EP0585622A2 - Method for length or angle measurement devices - Google Patents

Method for length or angle measurement devices Download PDF

Info

Publication number
EP0585622A2
EP0585622A2 EP93112309A EP93112309A EP0585622A2 EP 0585622 A2 EP0585622 A2 EP 0585622A2 EP 93112309 A EP93112309 A EP 93112309A EP 93112309 A EP93112309 A EP 93112309A EP 0585622 A2 EP0585622 A2 EP 0585622A2
Authority
EP
European Patent Office
Prior art keywords
tracks
reading
track
material measure
read
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP93112309A
Other languages
German (de)
French (fr)
Other versions
EP0585622B1 (en
EP0585622A3 (en
Inventor
Günther Dr.-Ing. Nelle
Siegbert Ing. Grad. Holstein
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dr Johannes Heidenhain GmbH
Original Assignee
Dr Johannes Heidenhain GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dr Johannes Heidenhain GmbH filed Critical Dr Johannes Heidenhain GmbH
Publication of EP0585622A2 publication Critical patent/EP0585622A2/en
Publication of EP0585622A3 publication Critical patent/EP0585622A3/en
Application granted granted Critical
Publication of EP0585622B1 publication Critical patent/EP0585622B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
    • G01D5/249—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains using pulse code
    • G01D5/2497—Absolute encoders
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03M—CODING; DECODING; CODE CONVERSION IN GENERAL
    • H03M1/00—Analogue/digital conversion; Digital/analogue conversion
    • H03M1/12—Analogue/digital converters
    • H03M1/22—Analogue/digital converters pattern-reading type
    • H03M1/24—Analogue/digital converters pattern-reading type using relatively movable reader and disc or strip
    • H03M1/28—Analogue/digital converters pattern-reading type using relatively movable reader and disc or strip with non-weighted coding
    • H03M1/287—Analogue/digital converters pattern-reading type using relatively movable reader and disc or strip with non-weighted coding using gradually changing slit width or pitch within one track; using plural tracks having slightly different pitches, e.g. of the Vernier or nonius type

Definitions

  • the invention relates to a method in length or angle measuring devices according to the preamble of claim 1 or 2.
  • Such methods are used in particular in machine tools for measuring the relative position of a tool with respect to a workpiece to be machined, and in coordinate measuring machines for determining the position and / or dimensions of test objects.
  • An incremental displacement measuring device has a graduation carrier with an incremental graduation, which is sampled by a scanning device for generating periodic scanning signals, from which counting pulses for each division increment or, after electronic interpolation, for a fraction of a division increment are obtained in an evaluation device.
  • the counting of these counting pulses in a counter provides the current position measurement value and is carried out in each case from freely selectable measurement reference positions of this incremental division; coded reference marks, the positions of which are permanently assigned to certain positions, can be assigned to these measuring reference positions for mutual differentiation.
  • Such a position measuring device and a method for forming measured values is known from WO 89/11080. The following is described there:
  • two tracks are scanned by means of two sensors, each of which generates a sinusoidal signal pair (cos ⁇ ; sin ⁇ ; cos ⁇ , sin ⁇ ) or a similar periodic signal with a phase position defined at any time, whose period length behaves like n / n + 1.
  • the relative distance sought then results as the difference between the two phase positions.
  • the invention is based on the object of specifying a method with which a measuring device for dynamic absolute position determination can be operated, incremental measuring signals being determined and corrected sequentially in multi-track measuring devices.
  • a length measuring device shown in FIG. 1 has an illumination source 1 and a condenser 2, which direct parallel light onto a material measure 3.
  • the material measure 3 has four tracks with measuring graduations 4, 5, 6 and 7, the division periods of which differ from one another.
  • a scanning plate 8 and a detector unit 9 are provided, the scanning and detector fields of which are adapted and assigned to the measurement divisions are.
  • An evaluation device bears reference number 10.
  • Each track of the measuring divisions 4, 5, 6 and 7 is scanned in a known manner with four scanning fields offset by 1/4 division period from one another.
  • two sinusoidal signals offset from one another by 1/4 division period are generated per track from each measuring division 4, 5, 6 and 7 in a known manner and can be interpolated in predetermined steps.
  • a suitable gradation of the division periods to one another enables particularly simple and reliable coding of the absolute position value to be determined.
  • the mathematical correlations of the gradations are to be chosen in a suitable manner.
  • Figure 2 shows a material measure 3, the graduations 31, 32, 33, 34 and 35 are graduated according to a scheme that is described in a previously unpublished application with the file number P 41 25 865.7. For technical reasons, the principle has been exaggerated.
  • the scanning plate 8 shown in FIG. 1 for scanning the first track 31 is on the reading line t equal to t1.
  • the scanning plate 8 is located on the reading line t2, etc. during the scanning of the second track 32.
  • measured values are available for the individual tracks 31, 32, 33, 34, and 35, which differ by an amount of shift from the measured value of the first read track.
  • the first track 31 is additionally scanned a second time and a second measured value is generated for this track.
  • This second measured value arises at a time in which the scanning plate 8 is located on the reading line t6 and is offset against the first measured value from the first scan at t1. This path difference is saved.
  • a coded position value at the time of the first reading on the reading line t1 of the first track 31 is calculated from the measured values of the individual tracks 31, 32, 33, 34 and 35 corrected in this way at the different reading times on the reading lines t1 to t6.
  • the path between these readings and thus a correction value for the readings can be determined directly from the time between the readings of the reference track and the further tracks via the relative speed.

Landscapes

  • Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Devices For Conveying Motion By Means Of Endless Flexible Members (AREA)
  • Length-Measuring Instruments Using Mechanical Means (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)

Abstract

Bei einem Verfahren bei Längen- oder Winkelmeßeinrichtungen wird die Relativgeschwindigkeit zwischen Maßverkörperung und Abtastplatte durch zweimaliges Ablesen einer Spur (31) zu unterschiedlichen Zeiten ermittelt. Daraus werden Korrekturwerte für die anderen Spuren (32 bis 35) errechnet, die die zu unterschiedlichen Zeiten ermittelten Meßwerte der einzelnen Spuren (31 bis 35) auf gleichzeitige Werte zurückführen. <IMAGE>In a method in the case of length or angle measuring devices, the relative speed between the measuring standard and the scanning plate is determined by reading a track (31) twice at different times. Correction values for the other tracks (32 to 35) are calculated therefrom, which bring the measured values of the individual tracks (31 to 35) determined at different times back to simultaneous values. <IMAGE>

Description

Die Erfindung bezieht sich auf ein Verfahren bei Längen- oder Winkelmeßeinrichtungen gemäß dem Oberbegriff des Anspruches 1 oder 2.The invention relates to a method in length or angle measuring devices according to the preamble of claim 1 or 2.

Derartige Verfahren werden insbesondere bei Bearbeitungsmaschinen zur Messung der Relativlage eines Werkzeugs bezüglich eines zu bearbeitenden Werkstücks sowie bei Koordinatenmeßmaschinen zur Ermittlung von Lage und/oder Abmessungen von Prüfobjekten eingesetzt.Such methods are used in particular in machine tools for measuring the relative position of a tool with respect to a workpiece to be machined, and in coordinate measuring machines for determining the position and / or dimensions of test objects.

Bei den zu solchen Messungen dienenden Meßeinrichtungen wird zwischen inkrementalen Längen- oder Winkelmeßeinrichtungen und absoluten Längen- oder Winkelmeßeinrichtungen unterschieden.In the measuring devices used for such measurements, a distinction is made between incremental length or angle measuring devices and absolute length or angle measuring devices.

Eine inkrementale Wegmeßeinrichtung weist einen Teilungsträger mit einer inkrementalen Teilung auf, die von einer Abtasteinrichtung zur Erzeugung von periodischen Abtastsignalen abgetastet wird, aus denen in einer Auswerteeinrichtung Zählimpulse für jedes Teilungsinkrement oder nach elektronischer Interpolation für einen Bruchteil eines Teilungsinkrementes gewonnen werden. Die Zählung dieser Zählimpulse in einem Zähler liefert den momentanen Positionsmeßwert und erfolgt jeweils von frei wählbaren Meßbezugslagen dieser inkrementalen Teilung ausgehend; diesen Meßbezugslagen können zur gegenseitigen Unterscheidung codierte Referenzmarken zugeordnet sein, deren Lagen bestimmten Positionen fest zugeordnet sind.An incremental displacement measuring device has a graduation carrier with an incremental graduation, which is sampled by a scanning device for generating periodic scanning signals, from which counting pulses for each division increment or, after electronic interpolation, for a fraction of a division increment are obtained in an evaluation device. The counting of these counting pulses in a counter provides the current position measurement value and is carried out in each case from freely selectable measurement reference positions of this incremental division; coded reference marks, the positions of which are permanently assigned to certain positions, can be assigned to these measuring reference positions for mutual differentiation.

Eine derartige Positionsmeßeinrichtung und ein Verfahren zur Meßwertbildung ist aus der WO 89/11080 bekannt. Dort wird folgendes beschrieben:Such a position measuring device and a method for forming measured values is known from WO 89/11080. The following is described there:

Um in einer Positionsmeßeinrichtung praktisch jederzeit ein lagecodiertes Signal zu erzeugen, werden zwei Spuren mittels zweier Sensoren abgetastet, die je ein sinusförmiges Signalpaar (cos α; sin α; cos β, sin β) oder ein ähnliches periodisches Signal mit einer jederzeit definierten Phasenlage erzeugen, deren Periodenlänge sich wie n/n+1 verhalten. Der gesuchte Relativabstand ergibt sich dann als Differenz der beiden Phasenlagen.In order to generate a position-coded signal in a position measuring device at practically any time, two tracks are scanned by means of two sensors, each of which generates a sinusoidal signal pair (cos α; sin α; cos β, sin β) or a similar periodic signal with a phase position defined at any time, whose period length behaves like n / n + 1. The relative distance sought then results as the difference between the two phase positions.

Der Erfindung liegt die Aufgabe zugrunde, ein Verfahren anzugeben mit dem eine Meßeinrichtung zur dynamischen absoluten Positionsbestimmung betrieben werden kann, wobei inkrementale Meßsignale bei mehrspurigen Meßeinrichtungen sequentiell ermittelt und korrigiert werden.The invention is based on the object of specifying a method with which a measuring device for dynamic absolute position determination can be operated, incremental measuring signals being determined and corrected sequentially in multi-track measuring devices.

Diese Aufgabe wird mit einem Verfahren gelöst, das die Verfahrensschritte des Anspruches 1 oder 2 enthält.This object is achieved with a method which contains the method steps of claim 1 or 2.

Die Vorteile des erfindungsgemäßen Verfahrens liegen darin, daß mit wenigen Inkrementalspuren eine absolutcodierte Position bei großer Meßlänge und mit hoher Auflösung bestimmt werden kann, wobei die Signale jeder Inkrementalspur interpolationsgeeignet sind und die Interpolationswerte jeder Spur bei dynamischer Abtastung korrigiert werden. Aufwendige Sample- and Hold-Glieder für jede Spur können entfallen.The advantages of the method according to the invention lie in the fact that an absolutely coded position can be determined with a large measuring length and with high resolution with only a few incremental tracks, the signals of each incremental track being suitable for interpolation and the interpolation values of each track being corrected during dynamic scanning. Elaborate sample and hold elements for each track can be omitted.

Mit Hilfe von Ausführungsbeispielen wird die Erfindung anhand der Schema-Zeichnungen noch näher erläutert:With the help of exemplary embodiments, the invention is explained in more detail with reference to the schematic drawings:

Es zeigt

Figur 1
die Kernmerkmale einer Längenmeßeinrichtung und
Figur 2
eine Maßverkörperung mit Bezugsspur.
It shows
Figure 1
the key features of a length measuring device and
Figure 2
a material measure with reference track.

Eine in Figur 1 dargestellte Längenmeßeinrichtung weist eine Beleuchtungsquelle 1 und einen Kondensor 2 auf, die paralleles Licht auf eine Maßverkörperung 3 richten. Die Maßverkörperung 3 weist vier Spuren mit Meßteilungen 4, 5, 6 und 7 auf, deren Teilungsperioden sich voneinander unterscheiden.A length measuring device shown in FIG. 1 has an illumination source 1 and a condenser 2, which direct parallel light onto a material measure 3. The material measure 3 has four tracks with measuring graduations 4, 5, 6 and 7, the division periods of which differ from one another.

Des weiteren ist eine Abtastplatte 8 und eine Detektoreinheit 9 vorgesehen, deren Abtast- und Detektorfelder den Meßteilungen angepaßt und zugeordnet sind. Eine Auswerteeinrichtung trägt das Bezugszeichen 10.Furthermore, a scanning plate 8 and a detector unit 9 are provided, the scanning and detector fields of which are adapted and assigned to the measurement divisions are. An evaluation device bears reference number 10.

Jede Spur der Meßteilungen 4, 5, 6 und 7 wird in bekannter Weise mit vier um 1/4 Teilungsperiode zu einander versetzten Abtastfeldern abgetastet. Dadurch werden in bekannter Weise je Spur aus jeder Meßteilung 4, 5, 6 und 7 zwei um 1/4 Teilungsperiode zueinander versetzte sinusförmige Signale erzeugt, die in vorbestimmbaren Schritten interpolationsfähig sind.Each track of the measuring divisions 4, 5, 6 and 7 is scanned in a known manner with four scanning fields offset by 1/4 division period from one another. As a result, two sinusoidal signals offset from one another by 1/4 division period are generated per track from each measuring division 4, 5, 6 and 7 in a known manner and can be interpolated in predetermined steps.

Eine geeignete Abstufung der Teilungsperioden zueinander ermöglicht eine besonders einfache und zuverlässige Auscodierung des zu ermittelnden absoluten Positionswertes. Die mathematischen Zusammenhänge der Teilungsabstufungen sind in geeigneter Weise zu wählen.A suitable gradation of the division periods to one another enables particularly simple and reliable coding of the absolute position value to be determined. The mathematical correlations of the gradations are to be chosen in a suitable manner.

Figur 2 zeigt eine Maßverkörperung 3, deren Meßteilungen 31, 32, 33, 34 und 35 nach einem Schema abgestuft sind, das in einer nicht vorveröffentlichten Anmeldung mit dem Aktenzeichen P 41 25 865.7 beschrieben ist. Aus zeichentechnischen Gründen ist das Prinzip allerdings stark übertrieben dargestellt worden.Figure 2 shows a material measure 3, the graduations 31, 32, 33, 34 and 35 are graduated according to a scheme that is described in a previously unpublished application with the file number P 41 25 865.7. For technical reasons, the principle has been exaggerated.

Für die Erläuterung der dynamischen Abtastung sind verschiedene Ableselinien t in strichpunktierter Form eingezeichnet.Der Abstand der Ableselinien t in Meßrichtung resultiert aus der Verfahrgeschwindigkeit beim relativen Verfahren von Abtastplatte 8 und Maßverkörperung 3 und verdeutlicht die unterschiedlichen Ablesezeitpunkte.For the explanation of the dynamic scanning, different reading lines t are drawn in dash-dotted form. The distance of the reading lines t in the measuring direction results from the travel speed in the relative movement of scanning plate 8 and measuring standard 3 and illustrates the different reading times.

Zum Zeitpunkt der ersten Ablesung befindet sich die in Figur 1 gezeigte Abtastplatte 8 zur Abtastung der ersten Spur 31 auf der Ableselinie t gleich t1. Durch die Verfahrbewegung zwischen Abtastplatte 8 und Maßverkörperung 3 befindet sich die Abtastplatte 8 bei der Abtastung der zweiten Spur 32 auf der Ableselinie t2, u.s.w..At the time of the first reading, the scanning plate 8 shown in FIG. 1 for scanning the first track 31 is on the reading line t equal to t1. As a result of the movement between the scanning plate 8 and the material measure 3, the scanning plate 8 is located on the reading line t2, etc. during the scanning of the second track 32.

Nach der sequentiellen Abtastung aller Spuren liegen für die einzelnen Spuren 31, 32, 33, 34, und 35 jeweils Meßwerte vor, die sich um einen Verschiebungsbetrag vom Meßwert der ersten abgelesenen Spur unterscheiden.After the sequential scanning of all tracks, measured values are available for the individual tracks 31, 32, 33, 34, and 35, which differ by an amount of shift from the measured value of the first read track.

Nachdem alle Spuren abgetastet sind, wird zusätzlich ein zweites Mal die erste Spur 31 abgetastet und ein zweiter Meßwert für diese Spur erzeugt. Dieser zweite Meßwert entsteht zu einem Zeitpunkt, in welchem sich die Abtastplatte 8 an der Ableselinie t6 befindet und wird mit dem ersten Meßwert aus der ersten Abtastung bei t1 verrechnet. Diese Wegdifferenz wird abgespeichert.After all tracks have been scanned, the first track 31 is additionally scanned a second time and a second measured value is generated for this track. This second measured value arises at a time in which the scanning plate 8 is located on the reading line t6 and is offset against the first measured value from the first scan at t1. This path difference is saved.

Bei hinreichend gleichmäßiger Verfahrgeschwindigkeit, d.h., bei konstanten Zeitabständen zwischen den Messungen in den einzelnen Spuren 31, 32, 33, 34 und 35, werden aus der Wegdifferenz der beiden Messungen der ersten Spur 31 und aus den Verhältnissen der Zeiten der Messungen der ersten und der weiteren Spuren Korrekturwerte für die Meßwerte aller Spuren ermittelt. Damit wird sichergestellt, daß alle Meßwerte auf den Zeitpunkt der ersten Messung an der Ableselinie t1 in der ersten Spur 31 zurückgeführt sind. Durch diese Maßnahme werden die Meßwerte unabhängig vom Zeitpunkt der tatsächlichen Ablesung, da unabhängig von einer Relativbewegung zwischen dem Maßstab 3 und der Abtastplatte 8 derselbe Ablesezeitpunkt - nämlich der an der Ableselinie t1 - für alle Spuren gilt.With a sufficiently uniform traversing speed, ie with constant time intervals between the measurements in the individual tracks 31, 32, 33, 34 and 35, the path difference of the two measurements of the first track 31 and the ratios of the times of the measurements of the first and the other tracks, correction values for the measured values of all tracks were determined. This ensures that all measured values are traced back to the time of the first measurement on the reading line t1 in the first track 31. This measure makes the measured values independent of the point in time of the actual reading, since it is independent of a relative movement between the scale 3 and the scanning plate 8 the same reading time - namely that on the reading line t1 - applies to all tracks.

Aus den auf diese Weise korrigierten Meßwerten der einzelnen Spuren 31, 32, 33, 34 und 35 zu den unterschiedlichen Ablesezeitpunkten an den Ableselinien t1 bis t6 wird ein codierter Positionswert zum Zeitpunkt der ersten Ablesung an der Ableselinie t1 der ersten Spur 31 berechnet.A coded position value at the time of the first reading on the reading line t1 of the first track 31 is calculated from the measured values of the individual tracks 31, 32, 33, 34 and 35 corrected in this way at the different reading times on the reading lines t1 to t6.

Bei bekannten Zeitdifferenzen zwischen den Ablesungen der einzelnen Spuren kann über die Relativgeschwindigkeit aus der Zeit zwischen den Ablesungen der Bezugsspur und den weiteren Spuren direkt der Weg zwischen diesen Ablesungen und damit ein Korrekturwert für die Ablesungen ermittelt werden kann.In the case of known time differences between the readings of the individual tracks, the path between these readings and thus a correction value for the readings can be determined directly from the time between the readings of the reference track and the further tracks via the relative speed.

Claims (2)

Verfahren zum Ablesen einer Maßverkörperung (3) einer Längen- oder Winkelmeßeinrichtung, wobei die Maßverkörperung (3) mehrere Spuren (31, 32, 33, 34, 35) mit Meßteilungen unterschiedlicher Teilungsperioden aufweist, die mittels einer relativ zur Maßverkörperung (3) verfahrbaren Abtastplatte (8) bei gleichmäßiger Verfahrgeschwindigkeit sequentiell abgelesen werden, dadurch gekennzeichnet, daß beginnend bei der Spur (31) mit der kleinsten Teilungsperiode als Bezugsspur die Meßwerte in jeder weiteren Spur (32 bis 35) sequentiell ermittelt und zahlenmäßig abgespeichert werden, daß nach dem Ablesen aller Spuren (32 bis 35) die Bezugsspur (31) nochmals abgelesen und eine Wegdifferenz zur ersten Ablesung aufgrund der unterschiedlichen Ablesezeitpunkte ermittelt wird, wobei aus dieser Wegdifferenz unter Berücksichtigung der Anzahl der sequentiell abgelesenen Spuren (31 bis 36) Korrekturwerte für die Meßwerte der einzelnen Spuren (32 bis 35) errechnet werden, die eine Korrektur des Ablesezeitpunktes in den einzelnen Spuren (32 bis 35) durch Rückführung auf den Ablesezeitpunkt der Bezugsspur (31) bewirken.Method for reading a material measure (3) of a length or angle measuring device, the material measure (3) having a plurality of tracks (31, 32, 33, 34, 35) with graduations of different graduation periods, which can be moved by means of a scanning plate which can be moved relative to the material measure (3) (8) can be read sequentially at a uniform travel speed, characterized in that starting with track (31) with the smallest division period as the reference track, the measured values in each further track (32 to 35) are determined sequentially and stored numerically, that after reading all Tracks (32 to 35) the reference track (31) is read again and a path difference to the first reading is determined on the basis of the different reading times, with this path difference taking into account the number of sequentially read tracks (31 to 36) correction values for the measured values of the individual tracks (32 to 35) can be calculated using a correction effect of the reading time in the individual tracks (32 to 35) by returning to the reading time of the reference track (31). Verfahren zum Ablesen einer Maßverkörperung (3) einer Längen- oder Winkelmeßeinrichtung, wobei die Maßverkörperung (3) mehrere Spuren (31, 32, 33, 34, 35) mit Meßteilungen unterschiedlicher Teilungsperioden aufweist, die mittels einer Abtastplatte (8) abgelesen werden, dadurch gekennzeichnet, daß die Meßwerte aller Spuren (31 bis 35), beginnend bei der ersten Spur (31) nach einem Abrufimpuls hintereinander in bekannten Zeitabständen abgelesen, abgespeichert und nach Ermittlung der Relativgeschwindigkeit korrigiert werden.Method for reading a material measure (3) of a length or angle measuring device, the material measure (3) having a plurality of tracks (31, 32, 33, 34, 35) with graduations of different graduation periods, which are read by means of a scanning plate (8), thereby characterized in that the measured values of all tracks (31 to 35), starting at the first track (31) after a polling pulse are read in succession at known time intervals, stored and corrected after determining the relative speed.
EP93112309A 1992-09-04 1993-07-31 Method for length or angle measurement devices Expired - Lifetime EP0585622B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE4229575 1992-09-04
DE4229575A DE4229575C1 (en) 1992-09-04 1992-09-04 Procedure for length or angle measuring devices

Publications (3)

Publication Number Publication Date
EP0585622A2 true EP0585622A2 (en) 1994-03-09
EP0585622A3 EP0585622A3 (en) 1994-06-08
EP0585622B1 EP0585622B1 (en) 1996-10-30

Family

ID=6467235

Family Applications (1)

Application Number Title Priority Date Filing Date
EP93112309A Expired - Lifetime EP0585622B1 (en) 1992-09-04 1993-07-31 Method for length or angle measurement devices

Country Status (5)

Country Link
US (1) US5456021A (en)
EP (1) EP0585622B1 (en)
JP (1) JP2635913B2 (en)
AT (1) ATE144829T1 (en)
DE (2) DE4229575C1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9103699B2 (en) 2012-05-02 2015-08-11 Canon Kabushiki Kaisha Encoder and apparatus using the same

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19507613C2 (en) * 1995-03-04 1997-01-23 Heidenhain Gmbh Dr Johannes Length or angle measuring device
DE59813001D1 (en) † 1997-04-16 2005-09-22 Heidenhain Gmbh Dr Johannes Position measuring device and method for its operation
DE10028136B4 (en) * 1999-06-04 2011-01-27 Dr. Johannes Heidenhain Gmbh position measuring system
DE102007061287A1 (en) * 2007-12-19 2009-06-25 Dr. Johannes Heidenhain Gmbh Position measuring device and method for absolute position determination
JP6422201B2 (en) * 2013-03-28 2018-11-14 キヤノン株式会社 Position detection means
JP6315548B2 (en) * 2013-12-25 2018-04-25 株式会社ミツトヨ Optical encoder
JP6359340B2 (en) * 2014-05-27 2018-07-18 株式会社ミツトヨ Scale and optical encoder

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3000378A1 (en) * 1979-03-26 1980-10-16 Jenoptik Jena Gmbh DETECTOR ARRANGEMENT FOR LENGTH AND ANGLE MEASURING SYSTEMS
EP0076861A1 (en) * 1981-04-13 1983-04-20 Tokyo Kogaku Kikai Kabushiki Kaisha Displacement measuring device
DE3243759A1 (en) * 1982-11-26 1984-05-30 Brown, Boveri & Cie Ag, 6800 Mannheim Method and device for forming the angle and/or angular velocity of a converter-powered drive
WO1989011080A1 (en) * 1988-05-10 1989-11-16 Siemens Aktiengesellschaft Position-coded sensor

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2729697A1 (en) * 1977-07-01 1979-01-04 Heidenhain Gmbh Dr Johannes METHOD OF INTERPOLATION
DE2742186A1 (en) * 1977-07-09 1979-01-18 Gruenzweig Hartmann Glasfaser METHOD AND DEVICE FOR PRODUCING MINERAL FIBER SHEETS WITH FIBERS RUNNING ABOUT VERTICAL TO THE LARGE SURFACES
DE3412128C1 (en) * 1984-03-31 1985-05-09 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Position measuring device
DE3417176C2 (en) * 1984-05-09 1986-07-31 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Photoelectric measuring device
DE3612609A1 (en) * 1986-04-15 1987-10-22 Heidenhain Gmbh Dr Johannes DEVICE FOR SERIAL TRANSFER OF DIGITAL MEASURED VALUES AT LEAST ONE MEASURED VALUE CONVERTER
DE4125865C2 (en) * 1991-08-03 1994-01-20 Heidenhain Gmbh Dr Johannes Length or angle measuring device

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3000378A1 (en) * 1979-03-26 1980-10-16 Jenoptik Jena Gmbh DETECTOR ARRANGEMENT FOR LENGTH AND ANGLE MEASURING SYSTEMS
EP0076861A1 (en) * 1981-04-13 1983-04-20 Tokyo Kogaku Kikai Kabushiki Kaisha Displacement measuring device
DE3243759A1 (en) * 1982-11-26 1984-05-30 Brown, Boveri & Cie Ag, 6800 Mannheim Method and device for forming the angle and/or angular velocity of a converter-powered drive
WO1989011080A1 (en) * 1988-05-10 1989-11-16 Siemens Aktiengesellschaft Position-coded sensor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9103699B2 (en) 2012-05-02 2015-08-11 Canon Kabushiki Kaisha Encoder and apparatus using the same

Also Published As

Publication number Publication date
EP0585622B1 (en) 1996-10-30
DE59304346D1 (en) 1996-12-05
JPH06174421A (en) 1994-06-24
ATE144829T1 (en) 1996-11-15
US5456021A (en) 1995-10-10
DE4229575C1 (en) 1993-11-25
EP0585622A3 (en) 1994-06-08
JP2635913B2 (en) 1997-07-30

Similar Documents

Publication Publication Date Title
EP0106951B1 (en) Position measuring method and device for performing this method
EP0913668B1 (en) Process for measuring the phase angle of position sensors with sinusoidal output signals
EP0268558B1 (en) Apparatus for measuring lengths or angles
DE3046797A1 (en) ELECTROOPTIC MEASURING SYSTEM WITH ERROR CORRECTION
EP0585622B1 (en) Method for length or angle measurement devices
AT392536B (en) LINEAR, INCREMENTAL MEASURING SYSTEM
EP0526730B1 (en) Linear or angular position measuring device
DE102006029650A1 (en) Circuit arrangement for determining tilting error at position measuring device, has arithmetic unit provided, where tilting error signal is produced from two position signals by addition or subtraction operations with arithmetic unit
DE3801763C1 (en)
DE4125865C2 (en) Length or angle measuring device
EP2116814B1 (en) Measuring device for calculating a position and/or a speed
DE10018298B4 (en) Method and device for vibration detection in a position measuring device
EP2533020B1 (en) Linear distance measuring system and method for determining the absolute position of a slide along a guide rail
EP0522377A1 (en) Position sensor for linear motors
DE3939147A1 (en) LIGHT ELECTRICAL POSITION MEASURING DEVICE
DE1548733A1 (en) Arrangement for measuring the relative position of objects
DE3417015C2 (en) Interpolation method
DE10001800C2 (en) Method and device for measuring, in particular, surface topologies in microscopic resolution
DE4009749C2 (en)
DE4244178C2 (en) Length or angle measuring device
EP0512327B1 (en) Position measuring device
DE3907760C2 (en)
DE3504520C2 (en)
DE9218478U1 (en) Length or angle measuring device
DE2345106C3 (en) Device for measuring the speed of a body, in particular a vehicle

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

17P Request for examination filed

Effective date: 19930812

AK Designated contracting states

Kind code of ref document: A2

Designated state(s): AT DE FR GB IT

PUAL Search report despatched

Free format text: ORIGINAL CODE: 0009013

AK Designated contracting states

Kind code of ref document: A3

Designated state(s): AT DE FR GB IT

17Q First examination report despatched

Effective date: 19951116

GRAG Despatch of communication of intention to grant

Free format text: ORIGINAL CODE: EPIDOS AGRA

GRAH Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOS IGRA

GRAH Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOS IGRA

ITF It: translation for a ep patent filed
GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

AK Designated contracting states

Kind code of ref document: B1

Designated state(s): AT DE FR GB IT

REF Corresponds to:

Ref document number: 144829

Country of ref document: AT

Date of ref document: 19961115

Kind code of ref document: T

ET Fr: translation filed
GBT Gb: translation of ep patent filed (gb section 77(6)(a)/1977)

Effective date: 19961030

REF Corresponds to:

Ref document number: 59304346

Country of ref document: DE

Date of ref document: 19961205

PLBE No opposition filed within time limit

Free format text: ORIGINAL CODE: 0009261

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT

26N No opposition filed
REG Reference to a national code

Ref country code: GB

Ref legal event code: IF02

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: AT

Payment date: 20020626

Year of fee payment: 10

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: GB

Payment date: 20020628

Year of fee payment: 10

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: FR

Payment date: 20020711

Year of fee payment: 10

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: GB

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20030731

Ref country code: AT

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20030731

GBPC Gb: european patent ceased through non-payment of renewal fee

Effective date: 20030731

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: FR

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20040331

REG Reference to a national code

Ref country code: FR

Ref legal event code: ST

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: IT

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES;WARNING: LAPSES OF ITALIAN PATENTS WITH EFFECTIVE DATE BEFORE 2007 MAY HAVE OCCURRED AT ANY TIME BEFORE 2007. THE CORRECT EFFECTIVE DATE MAY BE DIFFERENT FROM THE ONE RECORDED.

Effective date: 20050731

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: DE

Payment date: 20070719

Year of fee payment: 15

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: DE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20090203