EP0726395A1 - Régénération de panneaux d'une pompe de condensation cryogénique dans une chambre de vide - Google Patents

Régénération de panneaux d'une pompe de condensation cryogénique dans une chambre de vide Download PDF

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Publication number
EP0726395A1
EP0726395A1 EP96200260A EP96200260A EP0726395A1 EP 0726395 A1 EP0726395 A1 EP 0726395A1 EP 96200260 A EP96200260 A EP 96200260A EP 96200260 A EP96200260 A EP 96200260A EP 0726395 A1 EP0726395 A1 EP 0726395A1
Authority
EP
European Patent Office
Prior art keywords
vacuum chamber
panels
cryocondensation
screening
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP96200260A
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German (de)
English (en)
Inventor
Jan Visser
Klaus-Georg Engel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
IHI Hauzer Techno Coating BV
Original Assignee
Hauzer Techno Coating Europe BV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hauzer Techno Coating Europe BV filed Critical Hauzer Techno Coating Europe BV
Publication of EP0726395A1 publication Critical patent/EP0726395A1/fr
Withdrawn legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • F04B37/085—Regeneration of cryo-pumps

Definitions

  • This invention relates to a method according to the preamble of claim 1.
  • the cryopumping technique is a pumping technique largely used in vacuum technology. A detailed description of this pumping technique is to be found in different handbooks such as "KRYO-VAKUUMTECHNIK" written by R.A. Haefer and published by Springer-Verlag Berlin.
  • the cryopumping technique is a clean pumping technique, i.e. in contrast with many other pumping techniques the pump does not contribute to the level of contamination of the vacuum. It is another advantage of the cryopumping technique that very high pumping speeds are possible, provided sufficiently large panels can be placed in the vacuum.
  • a drawback of a cryopump is that the pumping action is finite. It is a fact that the gas removed from a vacuum chamber condenses on a cryocondensation pump panel with the result that a temperature gradient is formed over the layer growing on the cryocondensation pump panel. After some time the temperature gradient increases so much that the pumping action decreases and finally ceases to exist. For this reason the cryocondensation pump panels must be regenerated from time to time.
  • cryocondensation pump panels are heated so that the pumped gas is released. The released gas is then removed from the vacuum system. If the pressure remains lower than the atmospheric pressure, then the amount of gas will have to be discharged with an auxiliary pump or a pump group capable of transporting the gas to atmospheric pressure. In the regeneration process the pressure sometimes exceeds the atmospheric pressure so that the major part of the gas from the regeneration can be allowed to discharge into the outside air.
  • the relatively high pressure of condensable gases during the regeneration process promotes adsorption of condensable gases on walls that do not form part of the cryocondensation pump panels and have not been brought to a sufficiently high temperature.
  • the walls of a vacuum chamber which are, e.g., at room temperature, when being exposed to a high water vapour pressure, will be highly contaminated with water with the result that the pumping process will be impeded at a later stage.
  • a solution to this problem known from practice is to dispose a vacuum valve between the vacuum chamber and the cryopump which in closed condition prevents contamination of the vacuum chamber during heating of the cryopanels. Since in this solution the cryopanels are outside the vacuum chamber, the pumping speed cannot exceed the maximum volumetric gas flow capable of passing the pump opening, as determined by the kinetic gas theory. In practice, the pumping speed of such an external cryopump, i.e. mounted on the vacuum chamber, hardly exceeds that of another type of pump with the same pump opening.
  • the reasons therefor are, e.g., that owing to a rapid succession of pumping processes from atmospheric pressure to low pressure the regeneration time is too short to sufficiently heat the vacuum chamber and its components or that the heating causes too high a temperature load on the sealing materials of the vacuum chamber or too high a consumption of energy.
  • the object of the invention is to provide a method of regenerating cryocondensation pump panels in which the gases released during heating of a cryocondensation pump panel do not increase the level of desorption of the vacuum chamber walls, i.e. do not precipitate on the vacuum chamber walls or vacuum chamber components.
  • the method is characterized by the steps according to claim 1.
  • the proposed method is based on the use of a laminar gas flow forming a flow resistance to gas moving in a direction opposite to the direction of the laminar gas flow.
  • a barrier against the transport of the gas released from a cryocondensation pump panel to the vacuum chamber walls is created by directing a laminar gas flow from the vacuum chamber towards the cryocondensation pump panel and discharging it there by pumping or, if the pressure in the screened space exceeds the atmospheric pressure, allowing it to discharge into the atmosphere.
  • the degree of separation that can be realized by means of a laminar gas flow depends on the gas flow, the pressure and the dimensions of the flow channel.
  • the separation is preferably realized by means of the dimensions of the flow channel, i.e. by selecting a narrow or a wide flow channel.
  • the method according to the invention is particularly favourable because no vacuum-tight seal between the vacuum chamber and the cryopanel is necessary. Consequently, the screening panel forming the narrow gap can be of simple construction, and with a low flow rate in the vacuum chamber contamination of the vacuum chamber with gas released from the cryopanels can be prevented.
  • the method is characterized by the steps of claim 2.
  • the cryocondensation pump panels are kept from contamination by atmospheric air flowing into the vacuum chamber during release of the vacuum.
  • the method is preferably characterized by the steps of claim 3.
  • the method is characterized by the steps of claim 4.
  • these steps prevent direct contamination of these panels by an excessive increase of condensable gases still present in the vacuum chamber.
  • the invention also relates to an apparatus characterized by the features of claim 6.
  • the screening panels can be of relatively simple construction, which is therefore rather inexpensive, since with them it is not necessary to completely seal the screened space relative to the vacuum chamber. Since according to the method non-condensing gas is carried into the vacuum chamber, a laminar flow of the non-condensable gas towards the screened space is formed in the narrow gaps between the screening panels and the vacuum chamber and/or the screening panels relative to each other. Thus, the condensable gas released during the regeneration process can diffuse only in very small amounts from the screened space, against the laminar non-condensing gas flow, to the vacuum chamber.
  • the invention also relates to an apparatus for coating products provided with a vacuum chamber according to the invention.
  • a minimum of production time is lost because the regeneration process of the cryocondensation pump panels can be carried out while the treated products are replaced by products not yet treated. Moreover, the regeneration takes place in a qualitatively excellent and effective manner.
  • the drawings are all of a very schematic nature and diagrammatically show a vacuum chamber 1 bounded by walls 2, at least one of which can be opened, because it is designed as a door or a hatch.
  • the vacuum chamber is also provided with at least one connection 3 for a high-vacuum pump 4.
  • the vacuum chamber further contains cryocondensation pump panels 5 which in the practical examples shown are of tubular construction, so that a liquid or gas can be passed therethrough to control the temperature of the cryocondensation pump panels 5. All the embodiments shown are further provided with screening panels 6, which in a first position put the cryocondensation pump panels 5 into free communication with the vacuum chamber and in a second position place the cryocondensation pump panels 5 in a space 7 screened from the vacuum chamber.
  • the B figures show the screening panels 6 in a first position, i.e. the position in which the cryocondensation pump panels 5 can be active as pump and are therefore in free communication with the vacuum chamber 1, while the A figures show the screening panels 6 in the second position, i.e. in a position in which the cryocondensation pump panels 5 are regenerated.
  • a pipe 8 Connected to the screened space 7 is a pipe 8 which contains a vacuum pump 9 arranged to create a reduced pressure in the screened space 7 relative to the vacuum chamber 1.
  • the pipe 8 contains a valve 10 opened during regeneration of the cryocondensation pump panels 5 and closed when the vacuum chamber 1 is in use.
  • the vacuum chamber 1 is provided with means 11, 12, 13 for introducing a non-condensing gas into the vacuum chamber 1 when the cryocondensation pump panels 5 are regenerated.
  • These means 11, 12, 13 can be, e.g., a line 12 provided with a valve 13, which line 12 is at one end connected to the vacuum chamber 1 and at the other end to a source 11 of a non-condensing gas, e.g. nitrogen.
  • a non-condensing gas e.g. nitrogen.
  • the valve 13 is opened, so that the vacuum chamber 1 is filled with nitrogen, which nitrogen, as a result of the reduced pressure prevailing in the screened space 7, flows to the screened space 7 via the gaps 14 between the vacuum chamber walls 2 and the screening panels 6 and/or the screening panels 6 relative to each other.
  • Figs. 1-8 The practical examples shown in Figs. 1-8 are distinguished only by the design of the screening panels 6 and the related arrangement of the cryocondensation pump panels 5.
  • Figs. 1A and 1B show an embodiment in which the screening panel 6 is designed as a slidably mounted angled plate 6. At the edges which must connect to the vacuum chamber walls 2 the plate is provided with an enlarged edge 6B, thus increasing the width of the gap 14 via which the non-condensable gas G must pass, which has a favourable effect on the screening of the condensable gases C released in the screened space 7.
  • Figs. 2A and 2B show a screening panel 6 arranged before the cryocondensation pump panels 5 and hingedly connected at the ends with two closing pieces 6A which in a first position shown in Fig. 2B put the cryocondensation pump panels 5 into free communication with the vacuum chamber 1 and in a second position shown in Fig. 2A place the cryocondensation pump panels 5 in a screened space 7.
  • Figs. 3A, 3B; 4A, 4B; 5A, 5B show constructional modifications of the structural variants shown in Figs. 1A, 1B; 2A, 2B and need no further explanation.
  • Figs. 6A and 6B show an embodiment in which the cryocondensation pump panels 5 are of tubular construction and are preferably situated in a corner of the vacuum chamber 1.
  • the screening panels 6 have a cross-section in the form of a circular segment, within the concave part of which the tubular cryocondensation pump panels 5 are situated.
  • the screening panels 6 having the form of a circular segment are directed with the concave part towards the vacuum chamber 1
  • the second position shown in Fig. 6A the convex part of the screening panels 6 is directed towards the vacuum chamber 1. It is thus ensured that during the normal production process in the vacuum chamber 1 the access from the vacuum chamber 1 to the cryocondensation pump panel 5 is completely free.
  • the shape of the screening panel 6 and the manner of displacing the screening panel 6 may vary for each individual case.
  • the displacement of the screening panels 6 having the form of a circular segment may be effected, e.g., by rotation or by translation.
  • the space to be screened also contains stationary panels 15 disposed between the vacuum chamber walls 2 and the cryocondensation pump panels 5.
  • the stationary panels 15 may be provided with heating elements designed for heating the stationary panels 15 during the regeneration process.
  • the screening panel 6 is preferably also provided with heating elements designed for heating the screening panels 6 during the regeneration process. It is thus ensured that all the walls 6, 15 of the screened space 7 can be simply heated during regeneration.
  • Figs. 8A and 8B show an embodiment in which the screening panels 6 are designed in the form of venetian blinds.
  • the stationary panels 15 provided with heating elements as shown in Figs. 7A, 7B may also be used in the other practical examples.
  • the screening panels 6 provided with heating elements described with reference to Figs. 7A and 7B may be used in the other practical examples.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
EP96200260A 1995-02-07 1996-02-06 Régénération de panneaux d'une pompe de condensation cryogénique dans une chambre de vide Withdrawn EP0726395A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
NL9500225 1995-02-07
NL9500225A NL9500225A (nl) 1995-02-07 1995-02-07 Werkwijze voor het regenereren van cryocondensatiepomppanelen in een vacuümkamer, vacuümkamer geschikt voor het uitvoeren van de werkwijze en een inrichting voor het coaten van produkten voorzien van een dergelijke vacuümkamer.

Publications (1)

Publication Number Publication Date
EP0726395A1 true EP0726395A1 (fr) 1996-08-14

Family

ID=19865553

Family Applications (1)

Application Number Title Priority Date Filing Date
EP96200260A Withdrawn EP0726395A1 (fr) 1995-02-07 1996-02-06 Régénération de panneaux d'une pompe de condensation cryogénique dans une chambre de vide

Country Status (2)

Country Link
EP (1) EP0726395A1 (fr)
NL (1) NL9500225A (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2000854A3 (fr) * 2007-06-04 2009-09-23 Canon Kabushiki Kaisha Appareil de traitement de substrat et procédé de fabrication du dispositif
CN113975928A (zh) * 2021-09-27 2022-01-28 清华大学 真空环境下的低温吸附与再生系统

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL9500005A (nl) 1995-01-02 1996-08-01 Nederland Ptt Transmissievorkschakeling.

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2321609A1 (fr) * 1975-08-22 1977-03-18 Air Liquide Cryopompe a regeneration
EP0102787A1 (fr) * 1982-08-27 1984-03-14 Comptech, Incorporated Pompe cryogénique ayant un orifice étranglé avec ouverture maximum
JPS60169686A (ja) * 1984-02-13 1985-09-03 Hitachi Ltd クライオポンプ
WO1989011896A1 (fr) * 1988-06-02 1989-12-14 Grumman Aerospace Corporation Pompe de cryosorption regenerable et sa barriere physique mobile
US5105852A (en) * 1989-07-13 1992-04-21 Mitsubishi Denki Kabushiki Kaisha Tubular valve arrangement

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2321609A1 (fr) * 1975-08-22 1977-03-18 Air Liquide Cryopompe a regeneration
EP0102787A1 (fr) * 1982-08-27 1984-03-14 Comptech, Incorporated Pompe cryogénique ayant un orifice étranglé avec ouverture maximum
JPS60169686A (ja) * 1984-02-13 1985-09-03 Hitachi Ltd クライオポンプ
WO1989011896A1 (fr) * 1988-06-02 1989-12-14 Grumman Aerospace Corporation Pompe de cryosorption regenerable et sa barriere physique mobile
US5105852A (en) * 1989-07-13 1992-04-21 Mitsubishi Denki Kabushiki Kaisha Tubular valve arrangement

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 10, no. 6 (M - 445)<2063> 11 January 1986 (1986-01-11) *

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2000854A3 (fr) * 2007-06-04 2009-09-23 Canon Kabushiki Kaisha Appareil de traitement de substrat et procédé de fabrication du dispositif
CN113975928A (zh) * 2021-09-27 2022-01-28 清华大学 真空环境下的低温吸附与再生系统

Also Published As

Publication number Publication date
NL9500225A (nl) 1996-09-02

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