EP0603441A1 - Linear gas-tight actuator - Google Patents

Linear gas-tight actuator Download PDF

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Publication number
EP0603441A1
EP0603441A1 EP92403539A EP92403539A EP0603441A1 EP 0603441 A1 EP0603441 A1 EP 0603441A1 EP 92403539 A EP92403539 A EP 92403539A EP 92403539 A EP92403539 A EP 92403539A EP 0603441 A1 EP0603441 A1 EP 0603441A1
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EP
European Patent Office
Prior art keywords
nut
bellows
bearings
actuator
screw
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
EP92403539A
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German (de)
French (fr)
Inventor
Christophe Soutif
Stéphane Godineau
Robert Hugot
Jean-Claude Le Manner
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Sagem SA
Original Assignee
Sagem SA
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Publication date
Priority to FR9113149A priority Critical patent/FR2682938B1/en
Application filed by Sagem SA filed Critical Sagem SA
Priority to EP92403539A priority patent/EP0603441A1/en
Publication of EP0603441A1 publication Critical patent/EP0603441A1/en
Ceased legal-status Critical Current

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/50—Sealings between relatively-movable members, by means of a sealing without relatively-moving surfaces, e.g. fluid-tight sealings for transmitting motion through a wall
    • F16J15/52—Sealings between relatively-movable members, by means of a sealing without relatively-moving surfaces, e.g. fluid-tight sealings for transmitting motion through a wall by means of sealing bellows or diaphragms
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H25/00—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms
    • F16H25/18—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms for conveying or interconverting oscillating or reciprocating motions
    • F16H25/20—Screw mechanisms
    • F16H25/24—Elements essential to such mechanisms, e.g. screws, nuts
    • F16H25/2418—Screw seals, wipers, scrapers or the like

Definitions

  • the present invention relates to linear actuators having to operate in an environment prohibiting the operation of wet lubrication bearings. It finds a particularly important application in devices and installations comprising an actuator which must operate in ultra-vacuum. By way of example of such applications, mention may be made of actuators intended for use on observation or telecommunication satellites, in which pointing devices, such as mirrors or narrow lobe antennas, must be oriented with precision.
  • linear actuators of the type comprising a rotary electric stepper motor whose output shaft is coupled to a screw meshing a nut and immobilized in translation by lubricated guide bearings framing the nut.
  • the present invention aims to provide a linear actuator with wet type lubrication capable of operating under vacuum for long periods of time, which can reach and exceed ten years.
  • it proposes an actuator of the type defined above, in which the external part of the nut is tightly connected, on the one hand to a first casing enclosing the motor and one of the bearings, on the other hand to a second envelope enclosing the other bearing, by bellows respective metal, with high torsional rigidity.
  • the invention therefore makes it possible to eliminate the defects which have hitherto opposed the use of a sealed protective enclosure, namely the risk of leakage progressively reducing the internal pressure to the value prevailing in the environment.
  • all the connections necessary to constitute the enclosure are advantageously made by welding without filler material; this welding can in particular be carried out by laser beam, in the atmosphere of inert gas which it is desirable to maintain in the long term.
  • the bellows must have at the same time a very high torsional rigidity (to avoid any displacement in rotation of the nut, which would be a source of hysteresis and error) and very flexible in translation (so that the opposing forces opposing the longitudinal displacement of the nut are small), it will be advantageous to use a bellows comprising folds of great depth, produced by welding of successive folds (rather than by hydroforming).
  • the depth of the folds will generally be between a third and a half of the external radius of the bellows when the latter is in the axially compressed state. It is also desirable to constitute all of the components of the enclosure from the same metallic material, in order to avoid the welding problems posed by different materials: in particular titanium can be used.
  • the actuator comprises a stepping electric motor 10 of constitution in itself known, but advantageously comprising output links of these redundant coils to mitigate the effects of a possible rupture.
  • the motor output shaft 12 is coupled to a rod 14 so as to drive it in rotation.
  • the shaft 12 is coupled to the rod 14 by means making it possible to compensate for a possible misalignment, comprising a bellows 16 connecting two discs 18 and 20 wedged one on the shaft and l other on the stem.
  • the rod 14 has a central part 22 forming a screw framed by two lateral surfaces 24 and 26 mounted in bearings 28 and 30 for guiding and axial retention.
  • the bearing 28 is mounted in a flange 38 fixed by any means, such as a skirt 34, to the stator of the motor 10.
  • the bearing 30 is placed in an independent housing 32.
  • the screw 22 and the nut 36 are of a type avoiding hysteresis and jolts in operation: it is possible in particular to use a screw with rollers or with recirculation of balls.
  • the pitch of the screw and the nut is chosen according to the desired resolution.
  • the assembly constituted by the motor 10, the coupling of the motor to the rod and the bearing 28 is enclosed in a first envelope which is connected to the external part of the nut 34 by a first metal bellows 40.
  • the housing 32 constitutes a second envelope which is connected to the external part of the nut opposite to the first bellows by a second metal bellows 42.
  • the metal bellows 40 and 42 must have a sufficiently high torsional rigidity to prevent any appreciable rotation of the nut 36, when the first casing 43 and the second casing 32 are fixed, for example due to their mounting on structural elements 44 and 46 respectively. But the bellows must at the same time be as flexible as possible in the axial direction, so as not to oppose a significant force to the motor 10 and also not to exert a force tending to bring the nut towards a particular position when the motor 10 is not supplied.
  • the first envelope 43 may in particular be constituted by a bell enclosing the motor and by the flange 38 welded to the bell. Since the integrity of the enclosure containing the lubricant is conditioned by the absence of porosity of the connections, the components of the sealed enclosure will generally be connected by welding without filler metal. Although electron beam welding can be used, laser beam welding is generally preferred because of the small thicknesses of materials to be welded. In addition, laser welding allows to operate in the presence of the filling gas, which is not the case for electron beam welding.
  • the metal constituting the envelope will generally be titanium, because of its inalterability and its mechanical characteristics, or an alloy based on titanium. Welding can in particular be carried out along the lines indicated by 48 in the figure. An electrical connection between the motor 10 and the outside can be carried out by output pins passing through an attached washer made of a material compatible with the rest of the enclosure, for example made of titanium, through insulating glass beads.
  • the sealed enclosure can in particular be occupied by an atmosphere of inert gas, for example argon, to which helium constituting a tracer gas can be added making it possible to check the leak tightness by penetrant testing.
  • inert gas for example argon
  • helium constituting a tracer gas can be added making it possible to check the leak tightness by penetrant testing.
  • an actuator having a linear stroke of a few centimeters and an accuracy of the order of a micron is achievable by using components which are for the most part commercially available.
  • Such an actuator can in particular allow the adjustment of the angular position of a steering member on board a satellite. Two or three actuators can be used for this purpose, the nuts of which are connected at different points on the periphery of the steering member.

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Transmission Devices (AREA)
  • Connection Of Motors, Electrical Generators, Mechanical Devices, And The Like (AREA)

Abstract

The actuator, which can be used in an environment which does not allow wet lubrication, comprises a rotary electric stepper motor (10), the output shaft (12) of which is coupled to a screw (22) meshing with a nut (36) and immobilised in terms of translation by bearings (28, 30) encasing the nut. The external part of the nut (36) is connected in gastight fashion on the one hand to a first casing (43) containing the motor (10) and one of the bearings (28), and, on the other hand, to a second casing (32) containing the other bearing (30), by respective metal bellows (40, 42) with a high torsional stiffness. <IMAGE>

Description

La présente invention concerne les actuateurs linéaires devant fonctionner dans un environnement interdisant le fonctionnement de paliers à lubrification humide. Elle trouve une application particulièrement importante dans les appareils et installations comportant un actuateur qui doit fonctionner en ultra-vide. A titre d'exemple de telles applications, on peut citer les actuateurs destinés à être utilisés sur des satellites d'observation ou de télécommunication, dans lesquels des organes de pointage, tels que des miroirs ou des antennes à lobe étroit, doivent être orientés avec précision.The present invention relates to linear actuators having to operate in an environment prohibiting the operation of wet lubrication bearings. It finds a particularly important application in devices and installations comprising an actuator which must operate in ultra-vacuum. By way of example of such applications, mention may be made of actuators intended for use on observation or telecommunication satellites, in which pointing devices, such as mirrors or narrow lobe antennas, must be oriented with precision.

On a déjà proposé de constituer des actuateurs linéaires du type comprenant un moteur électrique rotatif pas à pas dont l'arbre de sortie est attelé à une vis engrenant un écrou et immobilisée en translation par des paliers lubrifiés de guidage encadrant l'écrou.It has already been proposed to constitute linear actuators of the type comprising a rotary electric stepper motor whose output shaft is coupled to a screw meshing a nut and immobilized in translation by lubricated guide bearings framing the nut.

Il est impossible d'utiliser des lubrifiants de type humide (graisse ou huile) sous vide poussé, du fait de l'élimination rapide du lubrifiant. On a déjà proposé d'utiliser des lubrifiants secs sur les éléments en mouvement relatif. Mais il subsiste des incertitudes graves sur la tenue à long terme d'une telle lubrification dans un environnement sous vide secondaire.It is impossible to use wet type lubricants (grease or oil) under high vacuum, due to the rapid elimination of the lubricant. It has already been proposed to use dry lubricants on the elements in relative motion. However, there are still serious uncertainties about the long-term performance of such lubrication in a secondary vacuum environment.

La présente invention vise à fournir un actuateur linéaire à lubrification de type humide capable de fonctionner sous vide pendant des durées importantes, pouvant atteindre et dépasser une dizaine d'années. Elle propose dans ce but un actuateur du type ci-dessus défini, dans lequel la partie externe de l'écrou est reliée de façon étanche, d'une part à une première enveloppe enfermant le moteur et un des paliers, d'autre part à une seconde enveloppe enfermant l'autre palier, par des soufflets métalliques respectifs, à rigidité en torsion élevée.The present invention aims to provide a linear actuator with wet type lubrication capable of operating under vacuum for long periods of time, which can reach and exceed ten years. To this end, it proposes an actuator of the type defined above, in which the external part of the nut is tightly connected, on the one hand to a first casing enclosing the motor and one of the bearings, on the other hand to a second envelope enclosing the other bearing, by bellows respective metal, with high torsional rigidity.

On constitue ainsi, du fait de l'absence de tout joint coulissant, une enceinte étanche capable de maintenir une atmosphère contrôlée autour des paliers et de la vis pendant un intervalle de temps très important, donc d'éviter le dégazage et la migration d'un lubrifiant de type humide.There is thus constituted, owing to the absence of any sliding joint, a sealed enclosure capable of maintaining a controlled atmosphere around the bearings and the screw for a very long period of time, therefore avoiding degassing and migration of a wet type lubricant.

L'invention permet donc d'écarter les défauts qui s'opposaient jusqu'ici à l'utilisation d'une enceinte étanche de protection, à savoir le risque de fuite réduisant progressivement la pression interne jusqu'à la valeur qui règne dans l'environnement.The invention therefore makes it possible to eliminate the defects which have hitherto opposed the use of a sealed protective enclosure, namely the risk of leakage progressively reducing the internal pressure to the value prevailing in the environment.

Pour éviter tout risque de fuite aux jonctions, tous les raccordements nécessaires pour constituer l'enceinte sont avantageusement effectués par soudage sans matériau d'apport ; ce soudage peut notamment être effectué par faisceau laser, dans l'atmosphère de gaz inerte qu'il est souhaitable de maintenir à long terme.To avoid any risk of leakage at the junctions, all the connections necessary to constitute the enclosure are advantageously made by welding without filler material; this welding can in particular be carried out by laser beam, in the atmosphere of inert gas which it is desirable to maintain in the long term.

Les soufflets devant avoir en même temps une rigidité en torsion très élevée (pour éviter tout déplacement en rotation de l'écrou, qui serait une source d'hystérésis et d'erreur) et très souple en translation (pour que les forces antagonistes s'opposant au déplacement longitudinal de l'écrou soient faibles), on utilisera avantageusement un soufflet comportant des plis de grande profondeur, réalisés par soudage de plis successifs (plutôt que par hydroformage). La profondeur des plis sera généralement comprise entre le tiers et la moitié du rayon externe du soufflet lorsque ce dernier est dans l'état comprimé axialement. Il est également souhaitable de constituer l'ensemble des composants de l'enceinte en un même matériau métallique, afin d'éviter les problèmes de soudage que posent des matériaux différents : on pourra notamment utiliser le titane.The bellows must have at the same time a very high torsional rigidity (to avoid any displacement in rotation of the nut, which would be a source of hysteresis and error) and very flexible in translation (so that the opposing forces opposing the longitudinal displacement of the nut are small), it will be advantageous to use a bellows comprising folds of great depth, produced by welding of successive folds (rather than by hydroforming). The depth of the folds will generally be between a third and a half of the external radius of the bellows when the latter is in the axially compressed state. It is also desirable to constitute all of the components of the enclosure from the same metallic material, in order to avoid the welding problems posed by different materials: in particular titanium can be used.

L'invention sera mieux comprise à la lecture de la description qui suit d'un actuateur constituant un mode particulier de réalisation de l'invention, donné à titre d'exemple non limitatif. La description se réfère à la figure unique qui l'accompagne et qui est une vue en coupe longitudinale de l'actuateur, l'écrou étant représenté en vue externe.The invention will be better understood on reading the following description of an actuator constituting a particular embodiment of the invention, given as non-limiting example. The description refers to the single figure which accompanies it and which is a view in longitudinal section of the actuator, the nut being shown in external view.

L'actuateur comprend un moteur électrique pas à pas 10 de constitution en elle-même connue, mais comportant avantageusement des liaisons de sortie de ces bobinages redondantes pour pallier les effets d'une rupture éventuelle. L'arbre 12 de sortie du moteur est attelé à une tige 14 de façon à l'entraîner en rotation. Dans le mode de réalisation montré, l'arbre 12 est attelé à la tige 14 par des moyens permettant de compenser un défaut d'alignement éventuel, comportant un soufflet 16 reliant deux disques 18 et 20 calés l'un sur l'arbre et l'autre sur la tige.The actuator comprises a stepping electric motor 10 of constitution in itself known, but advantageously comprising output links of these redundant coils to mitigate the effects of a possible rupture. The motor output shaft 12 is coupled to a rod 14 so as to drive it in rotation. In the embodiment shown, the shaft 12 is coupled to the rod 14 by means making it possible to compensate for a possible misalignment, comprising a bellows 16 connecting two discs 18 and 20 wedged one on the shaft and l other on the stem.

La tige 14 comporte une partie centrale 22 formant vis encadrée par deux portées latérales 24 et 26 montées dans des paliers 28 et 30 de guidage et de maintien axial. Le palier 28 est monté dans un flasque 38 fixé par des moyens quelconques, tels qu'une jupe 34, au stator du moteur 10. Le palier 30 est placé dans un boîtier indépendant 32.The rod 14 has a central part 22 forming a screw framed by two lateral surfaces 24 and 26 mounted in bearings 28 and 30 for guiding and axial retention. The bearing 28 is mounted in a flange 38 fixed by any means, such as a skirt 34, to the stator of the motor 10. The bearing 30 is placed in an independent housing 32.

Sur la vis 22 est monté un écrou 36 capable de se déplacer axialement le long de la vis, mais immobilisé en rotation par des moyens qui seront décrits plus loin. La vis 22 et l'écrou 36 sont d'un type évitant les hystérésis et les à-coups de fonctionnement : on peut notamment utiliser une vis à rouleaux ou à recirculation de billes. Le pas de la vis et de l'écrou est choisi en fonction de la résolution recherchée.On the screw 22 is mounted a nut 36 capable of moving axially along the screw, but immobilized in rotation by means which will be described later. The screw 22 and the nut 36 are of a type avoiding hysteresis and jolts in operation: it is possible in particular to use a screw with rollers or with recirculation of balls. The pitch of the screw and the nut is chosen according to the desired resolution.

Pour assurer l'étanchéité complète de l'espace contenant le lubrifiant destiné à garantir un fonctionnement satisfaisant des paliers et de la liaison vis-écrou, l'ensemble des composants qui viennent d'être décrits est enfermé dans une enceinte étanche, ne comportant aucun joint glissant, que ce soit en translation ou en rotation.To ensure complete sealing of the space containing the lubricant intended to guarantee satisfactory operation of the bearings and of the screw-nut connection, all of the components which have just been described are enclosed in a sealed enclosure, containing no sliding joint, whether in translation or rotation.

Pour cela, l'ensemble constitué par le moteur 10, l'attelage du moteur à la tige et le palier 28 est enfermé dans une première enveloppe qui est reliée à la partie externe de l'écrou 34 par un premier soufflet métallique 40. Le boîtier 32 constitue une seconde enveloppe qui est reliée à la partie externe de l'écrou opposée au premier soufflet par un second soufflet métallique 42.For this, the assembly constituted by the motor 10, the coupling of the motor to the rod and the bearing 28 is enclosed in a first envelope which is connected to the external part of the nut 34 by a first metal bellows 40. The housing 32 constitutes a second envelope which is connected to the external part of the nut opposite to the first bellows by a second metal bellows 42.

Les soufflets métalliques 40 et 42 doivent avoir une rigidité en torsion suffisamment importante pour interdire toute rotation appréciable de 1'écrou 36, lorsque la première enveloppe 43 et la seconde enveloppe 32 sont fixes, par exemple du fait de leur montage sur des éléments de structure respectifs 44 et 46. Mais les soufflets doivent en même temps être aussi souples que possible dans le sens axial, de façon à ne pas opposer une force importante au moteur 10 et à ne pas non plus exercer une force tendant à ramener l'écrou vers une position particulière lorsque le moteur 10 n'est pas alimenté.The metal bellows 40 and 42 must have a sufficiently high torsional rigidity to prevent any appreciable rotation of the nut 36, when the first casing 43 and the second casing 32 are fixed, for example due to their mounting on structural elements 44 and 46 respectively. But the bellows must at the same time be as flexible as possible in the axial direction, so as not to oppose a significant force to the motor 10 and also not to exert a force tending to bring the nut towards a particular position when the motor 10 is not supplied.

Cette condition conduira en général à utiliser des soufflets de grande profondeur, fabriqués par soudage de rondelles en forme, avec formation, au sommet des plis, de cordons arrondis destinés à éviter une accumulation de contraintes. En cas de nécessité, il est possible de maintenir l'écrou dans une position angulaire invariable par un guidage coulissant qui n'est cependant généralement ni nécessaire, car la rigidité en torsion d'un soufflet peut être très élevée, ni souhaitable du fait de la nécessité d'une lubrification supplémentaire.This condition will generally lead to the use of very deep bellows, manufactured by welding shaped washers, with the formation, at the top of the folds, of rounded beads intended to avoid an accumulation of stresses. If necessary, it is possible to maintain the nut in an invariable angular position by a sliding guide which is however generally neither necessary, because the torsional rigidity of a bellows can be very high, nor desirable because of the need for additional lubrication.

La première enveloppe 43 peut notamment être constituée par une cloche enfermant le moteur et par le flasque 38 soudé à la cloche. Etant donné que l'intégrité de l'enceinte contenant le lubrifiant est conditionnée par l'absence de porosité des liaisons, les composants de l'enceinte étanche seront généralement reliés par soudage sans métal d'apport. Bien que l'on puisse utiliser le soudage par faisceau d'électrons, on préférera en général le soudage par faisceau laser, du fait des faibles épaisseurs de matériaux à souder. De plus le soudage laser permet d'opérer en présence du gaz de remplissage, ce qui n'est pas le cas pour le soudage par faisceau d'électrons. Le métal constitutif de l'enveloppe sera généralement le titane, du fait de son inaltérabilité et de ses caractéristiques mécaniques, ou un alliage à base de titane. Le soudage peut notamment être effectué suivant les lignes indiquées par 48 sur la figure. Une liaison électrique entre le moteur 10 et l'extérieur peut être effectuée par des broches de sortie traversant une rondelle rapportée en un matériau compatible avec le reste de l'enceinte, par exemple en titane, à travers des perles de verre isolantes.The first envelope 43 may in particular be constituted by a bell enclosing the motor and by the flange 38 welded to the bell. Since the integrity of the enclosure containing the lubricant is conditioned by the absence of porosity of the connections, the components of the sealed enclosure will generally be connected by welding without filler metal. Although electron beam welding can be used, laser beam welding is generally preferred because of the small thicknesses of materials to be welded. In addition, laser welding allows to operate in the presence of the filling gas, which is not the case for electron beam welding. The metal constituting the envelope will generally be titanium, because of its inalterability and its mechanical characteristics, or an alloy based on titanium. Welding can in particular be carried out along the lines indicated by 48 in the figure. An electrical connection between the motor 10 and the outside can be carried out by output pins passing through an attached washer made of a material compatible with the rest of the enclosure, for example made of titanium, through insulating glass beads.

L'enceinte étanche peut notamment être occupée par une atmosphère de gaz inerte, par exemple d'argon, à laquelle on peut ajouter de l'hélium constituant un gaz traceur permettant de vérifier l'étanchéité par ressuage. Dans le cas où le fonctionnement aura lieu sous vide élevé, il sera généralement avantageux d'établir dans l'enceinte une atmosphère à pression inférieure à la pression atmosphérique normale.The sealed enclosure can in particular be occupied by an atmosphere of inert gas, for example argon, to which helium constituting a tracer gas can be added making it possible to check the leak tightness by penetrant testing. In the case where the operation will take place under high vacuum, it will generally be advantageous to establish in the enclosure an atmosphere at pressure lower than normal atmospheric pressure.

A titre d'exemple, on peut indiquer qu'un actuateur ayant une course linéaire de quelques centimètres et une précision de l'ordre du micron est réalisable en utilisant des composants qui sont pour la plupart disponibles dans le commerce. Un tel actuateur peut notamment permettre le réglage de la position angulaire d'un organe directeur à bord d'un satellite. On peut utiliser notamment à cet effet deux ou trois actuateurs dont les écrous sont reliés à des points différents de la périphérie de l'organe directeur.By way of example, it can be indicated that an actuator having a linear stroke of a few centimeters and an accuracy of the order of a micron is achievable by using components which are for the most part commercially available. Such an actuator can in particular allow the adjustment of the angular position of a steering member on board a satellite. Two or three actuators can be used for this purpose, the nuts of which are connected at different points on the periphery of the steering member.

Claims (5)

Actuateur linéaire comprenant un moteur électrique rotatif pas à pas (10) dont l'arbre de sortie (12) est attelé à une vis (22) engrenant un écrou (36) et immobilisée en translation par des paliers (28,30) encadrant l'écrou, caractérisé en ce que la partie externe de l'écrou (36) est reliée de façon étanche d'une part à une première enveloppe (43) enfermant le moteur (10) et un des paliers (28), d'autre part à une seconde enveloppe (32) enfermant l'autre palier (30), par des soufflets métalliques (40,42) respectifs à rigidité en torsion élevée.Linear actuator comprising a rotary electric stepper motor (10) whose output shaft (12) is coupled to a screw (22) engaging a nut (36) and immobilized in translation by bearings (28,30) framing the nut, characterized in that the external part of the nut (36) is tightly connected on the one hand to a first casing (43) enclosing the motor (10) and one of the bearings (28), on the other part to a second envelope (32) enclosing the other bearing (30), by respective metal bellows (40,42) with high torsional rigidity. Actuateur selon la revendication 1, caractérisé en ce que les enveloppes (32,43) et les soufflets (40,42) sont reliés par soudage sans métal d'apport.Actuator according to claim 1, characterized in that the envelopes (32,43) and the bellows (40,42) are connected by welding without filler metal. Actuateur selon la revendication 2, caractérisé en ce que les soudures de liaison sont effectuées par faisceau laser, les enveloppes, les soufflets et la partie externe de l'écrou étant en titane ou en alliage à base de titane.Actuator according to claim 2, characterized in that the bonding welds are carried out by laser beam, the casings, the bellows and the external part of the nut being made of titanium or of a titanium-based alloy. Actuateur selon la revendication 1, 2 ou 3, caractérisé en ce que les soufflets sont d'un type réalisé par soudage de rondelles et ont une profondeur comprise entre un tiers et la moitié du rayon externe des soufflets à l'état axialement comprimé.Actuator according to claim 1, 2 or 3, characterized in that the bellows are of a type produced by welding of washers and have a depth of between one third and half of the external radius of the bellows in the axially compressed state. Actuateur selon l'une quelconque des revendications précédentes, caractérisé en ce que la vis est du type à rouleaux ou à recirculation de billes.Actuator according to any one of the preceding claims, characterized in that the screw is of the roller or ball recirculation type.
EP92403539A 1991-10-24 1992-12-23 Linear gas-tight actuator Ceased EP0603441A1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FR9113149A FR2682938B1 (en) 1991-10-24 1991-10-24 WATERPROOF LINEAR ACTUATOR.
EP92403539A EP0603441A1 (en) 1991-10-24 1992-12-23 Linear gas-tight actuator

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR9113149A FR2682938B1 (en) 1991-10-24 1991-10-24 WATERPROOF LINEAR ACTUATOR.
EP92403539A EP0603441A1 (en) 1991-10-24 1992-12-23 Linear gas-tight actuator

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EP0603441A1 true EP0603441A1 (en) 1994-06-29

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EP92403539A Ceased EP0603441A1 (en) 1991-10-24 1992-12-23 Linear gas-tight actuator

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FR (1) FR2682938B1 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102013209141A1 (en) 2013-05-16 2014-06-18 Carl Zeiss Laser Optics Gmbh Actuator for optical assembly used for inspecting semiconductor wafer manufacturing process, has actuating object that is partially encased in bellows made of elastomer, in gastight manner
CN109312836A (en) * 2016-06-06 2019-02-05 索尤若驱动有限及两合公司 Linear actuator with the nut and screw rod that are rotatably supported in support cap

Citations (3)

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Publication number Priority date Publication date Assignee Title
US3216264A (en) * 1962-07-06 1965-11-09 Varian Associates Motion translation device
GB2041172A (en) * 1979-01-26 1980-09-03 Elektrowatt Ag Bellows seal for push rod
US4791831A (en) * 1985-10-11 1988-12-20 Reliance Electric Company Gearmotor, housing and associated method

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Publication number Priority date Publication date Assignee Title
JPS63306852A (en) * 1987-06-04 1988-12-14 Mitsubishi Electric Corp Electric discharge machine

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3216264A (en) * 1962-07-06 1965-11-09 Varian Associates Motion translation device
GB2041172A (en) * 1979-01-26 1980-09-03 Elektrowatt Ag Bellows seal for push rod
US4791831A (en) * 1985-10-11 1988-12-20 Reliance Electric Company Gearmotor, housing and associated method

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 013, no. 143 (M-811)7 Avril 1989 & JP-A-63 306 852 ( MITSUBISHI ELECTRIC ) 14 Décembre 1988 *

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102013209141A1 (en) 2013-05-16 2014-06-18 Carl Zeiss Laser Optics Gmbh Actuator for optical assembly used for inspecting semiconductor wafer manufacturing process, has actuating object that is partially encased in bellows made of elastomer, in gastight manner
CN109312836A (en) * 2016-06-06 2019-02-05 索尤若驱动有限及两合公司 Linear actuator with the nut and screw rod that are rotatably supported in support cap
CN109312836B (en) * 2016-06-06 2022-03-04 索尤若驱动有限及两合公司 Linear drive with a nut and a spindle rotatably mounted in a bearing cover

Also Published As

Publication number Publication date
FR2682938A1 (en) 1993-04-30
FR2682938B1 (en) 1994-01-28

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