EP0520002A1

EP0520002A1 - Surface wave transformer, especially of the split finger type, with the suppression of reflections of terminal transformer fingers

Info

Publication number: EP0520002A1
Application number: EP91906400A
Authority: EP
Inventors: Oswald Dr. Männer
Original assignee: Siemens AG
Current assignee: Siemens AG
Priority date: 1990-03-30
Filing date: 1991-03-28
Publication date: 1992-12-30
Also published as: US5304965A; DE4010310A1; JPH05505081A; WO1991015897A1

Abstract

Convertisseur d'ondes de surface avec des positions et des largeurs des doigts terminaux F1, F2 et F3 modifiées par rapport à celles des autres doigts de convertisseur, cet agencement étant destiné à supprimer les réflexions qui autrement se produiraient au niveau de ces doigts terminaux.Surface wave converter with positions and widths of the terminal fingers F1, F2 and F3 modified from those of the other converter fingers, this arrangement being intended to suppress reflections which would otherwise occur at these terminal fingers.

Description

Surface wave transducers, especially in the form of split fingers, with suppression of reflections from terminal transducer fingers

The present invention relates to surface wave transducers with the features of the preamble of patent claim 1.

To suppress unwanted reflections of the acoustic wave in the transducer or on its transducer fingers, it has long been known to design such (transmit / receive) transducers with interdigital transducer fingers, in particular as split finger transducers. Compared to a simple interdigital transducer with alternatingly polarized adjacent transducer fingers, such transducers each have two (possibly also three) adjacent fingers which have the same polarity, ie are electrically connected to one and the same busbar. When such a split finger transducer is usually carried out regularly, two (or three) transducer fingers connected to one busbar and two (or three) transducer fingers connected to the other busbar alternate. The center distances of successive transducer fingers (irrespective of the polarity, ie also the finger within a "split finger" and apart from places where transducer fingers are omitted) is a quarter (or a sixth) of the acoustic wavelength of the surface wave to which the respective one is concerned Transducer is tuned, namely the wavelength of the acoustic wave in the substrate material of the transducer. The center distances of adjacent groups of two (or three) equally polarized neighboring fingers, ie the center distances of the alternating split fingers, is again equal to half the wavelength as in the simple converter. Another type of converter with suppression of internal reflections of the ultrasonic waves is the lambda third-finger arrangement. This is also an interdigital transducer, in which, as with the split finger transducer, which has a finger comb (with busbar), double transducer fingers and a single finger of the finger comb of the other busbar is located between adjacent groups of such double transducer fingers.

For the inner areas of such a split finger converter or lambda third converter, the cancellation or suppression of internal reflections in the converter is practically complete with a correspondingly precise dimensioning. Unfortunately, however, this does not apply to the terminal split finger or finger groups. In order to also achieve this desired suppression of reflections, it is known (EP-A-0 088 400) to provide the transducer in question with terminal transducer fingers which are dimensioned in such a way as to be finger-sized in such a way that terminal transducer fingers relate to one another interfering with the reflections. A disadvantage of such an (additional) measure, however, is that such a stepped end of a transducer causes distortions in the phase front of the acoustic wave of the transducer. In addition, not all fingers of a transducer weighted by overlap, as is often the case, are completely hit by the acoustic wave which is picked up by the transducer, which is operated as a receiving transducer. The efficiency of such a measure for suppressing unwanted reflections occurring at the end of a transducer is also only limited.

Another method of suppressing terminal

The reflections of fingers of an interdigital transducer are those described in DE-B-28 39 851. Weighted fingers of the region of the transducer end are directed obliquely to the main axis of the wave propagation with substantial portions of the length of these fingers, so that these fingers with these inclined portions of their finger lengths reflect ultrasound waves impinging on them obliquely, ie do not reflect back into themselves. A still further method is (Trans. IECE Jap. Vol 64-C (1981) pp. 437-438) to shorten a few terminal fingers in relation to the mutual spacing of the opposing busbars and to eliminate the "missing" finger length replacing one floating finger each, however floating potentials are problematic in many applications.

Finally, reference should be made to a method for suppressing reflections from terminal fingers, which consists in making the outermost finger of the two fingers of the terminal (consisting of these two fingers) the outermost finger oriented obliquely to the main axis direction of the wave propagation. This measure has to be taken into account that disturbances in the phase front of the acoustic wave of the useful signal occur.

Attention is drawn to US-A-4 162 465, which appears to be close to the invention to be described below. This publication describes a split finger transducer, in which, in contrast to the split finger transducers known at the time, in which wave reflections on the fingers are suppressed intentionally, such mechanical reflection is brought about in a targeted manner. The purpose of this measure is to compensate (ie to eliminate) waves (RW) reflected from the electrical load by waves which are brought about in a targeted manner. For this purpose, according to the teaching of this publication, it is necessary, within each of the two transducer combs of the interdigital transducer, to provide fingers with a finger width and finger spacing that is different from the other fingers, one or more such fingers of the one comb of one or more fingers of the are adjacent to another ridge. The mechanical (MEL) wave is generated inside the transducer so modified, which compensates for the other load of electrically reflected (regenerated) wave. The dimensioning of these deviating fingers, which is dependent on the impedance of the load, is indicated. This has nothing to do with suppressing reflections of terminal fingers of a transducer to do and the fingers of the transducer described there according to US-A-4 162 465 are also not effective in this regard.

The object of the present invention is to provide measures with which such reflection effects occurring at the ends of a transducer are suppressed, and without other known operational disadvantages occurring.

This object is achieved by designing a converter in accordance with the features of patent claim 1. Further embodiments of the invention emerge from the subclaims.

The present invention is based on the knowledge that - based on the usual scheme of the width and positions of the transducer fingers in the interior of the transducer corresponding to the given design specification - by changing the finger width and finger position of the last transducer finger at the relevant end of the transducer, preferably the last two to four fingers, a satisfactory reflection suppression of reflections from terminal transducer fingers can be achieved. This measure is primarily provided at the opposite ends of two such transducers of a filter. In the case of the invention, "incorrect positioning" and / or "incorrect dimensioning of the finger width" of the last finger / the last fingers, as a result of interferences, eliminates reflections which nevertheless occur at the converter end despite the low-reflection finger arrangement of the transducer fingers. The invention is even more applicable to transducers with (in contrast to split fingers) single fingers.

The measure according to the invention avoids the known phase front distortions which occur, for example, in an embodiment with fingers that are gradually shortened. This version with gradually shortened fingers or the other known measures for suppressing the reflections of terminal fingers already mentioned above can, on the other hand, be carried out at the opposite end, ie at the end of a transducer facing the sump, without any noteworthy interference with the desired transmission. quality of the filter.

With regard to the measurements of these “incorrect positioning” and “finger width deviations” according to the invention, the following information is given:

The in a converter with the structure specified for the present application, e.g. Split finger structure and reflections that occur are calculated according to methods of the prior art (IEEE Ultrason. Symp. Proc. (1985) pp. 78-81) for interdigital transducers with predefined different finger positions and finger widths of terminal transducer fingers (for a given frequency range). This is done using the iterative least squares method. The iteration is terminated as soon as a geometry of four positions or finger width deviations has been achieved which results in satisfactorily low reflections (at the terminal transducer fingers). It is then the dimensions to be used for the individual case for the finger widths and for the incorrect positioning of the selected terminal transducer fingers, i.e. this results in the optimized deviations of dimensions and positions of the terminal transducer fingers compared to the transducer fingers of the diagram of the middle-sized transducer fingers.

The relevant terminal transducer fingers are connected to one and the same busbar, which is in particular grounded. Wave phase fronts are not disturbed by the measure according to the invention, there are no floating potentials and such converters or filters designed according to the invention can be produced using the conventional technological measures of lithography. The deviations for the finger widths are between up to almost double and approximately one fifth to one tenth of the finger widths of the transducer fingers of the scheme, the lithography for high frequencies determining the limit for the smallest width of a transducer finger. The changes in the spaces between the fingers (compared to the diagram) are roughly the same variation. rich. Numerical examples can make the orders of magnitude clearer. For a split finger transducer, a center frequency of 125 MHz applies to finger metallizations made of 0.3 μm aluminum for the transducer fingers of the diagram, ie a finger spacing of 6.92 μm for non-terminal fingers. The same measure applies to the finger width. Terminal fingers designed according to the invention have the following dimensions:

Finger width Finger distance last finger 0.70 μm 6.38 μm second last finger 4.33 μm 7.66 μm third last finger 0.70 μm 3.56 μm

For optimized terminal transducer fingers of a transducer with a lambda third structure of a filter with a 170 MHz center frequency and 12% realistic bandwidth, the fingers and spacing for the fingers of the transducer scheme are as follows:

Finger width Finger distance last finger 4.20 μm 0.84 μm second last finger 2.89 μm 3.92 μm third last finger 6, 96 μm 1.35 μm

The attached figures provide further explanations for the invention.

Figure 1 shows a surface acoustic wave filter with two transducers

FIG. 2 shows a first embodiment of a converter and

FIG. 3 shows an embodiment containing the invention and combining a known measure.

1 shows schematically a surface acoustic wave filter 1 with a plate-shaped substrate 2 and with it on the surface of the substrate located interdigital transducers 3 and 4 are shown. The double arrow 5 indicates the axis of the main direction of propagation of the acoustic waves, which is generated by one of the two transducers as a transmitting transducer and received by the other transducer as a receiving transducer.

FIG. 2 shows one of the converters of the filter of FIG. 1, for example the converter 4. Between the mutually opposite busbars 11 and 12, the transducer fingers F which are electrically connected to one or the other busbar can be seen. F _Q is the transducer finger corresponding to the predefined scheme of the transducer. As can be seen from FIG. 2, these transducer fingers F _Q are regularly positioned with respect to one another and have the same finger width. They fill the middle part of converter 4 and, in the exemplary embodiment in FIG. 2, are arranged and distributed relative to one another in accordance with a lambda third converter.

For the sake of completeness, it should be pointed out that these fingers F _{Q can} also be arranged at such differing distances and can be designed in accordance with changing finger widths, namely as is well known to a person skilled in the art for a dispersive transducer. A converter of this embodiment is also part of the invention.

At both ends, the transducer 4 of FIG. 2 has positional transducer fingers F ₁ , F ₂ and F _2, positioned according to the invention and measured with respect to the finger width. It can be clearly seen from FIG. 2 that both the finger widths and the distances between the fingers and the finger F to the neighboring finger F-. are obviously differently dimensioned, specifically different from one another and different from the positions and finger widths of the fingers F .... This is the characteristic of the invention. The two fingers F, and F ₂ , which are narrower than a finger F .., are also at a comparatively very small distance from one another. In contrast, the distance between the fingers F _{1 and 2} is larger, but nevertheless smaller than the distance between fingers F ₀ the finger F ,. The finger F is wider than a finger F _Q. The distance between the finger F and the adjacent finger F _Q , that is to say the first finger F ₀ corresponding to the diagram of the transducer, is again smaller than the usual finger distance between adjacent fingers F 1.

The other end of the transducer 4 has the corresponding fingers F, ', F' ¹ and, which are dimensioned and positioned according to the invention

Ύ -

The fingers F,, F ₂ and F_ are preferably connected to one and the same busbar 11, that is to say they are at the same potential, which is in particular the ground potential.

FIG. 3 shows one which also corresponds to the invention

Converter, referred to as converter 3. The transducer has fingers F, which are arranged and selected in accordance with a split finger transducer. The fingers F., F. ₂ and F. are again the final transducer fingers, which are positioned according to the invention and are dimensioned with regard to their finger width. In the converter 3, the iteration method described above has resulted in a very narrow finger F ..,, also a very narrow finger F ..., and a wider finger F, ₂ , but the latter finger is nevertheless narrower than a finger F _Q. Also, compared to the regular intervals finger, the finger F _n different distances of the finger F,, F ₂ _z ** Pi and the finger 13 adjacent finger F _Q can be recognized.

The end 31 of the transducer 3 opposite this configuration according to the invention is designed with gradually shortened fingers instead of according to the invention according to the known prior art specified above. If the transducers of FIGS. 2 and 3, as they are oriented in their figures, are in the filter 1 of FIG. 1, the end of the transducer 3 stands with its fingers F 1, F _2, and F., and the end of the transducer 4 with his fingers F,, F and F, opposite each other. The otherwise on terminal fingers of the inter Reflections occurring with digital transducers do not occur here according to the invention, or they are strongly suppressed. Because of the fingers F ,, F ₂ , F .. and F,,, P- _| 2 _> - ^r τ_ ₃ no adverse effects on the wave front of the acoustic wave occurring between transducers 3 and 4.

Claims

1. Surface wave transducer with measures for suppressing internal reflections on the terminal fingers of a transducer whose transducer fingers, which are adjacent to these terminal fingers, are arranged in accordance with the predetermined acoustic wavelength of the transducer in intervals specified by a scheme corresponding to the predetermined design specification and with Finger widths are also specified, characterized in that at least one end of the transducer (3, 4) has at least one end transducer finger (F,, F ₂ , F ,; F .., F- ₂ , F., connected to the one busbar) ) are positioned differently from this scheme of the positioning and finger width of the other transducer fingers (F _Q ) and are dimensioned differently in terms of their finger strip width, so that phases and amplitudes of those otherwise solely from these terminal transducer fingers and from the adjacent last one corresponding to the scheme of the transducer Converter finger (F _Q ) reflected wave components are changed so that these wave components interfere destructively with each other.

2. Surface wave transducer according to claim 1, marked ¬ characterized in that such dimensioned end transducer fingers (F ,, F ₂ , F- .; F ', F', F ₃ ¹ ) are provided at both ends of the transducer (4).

3. Surface wave transducer according to claim 1 or 2, ge ¬ indicates that in a transducer (3) with dimensioned according to claim 1 or 2 endständige gene transducer fingers (F. ,, F ^' , F.,) at one transducer end the other end of Transducer (31) is provided with gradually shortened terminal fingers.

4. Surface wave transducer according to claim 1 or 2, ge ¬ indicates that in a transducer with dimensioned according to claim 1 or 2 terminal transducer fingers at one transducer end, the other end of the wall lers is provided with terminal fingers oriented obliquely to a finger length portion.

Surface wave transducer according to one of Claims 1 to 4, characterized in that the last transducer finger corresponding to the scheme of the transducer is followed by three end transducer fingers at the end of the transducer, of which the third last transducer finger has a smaller finger width, the second last transducer finger has a larger finger width and the last, outermost transducer finger again has a smaller finger width than a transducer finger which corresponds to the scheme of the transducer, and that the gaps between the last transducer finger corresponding to the scheme of the transducer and the third last last transducer finger and the space between the second last and the last transducer finger are larger is as the space between transducer fingers of the transducer scheme.

6. Surface wave transducer according to one of claims 1 to 5, characterized in that the number of differently positioned and dimensioned end fingers (F ,, F ₂ , F ,; ...) at one end of the transducer is two to four.