EP0557553A1 - Ultrasonic atomizer - Google Patents

Ultrasonic atomizer Download PDF

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Publication number
EP0557553A1
EP0557553A1 EP92103290A EP92103290A EP0557553A1 EP 0557553 A1 EP0557553 A1 EP 0557553A1 EP 92103290 A EP92103290 A EP 92103290A EP 92103290 A EP92103290 A EP 92103290A EP 0557553 A1 EP0557553 A1 EP 0557553A1
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EP
European Patent Office
Prior art keywords
ultrasonic atomizer
atomizing plate
ultrasonic
atomizing
layer
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
EP92103290A
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German (de)
French (fr)
Inventor
Klaus Van Der Linden
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Siemens AG
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Siemens AG
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Publication date
Application filed by Siemens AG filed Critical Siemens AG
Priority to EP92103290A priority Critical patent/EP0557553A1/en
Publication of EP0557553A1 publication Critical patent/EP0557553A1/en
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05BSPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B17/00Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups
    • B05B17/04Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods
    • B05B17/06Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations
    • B05B17/0607Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers
    • B05B17/0623Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers coupled with a vibrating horn

Definitions

  • the invention relates to an ultrasonic atomizer for atomizing a substance with an ultrasonic transducer and an atomizing plate for the substance in engagement therewith.
  • Ultrasonic atomizers for atomizing liquids are known. They are usually part of an ultrasonic atomizing device. Particularly known applications of ultrasonic atomizing devices are the atomization of cosmetics and the atomization of medicaments for inhalation purposes.
  • Known ultrasonic atomizers generally contain an amplitude transformer to which a piezoceramic is coupled on one side and the opposite side of which is designed as an atomizing plate (EP 0 258 637, EP 0 373 237).
  • Such ultrasonic atomizers have the advantage that the liquid to be atomized forms a fine and homogeneous aerosol.
  • the droplet size of the aerosol in such ultrasonic atomizers can be influenced within wide limits by choosing an appropriate oscillation frequency.
  • the invention is therefore based on the object of specifying an ultrasonic atomizer with an atomizing plate, in which the life of the atomizing plate is increased.
  • This object is achieved in that the surface of the atomizing plate coming into contact with the substance to be atomized is hardened. This increases the service life of the surface of the atomizing plate. In the case of a liquid, the formation of cavitation craters due to imploding vapor bubbles on the surface of the atomizing plate that comes into contact with the liquid is also greatly restricted.
  • the hardened surface can advantageously be a tempered steel surface.
  • the atomizing plate if it is made of steel, only needs to be hardened during manufacture.
  • the hardened surface can be a layer applied to the atomizing plate.
  • the entire manufacturing process of the ultrasonic atomizer can be retained to this extent, with only one coating process for coating the atomizing plate having to be inserted at a suitable point in the sequence of the manufacturing steps.
  • the layer applied to the atomizing plate can contain titanium nitride (TiN) or alternatively chromium nitride (CrN) as the main component. Layers made of titanium nitride or alternatively made of chrome nitride are inexpensive and mechanically particularly hard.
  • the layer by sputtering This means vapor deposition, dusting or ion implantation or a combination of these coating processes.
  • the layers applied using these methods are not only particularly hard, but they also adhere extremely well to the surface to which they are applied.
  • FIG. 1 shows a longitudinal section through an ultrasonic atomizer.
  • the ultrasound atomizer 1 shown in FIG. 1 comprises an ultrasound transmitter 2, for example a piezoceramic plate, an amplitude transformer 4 connected to it, which merges into an atomizing plate 6.
  • the atomizer plate 6 contains a concave, hardened surface 8. 10 denotes a supply hose for a liquid 12.
  • the ultrasonic atomizer 1 During operation of the ultrasonic atomizer 1, the amount of liquid deposited on the surface of the atomizing plate by means of the guide hose 10 - generally one or a few drops - is atomized by means of the vibration excitation by the ultrasonic generator 2.
  • the more or less unavoidable imploding steam bubbles that occur during this process can hardly produce cavitation craters on the hardened surface 8 of the atomizing plate 6, since the atoms are more firmly bonded to one another on a hardened surface. This is the case, for example, if the surface 8 is a hardened layer of, for example, titanium nitride or chromium nitride or chromium chromide applied to the atomizing plate 6. As a result, the lifespan of this atomizing plate is considerably increased compared to an uncured atomizing plate.
  • the layer 8 applied to the surface of the atomizing plate 6 has been applied in the exemplary embodiment by sputtering.
  • an ultrasonic atomizer of the construction shown in FIG. 1 can be installed in any ultrasonic atomizing device.

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  • Physical Vapour Deposition (AREA)
  • Special Spraying Apparatus (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)

Abstract

With ultrasonic atomisers there is the problem that the liquid (12) contacting surface (8) of an atomiser disc (6) is progressively destroyed as a result of imploding vapour bubbles which generate cavitation craters in the surface. To solve the problem, according to the invention provision is made to harden the atomiser disc (6) surface (8) coming into contact with the liquid (12) to be atomised. The invention is applicable in principle to all ultrasonic atomisers. <IMAGE>

Description

Die Erfindung bezieht sich auf einen Ultraschallzerstäuber zur Zerstäubung eines Stoffes mit einem Ultraschallgeber und einem mit diesem in Eingriff stehenden Zerstäuberteller für den Stoff.The invention relates to an ultrasonic atomizer for atomizing a substance with an ultrasonic transducer and an atomizing plate for the substance in engagement therewith.

Ultraschallzerstäuber zur Zerstäubung von Flüssigkeiten sind bekannt. Sie sind üblicherweise Bestandteil eines Ultraschallzerstäubungsgerätes. Besonders bekannte Anwendungen von Ultraschallzerstäubungsgeräten sind die Zerstäubung von Kosmetika und die Zerstäubung von Arzneimitteln zu Inhalationszwecken.Ultrasonic atomizers for atomizing liquids are known. They are usually part of an ultrasonic atomizing device. Particularly known applications of ultrasonic atomizing devices are the atomization of cosmetics and the atomization of medicaments for inhalation purposes.

Bekannte Ultraschallzerstäuber enthalten im allgemeinen einen Amplitudentransformator, an dem auf der einen Seite eine Piezokeramik angekoppelt ist und dessen gegenüberliegende Seite als Zerstäuberteller ausgebildet ist (EP 0 258 637, EP 0 373 237). Derartige Ultraschallzerstäuber haben den Vorteil, daß die zu zerstäubende Flüssigkeit ein feines und homogenes Aerosol bildet. Darüber hinaus kann die Tröpfchengröße des Aerosols bei solchen Ultraschallzerstäubern durch Wahl einer entsprechenden Schwingungsfrequenz in weiten Grenzen beeinflußt werden. Nachteilig ist, daß sich aufgrund gerade der schnellen Schwingungen der Flüssigkeit im Raum unmittelbar über dem Zerstäuberteller Dampfbläschen bilden, die durch ihr Implodieren auf der mit der zu zerstäubenden Flüssigkeit in Berührung kommenden Oberfläche des Zerstäubertellers Kavitationskrater erzeugen. Aufgrund dieser Tatsache wird bei wiederholtem Einsatz des Ultraschallzerstäubers die mit der Flüssigkeit in Berührung kommende Oberfläche des Zerstäubertellers fortschreitend mit Kavitationskratern übersät und damit zerstört.Known ultrasonic atomizers generally contain an amplitude transformer to which a piezoceramic is coupled on one side and the opposite side of which is designed as an atomizing plate (EP 0 258 637, EP 0 373 237). Such ultrasonic atomizers have the advantage that the liquid to be atomized forms a fine and homogeneous aerosol. In addition, the droplet size of the aerosol in such ultrasonic atomizers can be influenced within wide limits by choosing an appropriate oscillation frequency. It is disadvantageous that due to the rapid vibrations of the liquid in the room, vapor bubbles form directly above the atomizing plate, which, due to their imploding, produce cavitation craters on the surface of the atomizing plate that comes into contact with the liquid to be atomized. Due to this fact, when the ultrasonic atomizer is used repeatedly, the surface of the atomizing plate that comes into contact with the liquid is progressively littered with cavitation craters and thus destroyed.

Der Erfindung liegt daher die Aufgabe zugrunde, einen Ultraschallzerstäuber mit einem Zerstäuberteller anzugeben, bei dem die Lebensdauer des Zerstäubertellers erhöht wird.The invention is therefore based on the object of specifying an ultrasonic atomizer with an atomizing plate, in which the life of the atomizing plate is increased.

Diese Aufgabe wird erfindungsgemäß dadurch gelöst, daß die mit dem zu zerstäubenden Stoff in Berührung kommende Oberfläche des Zerstäubertellers gehärtet ist. Hierdurch erhöht sich die Standzeit der Oberfläche des Zerstäubertellers. Im Fall einer Flüssigkeit wird so auch die Bildung von Kavitationskratern aufgrund implodierender Dampfbläschen auf der mit der Flüssigkeit in Berührung kommenden Oberfläche des Zerstäubertellers stark eingeschränkt.This object is achieved in that the surface of the atomizing plate coming into contact with the substance to be atomized is hardened. This increases the service life of the surface of the atomizing plate. In the case of a liquid, the formation of cavitation craters due to imploding vapor bubbles on the surface of the atomizing plate that comes into contact with the liquid is also greatly restricted.

In vorteilhafter Weise kann die gehärtete Oberfläche eine angelassene Stahlfläche sein. In diesem Fall braucht der Zerstäuberteller, sofern er aus Stahl besteht, nur während der Herstellung gehärtet zu werden.The hardened surface can advantageously be a tempered steel surface. In this case, the atomizing plate, if it is made of steel, only needs to be hardened during manufacture.

Alternativ kann die gehärtete Oberfläche eine auf den Zerstäuberteller aufgebrachte Schicht sein. Hierdurch kann der gesamte Herstellungsprozeß des Ultraschallzerstäubers insoweit beibehalten werden, wobei in der Abfolge der Herstellungsschritte an geeigneter Stelle nur ein Beschichtungsprozeß zur Beschichtung des Zerstäubertellers eingefügt werden muß.Alternatively, the hardened surface can be a layer applied to the atomizing plate. As a result, the entire manufacturing process of the ultrasonic atomizer can be retained to this extent, with only one coating process for coating the atomizing plate having to be inserted at a suitable point in the sequence of the manufacturing steps.

In vorteilhafter Weiterbildung der Erfindung kann die auf den Zerstäuberteller aufgebrachte Schicht als Hauptbestandteil Titannitrid (TiN) oder alternativ Chromnitrid (CrN) enthalten. Schichten aus Titannitrid oder alternativ aus Chromnitrid sind preiswert und mechanisch besonders hart.In an advantageous development of the invention, the layer applied to the atomizing plate can contain titanium nitride (TiN) or alternatively chromium nitride (CrN) as the main component. Layers made of titanium nitride or alternatively made of chrome nitride are inexpensive and mechanically particularly hard.

Es erweist sich als besonders zweckmäßig, die Schicht durch Kathodenzerstäubung aufzubringen. Darunter sind Aufdampfen, Aufstäuben oder Ionenimplantieren oder eine Kombination dieser Beschichtungsverfahren zu verstehen. Die mittels dieser Verfahren aufgebrachten Schichten sind nicht nur besonders hart, sondern sie haften auch hervorragend auf der Fläche, auf die sie aufgebracht sind.It has proven particularly expedient to apply the layer by sputtering. This means vapor deposition, dusting or ion implantation or a combination of these coating processes. The layers applied using these methods are not only particularly hard, but they also adhere extremely well to the surface to which they are applied.

Ein Ausführungsbeispiel der Erfindung wird anhand der Zeichnung näher erläutert. Dabei zeigt:An embodiment of the invention is explained in more detail with reference to the drawing. It shows:

Figur 1 einen Längsschnitt durch einen Ultraschallzerstäuber.1 shows a longitudinal section through an ultrasonic atomizer.

Der in Figur 1 gezeigte Ultraschallzerstäuber 1 umfaßt einen Ultraschallgeber 2, zum Beispiel eine Piezokeramikplatte, einen mit diesem verbundenen Amplitudentransformator 4, der in einen Zerstäuberteller 6 übergeht. Der Zerstäuberteller 6 enthält im Ausführungsbeispiel eine konkave, gehärtete Oberfläche 8. Mit 10 ist ein Zuführungsschlauch für eine Flüssigkeit 12 bezeichnet.The ultrasound atomizer 1 shown in FIG. 1 comprises an ultrasound transmitter 2, for example a piezoceramic plate, an amplitude transformer 4 connected to it, which merges into an atomizing plate 6. In the exemplary embodiment, the atomizer plate 6 contains a concave, hardened surface 8. 10 denotes a supply hose for a liquid 12.

Beim Betrieb des Ultraschallzerstäubers 1 wird die mittels des Führungsschlauchs 10 auf der Oberfläche des Zerstäubertellers deponierte Flüssigkeitsmenge - im allgemeinen ein oder einige wenige Tropfen - mittels der Schwingungsanregung durch den Ultraschallgeber 2 zerstäubt. Die bei diesem Vorgang mehr oder weniger unvermeidbar auftretenden, implodierenden Dampfbläschen können an der gehärteten Oberfläche 8 des Zerstäubertellers 6 kaum noch Kavitationskrater erzeugen, da die Atome auf einer gehärteten Oberfläche fester aneinander gebunden sind. Dies ist zum Beispiel der Fall, wenn die Oberfläche 8 eine gehärtete, auf den Zerstäuberteller 6 aufgebrachte Schicht aus beispielsweise Titannitrid oder Chromnitrid oder Chromchromid ist. Hierdurch ist die Lebensdauer dieses Zerstäubertellers gegenüber einem ungehärteten Zerstäuberteller erheblich vergrößert. Die auf die Oberfläche des Zerstäubertellers 6 aufgebrachte Schicht 8 ist im Ausführungsbeispiel durch Kathodenzerstäubung aufgetragen worden.During operation of the ultrasonic atomizer 1, the amount of liquid deposited on the surface of the atomizing plate by means of the guide hose 10 - generally one or a few drops - is atomized by means of the vibration excitation by the ultrasonic generator 2. The more or less unavoidable imploding steam bubbles that occur during this process can hardly produce cavitation craters on the hardened surface 8 of the atomizing plate 6, since the atoms are more firmly bonded to one another on a hardened surface. This is the case, for example, if the surface 8 is a hardened layer of, for example, titanium nitride or chromium nitride or chromium chromide applied to the atomizing plate 6. As a result, the lifespan of this atomizing plate is considerably increased compared to an uncured atomizing plate. The layer 8 applied to the surface of the atomizing plate 6 has been applied in the exemplary embodiment by sputtering.

Prinzipiell ist ein Ultraschallzerstäuber des in Figur 1 gezeigten Aufbaus in jedes Ultraschallzerstäubungsgerät einbaubar.In principle, an ultrasonic atomizer of the construction shown in FIG. 1 can be installed in any ultrasonic atomizing device.

Claims (8)

Ultraschallzerstäuber zur Zerstäubung eines Stoffes mit einem Ultraschallgeber und einem mit diesem in Eingriff stehenden Zerstäuberteller für den Stoff, dadurch gekennzeichnet, daß die mit dem zu zerstäubenden Stoff (12) in Berührung kommende Oberfläche des Zerstäubertellers (6) gehärtet ist.Ultrasonic atomizer for atomizing a substance with an ultrasonic transmitter and an atomizing plate for the substance in engagement with the substance, characterized in that the surface of the atomizing plate (6) coming into contact with the substance to be atomized (12) is hardened. Ultraschallzerstäuber nach Anspruch 1, dadurch gekennzeichnet, daß die gehärtete Oberfläche eine angelassene Stahlfläche ist.Ultrasonic atomizer according to claim 1, characterized in that the hardened surface is a tempered steel surface. Ultraschallzerstäuber nach Anspruch 1, dadurch gekennzeichnet, daß die gehärtete Oberfläche eine auf den Zerstäuberteller (6) aufgebrachte Schicht (8) ist.Ultrasonic atomizer according to claim 1, characterized in that the hardened surface is a layer (8) applied to the atomizing plate (6). Ultraschallzerstäuber nach Anspruch 1 oder 3, dadurch gekennzeichnet, daß die auf den Zerstäuberteller (6) aufgebrachte Schicht (8) als Hauptbestandteil Titannitrid TiN enthält.Ultrasonic atomizer according to claim 1 or 3, characterized in that the layer (8) applied to the atomizing plate (6) contains titanium nitride TiN as the main component. Ultraschallzerstäuber nach Anspruch 1, 3 oder 4, dadurch gekennzeichnet, daß die auf den Zerstäuberteller (6) aufgebrachte Schicht (8) als Hauptbestandteil Chromnitrid CrN enthält.Ultrasonic atomizer according to claim 1, 3 or 4, characterized in that the layer (8) applied to the atomizing plate (6) contains chromium nitride CrN as the main component. Ultraschallzerstäuber nach Anspruch 4 oder 5, dadurch gekennzeichnet, daß die Schicht (8) durch Kathodenzerstäubung aufgebracht ist.Ultrasonic atomizer according to claim 4 or 5, characterized in that the layer (8) is applied by sputtering. Ultraschallzerstäuber nach Anspruch 4 oder 5, dadurch gekennzeichnet, daß die Schicht (8) durch Aufdampfen im Vakuum aufgebracht ist.Ultrasonic atomizer according to claim 4 or 5, characterized in that the layer (8) is applied by vapor deposition in a vacuum. Ultraschallzerstäuber nach einem der Ansprüche 1 bis 7, dadurch gekennzeichnet, daß der Stoff in flüssigem Aggregatzustand vorliegt.Ultrasonic atomizer according to one of claims 1 to 7, characterized in that the substance is in a liquid state.
EP92103290A 1992-02-26 1992-02-26 Ultrasonic atomizer Withdrawn EP0557553A1 (en)

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EP92103290A EP0557553A1 (en) 1992-02-26 1992-02-26 Ultrasonic atomizer

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1996003216A1 (en) * 1994-07-25 1996-02-08 Siemens Aktiengesellschaft Process and device for generating and metering a powdered aerosol
US5950619A (en) * 1995-03-14 1999-09-14 Siemens Aktiengesellschaft Ultrasonic atomizer device with removable precision dosating unit
US5970974A (en) * 1995-03-14 1999-10-26 Siemens Aktiengesellschaft Dosating unit for an ultrasonic atomizer device

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2935873A1 (en) * 1979-09-05 1981-03-19 Bosch-Siemens Hausgeräte GmbH, 7000 Stuttgart Ultrasonic transducer for liq. sprayers - where piezoceramic disk is bonded to steel substrate by soft tin solder
EP0246515A1 (en) * 1986-05-20 1987-11-25 Siemens Aktiengesellschaft Ultrasonic MHz vibrator, in particular for atomizing fluids

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2935873A1 (en) * 1979-09-05 1981-03-19 Bosch-Siemens Hausgeräte GmbH, 7000 Stuttgart Ultrasonic transducer for liq. sprayers - where piezoceramic disk is bonded to steel substrate by soft tin solder
EP0246515A1 (en) * 1986-05-20 1987-11-25 Siemens Aktiengesellschaft Ultrasonic MHz vibrator, in particular for atomizing fluids

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1996003216A1 (en) * 1994-07-25 1996-02-08 Siemens Aktiengesellschaft Process and device for generating and metering a powdered aerosol
US5950619A (en) * 1995-03-14 1999-09-14 Siemens Aktiengesellschaft Ultrasonic atomizer device with removable precision dosating unit
US5970974A (en) * 1995-03-14 1999-10-26 Siemens Aktiengesellschaft Dosating unit for an ultrasonic atomizer device

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