EP0617407A2 - Contact recording disk file and head assembly for use therein - Google Patents
Contact recording disk file and head assembly for use therein Download PDFInfo
- Publication number
- EP0617407A2 EP0617407A2 EP94302049A EP94302049A EP0617407A2 EP 0617407 A2 EP0617407 A2 EP 0617407A2 EP 94302049 A EP94302049 A EP 94302049A EP 94302049 A EP94302049 A EP 94302049A EP 0617407 A2 EP0617407 A2 EP 0617407A2
- Authority
- EP
- European Patent Office
- Prior art keywords
- head
- layer
- disk
- wear
- head assembly
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
- 239000010410 layer Substances 0.000 claims abstract description 83
- 239000000725 suspension Substances 0.000 claims abstract description 31
- 229910052739 hydrogen Inorganic materials 0.000 claims abstract description 22
- 239000001257 hydrogen Substances 0.000 claims abstract description 22
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims abstract description 21
- 229910003481 amorphous carbon Inorganic materials 0.000 claims abstract description 13
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 11
- 230000001939 inductive effect Effects 0.000 claims description 7
- 230000004907 flux Effects 0.000 claims description 4
- 238000003860 storage Methods 0.000 claims description 3
- 239000000523 sample Substances 0.000 claims description 2
- 150000002431 hydrogen Chemical class 0.000 claims 1
- 239000002356 single layer Substances 0.000 claims 1
- 239000002355 dual-layer Substances 0.000 abstract description 3
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 13
- 239000000463 material Substances 0.000 description 9
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 8
- 229910052799 carbon Inorganic materials 0.000 description 7
- 238000000034 method Methods 0.000 description 7
- 239000002019 doping agent Substances 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 238000004544 sputter deposition Methods 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 238000000151 deposition Methods 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- XDTMQSROBMDMFD-UHFFFAOYSA-N Cyclohexane Chemical compound C1CCCCC1 XDTMQSROBMDMFD-UHFFFAOYSA-N 0.000 description 1
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000006978 adaptation Effects 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 230000000712 assembly Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 229910052593 corundum Inorganic materials 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 229910021385 hard carbon Inorganic materials 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- 238000007737 ion beam deposition Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 229910000889 permalloy Inorganic materials 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 238000002294 plasma sputter deposition Methods 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- MTPVUVINMAGMJL-UHFFFAOYSA-N trimethyl(1,1,2,2,2-pentafluoroethyl)silane Chemical compound C[Si](C)(C)C(F)(F)C(F)(F)F MTPVUVINMAGMJL-UHFFFAOYSA-N 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 229910001845 yogo sapphire Inorganic materials 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/48—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed
- G11B5/4806—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed specially adapted for disk drive assemblies, e.g. assembly prior to operation, hard or flexible disk drives
- G11B5/484—Integrated arm assemblies, e.g. formed by material deposition or by etching from single piece of metal or by lamination of materials forming a single arm/suspension/head unit
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/10—Structure or manufacture of housings or shields for heads
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/187—Structure or manufacture of the surface of the head in physical contact with, or immediately adjacent to the recording medium; Pole pieces; Gap features
- G11B5/255—Structure or manufacture of the surface of the head in physical contact with, or immediately adjacent to the recording medium; Pole pieces; Gap features comprising means for protection against wear
Definitions
- This invention relates to contact recording disk files (or “drives”), where the recording transducer (or “head”) is in contact with the magnetic recording disk during read and write operations.
- each of the read/write heads is supported on a carrier (or “slider") which rides on a cushion or bearing of air above the surface of its associated disk when the disk is rotating at its operating speed.
- the slider is connected to a linear or rotary actuator by means of a relatively fragile suspension.
- the slider is biased toward the disk surface by a small force from the suspension.
- the slider is in contact with the disk surface from the time the disk file is turned on until the disk reaches a speed sufficient to cause the slider to ride on the air bearing, and again when the disk file is turned off and the rotational speed of the disk falls below that necessary to create the air bearing.
- contact recording rigid disk files have been proposed wherein the head is in contact or near contact with the disk during read and write operations.
- Contact recording disk files have the advantage of much closer head-disk spacing and its associated improved writing efficiency, read signal response and corresponding storage densities.
- dry contact recording sometimes referred to as "dry” contact recording to distinguish it from liquid-bearing contact recording
- the disk file uses a head assembly in which the head carrier and suspension are formed as an integrated unit and the head carrier makes physical contact with the disk surface during read and write operations.
- the head carrier and suspension are formed as an integrated unit and the head carrier makes physical contact with the disk surface during read and write operations.
- Patent 5,041,932 a portion of the head pole piece and head carrier actually wear away due to frictional contact with the disk over the life of the disk file.
- this type of disk file it is extremely difficult to assemble the disk file so that the head pole piece is perfectly aligned and in complete contact with the disk.
- the present invention seeks to provide a contact recording disk file with an improved head assembly which permits the head pole piece to be quickly and accurately aligned with the disk.
- a head assembly for use in a contact recording rigid disk file comprising: a carrier having a wear pad for contact with the disk, the wear pad comprising an outer wear layer and an inner layer in contact with the outer layer and having a wear resistance greater than that of the outer layer; and a head supported within the carrier for reading or writing data on the disk, the head having a pole piece extending into the wear pad of the carrier.
- a contact recording disk file with a head-suspension assembly having a head carrier with a dual-layer wear pad.
- the outer wear layer of the pad is relatively soft compared to a harder inner wear layer.
- the outer wear layer wears away at a relatively rapid rate during initial wear-in of the head carrier. In this manner the head pole piece, which extends into the wear pad, is rapidly put into contact with the disk, thereby compensating for initial misalignment of the wear pad with the surface of the disk.
- both the outer and inner wear layers are formed of essentially amorphous carbon, with the inner layer being doped with various amounts of hydrogen to control wear resistance.
- the two layers are formed as an essentially single continuous layer, with the hydrogen concentration increasing or decreasing across the thickness of the layer.
- Fig. 1 illustrates a contact recording disk file including a housing 8 in which is mounted a rotary actuator 10, and an associated magnetic storage disk 12 mounted on a spindle 13 which is rotated by a drive motor (not shown) mounted to housing 8.
- the rotary actuator 10 moves the head-suspension assembly of the present invention in an arcuate path across the disk 12.
- the rotary actuator 10 includes a voice coil motor (VCM), which comprises a coil 14 movable within the magnetic field of a fixed permanent magnet assembly having a core 16.
- An actuator arm 20 is attached to the movable coil 14.
- the other end of the actuator arm 20 is attached to a combination head-suspension assembly 22 of the present invention.
- VCM voice coil motor
- the single-piece head-suspension assembly 22 includes a head-carrier segment 24 and a suspension section 26.
- head-suspension assembly 22 is depicted as a unitary body, it may also be of a two-piece construction where the carrier segment 24 is joined to the suspension section 26.
- the suspension section 26 can support the head-carrier segment 24 in contact with the surface of disk 12.
- the actuator arm 20 may include a plurality of arms with each arm supporting its own head-suspension assembly 22, each of which is associated with a surface of the disks located in the disk file. Therefore, for instance, the disk 12 can also have a head-suspension assembly 22 mounted to the actuator arm 20 for association with the media surface on the underside of disk 12. Further, other head-suspension assemblies may be mounted to actuator 10 for accessing associated top and bottom sides of other disks which may be included in the disk file.
- the suspension section 26 of the head-suspension assembly 22 provides a load to the head-carrier segment 24 which is generally perpendicular to the surface of disk 12. This perpendicular load maintains the head-carrier segment 24 in contact with the data surface of disk 12 during rotation of the disk 12.
- the head-suspension assembly 22 which includes suspension section 26 and head-carrier segment 24, is shown in an enlarged sectional view and in contact with the surface of magnetic recording disk 12.
- the head carrier 24 of head-suspension assembly 22 has on the end facing disk 12 a wear pad 30.
- the head carrier 24 has embedded within it an inductive read/write head which includes a pole piece (made up of pole tips 40, 42), a yoke 32, and a horizontally-oriented coil 34.
- the pole piece comprises adjacent pole tips 40, 42 which are spaced apart to define a magnetic recording gap 44.
- the head carrier 24 is formed as a single piece and is integrated with the suspension 26.
- the head carrier 24 can be fabricated as a separate segment, referred to as a "chiplet", and attached to a separate suspension.
- the pole piece is part of an inductive read/write head
- the head carrier 24 with wear pad 30 is also usable with other types of magnetic recording heads, such as heads wherein the pole pieces are vertical recording probes (as described in the cited US Patent 5041932), magnetoresistive (MR) sensors with their associated shields, or magnetic flux guides for directing the magnetic flux from the disk to the MR sensor.
- the pole pieces are vertical recording probes (as described in the cited US Patent 5041932), magnetoresistive (MR) sensors with their associated shields, or magnetic flux guides for directing the magnetic flux from the disk to the MR sensor.
- Fig. 3 is an illustration of the end of wear pad 30 which faces disk 12.
- the end of wear pad 30 has a wear surface 36 which is essentially coplanar with the ends of pole tips 40, 42.
- the wear pad 30, in particular the wear surface 36 is maintained in contact with the surface of disk 12 and partially wears away over the lifetime of the disk file.
- the structure of the inductive read/write head, including yoke 32 and coils 34, and their method for fabrication as part of the integrated head-suspension assembly 26, is described in further detail in the assignee's copending application EP-A-583921 (published 23/2/94).
- the head-carrier assembly 24 is shown in an enlarged view in a position so as to be initially misaligned with the disk 12.
- the pole tips 40, 42 are not in contact with the surface of disk 12 and only a portion of the wear surface 36 of wear pad 30 is in contact with the surface of disk 12.
- the wear pad 30 comprises two layers: a first outer layer 50, and a second inner layer 52 which is in contact with layer 50 and which has a wear resistance significantly higher than that of outer wear layer 50.
- both outer layer 50 and inner layer 52 are formed of amorphous carbon by sputtering from a graphite target or by plasma-enhanced chemical vapor deposition (PECVD). Doping of these layers with variable amounts of hydrogen is used to adjust wear resistance and hardness of these layers. Generally, either low or high levels of doping lead to low wear resistance and hardness while an intermediate, optimized level of doping results in the best wear resistance and hardness. In the case of PECVD amorphous carbon, low-level hydrogen doping generally means less than approximately 15 atomic percent (at %), intermediate level means approximately 15 to 35 at %, and high level means above approximately 35 at %.
- the first outer layer 50 is deposited with low or high levels of dopant and the second inner layer 52 is prepared with an intermediate level of hydrogen.
- Other dopants which alter wear resistance and hardness of the wear layer, such as nitrogen, can also be used.
- one layer can be formed by sputtering while the second layer can be deposited by PECVD.
- Other vacuum deposition techniques, such as ion beam deposition and electron cyclotron resonance, can be substituted for sputtering or PECVD.
- the outer layer 50 has a thickness preferably in the range of 0.1 to 1.0 micron and the inner layer 52 has a thickness preferably in the range of 1 to 10 microns.
- the outer layer 50 wears significantly faster than the inner layer 52 and provides a relatively quick alignment and initial contact of pole pieces 40, 42 with the surface of disk 12.
- the inner layer 52 provides the wear resistance for the head carrier 24 during the operational life of the disk file.
- a suitable substrate 100 such as silicon or aluminum oxide/titanium carbide ceramic, has a patterned etch stop 102 formed on it.
- the etch stop material is preferably a thin layer of chromium or tantalum formed by sputter deposition or evaporation.
- an alumina (Al2O3) layer 104 is deposited onto substrate 100 to a thickness equal to the desired height of wear pad 30 (see Fig. 2).
- a via is etched into the alumina down to the etch stop layer 102, which results in the structure shown in Fig. 5B.
- An alternate technique to create the template for the wear pad is to etch directly into the substrate 100 to create a depression for the wear pad. In this case, the height of the wear pad is determined by the depth of the etched depression.
- the next step is the deposition of a release layer 106, preferably a material such as copper, to a thickness of approximately 2 microns.
- the outer wear layer 50 is then deposited onto release layer 106.
- the layer 50 is an essentially amorphous carbon film formed by PECVD and is formed to a thickness in the range of 0.1 micron to 1 micron.
- the inner wear layer 52 is deposited onto the outer wear layer 50.
- the inner wear layer 52 is preferably formed by PECVD and is a film of essentially amorphous carbon doped with hydrogen.
- An organic source, such as cyclohexane is present during the PECVD process to form the relatively hard carbon inner layer 52.
- the PECVD process may be further modified by a nitrogen doping.
- the inner layer 52 is preferably formed to a thickness of 1 to 10 microns.
- outer and inner wear layers 50, 52 can be formed by varying the hydrogen content of sputtered or PECVD carbon in each of the layers. Specifically, outer layer 50 is deposited carbon with a low or high level of hydrogen dopant concentration and inner layer 52 is deposited carbon having an intermediate concentration of hydrogen.
- the wear layer 30 can also be formed by continuously varying the hydrogen content of the carbon during the period of deposition by PECVD or sputtering. Initially a high or low concentration of dopant is used to provide a low wear resistance in the outer layer, followed by a gradual change to an intermediate hydrogen concentration. This results in essentially a single continuous layer with a graded hardness and wear-resistant profile.
- Alumina may also be used as the soft outer layer 50 in place of amorphous carbon.
- portions of the wear layers 50, 52 are removed by reactive ion etching in areas outside of the subsequently formed head carrier 24 and in the central region 107 where the pole piece of the inductive read/write head will be formed.
- the pole piece including pole tips 40, 42, yoke 32, and coils 34.
- the yoke 32 and pole pieces 40, 42 are formed by depositing permalloy (NiFe).
- a gap material such as alumina or silica, is deposited isotropically. Unwanted gap material is removed by an anisotropic etch process, such as a reactive ion etch, so that gap material remains only on the vertical surfaces shown in Figure 5E.
- pole piece 42 is deposited adjacent to pole piece 40 but is now separated from it by gap 44.
- the structure is covered with insulating polymers or inorganic materials, copper coils 34 are then electroplated, vias are opened to expose the bottom of yoke 32, and the top of yoke 32 is plated to complete the head structure.
- alumina is next deposited, as shown in Fig. 5F, to the thickness desired for the suspension 26. Finally, the alumina layer 104 and the release layer 106 are etched in order to remove the completed head-suspension assembly 22 from the substrate 100 and the initial alumina layer 104.
- the following Table 1 lists the experimentally determined wear rates for various materials which can be used in the wear pad.
- the data was obtained from a conventional 2.5-inch disk drive operating at 3600 RPM.
- the wear pad had a contact surface area of 35 microns x 35 microns and was loaded onto a smooth carbon-overcoated and lubricated disk with a loading force of 20 mgmf.
- the local velocity of the disk under the wear pad was 10 m/sec.
Abstract
Description
- This invention relates to contact recording disk files (or "drives"), where the recording transducer (or "head") is in contact with the magnetic recording disk during read and write operations.
- In conventional noncontact rigid disk files, each of the read/write heads is supported on a carrier (or "slider") which rides on a cushion or bearing of air above the surface of its associated disk when the disk is rotating at its operating speed. The slider is connected to a linear or rotary actuator by means of a relatively fragile suspension. There may be a stack of disks in the disk file with the actuator supporting a number of sliders. The actuator moves the sliders radially so that each head may access the recording area of its associated disk surface. In these conventional disk files, the slider is biased toward the disk surface by a small force from the suspension. The slider is in contact with the disk surface from the time the disk file is turned on until the disk reaches a speed sufficient to cause the slider to ride on the air bearing, and again when the disk file is turned off and the rotational speed of the disk falls below that necessary to create the air bearing.
- In addition to the above-described conventional magnetic recording disk files, "contact" recording rigid disk files have been proposed wherein the head is in contact or near contact with the disk during read and write operations. Contact recording disk files have the advantage of much closer head-disk spacing and its associated improved writing efficiency, read signal response and corresponding storage densities. In one type of contact recording, sometimes referred to as "dry" contact recording to distinguish it from liquid-bearing contact recording, the disk file uses a head assembly in which the head carrier and suspension are formed as an integrated unit and the head carrier makes physical contact with the disk surface during read and write operations. In this type of head suspension, as described for example in U.S. Patent 5,041,932, a portion of the head pole piece and head carrier actually wear away due to frictional contact with the disk over the life of the disk file. Unfortunately, in this type of disk file it is extremely difficult to assemble the disk file so that the head pole piece is perfectly aligned and in complete contact with the disk. Thus, it is necessary to either develop manufacturing processes with improved tolerances or to operate the disk file for an initial wear-in period to wear down the head carrier a sufficient amount so that the head pole piece is in complete contact with the disk. Because the head carrier is formed of relatively hard material in order to provide a relatively long life for the disk file, this initial wear-in period can be unacceptably long.
- The present invention seeks to provide a contact recording disk file with an improved head assembly which permits the head pole piece to be quickly and accurately aligned with the disk.
- Accordingly, in a first aspect of the invention, there is provided a head assembly for use in a contact recording rigid disk file comprising: a carrier having a wear pad for contact with the disk, the wear pad comprising an outer wear layer and an inner layer in contact with the outer layer and having a wear resistance greater than that of the outer layer; and a head supported within the carrier for reading or writing data on the disk, the head having a pole piece extending into the wear pad of the carrier.
- In a second aspect of the invention there is provided a contact recording disk file incorporating a head assembly as defined in the appended claims.
- Thus is disclosed a contact recording disk file with a head-suspension assembly having a head carrier with a dual-layer wear pad. The outer wear layer of the pad is relatively soft compared to a harder inner wear layer. The outer wear layer wears away at a relatively rapid rate during initial wear-in of the head carrier. In this manner the head pole piece, which extends into the wear pad, is rapidly put into contact with the disk, thereby compensating for initial misalignment of the wear pad with the surface of the disk. In the preferred embodiment, both the outer and inner wear layers are formed of essentially amorphous carbon, with the inner layer being doped with various amounts of hydrogen to control wear resistance. In another embodiment the two layers are formed as an essentially single continuous layer, with the hydrogen concentration increasing or decreasing across the thickness of the layer.
- A preferred embodiment of the invention will now be described, by way of example only, with reference to the accompanying drawings in which:
- Fig. 1 is a top view of the contact recording disk file with the cover removed for illustrating schematically the major components;
- Fig. 2 is a side-section view of the integrated head-suspension assembly and disk illustrating the interface between the head carrier and the disk;
- Fig. 3 is a view of the bottom or disk side of the wear pad of the head carrier depicted in Fig. 2;
- Fig. 4 is an enlarged sectional view of the wear pad and pole piece of the head carrier in initial misalignment with the surface of the disk; and
- Figs. 5A-5F are illustrations of the integrated head-suspension assembly with head carrier during steps in the fabrication process.
- Fig. 1 illustrates a contact recording disk file including a
housing 8 in which is mounted arotary actuator 10, and an associatedmagnetic storage disk 12 mounted on aspindle 13 which is rotated by a drive motor (not shown) mounted tohousing 8. Therotary actuator 10 moves the head-suspension assembly of the present invention in an arcuate path across thedisk 12. Therotary actuator 10 includes a voice coil motor (VCM), which comprises acoil 14 movable within the magnetic field of a fixed permanent magnet assembly having acore 16. Anactuator arm 20 is attached to themovable coil 14. The other end of theactuator arm 20 is attached to a combination head-suspension assembly 22 of the present invention. The single-piece head-suspension assembly 22 includes a head-carrier segment 24 and asuspension section 26. Although head-suspension assembly 22 is depicted as a unitary body, it may also be of a two-piece construction where thecarrier segment 24 is joined to thesuspension section 26. Thesuspension section 26 can support the head-carrier segment 24 in contact with the surface ofdisk 12. Theactuator arm 20 may include a plurality of arms with each arm supporting its own head-suspension assembly 22, each of which is associated with a surface of the disks located in the disk file. Therefore, for instance, thedisk 12 can also have a head-suspension assembly 22 mounted to theactuator arm 20 for association with the media surface on the underside ofdisk 12. Further, other head-suspension assemblies may be mounted toactuator 10 for accessing associated top and bottom sides of other disks which may be included in the disk file. - The
suspension section 26 of the head-suspension assembly 22 provides a load to the head-carrier segment 24 which is generally perpendicular to the surface ofdisk 12. This perpendicular load maintains the head-carrier segment 24 in contact with the data surface ofdisk 12 during rotation of thedisk 12. - Referring now to Fig. 2, the head-
suspension assembly 22, which includessuspension section 26 and head-carrier segment 24, is shown in an enlarged sectional view and in contact with the surface ofmagnetic recording disk 12. Thehead carrier 24 of head-suspension assembly 22 has on the end facing disk 12 awear pad 30. As illustrated in the sectional view, thehead carrier 24 has embedded within it an inductive read/write head which includes a pole piece (made up ofpole tips 40, 42), ayoke 32, and a horizontally-oriented coil 34. The pole piece comprisesadjacent pole tips magnetic recording gap 44. In the embodiment depicted in Fig. 2, thehead carrier 24 is formed as a single piece and is integrated with thesuspension 26. However, it is possible that thehead carrier 24 can be fabricated as a separate segment, referred to as a "chiplet", and attached to a separate suspension. Also, while in the embodiment depicted in Fig. 2 the pole piece is part of an inductive read/write head, thehead carrier 24 withwear pad 30 is also usable with other types of magnetic recording heads, such as heads wherein the pole pieces are vertical recording probes (as described in the cited US Patent 5041932), magnetoresistive (MR) sensors with their associated shields, or magnetic flux guides for directing the magnetic flux from the disk to the MR sensor. - Fig. 3 is an illustration of the end of
wear pad 30 which facesdisk 12. The end ofwear pad 30 has awear surface 36 which is essentially coplanar with the ends ofpole tips wear pad 30, in particular thewear surface 36, is maintained in contact with the surface ofdisk 12 and partially wears away over the lifetime of the disk file. The structure of the inductive read/write head, includingyoke 32 andcoils 34, and their method for fabrication as part of the integrated head-suspension assembly 26, is described in further detail in the assignee's copending application EP-A-583921 (published 23/2/94). - Referring now to Fig. 4, the head-
carrier assembly 24 is shown in an enlarged view in a position so as to be initially misaligned with thedisk 12. As shown, because of this initial misalignment, thepole tips disk 12 and only a portion of thewear surface 36 ofwear pad 30 is in contact with the surface ofdisk 12. In accordance with the present invention, thewear pad 30 comprises two layers: a firstouter layer 50, and a secondinner layer 52 which is in contact withlayer 50 and which has a wear resistance significantly higher than that ofouter wear layer 50. - In the preferred embodiment of
head carrier 24, bothouter layer 50 andinner layer 52 are formed of amorphous carbon by sputtering from a graphite target or by plasma-enhanced chemical vapor deposition (PECVD). Doping of these layers with variable amounts of hydrogen is used to adjust wear resistance and hardness of these layers. Generally, either low or high levels of doping lead to low wear resistance and hardness while an intermediate, optimized level of doping results in the best wear resistance and hardness. In the case of PECVD amorphous carbon, low-level hydrogen doping generally means less than approximately 15 atomic percent (at %), intermediate level means approximately 15 to 35 at %, and high level means above approximately 35 at %. When both layers are formed by PECVD or by sputtering, the firstouter layer 50 is deposited with low or high levels of dopant and the secondinner layer 52 is prepared with an intermediate level of hydrogen. Other dopants which alter wear resistance and hardness of the wear layer, such as nitrogen, can also be used. Alternatively, one layer can be formed by sputtering while the second layer can be deposited by PECVD. Other vacuum deposition techniques, such as ion beam deposition and electron cyclotron resonance, can be substituted for sputtering or PECVD. Theouter layer 50 has a thickness preferably in the range of 0.1 to 1.0 micron and theinner layer 52 has a thickness preferably in the range of 1 to 10 microns. - With the
wear pad 30 of thehead carrier 24 according to the present invention, theouter layer 50 wears significantly faster than theinner layer 52 and provides a relatively quick alignment and initial contact ofpole pieces disk 12. Thus, during fabrication, only a relatively brief initial wear-in is required to cause thepole tips disk surface 12. Following the initial wear-in ofouter wear layer 50, theinner layer 52 provides the wear resistance for thehead carrier 24 during the operational life of the disk file. - The preferred method of manufacturing the integrated head-
suspension assembly 22 with thehead carrier 24 will now be explained with reference to Figs. 5A-5F. First, as shown in Fig. 5A, asuitable substrate 100, such as silicon or aluminum oxide/titanium carbide ceramic, has a patterned etch stop 102 formed on it. The etch stop material is preferably a thin layer of chromium or tantalum formed by sputter deposition or evaporation. Next, as shown in Fig. 5B, an alumina (Al₂O₃)layer 104 is deposited ontosubstrate 100 to a thickness equal to the desired height of wear pad 30 (see Fig. 2). Following the deposition of the alumina, a via is etched into the alumina down to theetch stop layer 102, which results in the structure shown in Fig. 5B. This creates a template for the subsequent formation of the wear pad. An alternate technique to create the template for the wear pad is to etch directly into thesubstrate 100 to create a depression for the wear pad. In this case, the height of the wear pad is determined by the depth of the etched depression. - Referring now to Fig. 5C, the next step is the deposition of a
release layer 106, preferably a material such as copper, to a thickness of approximately 2 microns. Theouter wear layer 50 is then deposited ontorelease layer 106. In the preferred embodiment, thelayer 50 is an essentially amorphous carbon film formed by PECVD and is formed to a thickness in the range of 0.1 micron to 1 micron. Next, theinner wear layer 52 is deposited onto theouter wear layer 50. Theinner wear layer 52 is preferably formed by PECVD and is a film of essentially amorphous carbon doped with hydrogen. An organic source, such as cyclohexane, is present during the PECVD process to form the relatively hard carboninner layer 52. The PECVD process may be further modified by a nitrogen doping. Theinner layer 52 is preferably formed to a thickness of 1 to 10 microns. - Alternatively, the outer and inner wear layers 50, 52 can be formed by varying the hydrogen content of sputtered or PECVD carbon in each of the layers. Specifically,
outer layer 50 is deposited carbon with a low or high level of hydrogen dopant concentration andinner layer 52 is deposited carbon having an intermediate concentration of hydrogen. - The
wear layer 30 can also be formed by continuously varying the hydrogen content of the carbon during the period of deposition by PECVD or sputtering. Initially a high or low concentration of dopant is used to provide a low wear resistance in the outer layer, followed by a gradual change to an intermediate hydrogen concentration. This results in essentially a single continuous layer with a graded hardness and wear-resistant profile. - Alumina may also be used as the soft
outer layer 50 in place of amorphous carbon. - Referring now to Fig. 5D, portions of the wear layers 50, 52 are removed by reactive ion etching in areas outside of the subsequently formed
head carrier 24 and in thecentral region 107 where the pole piece of the inductive read/write head will be formed. - Next, as shown in Fig. 5E, the pole piece, including
pole tips yoke 32, and coils 34, is formed. Theyoke 32 andpole pieces pole piece 40 is deposited first and then a gap material, such as alumina or silica, is deposited isotropically. Unwanted gap material is removed by an anisotropic etch process, such as a reactive ion etch, so that gap material remains only on the vertical surfaces shown in Figure 5E. Next,pole piece 42 is deposited adjacent topole piece 40 but is now separated from it bygap 44. After formation of thepole tips gap 44, the structure is covered with insulating polymers or inorganic materials, copper coils 34 are then electroplated, vias are opened to expose the bottom ofyoke 32, and the top ofyoke 32 is plated to complete the head structure. - Following the formation of the inductive read/write head, alumina is next deposited, as shown in Fig. 5F, to the thickness desired for the
suspension 26. Finally, thealumina layer 104 and therelease layer 106 are etched in order to remove the completed head-suspension assembly 22 from thesubstrate 100 and theinitial alumina layer 104. - The following Table 1 lists the experimentally determined wear rates for various materials which can be used in the wear pad. The data was obtained from a conventional 2.5-inch disk drive operating at 3600 RPM. The wear pad had a contact surface area of 35 microns x 35 microns and was loaded onto a smooth carbon-overcoated and lubricated disk with a loading force of 20 mgmf. The local velocity of the disk under the wear pad was 10 m/sec.
Material Initial Wear Rate Long-term Wear Rate alumina 3800 nm/day 75 nm/day sputtered carbon (4 at % hydrogen) 150 nm/ day 13 nm/day sputtered carbon (30 at % hydrogen) 18 nm/day 5 nm/day PECVD carbon (33 at % hydrogen) 6 nm/day 2 nm/day Table 1 - By appropriate selection of the materials in Table 1 to create a dual layer, or by gradually varying the dopant content in amorphous carbon, such as by increasing the hydrogen concentration from the outer layer to the inner layer to provide an essentially continuous single-wear layer, it is possible to fabricate a wear pad which solves the problem of initial misalignment with the disk and achieves high wear resistance over the lifetime of the disk file.
- While the preferred embodiments of the present invention have been illustrated in detail, it should be apparent that modifications and adaptations to those embodiments may occur to one skilled in the art without departing from the scope of the present invention as set forth in the following claims.
Claims (16)
- A head assembly for use in a contact recording rigid disk file comprising:
a carrier having a wear pad for contact with the disk, the wear pad comprising an outer wear layer and an inner layer in contact with the outer layer and having a wear resistance greater than that of the outer layer; and
a head supported within the carrier for reading or writing data on the disk, the head having a pole piece extending into the wear pad of the carrier. - A head assembly as claimed in claim 1 wherein the head comprises an inductive read/write head and wherein the pole piece comprises a pair of pole tips separated by a recording head gap.
- A head assembly as claimed in claim 1 wherein the head comprises a vertical recording head and wherein the pole piece comprises a vertical recording probe.
- A head assembly as claimed in claim 1 wherein the head comprises an inductive write head and a magnetoresistive read head, and wherein the pole piece comprises a magnetoresistive sensor and shields.
- A head assembly as claimed in claim 1 wherein the head comprises a magnetoresistive read head having a magnetoresistive sensor, and wherein the pole piece comprises a flux guide for directing magnetic flux to the magnetoresistive sensor.
- A head assembly as claimed in any preceding claim wherein the wear pad outer layer is formed of essentially amorphous carbon having substantially no hydrogen.
- A head assembly as claimed in claim 6 wherein the inner layer is formed of essentially amorphous carbon containing hydrogen.
- A head assembly as claimed in any of claims 1 - 5 wherein the outer layer is formed of essentially amorphous carbon containing less than approximately 15 atomic percent hydrogen and wherein the inner layer is formed of essentially amorphous carbon containing approximately 15 to 35 atomic percent hydrogen.
- A head assembly as claimed in any of claims 1 to 5 wherein the inner and outer layers of the wear pad are an essentially single continuous layer having a wear resistance which increases from the outward to the inward direction.
- A head assembly as claimed in claim 9 wherein the single continuous layer is formed of essentially amorphous carbon containing hydrogen, the hydrogen concentration varying across the thickness of the single layer.
- A head assembly as claimed in any of claims 1 to 5 wherein both the inner and outer layers are either PECVD-deposited or sputter-deposited layers.
- A head assembly as claimed in any of claims 1 to 5 wherein one layer is a sputter-deposited layer and the other layer is a PECVD-deposited layer.
- A head assembly as claimed in any of claims 1 to 5 wherein the outer layer is alumina.
- A head assembly as claimed in any preceding claim further comprising a suspension connected to the carrier.
- A head assembly as claimed in claim 14 wherein the carrier and suspension are formed as a single-piece integrated assembly.
- A contact recording disk file comprising:
a rigid disk for the storage of data;
means connected to the disk for rotating the disk;
a head assembly as claimed in any preceding claim;
means connected to the carrier for maintaining the wear pad of the carrier generally in contact with the disk during reading or writing of data by the head; and
means connected to the carrier for moving the carrier and supported head across the disk.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US37064 | 1993-03-25 | ||
US08/037,064 US5734519A (en) | 1993-03-25 | 1993-03-25 | Contact magnetic recording disk file with improved head assembly |
Publications (2)
Publication Number | Publication Date |
---|---|
EP0617407A2 true EP0617407A2 (en) | 1994-09-28 |
EP0617407A3 EP0617407A3 (en) | 1995-11-29 |
Family
ID=21892242
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP94302049A Ceased EP0617407A3 (en) | 1993-03-25 | 1994-03-22 | Contact recording disk file and head assembly for use therein. |
Country Status (7)
Country | Link |
---|---|
US (1) | US5734519A (en) |
EP (1) | EP0617407A3 (en) |
JP (1) | JP2721794B2 (en) |
KR (1) | KR940022386A (en) |
CN (1) | CN1039854C (en) |
MY (1) | MY111261A (en) |
SG (1) | SG79174A1 (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1996035212A1 (en) * | 1995-04-29 | 1996-11-07 | International Business Machines Corporation | Micromechanically manufactured read/write head for charge coupled devices |
FR2741470A1 (en) * | 1995-11-22 | 1997-05-23 | Commissariat Energie Atomique | METHOD FOR PRODUCING A PLANAR MAGNETIC HEAD AND HEAD OBTAINED BY THIS METHOD |
EP0974956A2 (en) * | 1998-07-24 | 2000-01-26 | International Business Machines Corporation | Procedure for the selective influencing of oscillation in fine or micromechanical cantileve systems |
US6088320A (en) * | 1997-02-19 | 2000-07-11 | International Business Machines Corporation | Micro-mechanically fabricated read/write head with a strengthening shell on the tip shaft |
CN113470700A (en) * | 2021-06-04 | 2021-10-01 | 杭州欧彬科技有限公司 | Auxiliary device for preventing magnetic head from being abraded based on rotation of magnetic disk |
Families Citing this family (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5949612A (en) * | 1995-03-21 | 1999-09-07 | Censtor Corp. | Low friction sliding hard disk drive system |
US6320725B1 (en) * | 1989-11-27 | 2001-11-20 | Censtor Corporation | Hard disk drive having ring head with predominantly perpendicular media fields |
US6009537A (en) * | 1996-03-29 | 1999-12-28 | Kabushiki Kaisha Toshiba | Disk wear prevention by relocating data in response to a head slide count |
US5940956A (en) * | 1996-10-31 | 1999-08-24 | Aiwa Co., Ltd. | Chemical-mechanical contouring (CMC) method for forming a contoured surface |
US6229671B1 (en) * | 1997-09-22 | 2001-05-08 | Seagate Technology Llc | Shock pads for a slider for a data storage system |
US6624977B1 (en) * | 1997-10-07 | 2003-09-23 | Seagate Technology Llc | Data storage system with slider having variable hardness pad |
WO1999046765A1 (en) * | 1998-03-13 | 1999-09-16 | Hitachi, Ltd. | Magnetic recording medium and magnetic memory |
US5995324A (en) | 1998-05-21 | 1999-11-30 | Maxtor Corporation | Pseudo-contact slider with recessed magneto-resistive transducer |
FR2780196B1 (en) * | 1998-06-23 | 2000-09-22 | Thomson Csf | METHOD FOR PRODUCING A MAGNETIC RECORDING / READING HEAD AND APPLICATION TO A MATRIX HEAD |
US6483668B2 (en) | 1999-01-22 | 2002-11-19 | Seagate Technology Llc | Edge contact protection feature for a disc drive head |
US6304418B1 (en) * | 1999-02-11 | 2001-10-16 | Seagate Technology Llc | Enhanced durability ultra-low-flying-height sliders |
KR100724299B1 (en) * | 1999-05-11 | 2007-06-04 | 소니 가부시끼 가이샤 | Information processor |
US6654205B1 (en) | 1999-11-01 | 2003-11-25 | Maxtor Corporation | Air bearing surface for reducing pressure gradients |
US6466408B2 (en) | 2000-03-16 | 2002-10-15 | International Business Machines Corporation | Storage system slider having trailing edge pad and method for making the same |
US7193805B1 (en) | 2000-03-20 | 2007-03-20 | Maxtor Corporation | Flying-type disk drive slider with micropad |
US6707631B1 (en) * | 2000-03-20 | 2004-03-16 | Maxtor Corporation | Flying-type disk drive slider with wear pad |
US6587314B1 (en) * | 2000-05-16 | 2003-07-01 | International Business Machines Corporation | Enhanced silicon and ceramic magnetoresistive read/write head and a method for producing the same |
US7038884B1 (en) | 2001-02-16 | 2006-05-02 | Maxtor Corporation | Flying-type disk drive slider with self-blending contact pad |
US6852013B2 (en) * | 2001-05-25 | 2005-02-08 | Hitachi Global Storage Technologies Netherlands B.V. | Method of burnishing a burnishable rear pad slider in a disk drive |
US20020197936A1 (en) * | 2001-06-21 | 2002-12-26 | International Business Machines Corporation | Method of burnishing a burnishable rear pad slider in a disk drive |
CN1282159C (en) * | 2002-07-11 | 2006-10-25 | Tdk股份有限公司 | Thin-film magnetic lead, method for generating said film and magnetic disk using said film |
US7495856B2 (en) * | 2004-10-29 | 2009-02-24 | Hitachi Global Storage Technologies Netherlands B.V. | Disk drive slider design for thermal fly-height control and burnishing-on-demand |
US8559136B1 (en) | 2012-11-14 | 2013-10-15 | HGST Netherlands B.V. | Hard amorphous carbon film containing ultratrace hydrogen for magnetic recording media and magnetic heads |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5619518A (en) * | 1979-07-25 | 1981-02-24 | Matsushita Electric Ind Co Ltd | Magnetic head |
WO1988006334A1 (en) * | 1987-02-13 | 1988-08-25 | Akashic Memories Corporation | Surface coating for magnetic head |
WO1989004039A1 (en) * | 1987-10-27 | 1989-05-05 | Thomson-Csf | Magnetic read/write head with abrasion-resistant layer and process for making it |
EP0508565A2 (en) * | 1991-04-10 | 1992-10-14 | Censtor Corporation | Wear-resistant head for contact reading and writing magnetic media |
DE4142202A1 (en) * | 1991-12-20 | 1993-06-24 | Philips Patentverwaltung | Magnetic recording head with wear resistant head - has surface coated with protective layer having crystalline diamond islands covered by carbon@ layer. |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4649448A (en) * | 1983-06-03 | 1987-03-10 | Hitachi, Ltd. | Thin film magnetic head having a sliding surface |
JPS6139918A (en) * | 1984-07-31 | 1986-02-26 | Hitachi Ltd | Slider for thin magnetic head |
FR2611970B1 (en) * | 1987-03-06 | 1989-05-26 | Thomson Csf | METHOD FOR PRODUCING A MAGNETIC HEAD IN THIN FILMS AND APPLICATION TO A RECORDING / READING HEAD |
US5075956A (en) * | 1988-03-16 | 1991-12-31 | Digital Equipment Corporation | Method of making recording heads with side shields |
DE68917875T2 (en) * | 1988-12-06 | 1995-03-02 | Ngk Insulators Ltd | Recording head consisting of a substrate carrying an electrode with a thin-walled contact end part. |
US5136775A (en) * | 1989-01-19 | 1992-08-11 | Pioneer Electronic Corporation | Method of manufacturing a magnetic head having wear resisting films |
US5041932A (en) * | 1989-11-27 | 1991-08-20 | Censtor Corp. | Integrated magnetic read/write head/flexure/conductor structure |
US5159508A (en) * | 1990-12-27 | 1992-10-27 | International Business Machines Corporation | Magnetic head slider having a protective coating thereon |
JPH04258805A (en) * | 1991-02-13 | 1992-09-14 | Nec Corp | Magnetic head |
US5408373A (en) * | 1993-03-15 | 1995-04-18 | International Business Machines Corporation | Integrated transducer-suspension assembly for vertical recording |
-
1993
- 1993-03-25 US US08/037,064 patent/US5734519A/en not_active Expired - Fee Related
-
1994
- 1994-01-14 JP JP6002363A patent/JP2721794B2/en not_active Expired - Fee Related
- 1994-02-25 CN CN94102526A patent/CN1039854C/en not_active Expired - Fee Related
- 1994-02-25 MY MYPI94000458A patent/MY111261A/en unknown
- 1994-02-25 KR KR1019940003412A patent/KR940022386A/en not_active Application Discontinuation
- 1994-03-22 SG SG9600130A patent/SG79174A1/en unknown
- 1994-03-22 EP EP94302049A patent/EP0617407A3/en not_active Ceased
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5619518A (en) * | 1979-07-25 | 1981-02-24 | Matsushita Electric Ind Co Ltd | Magnetic head |
WO1988006334A1 (en) * | 1987-02-13 | 1988-08-25 | Akashic Memories Corporation | Surface coating for magnetic head |
WO1989004039A1 (en) * | 1987-10-27 | 1989-05-05 | Thomson-Csf | Magnetic read/write head with abrasion-resistant layer and process for making it |
EP0508565A2 (en) * | 1991-04-10 | 1992-10-14 | Censtor Corporation | Wear-resistant head for contact reading and writing magnetic media |
DE4142202A1 (en) * | 1991-12-20 | 1993-06-24 | Philips Patentverwaltung | Magnetic recording head with wear resistant head - has surface coated with protective layer having crystalline diamond islands covered by carbon@ layer. |
Non-Patent Citations (4)
Title |
---|
1989 INTERNATIONAL MAGNETICS CONFERENCE, INTERMAG '89, WASHINGTON, DC, USA, 28-31 MARCH 1989, vol. 25, no. 5, ISSN 0018-9464, IEEE TRANSACTIONS ON MAGNETICS, SEPT. 1989, USA, pages 3686-3688, CHAPMAN D W 'A new approach to making thin film head-slider devices' * |
IBM TECHNICAL DISCLOSURE BULLETIN, vol. 32, no. 4B, September 1989 NEW YORK, US, pages 51-53, ANONYMOUS 'Magnetoresistive Magnetic Recording Sensor' * |
IBM TECHNICAL DISCLOSURE BULLETIN, vol. 32, no. 4B, September 1989 NEW YORK, US, pages 62-64, ANONYMOUS 'Thin Film Head for Magnetic Recording' * |
PATENT ABSTRACTS OF JAPAN vol. 005 no. 069 (P-060) ,9 May 1981 & JP-A-56 019518 (MATSUSHITA ELECTRIC IND CO LTD) 24 February 1981, * |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5863450A (en) * | 1955-04-04 | 1999-01-26 | Commissariat A L'energie Atomique | Process for making a plane magnetic head and magnetic head obtained by this process |
WO1996035212A1 (en) * | 1995-04-29 | 1996-11-07 | International Business Machines Corporation | Micromechanically manufactured read/write head for charge coupled devices |
FR2741470A1 (en) * | 1995-11-22 | 1997-05-23 | Commissariat Energie Atomique | METHOD FOR PRODUCING A PLANAR MAGNETIC HEAD AND HEAD OBTAINED BY THIS METHOD |
EP0775997A1 (en) * | 1995-11-22 | 1997-05-28 | Commissariat A L'energie Atomique | Process for producing a planar magnetic head and head obtained by this process |
US6088320A (en) * | 1997-02-19 | 2000-07-11 | International Business Machines Corporation | Micro-mechanically fabricated read/write head with a strengthening shell on the tip shaft |
EP0974956A2 (en) * | 1998-07-24 | 2000-01-26 | International Business Machines Corporation | Procedure for the selective influencing of oscillation in fine or micromechanical cantileve systems |
EP0974956A3 (en) * | 1998-07-24 | 2002-01-02 | International Business Machines Corporation | Procedure for the selective influencing of oscillation in fine or micromechanical cantilever systems |
US6359755B1 (en) | 1998-07-24 | 2002-03-19 | International Business Machines Corporation | Micromechanical cantilever suspension system |
CN113470700A (en) * | 2021-06-04 | 2021-10-01 | 杭州欧彬科技有限公司 | Auxiliary device for preventing magnetic head from being abraded based on rotation of magnetic disk |
Also Published As
Publication number | Publication date |
---|---|
JPH06301930A (en) | 1994-10-28 |
CN1093485A (en) | 1994-10-12 |
KR940022386A (en) | 1994-10-20 |
EP0617407A3 (en) | 1995-11-29 |
JP2721794B2 (en) | 1998-03-04 |
CN1039854C (en) | 1998-09-16 |
SG79174A1 (en) | 2001-03-20 |
US5734519A (en) | 1998-03-31 |
MY111261A (en) | 1999-10-30 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US5734519A (en) | Contact magnetic recording disk file with improved head assembly | |
US6673474B2 (en) | Medium substrate, production method thereof and magnetic disk device | |
JP3803180B2 (en) | Magnetic recording medium, method for manufacturing the same, and magnetic disk drive | |
US7064930B2 (en) | Slider deposits for control of pole-to-disc spacing | |
JPH05205257A (en) | Magnetic recording medium | |
US7532441B2 (en) | MR read head with first and second gap layers | |
JP2012133861A (en) | Magnetic head, method of manufacturing the same, and magnetic recording system | |
US5561570A (en) | Dynamically loaded suspension for contact recording | |
EP0703573A1 (en) | Magnetic recording disk with texturing layer | |
US20060209464A1 (en) | Silicon-made magnetic head slider and method of producing the same | |
US9318140B2 (en) | Exchange enhanced cap manufactured with argon and oxygen implantation | |
US5948532A (en) | Cermet adhesion layer with carbonaceous wear layer for head/disk interfaces | |
EP1204097B1 (en) | Magnetic recording medium, method of manufacture thereof, and magnetic disk apparatus | |
US7656617B2 (en) | Slider and manufacturing method thereof, head gimbal assembly, disk drive with same | |
US6731463B2 (en) | Wafer fabrication for thermal pole tip expansion/recession compensation | |
JP2003508868A (en) | Wear durability using high wear-resistant sliding pad | |
US5898540A (en) | Magnetic head and slider configuration for contact recording having a plurality of tapered surfaces | |
US6205002B1 (en) | Disk drive with textured slider contact region | |
US6509108B2 (en) | Magnetic recording medium and a magnetic disc apparatus, with a CRP or CrMoP reinforcing coat layer | |
WO2003105134A1 (en) | Slider deposits for control of pole-to-disc spacing | |
EP0421591A2 (en) | Method for depositing a protective film on a disk file slider | |
JP2001067660A (en) | Production of magnetic recording medium | |
JP2004022031A (en) | Magnetic disk and magnetic disk device | |
JP2000113443A (en) | Magnetic recording medium and magnetic disk device | |
JPH04251403A (en) | Method and device for magnetic recording and reproducing |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
AK | Designated contracting states |
Kind code of ref document: A2 Designated state(s): DE FR GB |
|
17P | Request for examination filed |
Effective date: 19950117 |
|
PUAL | Search report despatched |
Free format text: ORIGINAL CODE: 0009013 |
|
AK | Designated contracting states |
Kind code of ref document: A3 Designated state(s): DE FR GB |
|
17Q | First examination report despatched |
Effective date: 19970718 |
|
GRAG | Despatch of communication of intention to grant |
Free format text: ORIGINAL CODE: EPIDOS AGRA |
|
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE APPLICATION HAS BEEN REFUSED |
|
18R | Application refused |
Effective date: 19980713 |