EP0595279A1 - Pompe à plateau oscillant - Google Patents

Pompe à plateau oscillant Download PDF

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Publication number
EP0595279A1
EP0595279A1 EP93117372A EP93117372A EP0595279A1 EP 0595279 A1 EP0595279 A1 EP 0595279A1 EP 93117372 A EP93117372 A EP 93117372A EP 93117372 A EP93117372 A EP 93117372A EP 0595279 A1 EP0595279 A1 EP 0595279A1
Authority
EP
European Patent Office
Prior art keywords
pump
disk
drive shaft
rocking
axis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP93117372A
Other languages
German (de)
English (en)
Inventor
Nobuyuki Fukuda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Iwaki Co Ltd
Original Assignee
Iwaki Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Iwaki Co Ltd filed Critical Iwaki Co Ltd
Publication of EP0595279A1 publication Critical patent/EP0595279A1/fr
Withdrawn legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C9/00—Oscillating-piston machines or pumps
    • F04C9/005—Oscillating-piston machines or pumps the piston oscillating in the space, e.g. around a fixed point
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D33/00—Non-positive-displacement pumps with other than pure rotation, e.g. of oscillating type

Definitions

  • This invention relates to a pump, which is free from any mechanical frictional part in a fluid feeding zone in it and suitably applicable for feeding of chemical solution used in a process of semiconductor manufacture or for feeding blood for artificial lugs or artificial heart.
  • Such friction-free pumps there is one, in which a rotor with an impeller is disposed in a pump chamber carrying fluid fed therethrough is supported contactlessly by a magnetic bearing and is driven for rotation from the outside of the pump chamber for pumping operation.
  • the pump chamber is partitioned fluid-tight by a diaphragm, which is deformed reciprocally for pumping operation.
  • the above pump structure using the magnetic bearing is a centrifugal pump with an impeller, and thus can feed process fluid continuously and at a high rate.
  • a special electronic circuit for controlling the magnetic bearing is indispensable, thus posing inevitable problems of complication of the structure and cost increase.
  • As the prior art centrifugal pump without any magnetic bearing there is one, in which a conventional mechanical bearing section is provided in the pump chamber. In this case, frictional rotation in the bearing section causes generation of frictional dust which is introduced into the process fluid in the pump. Therefore, this type of pump can not be applied to cases where intrusion of impurities into process liquid is extremely detested as in the case of semiconductor manufacture. Further, in a blood feed pump for medical purposes, it is necessary to prevent rupture of blood cells during the feed thereof as much as possible. However, the frictional part of the pump is liable to cause rupture of blood cells. Therefore, it is difficult to apply this type of pump to this end.
  • An object of the invention accordingly, is to provide a pump with rocking disk, which can attain a friction-free structure with simple structure and nevertheless has a function of feeding process fluid continuously and at a high rate with a small structure, so that it is suited for feeding process fluid for semiconductor manufacture or feeding blood or the like in medical fields.
  • a pump with rocking disk which comprises a pump casing having a front wall with a central portion thereof formed with a suction port, and a substantially cylindrical barrel with the outer periphery thereof formed with a discharge port, the pump casing defining an inner pump chamber communicating with the suction and discharge ports, a rocking disk disposed in the pump chamber and having a front central portion facing the suction port, a peripheral edge portion facing the discharge port and a rear central portion opposite the front central portion, a drive shaft rotatable about an axis extending through the pump casing in the longitudinal direction thereof and having a free end portion, operative coupling means for coupling the rear central portion of the rocking disk to the free end portion of the drive shaft for relative rotation in a state with the axis of the rocking disk at an angle to the axis of the drive shaft, and a partitioning member stretched between the rocking disk and the pump casing such as to partition the pump chamber fluid-tight, thus permitting rocking motion of
  • the operative coupling means includes a shaft which is integral with the free end portion of the drive shaft and has an inclined axis at an angle to the axis of the drive shaft, and also a bearing is provided between the rear central portion of the rocking disk and the shaft portion.
  • the partitioning member is a bellows surrounding the free end portion of the drive shaft, the bellows having the ends thereof coupled fluid-tight to the rocking disk and the pump casing, respectively.
  • the rocking disk in the pump chamber is operatively coupled by the coupling means to the drive shaft with its axis at an angle to the axis of the drive shaft, and while the drive shaft is rotated, the disk is held prevented from rotation in unison with the drive shaft.
  • the rocking disk without being rotated, undergoes a rocking motion in the pump chamber such that its peripheral edge portion is repeatedly brought toward and away from the front wall of the pump chamber.
  • process fluid in a zone defined between the disk and the front wall of the pump chamber is fed out to the discharge port.
  • the disk although not rotated, effects a pumping operation similar to the centrifugal pumping operation brought about by a vane wheel.
  • the flexible partitioning member stretched between the disk and the pump casing partitions the pump chamber fluid-tight and eliminates any frictional part in the pump chamber.
  • the partitioning member further has a function of preventing the rotation of the disk in unison with the drive shaft, although it permits a rocking motion of the disk.
  • the rocking disk which is disposed in the pump chamber with its axis at an angle to the drive shaft is rocked in the pump chamber without being rotated about its axis, like the impeller of a centrifugal pump it is possible to pump out fluid continuously and at a high rate.
  • the pump is particularly suitably applicable for feeding process liquid in a semiconductor manufacture process, in which intrusion of impurities into the process fluid in the pump is detested, or for feeding feeding blood in artificial lungs or artificial heart.
  • the pump can have a simple mechanical structure without use of any complicated electronic circuit for control. Further, for most part of the whole pump structure, use may be made of components in prior art centrifugal pumps or the like. Thus, the pump can be manufactured easily and at low cost, as well as readily permitting the size reduction design.
  • the shaft may be formed by integrally bending a slight extension of the free end portion of the drive shaft.
  • the partitioning member is a bellows
  • low resistance is offered to the rocking motion of the rocking disk, while sufficiently preventing the rotation of the disk in unison with the drive shaft.
  • the pump thus has satisfactory seal property and high durability.
  • FIG. 1 shows a first embodiment of the pump with rocking disk.
  • the drive motor 12 has a shaft 16 coupled via a coupling 14 to a drive shaft 18 of the motor 18 for torque transmission.
  • the drive shaft 18 is supported in a bearing 22 for rotation around an axis X-X which extends in the longitudinal direction of a pump casing 20 of the pump 10.
  • the drive shaft 18 has one end coupled via the coupling 14 to the motor shaft 16, and its other end extends as a free end 18a into a pump chamber 24 defined in the pump casing 20.
  • the pump chamber 24 is defined in a front part (i.e., left part in Fig. 1) of the pump casing 20 by a substantially circular flat front wall 26 and a substantially cylindrical barrel 28.
  • the front wall 26 has a suction port 30 formed in its central portion, and the barrel 28 has a discharge port 32 formed in an edge portion of the periphery.
  • Designated at 34 is a rocking disk, which is disposed in the pump chamber 24 and has a front central portion 34a facing the suction port 30, a wing-like peripheral edge portion 34b facing the discharge port 32 and a rear central portion 34c opposite said the front central portion 34a.
  • the rocking disk 34 as will be described later in detail, is caused to rock from its state shown by solid line in Fig. 1 to a state shown by a phantom line with the rotation of the drive shaft 18, but its rotation about the axis X-X is prevented.
  • the shape of the space which is defined between the inner surface 26a of the front wall 26 and the front edge surface portion 34b of the disk 34, is changed progressively with the rocking of the disk 34.
  • the disk 34 itself is not rotated, its front edge portion 34b is repeatedly brought toward and away from the inner wall surface 26a of the front wall 26 in a circumferentially excursive motion. With this motion, the process fluid such as a chemical solution entering the pump through the suction port 30 is progressively fed out to the discharge port 32. Pumping operation is performed in this way.
  • the distance D between the front edge portion 34b of the disk 34 and the inner surface 26a of the front wall 26 is small when the former is closest to the latter, that is, when the space between the two is closed. This is so because fluid leaks through the space at a low rate.
  • the rocking disk 34 is supported for rotation via a bearing 38 at the rear central portion 34c in an inclined shaft portion 36 which is integral with the free end 18a of the drive shaft 18.
  • the inclined shaft portion 36 has an inclined axis Y-Y, which intersects with the axis X-X at point P andhas an inclination angle A with respect to the axis X-X.
  • the bearing 38 has its inner race secured to a stepped end portion 36a of the inclined shaft portion 36 and its outer race secured to the mounting member 40.
  • the axis of the disk 34 coincides with the inclined axis Y-Y.
  • Designated at 42 is a bellows serving as a flexible partitioning member.
  • the member 42 surrounds the free end portion 18a of the drive shaft 18. Its one end is made integral with the mounting member 40 on the rear side of the disk 34 ata the rear central portion 34c, while the other end is made integral with a flange 44 of the pump casing 20.
  • the partitioning member 42 is molded as a one-piece molding together with the mounting member 40 and flange 44 from a synthetic resin material. Where a chemical solution is handled as the process fluid in the pump, a highly corrosion-resistant Plastic material, e.g., "Teflon" (a trade name) is used as the molding material.
  • the partitioning member 42 is just like stretched in a pump casing portion on the rear side of the disk 34. By the partitioning member 42 the pump chamber 24 is partitioned fluid-tight.
  • the partitioning member 42 is capable of elongation and contraction in the X-X axis direction to permit the rocking motion of the rocking disk 34. However, since the partitioning member 42 is substantially secured in position although it may undergo slight elastic deformation about the X-X axis, the rotation of the rocking disk 34 about its axis Y-Y, i.e., its rotation following the rotation of the drive shaft 18, is prevented by the partitioning member 42.
  • the inclined shaft 36 is rotated about the axis Y-Y in unison with the drive shaft 18, while it undergoes a rocking motion with an inclination angle A.
  • This motion of the inclined shaft 36 is transmitted via the bearing 38 to the rocking disk 34.
  • the rotation of the inclined shaft 36 to follow the rotation of the drive shaft 18 is prevented by the partitioning member 42 as noted above, and the sole inclined shaft 36 is rotated relative to the disk 34 at the bearing 38.
  • the disk 34 is thus caused to undergo rocking as noted above, thus attaining the pumping action.
  • the peripheral edge portion 34b is parallel to the inner wall surface 26a of the front wall 26 when it is closest to the front wall 26. It is thus possible to set the distance D to a small value, and the disk 34 and front wall 26 may be brought so close as they are almost in contact with each other.
  • the rocking disk 34 is not rotated but is only rocked, and there is no rotationally frictional part in the pump chamber 24.
  • the pump according to the invention is suitably applicable for feeding a process solution or the like in semiconductor manufacture which detects intrusion of impurities. Also, it is suitably applicable to feeding blood or the like in medical fields without problem of rupture of blood cells in a frictional part.
  • Fig. 2 shows a second embodiment.
  • parts like those in the first embodiment are designated by like reference numerals while omitting their description, and the description concerns only a different part from the first embodiment.
  • free end portion 18a of drive shaft 18 is further extended, and integral inclined shaft 36 is formed such that it is slightly off-set with respect to the axis X-X so that the point P of intersection between the inclined axis Y-Y and axis X-X coincides with the apex of front central portion 34a of the rocking disk 34 having a conical shape.
  • the axis Y-Y intersects with the axis X-X at the apex of the front central portion 34a of the disk 34.
  • the front side of the disk 34 does not undergo any excentric motion, but undergoes a sole rocking motion as shown.
  • Fig. 3 shows a third embodiment. Similar to the preceding case, in this embodiment parts like those in the first embodiment are designated by like reference numerals while omitting their description, and only a part different form the first embodiment will be described.
  • free end portion 18a of drive shaft 18 is further extended, and integral inclined shaft 36 is provided in an off-set state.
  • the point P of intersection between the inclined axis Y-Y and axis X-X is set at the center of rocking disk 34.
  • the peripheral edge portion 34d of the disk 34 is caused to rock by drawing a spherical surface with the intersection point P as the center and a radius of R1.
  • the inner peripheral surface 28a of barrel 28 of pump casing 20 is a spherical surface with the intersection point P as the center and a radius of R2, R2 being made closer to R1.
  • discharge port 32 is provided at an off-set position from the barrel 28 facing the edge 34d of the disk 34. This is done so because a sufficient fluid path area can not be secured in the barrel 28. Specifically, a portion of the pump casing 20, in which the front wall 26 and barrel 28 are united to each other, is shifted forwward to form a ring-like communication path 46 between the discharge port 32 and pump chamber 24, thus securing the fluid path.
  • the shape of the pump casing 20, particularly the sectional profile of the barrel 28, may be as shown in Figs. 4(a) to 4(c) in these embodiments.
  • the rocking disk 34 is shown by a phantom line.
  • the radius of the barrel 28 is increased gradually in the direction of flow of fluid toward the discharge port 32.
  • This structure is the same as that of the pump casing of the usual centrifugal pump.
  • the barrel 28 is concentric with the disk 34, and the discharge port 32 extends in the radial direction.
  • the discharge port 32 extends not radially but tangentially. Either of the above structures is applicable to the above embodiments of the invention.
  • the ring-like communication path 46 in the third embodiment is, for instance, formed over the entire circumference as shown in Fig. 4(b).
  • the portions defining the pump chamber 24 and in contact with the process liquid may be made of high corrosion-resistant synthetic resins or like material.
  • the partitioning member 42 since the fluid is partitioned fluid-tight by the partitioning member 42 form the space accommodating the drive shaft, bearing 38, etc., portions other than those forming the pump chamber 24 may be made of any desired material.
  • a bellows is most suitable for permitting the rocking motion of the disk 34 while preventing the rotation thereof.
  • the process fluid that is handled in the pump is not limited to liquid, but the invention is applicable as well to feeding gas such as in an air pump. Further, the above embodiments of the invention may be modified variously.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
EP93117372A 1992-10-28 1993-10-27 Pompe à plateau oscillant Withdrawn EP0595279A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP312992/92 1992-10-28
JP4312992A JPH06173900A (ja) 1992-10-28 1992-10-28 揺動円盤を備えたポンプ

Publications (1)

Publication Number Publication Date
EP0595279A1 true EP0595279A1 (fr) 1994-05-04

Family

ID=18035938

Family Applications (1)

Application Number Title Priority Date Filing Date
EP93117372A Withdrawn EP0595279A1 (fr) 1992-10-28 1993-10-27 Pompe à plateau oscillant

Country Status (3)

Country Link
EP (1) EP0595279A1 (fr)
JP (1) JPH06173900A (fr)
KR (1) KR940009530A (fr)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ITTO20100716A1 (it) * 2010-08-27 2012-02-28 Captech S R L Macchina a fluido con disco oscillante
WO2019081966A1 (fr) * 2017-10-26 2019-05-02 Paul Zehnder Pompe à disque en nutation
WO2020136255A1 (fr) * 2018-12-27 2020-07-02 Saint-Gobain Performance Plastics France Dispositif servant à faire circuler un fluide
US12018672B2 (en) 2020-04-02 2024-06-25 Idex Health And Science Llc Precision volumetric pump with a bellows hermetic seal

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1143675A (fr) * 1900-01-01
FR1049230A (fr) * 1952-01-18 1953-12-29 Perfectionnements aux pompes ou appareils à fluide comportant un piston dont l'axe décrit un cône
GB752435A (en) * 1954-10-18 1956-07-11 Richard Thomas Cornelius Improvements in or relating to rotary pumps
FR1361933A (fr) * 1963-03-04 1964-05-29 Rech S Et D Expl S Ind Sorexi Perfectionnements aux pompes rotatives
FR84244E (fr) * 1963-09-05 1964-12-24 Machines motrices ou opératrices à fluide

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0373163A (ja) * 1989-05-22 1991-03-28 Olympus Optical Co Ltd 血液ポンプ

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1143675A (fr) * 1900-01-01
FR1049230A (fr) * 1952-01-18 1953-12-29 Perfectionnements aux pompes ou appareils à fluide comportant un piston dont l'axe décrit un cône
GB752435A (en) * 1954-10-18 1956-07-11 Richard Thomas Cornelius Improvements in or relating to rotary pumps
FR1361933A (fr) * 1963-03-04 1964-05-29 Rech S Et D Expl S Ind Sorexi Perfectionnements aux pompes rotatives
FR84244E (fr) * 1963-09-05 1964-12-24 Machines motrices ou opératrices à fluide

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ITTO20100716A1 (it) * 2010-08-27 2012-02-28 Captech S R L Macchina a fluido con disco oscillante
WO2019081966A1 (fr) * 2017-10-26 2019-05-02 Paul Zehnder Pompe à disque en nutation
WO2020136255A1 (fr) * 2018-12-27 2020-07-02 Saint-Gobain Performance Plastics France Dispositif servant à faire circuler un fluide
FR3091318A1 (fr) * 2018-12-27 2020-07-03 Saint-Gobain Performance Plastics France Dispositif pour la mise en circulation d’un fluide
US12018672B2 (en) 2020-04-02 2024-06-25 Idex Health And Science Llc Precision volumetric pump with a bellows hermetic seal

Also Published As

Publication number Publication date
KR940009530A (ko) 1994-05-20
JPH06173900A (ja) 1994-06-21

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