palier 47, qui est aussi l'axe de l'arbre manivelle 40, est excentré par rapport à l'axe 55 de la pompe.The motor shaft 21 of the motor 20 is centered on the axis 55 of the pump; the axis 65 of the bearing 47, which is also the axis of the crank shaft 40, is eccentric relative to the axis 55 of the pump.

On voit à la figure 1 l'aspiration 56 de la pompe et le refoulement 57 de celle-ci en aval d'un clapet anti-retour 59 ; les chambres variables d'extrémité définies par les saillies en spirale sont en communication grâce à des embrèvements latéraux prévus dans les plateaux 31 et 32 tels que l'embrèvement 58 du plateau 31 monté sur la figure 2 ; on notera que l'aspiration 56 et le refoulement 57 sont disposés radialement et à 90 degrés l'un de l'autre. Dès la mise en service de la pompe, le fluide gazeux pompé est soumis à l'effet continu et progressif de compression dû au débattement en translation circulaire des saillies en spirale mobiles par rapport aux saillies en spirale fixes.We see in Figure 1 the suction 56 of the pump and the discharge 57 of the latter downstream of a non-return valve 59; variable end rooms defined by the spiral projections are in communication thanks to lateral dimples provided in plates 31 and 32 such that the recess 58 of the plate 31 mounted in Figure 2; note that suction 56 and discharge 57 are arranged radially and at 90 degrees one of the other. As soon as the pump is put into service, the gaseous fluid pumped is subjected to the continuous and progressive effect of compression due to the travel in circular translation of the movable spiral projections with respect to the projections fixed spiral.

Comme on le voit, l'enceinte de la pompe où se réalise le vide est totalement isolée de l'extérieur et du reste de la pompe par le soufflet 60 ; un groupe de ventilation 54 refroidit la face extérieure transversale du flasque 14 prévu relativement massif pour absorber les calories produites par le pompage et les transmettre à l'air de refroidissement.As we can see, the pump enclosure where the vacuum is created is totally isolated from the outside and from the rest of the pump by the bellows 60; a ventilation unit 54 cools the transverse external face of the flange 14 planned relatively massive to absorb the calories produced by pumping and pass them to the cooling air.

On appréciera la simplicité d'une telle pompe qui convient bien pour des volumes engendrés au plus égaux à 25 m3/heure. Bien entendu, s'il n'est pas recherché impérativement un encombrement radial le plus réduit possible, on peut engendrer des volumes supérieurs en entourant le soufflet métallique 60 d'un second soufflet métallique fixé par ses extrémités aux mêmes organes auxquels sont fixées celles du soufflet 60.We appreciate the simplicity of such a pump which is well suited for volumes generated at most equal to 25 m 3 / hour. Of course, if it is not imperative to seek the smallest possible radial size, it is possible to generate greater volumes by surrounding the metal bellows 60 with a second metal bellows fixed by its ends to the same members to which those of the bellows 60.

Le dernier étage de la pompe constitué par les saillies 25 et 35 de petites dimensions permet une pression du fluide à l'échappement pratiquement égale à la pression atmosphérique.The last stage of the pump consisting of projections 25 and 35 of small dimensions allows fluid pressure at the exhaust practically equal to atmospheric pressure.

Claims (11)

  1. A vacuum pump with a circular translation cycle, comprising a fixed body (10) having at least one fixed disc (13-14) having on one of its sides a spiral-shaped projection (23-24-25), a movable disc (30) opposite the fixed disc (13-14) and also having at least one spiral-shaped projection (33-34-35) interposed with the spiral-shaped projection (23-24-25) of the fixed disc (13-14) and with the same angular amplitude, a mechanism by which the movable disc (30) is connected to said body (10) and supported by it so as to control a circular movement of translation of the movable disc (30) in relation to said body (10) during the operation of the pump, drive means (20) for driving the movable disc (30) via a pump shaft (50) and causing it to effect said circular movement of translation, said pump also comprising a device for limiting circular translatory displacement, said mechanism comprising at least one bearing (47) carried by the pump shaft (50), said pump shaft (50) being in a central position in relation to the fixed body (10), said mechanism also comprising a crankshaft (40) which is adapted to be displaced in a circular movement of translation and which, at one of its ends (41), is coupled to the movable disc (30) which it drives during its movement, whereas its other end (44), near to the drive means (20), is supported by said bearing (47),
    characterised in that the device for limiting circular translatory displacement is a metal bellows (60), one end of the metal bellows (60) being attached to the fixed body (10) and the other end of the metal bellows (60) being attached to the crankshaft (40), the metal bellows (60) surrounding the crankshaft (40).
  2. A pump according to claim 1, characterised in that it comprises a movable disc (30) formed by two movable plates (31,32), the spiral-shaped projections (33,34,35) of which are on opposite sides of the movable plates (31,32), the movable disc (30) being disposed between a fixed annular disc (31) and a flange (14), the opposing faces of which carry the fixed spiral-shaped projections (23,24,25).
  3. A pump according to claim 2, characterised in that the flange (14) has a peripheral spiral-shaped projection (24) extending towards the pump axis along a central spiral-shaped projection (25), the axial height of which is less than that of the peripheral projection (24), the two projections, peripheral (24) and central (25), having their free ends in the same transverse plane (18), one of the movable plates (32), opposite the flange (14), being provided, on the one hand, with a spiral-shaped projection (34) interposed with the peripheral projection (24) of the flange (14) and of the same angular amplitude, and, on the other hand, with a spiral-shaped projection (35) interposed with the central projection (25) of the flange (14) and of the same angular amplitude.
  4. A pump according to either claim 2 or claim 3, characterised in that the two plates (31,32) of the movable disc (30) are connected by a ring gear (36) of U-shaped section, the walls of which are of a thickness allowing the two plates (31,32) to move axially in relation to one another.
  5. A pump according to claim 4, characterised in that a spring (37) disposed between the two plates (31,32) acts on them by moving them axially apart.
  6. A pump according to claim 4 or 5, characterised in that the plates (31,32), their projections (33,34,35) and the ring gear (36) are in one piece of a material allowing contact between the movable disc (30), on the one hand, and the fixed disc (13) and flange (14), on the other hand, which are made of metal, said contact being with minimal friction.
  7. A pump according to claim 6, characterised in that the spiral-shaped projections (23,24,25) of the fixed disc (13-14) and the spiral-shaped projections (33,34,35) of the movable disc (30) co-operate with friction during the operation of the pump.
  8. A pump according to any one of claims 1 to 7, characterised in that the crankshaft (40) has a central portion (45) of generally frustoconical shape, the end of which situated on the side of the small base carries a cylindrical sleeve (41) provided on its outer surface with longitudinal splines (42) co-operating with complementary longitudinal splines (38) provided on the inner surface of a skirt (39) carried by the movable plate (32) opposite the flange (14).
  9. A pump according to claims 6 and 8, characterised in that the skirt (39) is also in one piece with the movable disc (30).
  10. A pump according to claims 1 to 9, characterised in that the pump shaft (50) is a hollow shaft having, on the one hand, an outer cylindrical projection (52) by which it is supported by the frame (10) via bearing means (19) and, on the other hand, a cylindrical bore (51) receiving the bearing (47) with interposition of a bearing (48), the outer cylindrical projection (52) being offset axially in relation to the cylindrical bore (51), the diameter of which is greater than the diameter of the outer cylindrical projection (52).
  11. A pump according to claims 1 to 10, characterised in that the metal bellows (60) has two corrugated zones (60A,60C) disposed axially on either side of a central cylindrical zone (60B).
EP96400385A 1995-02-24 1996-02-23 Scroll vacuum pump Expired - Lifetime EP0728947B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR9502209 1995-02-24
FR9502209A FR2731051B1 (en) 1995-02-24 1995-02-24 VACUUM PUMP WITH CIRCULAR TRANSLATION CYCLE

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EP0728947A1 EP0728947A1 (en) 1996-08-28
EP0728947B1 true EP0728947B1 (en) 1999-12-08

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JP (2) JP3914974B2 (en)
KR (2) KR100383696B1 (en)
DE (2) DE69605462T2 (en)
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JP3170904B2 (en) * 1992-10-05 2001-05-28 花王株式会社 Carbon dioxide gas-curable binder aqueous solution for casting sand and method for producing mold

Also Published As

Publication number Publication date
EP0728948A1 (en) 1996-08-28
DE69605461T2 (en) 2000-07-27
JPH11504692A (en) 1999-04-27
US5951268A (en) 1999-09-14
JPH11500804A (en) 1999-01-19
KR19980702456A (en) 1998-07-15
WO1996026367A1 (en) 1996-08-29
JP3914974B2 (en) 2007-05-16
US6022202A (en) 2000-02-08
ES2140040T3 (en) 2000-02-16
TW311162B (en) 1997-07-21
KR100383695B1 (en) 2004-05-20
KR19980702432A (en) 1998-07-15
EP0728948B1 (en) 1999-12-08
EP0728947A1 (en) 1996-08-28
FR2731051B1 (en) 1997-04-30
ES2140039T3 (en) 2000-02-16
KR100383696B1 (en) 2004-05-20
JP4088340B2 (en) 2008-05-21
DE69605462D1 (en) 2000-01-13
DE69605462T2 (en) 2000-07-27
FR2731051A1 (en) 1996-08-30
TW314576B (en) 1997-09-01
WO1996026366A1 (en) 1996-08-29
DE69605461D1 (en) 2000-01-13

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