EP0575003A3 - - Google Patents

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Publication number
EP0575003A3
EP0575003A3 EP19930201714 EP93201714A EP0575003A3 EP 0575003 A3 EP0575003 A3 EP 0575003A3 EP 19930201714 EP19930201714 EP 19930201714 EP 93201714 A EP93201714 A EP 93201714A EP 0575003 A3 EP0575003 A3 EP 0575003A3
Authority
EP
European Patent Office
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP19930201714
Other versions
EP0575003B1 (fr
EP0575003A2 (fr
Inventor
Eckart Boettger
Heinz Prof Dr Dimigen
Claus-Peter Dr Klages
Klaus Dr Taube
Rudolf Thyen
Hubertus Huebsch
Rainer Veyhl
Andreas Dr Weber
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Philips Intellectual Property and Standards GmbH
Koninklijke Philips NV
Original Assignee
Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Philips Patentverwaltung GmbH
Koninklijke Philips Electronics NV
Philips Electronics NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=6461103&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=EP0575003(A3) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV, Philips Patentverwaltung GmbH, Koninklijke Philips Electronics NV, Philips Electronics NV filed Critical Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Publication of EP0575003A2 publication Critical patent/EP0575003A2/fr
Publication of EP0575003A3 publication Critical patent/EP0575003A3/xx
Application granted granted Critical
Publication of EP0575003B1 publication Critical patent/EP0575003B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
    • H01C7/006—Thin film resistors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/06—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
    • H01C17/075—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques
    • H01C17/12—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques by sputtering

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Non-Adjustable Resistors (AREA)
  • Apparatuses And Processes For Manufacturing Resistors (AREA)
  • Physical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)
EP93201714A 1992-06-16 1993-06-15 Résistance électrique en couche Expired - Lifetime EP0575003B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE4219649 1992-06-16
DE4219649 1992-06-16

Publications (3)

Publication Number Publication Date
EP0575003A2 EP0575003A2 (fr) 1993-12-22
EP0575003A3 true EP0575003A3 (fr) 1994-08-03
EP0575003B1 EP0575003B1 (fr) 1999-02-17

Family

ID=6461103

Family Applications (1)

Application Number Title Priority Date Filing Date
EP93201714A Expired - Lifetime EP0575003B1 (fr) 1992-06-16 1993-06-15 Résistance électrique en couche

Country Status (6)

Country Link
US (2) US5677070A (fr)
EP (1) EP0575003B1 (fr)
JP (1) JPH06163201A (fr)
DE (1) DE59309376D1 (fr)
ES (1) ES2130212T3 (fr)
TW (1) TW240321B (fr)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE59605278D1 (de) * 1995-03-09 2000-06-29 Philips Corp Intellectual Pty Elektrisches Widerstandsbauelement mit CrSi-Widerstandsschicht
TW430827B (en) * 1998-05-22 2001-04-21 Advanced Refractory Tech Resistors with low temperature coefficient of resistance and methods of making
DE19834968A1 (de) * 1998-08-03 2000-02-17 Fraunhofer Ges Forschung Beschichtung für Werkzeuge zur Bearbeitung von wärmebehandeltem Glas
US6462467B1 (en) * 1999-08-11 2002-10-08 Sony Corporation Method for depositing a resistive material in a field emission cathode
EP2277177B1 (fr) * 2008-04-24 2017-08-02 Hochschule für Technik und Wirtschaft des Saarlandes Résistance à couche, à coefficient de température constant et fabrication d'une telle résistance à couche
WO2014200011A1 (fr) * 2013-06-12 2014-12-18 アルプス電気株式会社 Résistance et dispositif de détection de température

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2509623A1 (de) * 1975-03-05 1976-09-16 Siemens Ag Verfahren zum herstellen von elektrischen widerstandsschichten
US4118788A (en) * 1977-03-07 1978-10-03 Bell Telephone Laboratories, Incorporated Associative information retrieval
US4159459A (en) * 1977-06-23 1979-06-26 Angstrohm Precision, Inc. Non-inductive cylindrical thin film resistor
DE2812497C3 (de) * 1978-03-22 1982-03-11 Preh, Elektrofeinmechanische Werke, Jakob Preh, Nachf. Gmbh & Co, 8740 Bad Neustadt Gedruckte Schaltung
US4495524A (en) * 1983-06-21 1985-01-22 Nitto Electric Industrial Co., Ltd. Part for a slide variable resistor
US4599193A (en) * 1983-06-30 1986-07-08 Director-General Of The Agency Of Industrial Science And Technology, An Organ Of The Ministry Of International Trade And Industry Of Japan Highly electroconductive pyrolyzed product retaining its original shape and composition formed therefrom
GB2176443B (en) * 1985-06-10 1990-11-14 Canon Kk Liquid jet recording head and recording system incorporating the same
US4774151A (en) * 1986-05-23 1988-09-27 International Business Machines Corporation Low contact electrical resistant composition, substrates coated therewith, and process for preparing such
US5106538A (en) * 1987-07-21 1992-04-21 Raychem Corporation Conductive polymer composition
US5111178A (en) * 1990-06-15 1992-05-05 Bourns, Inc. Electrically conductive polymer thick film of improved wear characteristics and extended life
US5510823A (en) * 1991-03-07 1996-04-23 Fuji Xerox Co., Ltd. Paste for resistive element film

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
GERHARD SOBE ET AL.: "Process characterization with D.C. magnetron sputtering of Cr-Si-C thin films in Ar-CH4 mixtures", THIN SOLID FILMS, vol. 201, no. 1, 5 June 1991 (1991-06-05), LAUSANNE CH, pages 109 - 122 *

Also Published As

Publication number Publication date
EP0575003B1 (fr) 1999-02-17
TW240321B (fr) 1995-02-11
ES2130212T3 (es) 1999-07-01
US5677070A (en) 1997-10-14
DE59309376D1 (de) 1999-03-25
JPH06163201A (ja) 1994-06-10
EP0575003A2 (fr) 1993-12-22
US5748069A (en) 1998-05-05

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