EP0720416B1 - Ceramic heating element, its manufacturing method and its uses - Google Patents

Ceramic heating element, its manufacturing method and its uses Download PDF

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Publication number
EP0720416B1
EP0720416B1 EP95120498A EP95120498A EP0720416B1 EP 0720416 B1 EP0720416 B1 EP 0720416B1 EP 95120498 A EP95120498 A EP 95120498A EP 95120498 A EP95120498 A EP 95120498A EP 0720416 B1 EP0720416 B1 EP 0720416B1
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EP
European Patent Office
Prior art keywords
heating
heating element
film
ceramic
heating conductor
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
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EP95120498A
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German (de)
French (fr)
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EP0720416A3 (en
EP0720416A2 (en
Inventor
Werner Dipl.-Phys. Gruenwald
Claudio De La Prieta
Albrecht Dipl.-Ing. Geissinger
Gert Dipl.-Ing. Lindemann
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Robert Bosch GmbH
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Robert Bosch GmbH
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Priority claimed from DE19547373A external-priority patent/DE19547373A1/en
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Publication of EP0720416A2 publication Critical patent/EP0720416A2/en
Publication of EP0720416A3 publication Critical patent/EP0720416A3/en
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Publication of EP0720416B1 publication Critical patent/EP0720416B1/en
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    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00Ohmic-resistance heating
    • H05B3/10Heater elements characterised by the composition or nature of the materials or by the arrangement of the conductor
    • H05B3/12Heater elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material
    • H05B3/14Heater elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material the material being non-metallic
    • H05B3/141Conductive ceramics, e.g. metal oxides, metal carbides, barium titanate, ferrites, zirconia, vitrous compounds
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23QIGNITION; EXTINGUISHING-DEVICES
    • F23Q7/00Incandescent ignition; Igniters using electrically-produced heat, e.g. lighters for cigarettes; Electrically-heated glowing plugs
    • F23Q7/22Details

Definitions

  • the invention relates to a ceramic heater the genus of independent claims, a method too their manufacture and their use.
  • From DE-OS 39 24 777 is a ceramic heater known in which a heating conductor with leads from a ceramic foil is punched out.
  • the blank obtained in this way is made into a powder mixture from an electric insulating powder embedded, pressed into a body and then sintered.
  • Heating conductor are squeezed. As a result, the Resistance value of the heating conductor changed and thereby the required heating output is not reached.
  • the heaters with the characteristic features of the independent claims have the advantage that Heating device economical in foil and Laminating technology can be produced.
  • the one when laminating The forces to be exerted are less than when pressing one Ceramic powder. That means that the punched out Heating element less mechanical during manufacture is claimed. This in turn causes a uniform current flow through the heating element and thus a particularly uniform power supply is achieved.
  • a particularly definable setting for the heating output is guaranteed if a leveling layer is provided. This prevents the heating element is squeezed under pressure when laminating. Besides, will thereby achieving a better laminate bond.
  • By an in the structured heat conductor zone becomes the mechanical stability of the heating conductor increased, which the punched heating element is easy to handle.
  • the further invention with a thick-film technique executed heating element and with a film punched out leads has the advantage that the Supply lines can be designed with particularly low resistance. Thereby it is possible to over the ohmic resistance of the heating conductor the composition of the paste of the heating layer independently of the materials of the supply lines.
  • This Execution also has the advantage that the punched out feed lines are easier to handle than a punched heating element with a relatively thin trained heating conductor. It is also through the Thick film technology of the heating conductor with simple means structurable in different ways, for example in Meander.
  • FIG. 1 shows a simplified Exploded view of a first invention Heating device
  • Figure 2 is a film for producing a Heating element
  • Figure 3 a punched out of the film Heating element according to Figure 1
  • Figure 4 a laminated together Heating device according to Figure 1 in cross section
  • Figure 5 a Cross section of a round heating device
  • Figure 6 a Exploded view of a second invention Heating device
  • Figure 7 shows a cross section of the Heating device according to Figure 6
  • Figure 8 is a plan view a heating element with a structured heating conductor zone
  • Figure 9 is a plan view of a leveling layer for a Heating element
  • Figure 10 shows a cross section through a Heating device with a first embodiment of the Compensation layer
  • Figure 11 shows a cross section through a Heating device with a second embodiment of the Leveling layer.
  • Heating device consists of a first ceramic Carrier film 11, a second ceramic carrier film 12 and one between the two carrier films 11 and 12 arranged heating element 13.
  • the carrier films 11, 12 consist of an electrically insulating ceramic Material.
  • the heating element 13 has a heating conductor zone 26 with a heating conductor 15 which is connected to a first supply line 16 and a second feed line 17 is connected.
  • the heating conductor zone 26 is at one end of the carrier films 11, 12 positioned.
  • the leads 16, 17 lead from the heating conductor 15 to the opposite end of the carrier films 11, 12.
  • the heating element 13 is made of an electric conductive, ceramic film, hereinafter heating element film Called 19 ( Figure 2), punched out.
  • the contour of the Heating element 13 is designed so that the two Feed lines 16, 17 are made wider than that Heating conductor 15, which changes the cross section of the leads 16, 17 increased compared to the cross section of the heating conductor 15. This is the ohmic resistance of the individual supply line 16, 17 less than the ohmic resistance of the heating conductor 15. This ensures that the heating power in Heating conductor 15 arises and thus with the Heat conductor 15 provided end of the carrier films 11, 12 concentrated.
  • the heating element film 19 has a thickness of 20 ⁇ m to 500 ⁇ m.
  • the carrier films 11, 12 and the heating element 13 become a sintered body 21, 22 according to FIGS. 4 and 5 laminated together and sintered, the sintered body 22 5 prior to sintering into one rotationally symmetrical pin was pressed.
  • Heating element film 19 indentations 27 embossed so that the cross section of the heating element film 19 at these points is reduced.
  • areas 28 present that have a larger cross section than the areas of the depressions 27.
  • the cross section of the areas 28 and the recesses 27 is less than the cross section of the feed lines 16, 17, whereby the heating conductor zone 26 is higher impedance than the feed lines 16, 17. This creates a high-resistance current path in the heating conductor zone 26, which as Heating conductor 15 acts.
  • the heating element 13 first punched out and then the heating conductor zone 26 structured, it being essential that after the Structuring a heat conductor is present, its cross section is smaller than the cross section of the feed lines 16, 17.
  • a second manufacturing possibility is that first the heat conductor film 19 in the area of the later Heater conductor zone 26 with a structure according to the depressions 27 and the areas 28 is provided and then the Heating element 13 is punched out of the heating conductor film. This will cause the material to be pushed away to the side during embossing cut away when punching. This is easier too ensure that the cross section of the heating conductor 15 is lower and therefore higher impedance than that of the supply lines 16, 17.
  • the carrier foils are used to manufacture the heating device 11 and 12 the intermediate heating element 13 with the Supply lines 16, 17 and with the heating conductor 15 under pressure laminated together.
  • the laminated body is in a co-sintering process at, for example, 1850 ° C. Nitrogen or sintered with a forming gas. Then the sintered body 21 or 22 with the in the Figures 4 and 5 shown cross sections.
  • FIGS. 9, 10 and 11 Two further versions of the heating device according to the invention are shown in FIGS. 9, 10 and 11.
  • a compensation layer 30 is arranged around the heating element 13.
  • the compensation layer 30 consists of an electrically insulating, ceramic material, for example Al 2 O 3 or Si 3 N 4 .
  • the thickness of the compensation layer 30 corresponds approximately to the thickness of the heating conductor film 19 from which the heating element 13 is punched out.
  • the second embodiment of the compensation layer 30 starts Figure 11 out.
  • the leveling layer 30 is one of the carrier films 11, 12, into which a recess 36 is stamped, which has the contour of the heating element 13.
  • the depth of the recess 36 corresponds essentially to that Thickness of the heating conductor film 19.
  • the thickness of the cavity thus formed in essentially correspond to the thickness of the heating conductor foil 19 should.
  • additional ceramic films use in which the recess 36 is embossed so that the punched heating element 13 at least in the large area one of the additional foils can be sunk.
  • FIGS. 6 and 7. Another heating device according to the invention is shown in FIGS. 6 and 7.
  • a heating conductor layer 24 forming a heating conductor 20 with, for example, a U-shaped contour is applied to an end section of the first carrier film 11.
  • the heating conductor layer 24 is formed from a ceramic paste which contains a ceramic component and an electrically conductive, high-temperature-resistant material, for example MoSi 2 .
  • the paste is applied to at least one of the carrier films 11, 12 using a screen or pad printing technique.
  • the two supply lines 16, 17 are likewise punched out of a heating element film and are placed, for example, on the first carrier film 11, so that the supply lines 16, 17 contact the heating conductor layer 24.
  • the layer thickness of the heating conductor layer 24 is for example 20 ⁇ m.
  • the thickness of the feed lines 16, 17 corresponds to the thickness of the heating element film 19 of for example 0.4 mm.
  • the sintered body 23 can also be closed a body with a round cross section according to FIG. 5 be pressed after sintering.
  • the carrier films 11, 12 each consist of AlN, for example. However, it is also conceivable to use other electrically insulating, ceramic materials, such as Si 3 N 4 or Al 2 O 3, or a mixture of these substances. It is also conceivable to produce the two carrier films 11, 12 from different materials.
  • the heating element film 19, from which the heating element 13 or the feed lines 16, 17 are punched out consists, for example, of a mixture of 90-30 mol% MoSi 2 and 10-70 mol% AlN. Instead of AlN, Si 3 N 4 or Al 2 O 3 or a mixture of these substances can also be used. The addition of Si 3 N 4 , AlN and / or Al 2 O 3 depends on the material of the carrier films 11, 12 used, with the addition of the corresponding material of the carrier films 11, 12, the thermal expansion coefficients of carrier films 11, 12 and Move the heating element 13 closer together and thereby improve the adhesive strength of the heating element with the carrier films 11, 12.
  • the heating device according to the invention is for example suitable for use as a glow plug and glow plug or Incandescent bodies, which are used as starting aids Lighten diesel engines.
  • the inclusion in a Housing and the contacting of the leads 16, 17 with Connection cables are well known and will not be described in detail described.
  • the heating device with others Combine components that are specific to one Temperature must be heated.

Description

Stand der TechnikState of the art

Die Erfindung betrifft eine keramische Heizeinrichtung nach der Gattung der unabhängigen Ansprüche, ein Verfahren zu deren Herstellung sowie deren Verwendung.The invention relates to a ceramic heater the genus of independent claims, a method too their manufacture and their use.

Aus der DE-OS 39 24 777 ist eine keramische Heizeinrichtung bekannt, bei der ein Heizleiter mit Zuleitungen aus einer keramischen Folie ausgestanzt ist. Der so erhaltene Rohling wird in eine Pulvermischung aus einem elektrisch isolierenden Pulver eingebettet, zu einem Körper gepreßt und anschließend gesintert. Beim Verpressen der Keramik kann insbesondere der im Querschnitt relativ dünn ausgeführte Heizleiter gequetscht werden. Das führt dazu, daß der Widerstandswert des Heizleiters verändert und dadurch die geforderte Heizleistung nicht erreicht wird.From DE-OS 39 24 777 is a ceramic heater known in which a heating conductor with leads from a ceramic foil is punched out. The blank obtained in this way is made into a powder mixture from an electric insulating powder embedded, pressed into a body and then sintered. When pressing the ceramic can especially the one with a relatively thin cross section Heating conductor are squeezed. As a result, the Resistance value of the heating conductor changed and thereby the required heating output is not reached.

Vorteile der ErfindungAdvantages of the invention

Die Heizeinrichtungen mit den kennzeichnenden Merkmalen der unabhängigen Ansprüche haben den Vorteil, daß die Heizeinrichtung wirtschaftlich in Folien- und Laminiertechnik herstellbar ist. Die beim Laminieren aufzuwendenden Kräft sind geringer als beim Pressen eines Keramikpulvers. Das bedeutet, daß das ausgestanzte Heizelement bei der Herstellung weniger stark mechanisch beansprucht wird. Dies bewirkt wiederum, daß ein gleichmäßiger Stromfluß durch das Heizelement vorliegt und damit eine besonders gleichmäßige Leistungseinspeisung erreicht wird.The heaters with the characteristic features of the independent claims have the advantage that Heating device economical in foil and Laminating technology can be produced. The one when laminating The forces to be exerted are less than when pressing one Ceramic powder. That means that the punched out Heating element less mechanical during manufacture is claimed. This in turn causes a uniform current flow through the heating element and thus a particularly uniform power supply is achieved.

Durch die in den Unteransprüchen aufgeführten Maßnahmen sind vorteilhafte Weiterbildungen und Verbesserungen möglich. Eine besonders definierbare Einstellung der Heizleistung wird dadurch gewährleistet, wenn eine Ausgleichsschicht vorgesehen wird. Dadurch wird vermieden, daß das Heizelement beim Laminieren unter Druck gequetscht wird. Außerdem wird dadurch ein besserer Laminatverbund erreicht. Durch einen in der Heizleiterzone strukturierten Heizleiter wird die mechanische Stabilität des Heizleiters erhöht, wodurch das ausgestanzte Heizelement gut handhabbar ist.By the measures listed in the subclaims advantageous further developments and improvements possible. A particularly definable setting for the heating output is guaranteed if a leveling layer is provided. This prevents the heating element is squeezed under pressure when laminating. Besides, will thereby achieving a better laminate bond. By an in the structured heat conductor zone becomes the mechanical stability of the heating conductor increased, which the punched heating element is easy to handle.

Die weitere Erfindung mit einem in Dickschichttechnik ausgeführten Heizelement und mit aus einer Folie ausgestanzten Zuleitungen hat den Vorteil, daß die Zuleitungen besonders niederohmig ausbildbar sind. Dadurch ist es möglich, den ohmschen Widerstand des Heizleiters über die Zusammensetzung der Paste der Heizleitschicht unabhängig von den Materialien der Zuleitungen einzustellen. Dieses Ausführung bietet weiterhin den Vorteil, daß die ausgestanzten Zuleitungen leichter zu handhaben sind als ein ausgestanztes Heizelement mit einem relativ dünn ausgebildeten Heizleiter. Außerdem ist durch die Dickschichttechnik der Heizleiter mit einfachen Mitteln verschiedenartig strukturierbar, zum Beispiel in Mäanderform. The further invention with a thick-film technique executed heating element and with a film punched out leads has the advantage that the Supply lines can be designed with particularly low resistance. Thereby it is possible to over the ohmic resistance of the heating conductor the composition of the paste of the heating layer independently of the materials of the supply lines. This Execution also has the advantage that the punched out feed lines are easier to handle than a punched heating element with a relatively thin trained heating conductor. It is also through the Thick film technology of the heating conductor with simple means structurable in different ways, for example in Meander.

Zeichnungdrawing

Ausführungsbeispiele der Erfindungen sind in der Zeichnung dargestellt und in der nachfolgenden Beschreibung näher erläutert. Es zeigen Figur 1 eine vereinfachte Explosionsdarstellung einer ersten erfindungsgemäßen Heizeinrichtung, Figur 2 eine Folie zur Herstellung eines Heizelements, Figur 3 ein aus der Folie ausgestanztes Heizelement gemäß Figur 1, Figur 4 eine zusammenlaminierte Heizeinrichtung gemäß Figur 1 im Querschnitt, Figur 5 einen Querschnitt einer runden Heizeinrichtung, Figur 6 eine Explosionsdarstellung einer zweiten erfindungsgemäßen Heizeinrichtung, Figur 7 einen Querschnitt der Heizeinrichtung gemäß Figur 6, Figur 8 eine Draufsicht auf ein Heizelement mit einer strukturierten Heizleiterzone, Figur 9 eine Draufsicht auf eine Ausgleichsschicht für ein Heizelement, Figur 10 einen Querschnitt durch eine Heizeinrichtung mit einer ersten Ausführungsform der Ausgleichsschicht und Figur 11 einen Querschnitt durch eine Heizeinrichtung mit einer zweiten Ausführungsform der Ausgleichsschicht.Embodiments of the inventions are in the drawing shown and in the description below explained. Figure 1 shows a simplified Exploded view of a first invention Heating device, Figure 2 is a film for producing a Heating element, Figure 3 a punched out of the film Heating element according to Figure 1, Figure 4 a laminated together Heating device according to Figure 1 in cross section, Figure 5 a Cross section of a round heating device, Figure 6 a Exploded view of a second invention Heating device, Figure 7 shows a cross section of the Heating device according to Figure 6, Figure 8 is a plan view a heating element with a structured heating conductor zone, Figure 9 is a plan view of a leveling layer for a Heating element, Figure 10 shows a cross section through a Heating device with a first embodiment of the Compensation layer and Figure 11 shows a cross section through a Heating device with a second embodiment of the Leveling layer.

Ausführungsbeispieleembodiments

Die in Figur 1 vereinfacht und stark vergrößert dargestellte Heizeinrichtung besteht aus einer ersten keramischen Trägerfolie 11, einer zweiten keramischen Trägerfolie 12 und einem zwischen den beiden Trägerfolien 11 und 12 angeordneten Heizelement 13. Die Trägerfolien 11, 12 bestehen aus einem elektrisch isolierenden keramischen Material. Das Heizelement 13 besitzt eine Heizleiterzone 26 mit einem Heizleiter 15, der mit einer ersten Zuleitung 16 und einer zweiten Zuleitung 17 verbunden ist. Die Heizleiterzone 26 ist an einem Ende der Trägerfolien 11, 12 positioniert. Die Zuleitungen 16, 17 führen vom Heizleiter 15 an das gegenüberliegende Ende der Trägerfolien 11, 12.The one shown in FIG. 1 is simplified and greatly enlarged Heating device consists of a first ceramic Carrier film 11, a second ceramic carrier film 12 and one between the two carrier films 11 and 12 arranged heating element 13. The carrier films 11, 12 consist of an electrically insulating ceramic Material. The heating element 13 has a heating conductor zone 26 with a heating conductor 15 which is connected to a first supply line 16 and a second feed line 17 is connected. The The heating conductor zone 26 is at one end of the carrier films 11, 12 positioned. The leads 16, 17 lead from the heating conductor 15 to the opposite end of the carrier films 11, 12.

Das Heizelement 13 gemäß Figur 3 ist aus einer elektrisch leitenden, keramischen Folie, nachfolgend Heizelementfolie 19 genannt (Figur 2), ausgestanzt. Die Kontur des Heizelements 13 ist dabei so ausgebildet, daß die beiden Zuleitungen 16, 17 breiter ausgeführt sind als der Heizleiter 15, wodurch sich der Querschnitt der Zuleitungen 16, 17 gegenüber dem Querschnitt des Heizleiters 15 erhöht. Damit ist der ohmsche Widerstand der einzelnen Zuleitung 16, 17 geringer als der ohmsche Widerstand des Heizleiters 15. Dadurch ist gewährleistet, daß die Heizleistung im Heizleiter 15 entsteht und sich damit auf das mit dem Heizleiter 15 versehene Ende der Trägerfolien 11, 12 konzentriert. Die Heizelementfolie 19 hat eine Dicke von 20 µm bis 500µm.The heating element 13 according to Figure 3 is made of an electric conductive, ceramic film, hereinafter heating element film Called 19 (Figure 2), punched out. The contour of the Heating element 13 is designed so that the two Feed lines 16, 17 are made wider than that Heating conductor 15, which changes the cross section of the leads 16, 17 increased compared to the cross section of the heating conductor 15. This is the ohmic resistance of the individual supply line 16, 17 less than the ohmic resistance of the heating conductor 15. This ensures that the heating power in Heating conductor 15 arises and thus with the Heat conductor 15 provided end of the carrier films 11, 12 concentrated. The heating element film 19 has a thickness of 20 µm to 500µm.

Die Trägerfolien 11, 12 und das Heizelement 13 werden zu einem Sinterkörper 21, 22 gemäß den Figuren 4 und 5 zusammenlaminiert und gesintert, wobei der Sinterkörper 22 gemäß Figur 5 vor dem Sintern zu einem rotationssymmetrischen Stift gepreßt wurde.The carrier films 11, 12 and the heating element 13 become a sintered body 21, 22 according to FIGS. 4 and 5 laminated together and sintered, the sintered body 22 5 prior to sintering into one rotationally symmetrical pin was pressed.

Bei der Heizleiterzone 26 gemäß Figur 8 sind in die Heizelementfolie 19 Vertiefungen 27 eingeprägt, so daß an diesen Stellen der Querschnitt der Heizelementfolie 19 reduziert wird. Neben den Vertiefungen 27 sind Bereiche 28 vorhanden, die einen größeren Querschnitt als die Bereiche der Vertiefungen 27 aufweisen. Der Querschnitt der Bereiche 28 und der Vertiefungen 27 ist geringer als der Querschnitt der Zuleitungen 16, 17, wodurch die Heizleiterzone 26 hochohmiger als die Zuleitungen 16, 17 ist. Dadurch entsteht ein hochohmiger Strompfad in der Heizleiterzone 26, der als Heizleiter 15 wirkt. In the heat conductor zone 26 according to FIG Heating element film 19 indentations 27 embossed so that the cross section of the heating element film 19 at these points is reduced. In addition to the depressions 27 there are areas 28 present that have a larger cross section than the areas of the depressions 27. The cross section of the areas 28 and the recesses 27 is less than the cross section of the feed lines 16, 17, whereby the heating conductor zone 26 is higher impedance than the feed lines 16, 17. This creates a high-resistance current path in the heating conductor zone 26, which as Heating conductor 15 acts.

Zur Herstellung der Heizeinrichtung wird das Heizelement 13 zunächst ausgestanzt und danach die Heizleiterzone 26 strukturiert, wobei wesentlich ist, daß nach dem Strukturieren ein Heizleiter vorliegt, dessen Querschnitt geringer ist als der Querschnitt der Zuleitungen 16, 17. Eine zweite Herstellungsmöglichkeit besteht darin, daß zuerst die Heizleiterfolie 19 im Bereich der späteren Heizleiterzone 26 mit einer Struktur gemäß den Vertiefungen 27 und den Bereichen 28 versehen wird und danach das Heizelement 13 aus der Heizleiterfolie ausgestanzt wird. Dadurch wird das beim Prägen seitlich weggedrückte Material beim Stanzen mit weggeschnitten. Damit ist leichter zu gewährleisten, daß der Querschitt des Heizleiters 15 geringer und damit hochohmiger ist als der der Zuleitungen 16, 17.To produce the heating device, the heating element 13 first punched out and then the heating conductor zone 26 structured, it being essential that after the Structuring a heat conductor is present, its cross section is smaller than the cross section of the feed lines 16, 17. A second manufacturing possibility is that first the heat conductor film 19 in the area of the later Heater conductor zone 26 with a structure according to the depressions 27 and the areas 28 is provided and then the Heating element 13 is punched out of the heating conductor film. This will cause the material to be pushed away to the side during embossing cut away when punching. This is easier too ensure that the cross section of the heating conductor 15 is lower and therefore higher impedance than that of the supply lines 16, 17.

Zur Herstellung der Heizeinrichtung werden die Trägerfolien 11 und 12 das dazwischen angeordneten Heizelement 13 mit den Zuleitungen 16, 17 und mit dem Heizleiter 15 unter Druck zusammenlaminiert. Der zusammenlaminierte Körper wird in einem Co-Sinterverfahren bei beispielsweise 1850° C unter Stickstoff beziehungsweise mit einem Formiergas gesintert. Danach entstehen die Sinterkörper 21 oder 22 mit den in den Figuren 4 und 5 dargestellten Querschnitten.The carrier foils are used to manufacture the heating device 11 and 12 the intermediate heating element 13 with the Supply lines 16, 17 and with the heating conductor 15 under pressure laminated together. The laminated body is in a co-sintering process at, for example, 1850 ° C. Nitrogen or sintered with a forming gas. Then the sintered body 21 or 22 with the in the Figures 4 and 5 shown cross sections.

Zwei weitere Ausführungen der erfindungsgemäßen Heizeinrichtung gehen aus den Figuren 9, 10 und 11 hervor. Hierbei wird eine Ausgleichsschicht 30 um das Heizelement 13 angeordnet. Die Ausgleichsschicht 30 besteht aus einem elektrisch isolierenden, keramischen Material, beispielsweise Al2O3 oder Si3N4. Die Dicke der Ausgleichsschicht 30 entspricht etwa der Dicke der Heizleiterfolie 19, aus der das Heizelement 13 ausgestanzt ist. Two further versions of the heating device according to the invention are shown in FIGS. 9, 10 and 11. Here, a compensation layer 30 is arranged around the heating element 13. The compensation layer 30 consists of an electrically insulating, ceramic material, for example Al 2 O 3 or Si 3 N 4 . The thickness of the compensation layer 30 corresponds approximately to the thickness of the heating conductor film 19 from which the heating element 13 is punched out.

Zweckmäßig ist, die Ausgleichsschicht 30 gemäß Figur 10 aus einer weiteren keramischen Folie 31 herzustellen. Dazu wird aus der Folie 31 gemäß Figur 9 eine Aussparung 32 ausgestanzt, die der Kontur des Heizelements 13 entspricht.It is expedient to use the compensation layer 30 according to FIG to produce a further ceramic film 31. This will a recess 32 from the film 31 according to FIG. 9 punched out, which corresponds to the contour of the heating element 13.

Die zweite Ausführungsform der Ausgleichsschicht 30 geht aus Figur 11 hervor. Hier ist die Ausgleichsschicht 30 von einer der Trägerfolien 11, 12 gebildet, in die eine Vertiefung 36 eingeprägt ist, die die Kontur des Heizelements 13 besitzt. Die Tiefe der Vertiefung 36 entspricht im wesentlichen der Dicker der Heizleiterfolie 19. In die Vertiefung 36 wird das Heizelement 14 eingelegt und mit der anderen Trägerfolien 11, 12 zusammenlaminiert. Es ist jedoch auch möglich in beide Trägerfolien 11, 12 jeweils die Kontur einzuprägen, wobei die Dicke des dadurch gebildeten Hohlraumes im wesentlichen der Dicke der Heizleiterfolie 19 entsprechen sollte. Es ist darüberhinaus ebenfalls denkbar, neben den Trägerfolien 11, 12 zusätzliche keramische Folien zu verwenden, in denen die Vertiefung 36 eingeprägt ist, so daß das ausgestanzte Heizelement 13 in der Großfläche mindestens einer der zusätzlichen Folien versenkt werden kann.The second embodiment of the compensation layer 30 starts Figure 11 out. Here the leveling layer 30 is one of the carrier films 11, 12, into which a recess 36 is stamped, which has the contour of the heating element 13. The depth of the recess 36 corresponds essentially to that Thickness of the heating conductor film 19. In the recess 36 that Heating element 14 inserted and with the other carrier films 11, 12 laminated together. However, it is also possible in impress the contour of both carrier foils 11, 12, the thickness of the cavity thus formed in essentially correspond to the thickness of the heating conductor foil 19 should. It is also conceivable, in addition to the Carrier films 11, 12 additional ceramic films use in which the recess 36 is embossed so that the punched heating element 13 at least in the large area one of the additional foils can be sunk.

Eine weitere erfindungsgemäße Heizeinrichtung geht aus den Figuren 6 und 7 hervor. Gemäß Figur 6 ist auf einem Endabschnitt der ersten Trägerfolie 11 eine einen Heizleiter 20 bildenden Heizleiterschicht 24 mit beispielsweise einer U-förmigen Kontur aufgetragen. Die Heizleiterschicht 24 wird aus einer keramische Paste bildet, die eine keramische Komponente und ein elektrisch leitendes, hochtemperaturbeständiges Material, beispielsweise MoSi2 enthält. Die Paste wird mittels Sieb- oder Tampondrucktechnik auf mindestens eine der Trägerfolien 11, 12 aufgetragen. Die beiden Zuleitungen 16, 17 sind ebenfalls aus einer Heizelementfolie ausgestanzt und werden beispielsweise auf die erste Trägerfolie 11 aufgelegt, so daß die Zuleitungen 16, 17 die Heizleiterschicht 24 kontaktieren.Another heating device according to the invention is shown in FIGS. 6 and 7. According to FIG. 6, a heating conductor layer 24 forming a heating conductor 20 with, for example, a U-shaped contour is applied to an end section of the first carrier film 11. The heating conductor layer 24 is formed from a ceramic paste which contains a ceramic component and an electrically conductive, high-temperature-resistant material, for example MoSi 2 . The paste is applied to at least one of the carrier films 11, 12 using a screen or pad printing technique. The two supply lines 16, 17 are likewise punched out of a heating element film and are placed, for example, on the first carrier film 11, so that the supply lines 16, 17 contact the heating conductor layer 24.

Die Schichtdicke der Heizleiterschicht 24 beträgt beispielsweise 20 µm. Die Dicke der Zuleitungen 16, 17 entspricht der Dicke der Heizelementfolie 19 von beispielsweise 0,4 mm.The layer thickness of the heating conductor layer 24 is for example 20 µm. The thickness of the feed lines 16, 17 corresponds to the thickness of the heating element film 19 of for example 0.4 mm.

Nach dem Aufbringen der Heizleiterschicht 24 und dem Auflegen der Zuleitungen 16, 17 auf die Trägerfolie 11 wird die zweite Trägerfolie 12 mit der ersten Trägerfolie 11 unter Druck zusammenlaminiert und anschließend zu einem Sinterkörper 23 gesintert. Der Sinterkörper 23 kann auch zu einem Körper mit einem runden Querschitt gemäß Figur 5 vor dem Sintern gepreßt werden.After the application of the heating conductor layer 24 and the Placing the leads 16, 17 on the carrier film 11 the second carrier film 12 with the first carrier film 11 laminated together under pressure and then into one Sintered body 23 sintered. The sintered body 23 can also be closed a body with a round cross section according to FIG. 5 be pressed after sintering.

Die Trägerfolien 11, 12 bestehen beispielsweise jeweils aus AlN. Es ist aber auch denkbar, andere elektrisch isolierende, keramische Materialien, wie beispielsweise Si3N4 oder Al2O3 oder ein Gemisch dieser Stoffe einzusetzen. Es ist ebenfalls denkbar, die beiden Trägerfolien 11, 12 aus unterschiedlichen Materialien herzustellen.The carrier films 11, 12 each consist of AlN, for example. However, it is also conceivable to use other electrically insulating, ceramic materials, such as Si 3 N 4 or Al 2 O 3, or a mixture of these substances. It is also conceivable to produce the two carrier films 11, 12 from different materials.

Die Heizelementfolie 19, aus der das Heizelement 13 bzw. die Zuleitungen 16, 17 ausgestanzt werden, besteht beispielsweise aus einem Gemisch aus 90 - 30 Mol.% MoSi2 und 10 - 70 Mol.% AlN. Anstelle von AlN kann auch Si3N4 oder Al2O3 oder ein Gemisch dieser Stoffe verwendet werden. Die Zugabe von Si3N4, AlN und/oder Al2O3, richtet sich nach dem Material der verwendeten Trägerfolien 11, 12, wobei durch die Zugabe des entsprechenden Materials der Trägerfolien 11, 12 die thermischen Ausdehnungskoeffizienten von Trägerfolien 11, 12 und Heizelement 13 näher zusammenrücken und dadurch die Haftfestigkeit des Heizelements mit den Trägerfolien 11, 12 verbessert wird. The heating element film 19, from which the heating element 13 or the feed lines 16, 17 are punched out, consists, for example, of a mixture of 90-30 mol% MoSi 2 and 10-70 mol% AlN. Instead of AlN, Si 3 N 4 or Al 2 O 3 or a mixture of these substances can also be used. The addition of Si 3 N 4 , AlN and / or Al 2 O 3 depends on the material of the carrier films 11, 12 used, with the addition of the corresponding material of the carrier films 11, 12, the thermal expansion coefficients of carrier films 11, 12 and Move the heating element 13 closer together and thereby improve the adhesive strength of the heating element with the carrier films 11, 12.

Die erfindungsgemäße Heizeinrichtung ist beispielsweise geeignet für den Einsatz als Glühkerze und Glühvorsatz oder Glühkörper, welche als Starthilfen das Anlassen von Dieselmotoren erleichtern. Dabei ragt das mit dem Heizleiter 15, 20 versehene Ende in den Brennraum beziehungsweise in die Vorkammer eines Dieselmotors hinein. Die Aufnahme in ein Gehäuse und die Kontaktierung der Zuleitungen 16, 17 mit Anschlußkabeln ist allgemein bekannt und wird nicht näher beschrieben.The heating device according to the invention is for example suitable for use as a glow plug and glow plug or Incandescent bodies, which are used as starting aids Lighten diesel engines. The protrudes with the heat conductor 15, 20 provided end in the combustion chamber or in the pre-chamber of a diesel engine. The inclusion in a Housing and the contacting of the leads 16, 17 with Connection cables are well known and will not be described in detail described.

Es ist aber ebenso denkbar, die Heizeinrichtung mit anderen Bauelementen zu kombinieren, die auf eine bestimmte Temperatur aufgeheizt werden müssen.But it is also conceivable that the heating device with others Combine components that are specific to one Temperature must be heated.

Claims (12)

  1. Ceramic heating device, having a heating element (13) which is embedded in an electrically insulating ceramic body and has a heating conductor (15) with supply conductors (16, 17) and has a heating conductor zone (26), which is formed by the heating conductor (15) formed at one end between the supply conductors (16, 17), the heating element (13) being stamped out of a ceramic film, characterized in that the heating element (13) which is stamped out of the ceramic film (19) is arranged between a first carrier film (11) and a second carrier film (12), and the carrier films (11, 12) and the heating element (14) are laminated together.
  2. Heating device according to Claim 1, characterized in that recesses (27) are introduced into the heating conductor zone (26) and in this zone form regions with different cross sections, in such a manner that a structured heating conductor (15) having at least one current path of higher impedance than the supply conductors (16, 17) is formed.
  3. Heating device according to Claim 2, characterized in that recesses are introduced into the ceramic film by pressure-stamping.
  4. Heating device according to Claim 1, characterized in that the heating element (13) is surrounded by a compensation layer (30) which is formed by at least one electrically insulating, ceramic film (31), and in that the film (31) has a contour in which the heating element (13) can be at least approximately countersunk.
  5. Heating device according to Claim 4, characterized in that the contour is formed by a cutout (32) which is stamped out of the film (31) and into which the stamped-out heating element (14) can be countersunk.
  6. Heating device according to Claim 4, characterized in that the film (31) is formed by at least one of the two carrier films (11, 12), in that the contour is formed by at least one recess (36) which has been introduced into at least one of the carrier films (11, 12), and in that the heating element (13) can be countersunk in the recess (36).
  7. Ceramic heating device, having a heating element (14) which is embedded in an electrically insulating ceramic body and has a heating conductor (20) with supply conductors (16, 17) and has a heating conductor zone, which is formed by the heating conductor (20) formed at one end between the supply conductors (16, 17), characterized in that the heating conductor (20) is formed by a heating conductor layer (24) which is applied to at least one of the carrier films (11, 12) using thick-film technology, in that the supply conductors (16, 17) are stamped out of an electrically conductive, ceramic film, in that the stamped-out supply conductors (16, 17) are arranged on one of the carrier films (11, 12), in such a manner that the supply conductors (16, 17) make contact with the heating conductor layer (24), and in that the carrier films (11, 12) and the heating element (14) are laminated together.
  8. Process for producing a heating device having a heating element (13, 14), which is embedded in at least two ceramic carrier films (11, 12) and has a heating conductor (15, 20) arranged in a heating conductor zone (26) and supply conductors (16, 17) according to Claims 1 to 7, characterized in that at least the supply conductors (16, 17) of the heating elements (13, 14) are stamped out of an electrically conductive, ceramic film (19), in that the heating element is arranged between the carrier films (11, 12) and is laminated together with the carrier films (11, 12) to form a laminated body, and in that the laminated body is then sintered.
  9. Process according to Claim 8, characterized in that recesses are pressure-stamped into the heating conductor zone (26) in such a manner that a structured heating conductor (15, 20) with at least one current path of higher impedance than the supply conductors is formed.
  10. Process according to Claim 9, characterized in that the heating element (13, 14) is stamped out first of all, and then the heating conductor zone (26) is structured.
  11. Process according to Claim 8, characterized in that first of all the film (19) is structured in the region of the heating conductor zone (26), and in that then the heating element (13, 14) is stamped out of the film (19).
  12. Use of the ceramic heating device according to Claims 1 to 7 as a glow plug, glow attachment or glow body, which are suitable for use as starting aid devices in internal combustion engines.
EP95120498A 1994-12-29 1995-12-22 Ceramic heating element, its manufacturing method and its uses Expired - Lifetime EP0720416B1 (en)

Applications Claiming Priority (4)

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DE4447074 1994-12-29
DE4447074 1994-12-29
DE19547373 1995-12-19
DE19547373A DE19547373A1 (en) 1994-12-29 1995-12-19 Ceramic heater, process for its manufacture and its use

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EP0720416A2 EP0720416A2 (en) 1996-07-03
EP0720416A3 EP0720416A3 (en) 1996-11-20
EP0720416B1 true EP0720416B1 (en) 2004-03-24

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ATE301917T1 (en) * 1999-09-07 2005-08-15 Ibiden Co Ltd CERAMIC HEATING ELEMENT
EP1972878B1 (en) * 2006-01-13 2016-09-28 NGK Insulators, Ltd. Support structure of heater
US8089337B2 (en) 2007-07-18 2012-01-03 Watlow Electric Manufacturing Company Thick film layered resistive device employing a dielectric tape
US8557082B2 (en) 2007-07-18 2013-10-15 Watlow Electric Manufacturing Company Reduced cycle time manufacturing processes for thick film resistive devices
US8061402B2 (en) 2008-04-07 2011-11-22 Watlow Electric Manufacturing Company Method and apparatus for positioning layers within a layered heater system

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DE3924777A1 (en) * 1988-07-26 1990-02-08 Ngk Spark Plug Co Ceramic heating plug using embedded ceramic resistor - has improved resistance to thermal cycling as result of material selection and dimensions

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US5086210A (en) * 1988-03-29 1992-02-04 Nippondenso Co., Ltd. Mo5 Si3 C ceramic material and glow plug heating element made of the same
JPH01313362A (en) * 1988-06-09 1989-12-18 Ngk Spark Plug Co Ltd Ceramic heating element and production thereof
DE4318327C2 (en) * 1993-06-02 1997-01-30 Siemens Ag Gas sensor
JP2828575B2 (en) * 1993-11-12 1998-11-25 京セラ株式会社 Silicon nitride ceramic heater

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Publication number Priority date Publication date Assignee Title
DE3924777A1 (en) * 1988-07-26 1990-02-08 Ngk Spark Plug Co Ceramic heating plug using embedded ceramic resistor - has improved resistance to thermal cycling as result of material selection and dimensions

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