EP0598763A1 - Acid bath for the galvanic deposition of copper, and the use of such a bath. - Google Patents

Acid bath for the galvanic deposition of copper, and the use of such a bath.

Info

Publication number
EP0598763A1
EP0598763A1 EP92916259A EP92916259A EP0598763A1 EP 0598763 A1 EP0598763 A1 EP 0598763A1 EP 92916259 A EP92916259 A EP 92916259A EP 92916259 A EP92916259 A EP 92916259A EP 0598763 A1 EP0598763 A1 EP 0598763A1
Authority
EP
European Patent Office
Prior art keywords
poly
bath according
aqueous acid
acid bath
methyl
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP92916259A
Other languages
German (de)
French (fr)
Other versions
EP0598763B1 (en
Inventor
Wolfgang Dahms
Horst Westphal
Michael Jonat
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Atotech Deutschland GmbH and Co KG
Original Assignee
Atotech Deutschland GmbH and Co KG
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Filing date
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Application filed by Atotech Deutschland GmbH and Co KG filed Critical Atotech Deutschland GmbH and Co KG
Publication of EP0598763A1 publication Critical patent/EP0598763A1/en
Application granted granted Critical
Publication of EP0598763B1 publication Critical patent/EP0598763B1/en
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Classifications

    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D3/00—Electroplating: Baths therefor
    • C25D3/02—Electroplating: Baths therefor from solutions
    • C25D3/38—Electroplating: Baths therefor from solutions of copper

Definitions

  • the invention relates to an acid bath for the galvanic deposition of shiny, ductile and leveled copper coatings and the use of this combination.
  • the bath according to the invention can be used both to reinforce the conductor tracks of printed circuits and in the decorative sector.
  • the prior art includes baths which contain a mixture of oxygen-containing high-molecular compounds with organic, in particular aromatic thio compounds (DE-AS 1521062).
  • DE-AS 1521062 organic, in particular aromatic thio compounds
  • DE-AS 2039831 describes an acidic copper bath which, in addition to a polymeric oxygen-containing compound and a thio compound with a water-soluble group, also contains at least one dye from the series of the polymeric phenazonium compound in solution. Further work describes the combination of organic thio compounds and polymeric oxygen-containing compounds with other dyes such as crystal violet (EP-PS 71512) or phthalocyanine derivatives with aposafranine (DE-PS 3420999) or a combination with amides (DE-PS 2746938).
  • the object of this invention is to avoid these disadvantages.
  • R 1 is a lower alkyl C- j to C_ j .
  • R 2 is an aliphatic chain or an aromatic radical and a either means 1 or 2.
  • the amount in which the polyalkylene glycol dialkyl ether can be added in order to achieve a significant improvement in the copper deposition is about 0.005 to 30 g / liter; preferably 0.02 to 8.0 g / liter.
  • the real molar mass can be between 500 and 35000 g / mol; preferably 800 to 4000 g / mol.
  • polyaclylene glycol dialkyl ethers are known per se or can be prepared by processes known per se by reacting polyalkylene glycols with an alkylating agent, such as, for example, dimethyl sulfate or tert. Bute " .
  • Table 1 shows examples of the polyalkylene glycol dialkyl ethers to be used according to the invention and their preferred uses. Turning concentration listed: Table 1
  • At least one thio compound with a water-solubilizing group can be added to the compound according to the invention.
  • Further additives, such as nitrogen-containing thio compounds, polymeric nitrogen compounds and / or polymeric phenazonium compounds, can also be added to the bath.
  • Table 2 lists some common thio compounds with water-soluble groups and their preferred application concentration:
  • Table 3 contains examples of nitrogen-containing thio compounds (so-called thiourea derivatives) and Table 4 for polymeric phenazonium compounds and Table 5 for polymeric nitrogen compounds.
  • N-acetylthiourea N-trifluoroacetythiourea N-ethylthiourea N-cyanoacetylthiourea N-allylthiourea o-tolylthiourea N, N'-butylene thiourea thiazolidinethiol (2) 4-thiazolinethiol (2)
  • Imidazolidinthiol (2) (N, • -ethylenethiourea) 4-methyl-2-pyrimidinthiol 2-thiouracil 1 Tables 3 to 5 may possibly be omitted.
  • composition of the bath according to the invention can vary within wide limits.
  • an aqueous solution of the following composition is used:
  • Copper sulfate (CuS0 4 * 5H 2 0) preferably
  • chloride ions Preferably chloride ions
  • copper sulfate instead of copper sulfate, other copper salts can also be used, at least in part.
  • the sulfuric acid can also be partially or completely replaced by fluoroboric acid, methanesulfonic acid or other acids.
  • the chloride ions are added as alkali chloride (eg sodium chloride) or in the form of hydrochloric acid pa.
  • alkali chloride eg sodium chloride
  • hydrochloric acid pa The addition of sodium chloride can be omitted in whole or in part if halogen ions are already present in the additives.
  • customary brighteners, levelers or wetting agents can also be present in the bathroom.
  • the working conditions of the bath are as follows:
  • the electrolyte movement takes place by blowing clean air in, so strongly that the electrolyte surface is in a strong flush.
  • Copper with a content of 0.02 to 0.067% phosphorus is used as the anode.
  • a well-leveled, shiny copper coating is obtained at an electrolyte temperature of 30 ° C. with a current density of 4 A / dm 2 and movement by blowing in air.
  • the electrolyte is now subjected to a permanent load of 500 Ah / 1, the gloss former consumed during the electrolysis being supplemented to set values, the electrolyte at the tub edge shows clear gelatinous polymer framing.
  • the electrolyte is now subjected to a permanent load of 500 Ah / 1, the gloss former consumed during the electrolysis being supplemented to set values, the electrolyte at the tub edge shows clear gelatinous polymer framing.
  • the compound according to the invention polypropylene glycol dimethyl ether
  • the electrolyte shows no polymer framing after aging.
  • the electrolyte is now subjected to a permanent load of 500 Ah / 1, the gloss former consumed during the electrolysis being supplemented to set values, the electrolyte at the tub edge shows clear gelatinous polymer framing.
  • the compound according to the invention octyl monomethyl polyalkyl glycol, is added to the electrolyte in the same amount, the electrolyte shows no polymer framing after aging.

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Electroplating And Plating Baths Therefor (AREA)
  • Electroplating Methods And Accessories (AREA)
  • Chemically Coating (AREA)

Abstract

PCT No. PCT/DE92/00605 Sec. 371 Date Apr. 6, 1994 Sec. 102(e) Date Apr. 6, 1994 PCT Filed Jul. 22, 1992 PCT Pub. No. WO93/03204 PCT Pub. Date Feb. 18, 1993.An aqueous acid bath for the galvanic deposition of bright, ductile and smooth copper coats which is suitable for decorative purposes as well as for strengthening the conductors of printed circuits. The bath is characterized by a content of polyalkylene glycol ether. When combined with thio compounds containing water-soluble groups, these additions produce an electrolyte with excellent stability. Polymeric phenazonium compounds, polymeric nitrogen compounds and/or thio compounds containing nitrogen may also be successfully combined, in addition, depending on the desired properties.

Description

Saures Bad zur galvanischen Abscheidung von Kupfer und dessen Vervendung Acid bath for the galvanic deposition of copper and its use
Die Erfindung betrifft ein saures Bad zur galvanischen Abschei¬ dung glänzender, duktiler und eingeebneter KupferÜberzüge und die Verwendung dieser Kombination. Das erfindungsgemäße Bad kann sowohl zur Verstärkung der Leiterbahnen von gedruckten Schaltun¬ gen als auch auf dem dekorativen Sektor eingesetzt werden.The invention relates to an acid bath for the galvanic deposition of shiny, ductile and leveled copper coatings and the use of this combination. The bath according to the invention can be used both to reinforce the conductor tracks of printed circuits and in the decorative sector.
Es ist seit langem bekannt, daß galvanischen Kupferbädern orga¬ nische Substanzen zugesetzt werden, um glänzende Abscheidungen zu erzielen. Die zahlreichen für diesen Zweck bereits bekannten Verbindungen, wie zum Beispiel Thioharnstoff, Gelatine, Melasse, Kaffee-Extrakt, "basische" Farbstoffe und Thiophosphorsäure- ester, besitzen jedoch keinerlei praktische Bedeutung mehr, da die Qualität der mit ihnen erhaltenen Kupferüberzüge - besonders bezüglich des gleichmäßigen Aussehens, der Härte und der Bruche- longation - nicht den heutigen Anforderungen entsprechen.It has long been known that galvanic copper baths are added with organic substances in order to achieve shiny deposits. However, the numerous compounds already known for this purpose, such as, for example, thiourea, gelatin, molasses, coffee extract, "basic" dyes and thiophosphoric acid esters, are no longer of any practical importance since the quality of the copper coatings obtained with them - particularly with regard to the uniform appearance, hardness and elongation - do not meet today's requirements.
Zum Stand der Technik zählen Bäder, die eine Mischung von sauer¬ stoffhaltigen hochmolekularen Verbindungen mit organischen, ins¬ besondere aromatischen Thioverbindungen (DE-AS 1521062), enthal¬ ten. Diese zeigen aber unbefriegende Ergebnisse bezüglich Me¬ tallsteuerung und/oder Einebnung.The prior art includes baths which contain a mixture of oxygen-containing high-molecular compounds with organic, in particular aromatic thio compounds (DE-AS 1521062). However, these show unsatisfactory results with regard to metal control and / or leveling.
Zur Verbesserung wird in der DE-AS 2039831 ein saures Kupferbad beschrieben, das neben einer polymeren sauerstoffhaltigen Verbindung und einer Thioverbindung mit wasserlöslicher Gruppe noch mindestens einen Farbstoff aus der Reihe der polymeren Phenazoniumverbindung gelöst enthält. Weitere Arbeiten beschrei¬ ben die Kombination von organischen Thioverbindungen und polyme¬ ren sauerstoffhaltigen Verbindungen mit anderen Farbstoffen wie zum Beispiel Kristall-Violett (EP-PS 71512) oder Phthalocyanin- Derivaten mit Apo-Safranin (DE-PS 3420999) oder eine Kombination mit Amiden (DE-PS 2746938) .For improvement, DE-AS 2039831 describes an acidic copper bath which, in addition to a polymeric oxygen-containing compound and a thio compound with a water-soluble group, also contains at least one dye from the series of the polymeric phenazonium compound in solution. Further work describes the combination of organic thio compounds and polymeric oxygen-containing compounds with other dyes such as crystal violet (EP-PS 71512) or phthalocyanine derivatives with aposafranine (DE-PS 3420999) or a combination with amides (DE-PS 2746938).
Nachteilig bei der Verwendung üblicher sauerstoffhaltiger hoch— molekularer Verbindungen ist die Stabilität im Elektrolyten. Bei normaler Anwendung zersetzen sich diese genannten Verbindungen während der Elektrolyse langsam zur wasserunlöslichen Polymeren, die sich immer mehr im Elektrolyten anreichern, an der Wandungen' als Gallerte ausrahmen und schließlich auf der Ware selbst ab¬ lagern, so daß die Ware mit Fehlstellen behaftet und so unbrauchbar wird. Diese Zersetzung wird extrem verstärkt, wenn die Badtemperatur über 28 °C ansteigt.Disadvantageous when using conventional oxygen-containing high molecular compounds is the stability in the electrolyte. With normal use, these compounds decompose slowly during the electrolysis to water-insoluble polymers, which accumulate more and more in the electrolyte, frame on the walls as gelatin and finally deposit on the goods themselves, so that the goods are defective and so on becomes unusable. This decomposition is extremely increased when the bath temperature rises above 28 ° C.
Aufgabe dieser Erfindung ist es, diese Nachteile zu vermeiden.The object of this invention is to avoid these disadvantages.
Diese Aufgabe wird erfindungsgemäß durch ein saures Bad gelöst, daß mindesens einen Polyalkylenglycoldialkyläther der allgemei¬ nen FormelThis object is achieved according to the invention by an acidic bath that at least one polyalkylene glycol dialkyl ether of the general formula
£Rl-0(CH2CH20)n(CH-CH20)ln-R2]a £ Rl-0 (CH 2 CH 2 0) n (CH-CH 2 0) ln -R2] a
CH3 CH 3
enthält, in der n = 8 - 800, vorzugsweise 14 - 90, und m = 0 - 50, vorzugsweise 0 - 20, R1 ein niedriges Alkyl C-j bis C_j., R2 eine aliphatische Kette oder eine aromatischen Rest und a entwe¬ der 1 oder 2 bedeuten .contains, in which n = 8-800, preferably 14-90, and m = 0-50, preferably 0-20, R 1 is a lower alkyl C- j to C_ j ., R 2 is an aliphatic chain or an aromatic radical and a either means 1 or 2.
Die Menge, in den der Polyalkylengylcoldialkyläther zugegeben werden kann, um eine deutlische Verbesserung der Kupferabschei- dung zu erzielen, beträgt etwa 0,005 bis 30 g/Liter; vorzugs¬ weise 0,02 bis 8,0 g/Liter. Die realtive Molmasse kann zwischen 500 und 35000 g/mol betragen; vorzugsweise 800 bis 4000 g/mol.The amount in which the polyalkylene glycol dialkyl ether can be added in order to achieve a significant improvement in the copper deposition is about 0.005 to 30 g / liter; preferably 0.02 to 8.0 g / liter. The real molar mass can be between 500 and 35000 g / mol; preferably 800 to 4000 g / mol.
Die Polyaklylenglycoldialkyläther sind an sich bekannt oder kön¬ nen nach an sich bekannten Verfahren durch Umsetzen von Polyal- kylenglykolen mit einem Alkylierungsmittel, wie z.B. Dime- thylsulfat oder tert. Bute "hergestellt werden.The polyaclylene glycol dialkyl ethers are known per se or can be prepared by processes known per se by reacting polyalkylene glycols with an alkylating agent, such as, for example, dimethyl sulfate or tert. Bute " .
In der Tabelle 1 sind Beispiele der erfindungsgemäß zu verwen¬ denden Polyalkylenglycoldialkyläther sowie ihre bevorzugte An— Wendungskonzentration aufgeführt: Tabelle 1Table 1 shows examples of the polyalkylene glycol dialkyl ethers to be used according to the invention and their preferred uses. Turning concentration listed: Table 1
Polyalkylenglycoldialkyläther bevorzugte Konzentration g/LiterPolyalkylene glycol dialkyl ether preferred concentration g / liter
Dimethyl-polyäthylenglycolätherDimethyl polyethylene glycol ether
Dimethyl-polypropylenglycolätherDimethyl polypropylene glycol ether
Di-tert.-butyl-polyäthylenglycolätherDi-tert-butyl polyethylene glycol ether
Stearyl-monomethyl-polyäthylenglycolätherStearyl monomethyl polyethylene glycol ether
Nonylphenyl-monomethyl-polyäthylenglycoläther Nonylphenyl monomethyl polyethylene glycol ether
Polyäthylen-polypropylen-dimethylätherPolyethylene polypropylene dimethyl ether
(Misch- oder Blockpolymerisat) 0,02 - 5,0(Mixed or block polymer) 0.02 - 5.0
Octyl-monomethyl-polyalkylenätherOctyl monomethyl polyalkylene ether
(Misch- oder Blockpolymerisat) 0,05 - 0,5(Mixed or block polymer) 0.05 - 0.5
Dimethyl-bis(polyalkylenglykol)octylenätherDimethyl bis (polyalkylene glycol) octylene ether
(Misch- oder Blockpolymerisat) 0,02 0,5 ß-Naphthol-monomethyl-polyäthylenglycoläther 0,03 4,0(Copolymer or block polymer) 0.02 0.5 β-naphthol monomethyl polyethylene glycol ether 0.03 4.0
1 Kurzbezeichnung Dimethyl-polyalkylenglykoläther1 short designation dimethyl polyalkylene glycol ether
Zu der erfindungsgemäßen Verbindung können, um glänzende Nieder¬ schläge zu erhalten, zumindestens eine Thioverbindung mit wasserlöslichmachender Gruppe zugesetzt werden. Weitere Zusätze, wie stickstoffhaltige Thioverbindungen, polymere StickstoffVer¬ bindungen und/oder polymere Phenazoniumverbindungen können eben¬ falls dem Bad zugesetzt werden.In order to obtain shiny precipitates, at least one thio compound with a water-solubilizing group can be added to the compound according to the invention. Further additives, such as nitrogen-containing thio compounds, polymeric nitrogen compounds and / or polymeric phenazonium compounds, can also be added to the bath.
Diese Einzelkomponenten des erfindungsgemäßen Kupferbades können im allgemeinen vorteilhaft innerhalb folgender Grenzkonzentrationen im anwendungsfertigen Bad enthalten sein:These individual components of the copper bath according to the invention can in general advantageously be present in the ready-to-use bath within the following limit concentrations:
Übliche organische Thiover¬ bindungen mit wasserlöslichen Gruppen 0,0005 - 0,4 g/LiterUsual organic thio compounds with water-soluble groups 0.0005-0.4 g / liter
vorzugsweise 0,001 - 0,15 g/Liter In der Tabelle 2 sind einige übliche Thioverbindungen mit wasserlöslichen Gruppen sowie ihre bevorzugte Anwendungskonzen¬ tration aufgeführt:preferably 0.001-0.15 g / liter Table 2 lists some common thio compounds with water-soluble groups and their preferred application concentration:
Tabelle 2Table 2
Thioverbindungen bevorzugte Konzentration g/LiterThio compounds preferred concentration g / liter
3-Mercacptopropan-l-sulfonsäure, Natriumsalz 0,002 - 0,13-Mercacptopropane-l-sulfonic acid, sodium salt 0.002-0.1
Thiophosphorsäure-O-äthyl-bis-(u-sulfopropyl)- ester, Dinatriumsalz 0,01 - 0,15Thiophosphoric acid-O-ethyl-bis- (u-sulfopropyl) ester, disodium salt 0.01-0.15
Thiophosphorsäure-tris-(ω-sulfopropyl)-ester,Tri (ω-sulfopropyl) ester of thiophosphoric acid,
Trinatriumsalz 0,02 - 0,15Trisodium salt 0.02-0.15
Thioglycolsäure 0,001 - 0,005Thioglycolic acid 0.001 - 0.005
Äthylendithiodipropylsulfonsäure, Natriumsalz 0,001 - 0,1Ethylene dithiodipropyl sulfonic acid, sodium salt 0.001 - 0.1
Bis-(uj-sulfopropyl)-disulfid, Dinatriumsalz 0,001 - 0,05Bis (uj-sulfopropyl) disulfide, disodium salt 0.001 - 0.05
Bis-(ω-sulfopropyl)-sulfid, Dinatriumsalz 0,01 - 0,15Bis- (ω-sulfopropyl) sulfide, disodium salt 0.01-0.15
O-Äthyl-dithiokohlensäure-S-(t_-sulfopropyl)- ester, Kaliumsalz 0,002 - 0,05O-ethyl-dithiocarbonic acid S- (t_-sulfopropyl) ester, potassium salt 0.002 - 0.05
3(Benzthiazolyl-2-thio)-propylsulfonsäure,3 (benzothiazolyl-2-thio) propyl sulfonic acid,
Natriumsalz 0,005 - 0,1Sodium salt 0.005-0.1
Bis-(w-sulfohydroxypropyl)-disulfid,Bis (w-sulfohydroxypropyl) disulfide,
Dinatriumsalz 0,003 - 0,04Disodium salt 0.003 - 0.04
Bis-(t_»-sulfobutyl)-disulfid, Dinatriumsalz 0,004 - 0,04Bis- (t _ »- sulfobutyl) disulfide, disodium salt 0.004 - 0.04
Bis(p-sulfophenyl)-disulfid, Dinatriumsalz 0,004 - 0,04Bis (p-sulfophenyl) disulfide, disodium salt 0.004 - 0.04
Methyl-(uj-sulfopropyl)-disulfid, Dinatriumsalz 0,007 - 0,08Methyl (uj-sulfopropyl) disulfide, disodium salt 0.007-0.08
Methyl-(ω-sulfopropyl)-trisulfid, Dinatriumsalz 0,005 - 0,03Methyl (ω-sulfopropyl) trisulfide, disodium salt 0.005-0.03
Übliche stickstoffhaltige Thioverbindungen (sog. Thioharnstoff- derivate) und/oder polymere Phenazoniumverbindungen und/oder polymere StickstoffverbindungenUsual nitrogen-containing thio compounds (so-called thiourea derivatives) and / or polymeric phenazonium compounds and / or polymeric nitrogen compounds
0,0001 - 0,50 g/Liter0.0001 - 0.50 g / liter
vorzugsweise 0,0005 - 0,04 g/Liter Tabelle 3 enthält Beispiele für stickstoffhaltige Thioverbindun¬ gen (sog. Thioharnstoffderivate) und Tabelle 4 für polymere Phenazoniumverbindungen und Tabelle 5 für polymere StickstoffVerbindungen.preferably 0.0005-0.04 g / liter Table 3 contains examples of nitrogen-containing thio compounds (so-called thiourea derivatives) and Table 4 for polymeric phenazonium compounds and Table 5 for polymeric nitrogen compounds.
Tabelle 3 Stickstoffhaltige ThioverbindungenTable 3 Nitrogen-containing thio compounds
N-Acetylthioharnstoff N-Trifluoroacetythioharnstoff N-Äthylthioharnstoff N-Cyanoacetylthioharnstoff N-Allylthioharnstoff o-Tolylthioharnstoff N,N'-Butylenthioharnstoff Thiazolidinthiol(2) 4-Thiazolinthiol(2)N-acetylthiourea N-trifluoroacetythiourea N-ethylthiourea N-cyanoacetylthiourea N-allylthiourea o-tolylthiourea N, N'-butylene thiourea thiazolidinethiol (2) 4-thiazolinethiol (2)
Imidazolidinthiol(2) (N, •-Äthylenthioharnstoff) 4-Methyl-2-pyrimidinthiol 2-Thiouracil 1 Tabelle 3 bis 5 können evtl. ausgelassen werden.Imidazolidinthiol (2) (N, • -ethylenethiourea) 4-methyl-2-pyrimidinthiol 2-thiouracil 1 Tables 3 to 5 may possibly be omitted.
Tabelle 4 Polymere PhenazoniumverbindungenTable 4 Polymeric phenazonium compounds
Poly(6-methyl-7-dimethylamino-5-phenyl-phenazoniumsulfat)Poly (6-methyl-7-dimethylamino-5-phenylphenazonium sulfate)
Poly(2-methyl-7-diäthylamino-5-phenyl-phenazoniumchlorid)Poly (2-methyl-7-diethylamino-5-phenyl-phenazonium chloride)
Poly(2-methyl-7-dimethylamino-5-phenyl-phenazoniumsulfat)Poly (2-methyl-7-dimethylamino-5-phenylphenazonium sulfate)
Poly(5-methyl-7-dimethylamino-phenazoniumacetat)Poly (5-methyl-7-dimethylamino-phenazonium acetate)
Poly(2-methyl-7-anilino-5-phenyl-phenazoniumsulfat)Poly (2-methyl-7-anilino-5-phenylphenazonium sulfate)
Poly(2-methyl-7-dimethylamino-phenazoniumsulfat)Poly (2-methyl-7-dimethylamino-phenazonium sulfate)
Poly(7-methylamino-5-phenyl-phenazoniumacetat)Poly (7-methylamino-5-phenylphenazonium acetate)
Poly(7-äthylamino-2,5-diphenyl-phenazoniumchlorid)Poly (7-ethylamino-2,5-diphenyl-phenazonium chloride)
Poly(2,8-dimethyl-7-diäthylamino-5-p-tolyl- phenazoniumchlorid)Poly (2,8-dimethyl-7-diethylamino-5-p-tolylphenazonium chloride)
Poly(2,5,8-triphenyl-7-dimethylamino-phenazoniumsulfat) Poly (2 , 8-d__methyl-7-amino-5-phenyl-phenazoniumsulf at) Poly ( 7 -Dimethylamino-5-pheny 1-phenaz oniumchlor id)Poly (2,5,8-triphenyl-7-dimethylaminophenazonium sulfate) Poly (2, 8-d__methyl-7-amino-5-phenyl-phenazonium sulfate) poly (7-dimethylamino-5-pheny 1-phenaz oniumchloride)
Tabelle 5 Polymere StickstoffverbindungenTable 5 Polymeric nitrogen compounds
PolyäthyleniminPolyethyleneimine
PolyäthylenimidPolyethyleneimide
PolyacrylsäureamidPolyacrylic acid amide
PolypropyleniminPolypropyleneimine
PolybutyleniminPolybutyleneimine
N-MethylpolyäthyleniminN-methylpolyethylenimine
N-AcetylpolyäthyleniminN-acetylpolyethyleneimine
N-ButylpolyäthyleniminN-butylpolyethyleneimine
Die Grundzusammensetzung des erfindungsgemäßen Bades kann in weiten Grenzen schwanken. Im allgemeinen wird eine wässrige Lö¬ sung folgender Zusammensetzung benutzt:The basic composition of the bath according to the invention can vary within wide limits. In general, an aqueous solution of the following composition is used:
Kupfersulfat (CuS04* 5H20) vorzugsweiseCopper sulfate (CuS0 4 * 5H 2 0) preferably
Schwefelsäure vorzugsweisePreferably sulfuric acid
Chloridionen vorzugsweise Preferably chloride ions
Anstelle von Kupfersulfat können zumindest teilweise auch andere Kupfersalze benutzt werden. Auch die Schwefelsäure kann teil¬ weise oder ganz durch Fluoroborsaure, Methansulfonsäure oder an¬ dere Säuren ersetzt werden. Die Chloridionen werden als Alkali chlorid (z.B. Natriumchlorid) oder in Form von Salzsäure p.a. zugesetzt. Die Zugabe von Nätriumchlorid kann ganz oder teil¬ weise entfallen, wenn in den Zusätzen bereits Halogenionen ent¬ halten sind. Außerdem können im Bad auch zusätzlich übliche Glanzbildner, Einebner oder Netzmittel enthalten sein.Instead of copper sulfate, other copper salts can also be used, at least in part. The sulfuric acid can also be partially or completely replaced by fluoroboric acid, methanesulfonic acid or other acids. The chloride ions are added as alkali chloride (eg sodium chloride) or in the form of hydrochloric acid pa. The addition of sodium chloride can be omitted in whole or in part if halogen ions are already present in the additives. In addition, customary brighteners, levelers or wetting agents can also be present in the bathroom.
Zur Herstellung des erfindungsgemäßen Bades werden die Einzelkomponenten der Grundzusammensetzung hinzugefügt.To produce the bath according to the invention, the individual components of the basic composition are added.
Die Arbeitsbedingungen des Bades sind wie folgt:The working conditions of the bath are as follows:
pH-Wert: < 1pH: <1
Temperatur: 15QC - 50°C, vorzugsweise 25βC - 40βCTemperature: 15 Q C - 50 ° C, preferably 25 β C - 40 β C
kath. stromdichte: 0,5 - 12 A/dm2, vorzugsweise 2-7 A/dm2 cath. current density: 0.5 - 12 A / dm 2 , preferably 2-7 A / dm 2
Die Elektrolytbewegung erfolgt durch Einblasen von sauberer Luft, und zwar so stark, daß sich die Elektrolytoberfläche in starker Wallung befindet.The electrolyte movement takes place by blowing clean air in, so strongly that the electrolyte surface is in a strong flush.
Als Anode wird Kupfer mit einem Gehalt von 0,02 bis 0,067 % Phosphor verwendet.Copper with a content of 0.02 to 0.067% phosphorus is used as the anode.
Die folgenden Beispiele dienen zur Erläuterung der Erfindung: The following examples serve to illustrate the invention:
BEISPIEL 1EXAMPLE 1
Einem Kupferbad der ZusammensetzungA copper bath of the composition
200,0 g/Liter Kupfersulfat (CuS04.5 H20)200.0 g / liter copper sulfate (CuS0 4 .5 H 2 0)
65,0 g/Liter Schwefelsäure65.0 g / liter sulfuric acid
0,12 g/Liter Natriumchlorid0.12 g / liter sodium chloride
werden als Glanzbildnerare used as brighteners
0,2 g/Liter Polyäthylenglycol,0.2 g / liter polyethylene glycol,
0,01 g/Liter Bis-(<υ-sulfopropyl)-disufid, Dinatrium¬ salz,0.01 g / liter bis - (<υ-sulfopropyl) disufide, disodium salt,
und 0,02 g/Liter polymeres 7-Dimethylamino-5-phenyl- phenazonium-chloridand 0.02 g / liter polymeric 7-dimethylamino-5-phenylphenazonium chloride
zugegeben. Man erhält bei einer Elektrolyttemperatur von 30 βC mit einer Stromdichte von 4 A/dm2 und Bewegung durch Luftein¬ blasung einen gut eingeebneten glänzenden KupferÜberzug.admitted. A well-leveled, shiny copper coating is obtained at an electrolyte temperature of 30 ° C. with a current density of 4 A / dm 2 and movement by blowing in air.
Wird nun der Elektrolyt einer Dauerbelastung von 500 Ah/1 unter¬ zogen, wobei die während der Elektrolyse verbrauchten Glanzbild¬ ner auf Sollwerte ergänzt werden, so zeigt der Elektrolyt am Wannenrand deutliche gallertartige Polymerausrahmungen.If the electrolyte is now subjected to a permanent load of 500 Ah / 1, the gloss former consumed during the electrolysis being supplemented to set values, the electrolyte at the tub edge shows clear gelatinous polymer framing.
Setzt man dagegen anstelle des Polyäthylenglycols die erfindungsgemäße Verbindung, Polyäthylenglycoldimethyläther in der gleichen Menge dem Elektrolyten zu, so zeigt der Elektrolyt nach der Alterung keine Polymerausrahmungen. BEISPIEL 2If, on the other hand, the compound according to the invention, polyethylene glycol dimethyl ether, is added to the electrolyte in the same amount instead of the polyethylene glycol, the electrolyte shows no polymer framing after aging. EXAMPLE 2
Einem Kupferbad der ZusammensetzungA copper bath of the composition
80 g/Liter Kupfersulfat (CuS04'5 H20)80 g / liter copper sulfate (CuS0 4 '5 H 2 0)
180 g/Liter Schwefelsäure konz.180 g / liter sulfuric acid conc.
0,08 g/Liter Natriumchlorid0.08 g / liter sodium chloride
werden als Glanzbildnerare used as brighteners
0,6 g/Liter Polypropylenglycol,0.6 g / liter polypropylene glycol,
0,02 g/Liter 3-Mercaptopropan-1-sulfonsäure, Natrium¬ salz0.02 g / liter of 3-mercaptopropan-1-sulfonic acid, sodium salt
und 0,003 g/Liter N-Acetylthioharnstoffand 0.003 g / liter of N-acetylthiourea
zugegeben. Bei einer Elektrolyttemperatur von 30 βC enthält man auf gekratztem Kupferlaminat bei einer Stromdichte von 2 A/dm2 glänzende Abscheidungen.admitted. At an electrolyte temperature of 30 C to β contains on gekratztem copper laminate at a current density of 2 A / dm 2 bright deposits.
Wird nun der Elektrolyt einer Dauerbelastung von 500 Ah/1 unter¬ zogen, wobei die während der Elektrolyse verbrauchten Glanzbild¬ ner auf Sollwerte ergänzt werden, so zeigt der Elektrolyt am Wannenrand deutliche gallertartige Polymerausrahmungen.If the electrolyte is now subjected to a permanent load of 500 Ah / 1, the gloss former consumed during the electrolysis being supplemented to set values, the electrolyte at the tub edge shows clear gelatinous polymer framing.
Setzt man dagegen anstelle des Polypropylenglycols die erfindungsgemäße Verbindung, Polypropylenglycoldimethyläther in der gleichen Menge dem Elektrolyten zu, so zeigt der Elektrolyt nach der Alterung keine Polymerausrahmungen.If, on the other hand, the compound according to the invention, polypropylene glycol dimethyl ether, is added to the electrolyte in the same amount instead of the polypropylene glycol, the electrolyte shows no polymer framing after aging.
Ers bla BEISPIEL 3Ers bla EXAMPLE 3
Einem Kupferbad der ZusammensetzungA copper bath of the composition
80 g/Liter Kupfersulfat (CuS04 %5 H20)80 g / liter copper sulfate (CuS0 4 % 5 H 2 0)
200 g/Liter Schwefelsäure konz.200 g / liter sulfuric acid conc.
0,06 g/Liter Natriumchlorid0.06 g / liter sodium chloride
werden als Glanzbildnerare used as brighteners
0,4 g/Liter Octyl-polyalkyläther und0.4 g / liter octyl polyalkyl ether and
0,01 g/Liter Bis-(ω-sulfopropyl)-sulfid, Dinatriumsalz und0.01 g / liter of bis (ω-sulfopropyl) sulfide, disodium salt and
0,01 g/Liter Polyacrylsäureamid0.01 g / liter polyacrylic acid amide
zugegeben. Bei einer Elektrolyttemperatur von 30 βC enthält man auf gekratztem Kupferlaminat bei einer Stromdichte von 2 A/dm2 glänzende Abscheidungen.admitted. At an electrolyte temperature of 30 C to β contains on gekratztem copper laminate at a current density of 2 A / dm 2 bright deposits.
Wird nun der Elektrolyt einer Dauerbelastung von 500 Ah/1 unter¬ zogen, wobei die während der Elektrolyse verbrauchten Glanzbild¬ ner auf Sollwerte ergänzt werden, so zeigt der Elektrolyt am Wannenrand deutliche gallertartige Polymerausrahmungen.If the electrolyte is now subjected to a permanent load of 500 Ah / 1, the gloss former consumed during the electrolysis being supplemented to set values, the electrolyte at the tub edge shows clear gelatinous polymer framing.
Setzt man dagegen anstelle des Octyl-polyalkylglycols die erfin¬ dungsgemäße Verbindung, Octyl-monomethyl-polyalkylglycols in der gleichen Menge dem Elektrolyten zu, so zeigt der Elektrolyt nach der Alterung keine Polymerausrahmungen.If, on the other hand, instead of the octyl polyalkyl glycol, the compound according to the invention, octyl monomethyl polyalkyl glycol, is added to the electrolyte in the same amount, the electrolyte shows no polymer framing after aging.
ERSATZBLATT BEISPIEL 4HE SAT ZB L ATT EXAMPLE 4
Eine Kupferfolie von 40 μm, die aus einem Kupferbad der ZusammensetzungA copper foil of 40 μm, made from a copper bath of the composition
80 g/Liter Kupfersulfat (CuS04.5 H20)80 g / liter copper sulfate (CuS0 4 .5 H 2 0)
200 g/Liter Schwefelsäure konz.200 g / liter sulfuric acid conc.
0,06 g/Liter Natriumchlorid0.06 g / liter sodium chloride
abgeschieden wurde, zeigt eine Bruchelongation von 4,2 %. Nach¬ dem in dem Elektrolytenwas separated, shows a fracture elongation of 4.2%. After in the electrolyte
0,4 g/Liter Dimethyl-polyalkyläther0.4 g / liter dimethyl polyalkyl ether
gelöst wurden, zeigt eine unter gleichen Bedingungen abgeschie¬ dene Folie 12,3 % Bruchelongation. were dissolved, a film deposited under the same conditions shows 12.3% elongation at break.

Claims

PATENTANSPRÜCHE PATENT CLAIMS
1. Wäßriges saures Bad zur galvanischen Abscheidung glänzender-' und eingeebneter Kupferüberzüge, enthaltend Polyalkylengly¬ koldialkyläther der allgemeinen Formel1. Aqueous acid bath for the electrodeposition of shiny and leveled copper coatings containing polyalkylene glycol dialkyl ether of the general formula
(Rl-0(CH2CH20)n(CH-CH20)m-R2)(Rl-0 (CH 2 CH 2 0) n (CH-CH 2 0) m -R 2 )
CH-CH-
in der n = 8 - 800, m = 0 - 50, R1 ein niedriges Alkyl C-j bis Of, R2 eine aliphatische Kette oder aromatischen Rest und a 1 oder 2 bedeuten.in which n = 8-800, m = 0-50, R 1 is a lower alkyl Cj to Of, R 2 is an aliphatic chain or aromatic radical and a is 1 or 2.
2. Wässriges saures Bad gemäß Anspruch 1, enthaltend Polyalkylenglykoldialkyläther oder deren Gemische in Konzen¬ trationen von 0,005 bis 30 g/Liter.2. Aqueous acid bath according to claim 1, containing polyalkylene glycol dialkyl ether or mixtures thereof in concentrations from 0.005 to 30 g / liter.
3. Wässriges saures Bad gemäß Anspruch 1 und 2, enthaltend3. Aqueous acid bath according to claim 1 and 2, containing
Dimethyl-polyäthylenglycolätherDimethyl polyethylene glycol ether
Di-tert.-butyl-polyäthylenglycolätherDi-tert-butyl polyethylene glycol ether
Stearyl-monomethyl-polyäthylenglycolätherStearyl monomethyl polyethylene glycol ether
Nonylphenyl-monomethyl-polyäthylenglycolätherNonylphenyl monomethyl polyethylene glycol ether
Polyäthylen-polypropylen-dimethylglycolätherPolyethylene polypropylene dimethyl glycol ether
Octyl-monomethyl-polyalkylenätherOctyl monomethyl polyalkylene ether
Dimethyl-bis(polyalkylenglykol)octylenäther und/oder ß-Naphthol-monomethyl-polyäthylenglycolätherDimethyl-bis (polyalkylene glycol) octylene ether and / or ß-naphthol monomethyl polyethylene glycol ether
4. Wässriges saures Bad gemäß Ansprüchen 1 bis 3, enthaltend zusätzlich eine Thioverbindung oder ein Gemisch mehrerer Thioverbindungen.4. Aqueous acid bath according to claims 1 to 3, additionally containing a thio compound or a mixture of several thio compounds.
5. Wässriges saures Bad gemäß Anspruch 4, enthaltend 3-Mercacptopropan-1-sulfonsäure, Natriumsalz5. Aqueous acid bath according to claim 4, containing 3-mercacptopropane-1-sulfonic acid, sodium salt
Thiophosphorsäure-0-äthyl-bis-(*j-sulfopropyl)-ester,Thiophosphoric acid-0-ethyl-bis- ( * j-sulfopropyl) ester,
DinatriumsalzDisodium salt
Thiophosphorsäure-tris-(w-sulfopropyl)-ester, Trinatriumsalz' Thiophosphoric acid tris (w-sulfopropyl) ester, trisodium salt '
ThioglycolsäureThioglycolic acid
Äthylendithiodipropylsulfonsäure, NatriumsalzEthylene dithiodipropyl sulfonic acid, sodium salt
Bis-(ω-sulfopropyl)-disulfid, DinatriumsalzBis- (ω-sulfopropyl) disulfide, disodium salt
Bis-(.-sulfopropyl)-sulfid, DinatriumsalzBis - (.- sulfopropyl) sulfide, disodium salt
O-Äthyl-dithiokohlensäure-S-(u?-sulfopropyl)- ester,O-ethyl-dithiocarbonic acid S- (u? -Sulfopropyl) ester,
KaliumsalzPotassium salt
3(Benzthiazolyl-2-thio)-propylsulfonsäure, Natriumsalz3 (benzothiazolyl-2-thio) propyl sulfonic acid, sodium salt
Bis-(ω-sulfohydroxypropyl)-disulfid, DinatriumsalzBis ( ω -sulfohydroxypropyl) disulfide, disodium salt
Bis-(u/-sulfobutyl-disulfid, DinatriumsalzBis (u / sulfobutyl disulfide, disodium salt
Bis-(p-sulfophenyl)-disulfid, DinatriumsalzBis (p-sulfophenyl) disulfide, disodium salt
Methyl- i-sulfopropyl)-disulfid, Dinatriumsalz und/oderMethyl i-sulfopropyl) disulfide, disodium salt and / or
Methyl-(u>-sulfopropyl)-trisulfid, Dinatriumsalz.Methyl (u> sulfopropyl) trisulfide, disodium salt.
6. Wässriges saures Bad gemäß Ansprüchen 4 und 5, enthaltend Thioverbindungen in Konzentrationen von 0,0005 bis 0,4 g/Liter.6. Aqueous acid bath according to claims 4 and 5, containing thio compounds in concentrations of 0.0005 to 0.4 g / liter.
7. Wässriges saures Bad gemäß Ansprüchen 1 bis 6, gekennzeich¬ net durch einen zusätzlichen Gehalt an mindestens einer po¬ lymeren Phenazoniumverbindung.7. Aqueous acid bath according to claims 1 to 6, gekennzeich¬ net by an additional content of at least one polymeric phenazonium compound.
8. Wässriges saures Bad gemäß Anspruch 7 enthaltend8. Aqueous acidic bath according to claim 7 containing
Poly(6-methyl-7-dimethylamino-5-phenyl-phenazoniumsulfat)Poly (6-methyl-7-dimethylamino-5-phenylphenazonium sulfate)
Poly(2-methyl-7-diäthylamino-5-phenyl-phenazoniumchlorid)Poly (2-methyl-7-diethylamino-5-phenyl-phenazonium chloride)
Poly(2-methyl-7-dimethylamino-5-phenyl-phenazoniumsulfat)Poly (2-methyl-7-dimethylamino-5-phenylphenazonium sulfate)
Poly(5-methyl-7-dimethylamino-phenazoniumacetat)Poly (5-methyl-7-dimethylamino-phenazonium acetate)
Poly(2-methyl-7-anilino-5-phenyl-phenazoniumsulfat)Poly (2-methyl-7-anilino-5-phenylphenazonium sulfate)
Poly(2-methyl-7-dimethylamino-phenazoniumsulfat)Poly (2-methyl-7-dimethylamino-phenazonium sulfate)
Poly(7-methylamino-5-phenyl-phenazoniumacetat)Poly (7-methylamino-5-phenylphenazonium acetate)
Poly(7-äthylamino-2,5-diphenyl-phenazoniumchlorid)Poly (7-ethylamino-2,5-diphenyl-phenazonium chloride)
Poly(2,8-dimethyl-7-diäthylamino-5-p-tolyl- phenazoniumchlorid) Poly(2,5,8-triphenyl-7-dimethylamino-phenazoniumsulfat) Poly(2,8-dimethyl-7-amino-5-phenyl-phenazoniumsulfat) und/oder Poly(7-Dimethylamino-5-phenyl-phenazoniumchlorid) .Poly (2,8-dimethyl-7-diethylamino-5-p-tolylphenazonium chloride) Poly (2,5,8-triphenyl-7-dimethylamino-phenazonium sulfate) poly (2,8-dimethyl-7-amino-5-phenyl-phenazonium sulfate) and / or poly (7-dimethylamino-5-phenyl-phenazonium chloride).
9. Wässriges saures Bad gemäß Ansprüchen 7 und 8, enthaltend polymere Phenazoniumverbindungen in Konzentrationen von 0,0001 bis 0,5 g/Liter.9. Aqueous acid bath according to claims 7 and 8, containing polymeric phenazonium compounds in concentrations of 0.0001 to 0.5 g / liter.
10. Wässriges saures Bad gemäß Ansprüchen 1 bis 6, gekennzeich¬ net durch einen zusätzlichen Gehalt an mindestens einem Thi- oharnstoffderivat.10. Aqueous acid bath according to claims 1 to 6, gekennzeich¬ net by an additional content of at least one thiourea derivative.
11. Wässriges saures Bad gemäß Anspruch 10, enthaltend11. Aqueous acid bath according to claim 10, containing
N-AcetylthioharnstoffN-acetylthiourea
N-TrifluoroacetythioharnstoffN-trifluoroacetythiourea
N-ÄthylthioharnstoffN-ethylthiourea
N-CyanoacetylthioharnstoffN-cyanoacetylthiourea
N-Allylthioharnstoff o-TolylthioharnstoffN-allylthiourea o-tolylthiourea
N,N■-ButylenthioharnstoffN, N ■ -butylene thiourea
Thiazolidinthiol(2)Thiazolidin thiol (2)
4-Thiazolinthiol(2)4-thiazolinethiol (2)
Imidazolidinthiol(2) (N,N'-Äthylenthioharnstoff)Imidazolidinthiol (2) (N, N'-ethylene thiourea)
4-Methyl-2-pyrimidinthiol und/oder4-methyl-2-pyrimidine thiol and / or
2-Thiouracil2-thiouracil
12. Wässriges saures Bad gemäß Ansprüchen 10 und 11, enthaltend Thioharnstoffderivat in Konzentrationen von 0,0001 bis 0,5 g/Liter.12. Aqueous acid bath according to claims 10 and 11, containing thiourea derivative in concentrations of 0.0001 to 0.5 g / liter.
13. Wässriges saures Bad gemäß Ansprüchen 1 bis 6, gekennzeich¬ net durch einen zusätzlichen Gehalt mindestens einer polyme ren StickstoffVerbindung.13. Aqueous acid bath according to claims 1 to 6, gekennzeich¬ net by an additional content of at least one polymer ren nitrogen compound.
14. Wässriges saures Bad gemäß Anspruch 13, enthaltend14. Aqueous acid bath according to claim 13, containing
PolyäthyleniminPolyethyleneimine
PolyäthylenimidPolyethyleneimide
PolyacrylsäureamidPolyacrylic acid amide
PolypropyleniminPolypropyleneimine
PolybutyleniminPolybutyleneimine
N-MethylpolyäthyleniminN-methylpolyethylenimine
N-Acetylpolyäthylenimin und/oderN-acetylpolyethylenimine and / or
N-ButylpolyäthyleniminN-butylpolyethyleneimine
15. Wässriges saures Bad gemäß Ansprüchen 13 und 14, enthaltend polymere Stickstoffverbindungen in Konzentrationen von 0,0001 bis 0,5 g/Liter.15. Aqueous acid bath according to claims 13 and 14, containing polymeric nitrogen compounds in concentrations of 0.0001 to 0.5 g / liter.
16. Wässriges saures Bad, gekennzeichnet durch einen Gehalt an Polyalkylenglycoldialkyläther gemäß Ansprüchen 1 bis 3 und Thioverbindungen gemäß gemäß Ansprüchen 4 bis 6.16. Aqueous acid bath, characterized by a content of polyalkylene glycol dialkyl ether according to claims 1 to 3 and thio compounds according to claims 4 to 6.
17. Verwendung des Bades nach mindestens einem der Ansprüche 1 bis 16 zur Verstärkung von Leiterbahnen von gedruckten Schaltungen.17. Use of the bath according to at least one of claims 1 to 16 for reinforcing conductor tracks of printed circuits.
18. Verwendung des Bades nach mindestens einem der Ansprüche l bis 16 zur Herstellung glänzender und eingeebneter Kupfer¬ überzüge.18. Use of the bath according to at least one of claims 1 to 16 for the production of shiny and leveled copper coatings.
ERSATZBLÄTT SPARE BLADE
EP92916259A 1991-08-07 1992-07-22 Acid bath for the galvanic deposition of copper, and the use of such a bath Expired - Lifetime EP0598763B1 (en)

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DE4126502 1991-08-07
PCT/DE1992/000605 WO1993003204A1 (en) 1991-08-07 1992-07-22 Acid bath for the galvanic deposition of copper, and the use of such a bath

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WO1993003204A1 (en) 1993-02-18
EP0598763B1 (en) 1995-12-13
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JPH07505187A (en) 1995-06-08
CA2115062A1 (en) 1993-02-18
US5433840A (en) 1995-07-18
CA2115062C (en) 2005-11-22

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