EP0534082A1 - Pump system for delivering liquid or gaseous media - Google Patents

Pump system for delivering liquid or gaseous media Download PDF

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Publication number
EP0534082A1
EP0534082A1 EP92112525A EP92112525A EP0534082A1 EP 0534082 A1 EP0534082 A1 EP 0534082A1 EP 92112525 A EP92112525 A EP 92112525A EP 92112525 A EP92112525 A EP 92112525A EP 0534082 A1 EP0534082 A1 EP 0534082A1
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EP
European Patent Office
Prior art keywords
pump system
pressure vessel
recipient
membrane
liquid
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Application number
EP92112525A
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German (de)
French (fr)
Inventor
Werner Dipl.-Ing. Zimmermann
Willi Dr. Dipl.-Phys. Martin
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Airbus Defence and Space GmbH
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Deutsche Aerospace AG
Daimler Benz Aerospace AG
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Application filed by Deutsche Aerospace AG, Daimler Benz Aerospace AG filed Critical Deutsche Aerospace AG
Publication of EP0534082A1 publication Critical patent/EP0534082A1/en
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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00Machines, pumps, or pumping installations having flexible working members
    • F04B43/02Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04Pumps having electric drive
    • F04B43/043Micropumps
    • F04B43/046Micropumps with piezoelectric drive

Definitions

  • the invention relates to a pump system for conveying liquid or gaseous media according to the preamble of claim 1.
  • the present invention is based on the object of demonstrating a pump system of the type mentioned at the outset, the pump frequencies of which extend into the kHz range and higher, have rapid controllability, are almost free of power loss and are hardly subject to wear.
  • the pump system shown there is based on an electrically conductive coating on both sides Film 10 made of a piezoelectric material - for example PVDF (polyvinylidene difluoride).
  • This piezo film 10 is now folded (FIG. 3) or rolled in two layers (FIG. 2) in a pressure vessel DG filled with liquid 15 with low compressibility, which is closed with a membrane 16 towards the recipient 13.
  • An inlet valve 14a and an outlet valve 14b are assigned to the recipient 13.
  • An electrical control voltage 12 is applied to the piezo film 10 via electrical connections 11, which causes polarization and thus a change in the film thickness.
  • the resulting change in pressure in the pressure vessel DG now moves the membrane 16, which in turn varies the volume of the recipient 13.
  • a periodic change in voltage now produces a pumping effect in connection with the two valves 14a, 14b.
  • this creates a pump system that operates at a very high frequency (kHz range and higher), has a quick controllability due to the low inertia of the drive, and since the piezoelectrics can in principle be controlled without power, only very low power losses occur because of ohmic and inductive There are no losses whatsoever. It is also essential that this pump system is almost wear-free.
  • the transverse contraction must be prevented by the thickness and by the elastic properties of at least one of the electrically conductive coatings (electrodes), for example by an Al foil con bonded to the piezoelectric foil with approx Thickness of the PVDF piezoelectric film.
  • the pressure vessel DG be replaced by a cylinder with a piston (not shown) complete, the diameter of the cylinder must be adapted to the desired piston stroke. This can be easily implemented by any specialist who has become familiar with the present pump system.
  • the thickness dimensioning of the piezo film 10 should be 100 ⁇ m. As already explained above, the film 10 must be folded or rolled in two layers in the pressure vessel DG so that no contact can occur between the two contact surfaces.

Abstract

The invention relates to a pump system for delivering liquid or gaseous media in a pressure vessel (DG) which is sealed with respect to the receiver (13) by means of a diaphragm (16) whose work output is based on a foil (10) which is made of piezoelectric material and is coated on both sides in an electrically conductive manner. Illustrative embodiments are described and drawn. <IMAGE>

Description

Die Erfindung bezieht sich auf ein Pumpensystem zur Förderung von flüssigen oder gasförmigen Medien gemäß dem Gattungsbegriff des Anspruchs 1.The invention relates to a pump system for conveying liquid or gaseous media according to the preamble of claim 1.

Solche Pumpensysteme zählen in den verschiedensten Ausführungsformen und für die verschiedensten Zwecke zum Stand der Technik. Jedes dieser Systeme hat sich für den ihr zugeordneten Zweck bewährt, ist aber auch mit Nachteilen behaftet. Im einen Fall muß sehr niederfrequent gearbeitet werden, im anderen Fall ist die Trägheit des Antriebs zu groß oder im dritten Fall sind die Verlustleistungen zu hoch usw.Pump systems of this type are state of the art in a wide variety of embodiments and for a wide variety of purposes. Each of these systems has proven itself for the purpose assigned to it, but also has disadvantages. In one case you have to work very low frequency, in the other case the inertia of the drive is too great or in the third case the power losses are too high etc.

Der vorliegenden Erfindung liegt die Aufgabe zugrunde, ein Pumpensystem der eingangs genannten Art aufzuzeigen, dessen Pumpfrequenzen bis in den kHz-Bereich und höher reichen, eine schnelle Regelbarkeit aufweisen, nahezu verlustleistungsfrei sind und kaum einem Verschleiß unterliegen.The present invention is based on the object of demonstrating a pump system of the type mentioned at the outset, the pump frequencies of which extend into the kHz range and higher, have rapid controllability, are almost free of power loss and are hardly subject to wear.

Diese Aufgabenkombination wird durch die im Anspruch 1 aufgezeigten Maßnahmen in überraschend einfacher zuverlässiger Weise gelöst. In den Unteransprüchen sind Weiterbildungen und Ausgestaltungen angegeben und in der nachfolgenden Beschreibung werden Ausführungsbeispiele erläutert. Die Figuren der Zeichnung ergänzen diese Erläuterungen. Es zeigen:

Fig. 1
einen Querschnitt durch ein Ausführungsbeispiel in schematischer Darstellung,
Fig. 2
eine perspektivische Skizze für ein Ausführungsbeispiel mit gerollter Piezofolie in schematischer Darstellung,
Fig. 3
eine perspektivische Skizze für ein Ausführungsbeispiel mit gefalteter Piezofolie in schematischer Darstellung.
This combination of tasks is solved in a surprisingly simple, reliable manner by the measures indicated in claim 1. Further developments and refinements are specified in the subclaims and exemplary embodiments are explained in the following description. The figures in the drawing complete these explanations. Show it:
Fig. 1
3 shows a cross section through an exemplary embodiment in a schematic illustration,
Fig. 2
1 shows a perspective sketch for an exemplary embodiment with rolled piezo film in a schematic illustration,
Fig. 3
a perspective sketch of an embodiment with folded piezo film in a schematic representation.

Wie aus der Figur 1 der Zeichnung hervorgeht, basiert das dort dargestellte Pumpensystem auf einer beidseitig elektrisch leitend beschichteten Folie 10 aus einem piezoelektrischen Material - beispielsweise PVDF (Polyvinylidendifluorid). Diese Piezofolie 10 befindet sich nun gefaltet (Fig. 3) oder doppellagig gerollt (Fig. 2) in einem mit Flüssigkeit 15 mit geringer Kompressibilität gefüllten Druckgefäß DG, welches mit einer Membran 16 zum Rezipienten 13 hin abgeschlossen ist. Dem Rezipienten 13 sind ein Einlaßventil 14a und ein Auslaßventil 14b zugeordnet. Über elektrische Anschlüsse 11 wird an die Piezofolie 10 eine elektrische Steuerspannung 12 angelegt, die eine Polarisation und damit eine Änderung der Foliendicke bewirkt. Der hierdurch veränderte Druck im Druckgefäß DG bewegt nun die Membran 16, die ihrerseits das Volumen des Rezipienten 13 variiert.As can be seen from FIG. 1 of the drawing, the pump system shown there is based on an electrically conductive coating on both sides Film 10 made of a piezoelectric material - for example PVDF (polyvinylidene difluoride). This piezo film 10 is now folded (FIG. 3) or rolled in two layers (FIG. 2) in a pressure vessel DG filled with liquid 15 with low compressibility, which is closed with a membrane 16 towards the recipient 13. An inlet valve 14a and an outlet valve 14b are assigned to the recipient 13. An electrical control voltage 12 is applied to the piezo film 10 via electrical connections 11, which causes polarization and thus a change in the film thickness. The resulting change in pressure in the pressure vessel DG now moves the membrane 16, which in turn varies the volume of the recipient 13.

Durch periodische Spannungsänderung wird nun in Verbindung mit den beiden Ventilen 14a, 14b eine Pumpwirkung erzielt. Damit ist aber nun ein Pumpensystem geschaffen, das sehr hochfrequent arbeitet (kHz-Bereich und höher), aufgrund der geringen Trägheit des Antriebes eine schnelle Regelbarkeit aufweist und da die Piezoelektrika im Prinzip leistungsfrei steuerbar sind, nur sehr geringe Verlustleistungen auftreten, weil ohmsche und induktive Verluste völlig entfallen. Weiterhin ist noch wesentlich, daß dieses Pumpensystem nahezu verschleißfrei ist.A periodic change in voltage now produces a pumping effect in connection with the two valves 14a, 14b. However, this creates a pump system that operates at a very high frequency (kHz range and higher), has a quick controllability due to the low inertia of the drive, and since the piezoelectrics can in principle be controlled without power, only very low power losses occur because of ohmic and inductive There are no losses whatsoever. It is also essential that this pump system is almost wear-free.

Die Spannungsänderung und damit die Dickenänderung haben so schnell zu erfolgen, daß aufgrund der Massenträgheit der Folie und der Flüssigkeit (bei der gefalteten Folie) die Querkontraktion der Dickenänderung nicht folgen kann. Daraus resultiert die Volumenänderung der Folie.The change in tension and thus the change in thickness must take place so quickly that, due to the inertia of the film and the liquid (in the case of the folded film), the transverse contraction cannot follow the change in thickness. This results in the change in volume of the film.

Für den quasistatischen bzw. langsam veränderlichen Betrieb muß die Querkontraktion durch die Dicke und durch die elastischen Eigenschaften mindestens einer der elektrisch leitenden Beschichtungen (Elektroden) verhindert werden, beispielsweise durch eine, mit der piezoelektrischen Folie verklebten Al-Folie con ca. 1/10 der Dicke der piezoelektrischen Folie aus PVDF.For quasi-static or slowly changing operation, the transverse contraction must be prevented by the thickness and by the elastic properties of at least one of the electrically conductive coatings (electrodes), for example by an Al foil con bonded to the piezoelectric foil with approx Thickness of the PVDF piezoelectric film.

In einem weiteren Ausführungsbeispiel wird vorgeschlagen, anstelle einer Membran 13 das Druckgefäß DG durch einen Zylinder mit Kolben (nicht gezeichnet) abzuschließen, wobei der Durchmesser des Zylinders dem gewünschten Kolbenhub angepaßt werden muß. Dies ist für jeden Fachmann, der das vorliegende Pumpensystem kennengelernt hat, problemlos zu realisieren.In a further exemplary embodiment it is proposed that the pressure vessel DG be replaced by a cylinder with a piston (not shown) complete, the diameter of the cylinder must be adapted to the desired piston stroke. This can be easily implemented by any specialist who has become familiar with the present pump system.

Nachstehend soll rechnerisch ein Ausführungsbeispiel aufgezeigt werden. Hierbei wird ein zylindrisches Druckgefäß DG mit einem Durchmesser D = 30 mm, einer Höhe H = 50mm und damit mit einem Volumen V = 35 cm³ zugrunde gelegt. Die Dicken-Dimensionierung der Piezofolie 10 soll 100 µm sein. Wie vorstehend bereits ausgeführt, muß die Folie 10 so gefaltet oder doppellagig gerollt im Druckgefäß DG untergebracht werden, daß keine Kontaktierung der beiden Kontaktflächen auftreten kann.An exemplary embodiment is to be arithmetically shown below. This is based on a cylindrical pressure vessel DG with a diameter D = 30 mm, a height H = 50 mm and thus with a volume V = 35 cm³. The thickness dimensioning of the piezo film 10 should be 100 µm. As already explained above, the film 10 must be folded or rolled in two layers in the pressure vessel DG so that no contact can occur between the two contact surfaces.

Die Folienfläche, die maximal in dem Volumen V des Druckgefäßes DG untergebracht wird, ist AF = 3.500 cm². Unter Zugrundelegung eines Füllfaktors Ff = 0,6 wird AFeff = 2.000 cm².The maximum film area that is accommodated in the volume V of the pressure vessel DG is A F = 3,500 cm². Based on a fill factor F f = 0.6, A Feff = 2,000 cm².

Die Änderung der Dicke D der Piezofolie 10 bei einer elektrischen Spannung von 1.000 V beträgt 1 Promille: ΔD = 0,1 µm. Daraus ergibt sich unter der Voraussetzung, daß die Änderung der Dicke D nicht durch gegenläufige Änderung von Länge oder Breite der Folie 10 kompensiert werden kann:

ΔV = 20mm³

Figure imgb0001


Das Druckgefäß 10 ist mit einer inkompressiblen Flüssigkeit - beispielsweise Glyzerin mit K = 4.7 x 10³ MPa - gefüllt.The change in the thickness D of the piezo film 10 at an electrical voltage of 1,000 V is 1 per mille: ΔD = 0.1 μm. This results on the assumption that the change in the thickness D cannot be compensated for by changing the length or width of the film 10 in opposite directions:

ΔV = 20mm³
Figure imgb0001


The pressure vessel 10 is filled with an incompressible liquid - for example glycerol with K = 4.7 x 10³ MPa.

Die Druckänderung durch Volumenänderung errechnet sich aus:

Δp = K AV/V = 4,7 x 10³ MPa 20mm³/35.000mm³ = 2,7 MPa

Figure imgb0002


dies entspricht ungefähr 27 bar.The change in pressure due to volume change is calculated from:

Δp = K AV / V = 4.7 x 10³ MPa 20mm³ / 35,000mm³ = 2.7 MPa
Figure imgb0002


this corresponds to approximately 27 bar.

Wird nun nicht eine Membran sondern ein Zylinder mit Kolben an das Druckgefäß 10 angeschlossen, so wird ein Durchmesser von DK = 2mm und eine Fläche von AK = 3mm² angenommen. Die Durchrechnung dieses Ausführungsbeispiels ergibt, daß der Kolben mit einer Kraft von 8,1 N und einem Hub von 6 mm bewegt wird.If not a membrane but a cylinder with a piston is connected to the pressure vessel 10, then a diameter of D K = 2 mm and an area of A K = 3 mm² are assumed. The calculation of this embodiment shows that the piston is moved with a force of 8.1 N and a stroke of 6 mm.

Claims (5)

Pumpensystem zur Förderung von flüssigen oder gasförmigen Medien in einem Druckgefäß, das mittels einer Membran zum Rezipienten hin abgeschlossen ist, dadurch gekennzeichnet, daß beidseitig elektrisch leitend beschichtete Folien (10) aus einem piezoelektrischen Material gefaltet oder doppellagig mit einem bestimmten Zwischenraum voneinander gerollt in dem entsprechend geformten Druckgefäß (DG) in einer Flüssigkeit (15) mit geringer Kompressibilität angeordnet und über elektrische Anschlüsse (11) mit einer Spannungsquelle (12) verbunden sind, deren periodische elektrische Spannungen eine Änderung der Foliendicke bewirken, die über die Membran (16) das Volumen des Rezipienten (13) variieren, wobei dem Rezipienten (13) ein Einlaß- (14a) und ein Auslaßventil (14b) zugeordnet sind.Pump system for the conveyance of liquid or gaseous media in a pressure vessel, which is closed off to the recipient by means of a membrane, characterized in that films (10) with an electrically conductive coating on both sides are folded or rolled in a double layer with a certain space between them in a corresponding manner formed pressure vessel (DG) in a liquid (15) with low compressibility and are connected via electrical connections (11) to a voltage source (12), the periodic electrical voltages of which cause a change in the film thickness, the volume via the membrane (16) of the recipient (13) vary, the recipient (13) being assigned an inlet (14a) and an outlet valve (14b). Pumpensystem nach Anspruch 1, dadurch gekennzeichnet, daß das Druckgefäß (DG) anstelle einer Membran (16) einen Zylinder mit Kolben als Abschluß aufweist, wobei der Zylinderdurchmesser dem gewünschten Kolbenhub entsprechend bemessen ist.Pump system according to claim 1, characterized in that the pressure vessel (DG) instead of a membrane (16) has a cylinder with a piston at the end, the cylinder diameter being dimensioned in accordance with the desired piston stroke. Pumpensystem nach einem der Ansprüche 1 oder 2, dadurch gekennzeichnet, daß als piezoelektrisches Folienmaterial PVDF (Polyvinylidendifluorid) verwendet wird.Pump system according to one of claims 1 or 2, characterized in that PVDF (polyvinylidene difluoride) is used as the piezoelectric film material. Pumpensystem nach den Ansprüchen 1 bis 3, dadurch gekennzeichnet, daß die Piezofolien (10) im Druckgefäß (DG) so gefaltet oder doppelt gerollt angeordnet sind, daß eine Kontaktierung der Folienflächen miteinander ausgeschlossen ist.Pump system according to claims 1 to 3, characterized in that the piezo foils (10) in the pressure vessel (DG) are arranged so as to be folded or double-rolled such that contact between the foil surfaces is impossible. Pumpensystem nach den Ansprüchen 1 bis 4, dadurch gekennzeichnet, daß die inkompressible Flüssigkeit (15) im Druckgefäß (DG) Glyzerin ist.Pump system according to claims 1 to 4, characterized in that the incompressible liquid (15) in the pressure vessel (DG) is glycerine.
EP92112525A 1991-08-22 1992-07-22 Pump system for delivering liquid or gaseous media Withdrawn EP0534082A1 (en)

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DE4127860A DE4127860A1 (en) 1991-08-22 1991-08-22 PUMP SYSTEM FOR CONVEYING LIQUID OR GASEOUS MEDIA
DE4127860 1991-08-22

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1323925A2 (en) * 2001-12-25 2003-07-02 Matsushita Electric Works, Ltd. Electroactive polymer actuator and diaphragm pump using the same

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4333871C2 (en) * 1993-10-05 1997-02-20 Daimler Benz Aerospace Ag Electro-hydraulic actuator
DE102009045396A1 (en) * 2009-10-06 2011-04-07 Fev Motorentechnik Gmbh Test-stand for testing fatigue strength e.g. transient fatigue, of cylindrical body of motor vehicle, has pressure generating unit and fixture including piezo-actuator and heating element, where load is applied on test objects
CN113994585A (en) * 2019-06-18 2022-01-28 Strawb股份有限公司 Electrostatic actuator

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US4330730A (en) * 1980-03-27 1982-05-18 Eastman Kodak Company Wound piezoelectric polymer flexure devices
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FR2645349A1 (en) * 1989-03-29 1990-10-05 Pennwalt Corp LAMINATED PIEZOELECTRIC STRUCTURE AND METHOD FOR ITS FORMATION

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US4330730A (en) * 1980-03-27 1982-05-18 Eastman Kodak Company Wound piezoelectric polymer flexure devices
DE3037380A1 (en) * 1980-10-03 1982-05-13 Carl Schenck Ag, 6100 Darmstadt HYDRAULIC PRINTER GENERATOR AND / OR PRESSURE SUPPLY ARRANGEMENT
DE3415421A1 (en) * 1983-04-25 1984-10-31 Ricoh Co., Ltd., Tokio/Tokyo PUMP FOR COMPRESSING A LIQUID
FR2645349A1 (en) * 1989-03-29 1990-10-05 Pennwalt Corp LAMINATED PIEZOELECTRIC STRUCTURE AND METHOD FOR ITS FORMATION

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1323925A2 (en) * 2001-12-25 2003-07-02 Matsushita Electric Works, Ltd. Electroactive polymer actuator and diaphragm pump using the same
EP1323925A3 (en) * 2001-12-25 2004-07-07 Matsushita Electric Works, Ltd. Electroactive polymer actuator and diaphragm pump using the same
US6960864B2 (en) 2001-12-25 2005-11-01 Matsushita Electric Works, Ltd. Electroactive polymer actuator and diaphragm pump using the same
EP1683968A2 (en) * 2001-12-25 2006-07-26 Matsushita Electric Works, Ltd. Electroactive polymer actuator and diaphragm pump using the same
EP1683968A3 (en) * 2001-12-25 2006-08-16 Matsushita Electric Works, Ltd. Electroactive polymer actuator and diaphragm pump using the same

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