EP0596924A1 - Continuous vacuum arc broad beam ion source - Google Patents

Continuous vacuum arc broad beam ion source

Info

Publication number
EP0596924A1
EP0596924A1 EP92915546A EP92915546A EP0596924A1 EP 0596924 A1 EP0596924 A1 EP 0596924A1 EP 92915546 A EP92915546 A EP 92915546A EP 92915546 A EP92915546 A EP 92915546A EP 0596924 A1 EP0596924 A1 EP 0596924A1
Authority
EP
European Patent Office
Prior art keywords
cathode
anode
ion
vacuum arc
ion source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP92915546A
Other languages
German (de)
English (en)
French (fr)
Inventor
Ian G. Brown
Robert A. Macgill
James E. Galvin
Michael R. Dickinson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
University of California
Original Assignee
University of California
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by University of California filed Critical University of California
Publication of EP0596924A1 publication Critical patent/EP0596924A1/en
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/08—Ion sources; Ion guns using arc discharge
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/48—Ion implantation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/08—Ion sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/30—Electron or ion beam tubes for processing objects
    • H01J2237/317—Processing objects on a microscale
    • H01J2237/31701—Ion implantation
EP92915546A 1991-07-11 1992-06-25 Continuous vacuum arc broad beam ion source Withdrawn EP0596924A1 (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US872971 1978-02-28
US72856691A 1991-07-11 1991-07-11
US728566 1991-07-11
US87297192A 1992-04-23 1992-04-23
PCT/US1992/005399 WO1993001327A1 (en) 1991-07-11 1992-06-25 Continuous vacuum arc broad beam ion source

Publications (1)

Publication Number Publication Date
EP0596924A1 true EP0596924A1 (en) 1994-05-18

Family

ID=27111712

Family Applications (1)

Application Number Title Priority Date Filing Date
EP92915546A Withdrawn EP0596924A1 (en) 1991-07-11 1992-06-25 Continuous vacuum arc broad beam ion source

Country Status (3)

Country Link
EP (1) EP0596924A1 (ja)
JP (1) JPH06508887A (ja)
WO (1) WO1993001327A1 (ja)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07155618A (ja) * 1993-12-06 1995-06-20 Hitachi Ltd 担持金属触媒、及びその製造方法
DE29505888U1 (de) * 1995-04-05 1995-05-24 Ardenne Anlagentech Gmbh Vorrichtung zum Zünden eines Vakuumlichtbogens
DE19621874C2 (de) * 1996-05-31 2000-10-12 Karlsruhe Forschzent Quelle zur Erzeugung von großflächigen, gepulsten Ionen- und Elektronenstrahlen
RU2685893C1 (ru) * 2018-05-08 2019-04-23 федеральное государственное бюджетное образовательное учреждение высшего образования "Уфимский государственный авиационный технический университет" Способ упрочнения лопаток блиска из легированных сталей

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3555332A (en) * 1967-10-25 1971-01-12 Perkin Elmer Corp Apparatus for producing a high energy beam of selected metallic ions
SU953004A1 (ru) * 1980-12-12 1982-08-23 Предприятие П/Я А-1614 Электродуговой испаритель металлов
US4929322A (en) * 1985-09-30 1990-05-29 Union Carbide Corporation Apparatus and process for arc vapor depositing a coating in an evacuated chamber
FR2619247A1 (fr) * 1987-08-05 1989-02-10 Realisations Nucleaires Et Implanteur d'ions metalliques
US5126030A (en) * 1990-12-10 1992-06-30 Kabushiki Kaisha Kobe Seiko Sho Apparatus and method of cathodic arc deposition

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See references of WO9301327A1 *

Also Published As

Publication number Publication date
WO1993001327A1 (en) 1993-01-21
JPH06508887A (ja) 1994-10-06

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Legal Events

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