JPS61154212A - Surface acoustic wave filter - Google Patents

Surface acoustic wave filter

Info

Publication number
JPS61154212A
JPS61154212A JP28164484A JP28164484A JPS61154212A JP S61154212 A JPS61154212 A JP S61154212A JP 28164484 A JP28164484 A JP 28164484A JP 28164484 A JP28164484 A JP 28164484A JP S61154212 A JPS61154212 A JP S61154212A
Authority
JP
Japan
Prior art keywords
electrode
finger
fingers
comb
surface wave
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP28164484A
Other languages
Japanese (ja)
Other versions
JPH0312485B2 (en
Inventor
Eiji Hirota
広田 英司
Jun Koike
純 小池
Koji Kawakatsu
川勝 孝治
Eiji Iegi
家木 英治
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP28164484A priority Critical patent/JPS61154212A/en
Publication of JPS61154212A publication Critical patent/JPS61154212A/en
Publication of JPH0312485B2 publication Critical patent/JPH0312485B2/ja
Granted legal-status Critical Current

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  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)

Abstract

PURPOSE:To suppress a spurious surface wave without giving adverse effect on the excitation for a prescribed surface wave by constituting the remote end electrode finger at the opposite electrode side of a weight electrode with electrde fingers formed by connecting electrically plural lectrode fingers with a specific interval. CONSTITUTION:A weighted comb-line electrode 2 being an input electrode is formed on a piezoelectric substrate 1 and a normal comb-line electrode 3 being an output electrode is formed from the electrode 2 with a prescribed interval. An elctroder finger 7 of the side of the opposite electrode 3 in the remotest electrode finger pairs 6, 7 in the hot side comb-line electrode 4 of the weighted electrode 2 consists of an electrode finger part 7a of the electrode 2 arranged with a prescribed pitch and exciting a desired surface wave and an electrode finger part 7b shifted toward the opposite electrode 3f by #10/2 in the propagat ing direction of the wave from the finger 7a and not contributing to the excita tion of the surface wave. the electrode fingers 7a, 7b have a nearly equal length a/2, the total length (a) is formed nearly equal to one electrode finger and they are connected electrically.

Description

【発明の詳細な説明】 (産業上の利用分野) この発明は、弾性表面波フィルタに関し、特に、通過帯
域特性の平坦な比帯域幅の広い弾性表面波フィルタに関
する。
DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a surface acoustic wave filter, and more particularly to a surface acoustic wave filter with flat passband characteristics and a wide fractional bandwidth.

(従来の技術) 一般に、弾性表面波フィルタは、圧電基板上に入力側お
よび出力側くし歯状電極を所定路離隔てて形成し、その
入力側電極から出力側電極へ伝播する表面波を利用した
もので、特に電極形状に基づく周波数特性によって、例
えばTVのVIPフィルタで要求される各種特性を実現
するようにしている。このような弾性表面波フィルタに
おいては、所望の表面波以外に、TTE、端面反射波、
バルク波といった不要波も発生する。従来では、不要波
の影響をなくするためにそれぞれ、スプリット電極構造
としたり、吸音材を塗布したり、底面加工を施したりし
ていた。
(Prior art) In general, a surface acoustic wave filter has input and output side comb-like electrodes formed on a piezoelectric substrate, separated by a predetermined distance, and utilizes surface waves propagating from the input side electrode to the output side electrode. In particular, the frequency characteristics based on the electrode shape are used to realize various characteristics required for, for example, a VIP filter for a TV. In such a surface acoustic wave filter, in addition to desired surface waves, TTE, edge reflected waves,
Unnecessary waves such as bulk waves are also generated. Conventionally, in order to eliminate the influence of unnecessary waves, each device had a split electrode structure, was coated with sound-absorbing material, or had its bottom surface processed.

ところが、TVのVIPフィルタなどと違って、例えば
中心周波数が70M Hz、3dB通過帯域幅が23M
 Hzのような非常に比帯域幅の広いフィルタを構成す
る場合には、上述した不要波以外に、表面波型スプリア
スと称されるスプリアスが相対的に大きくなり、通過帯
域内に、例えばし1NbOGでfo=70M日7.3(
jBバンド幅−23M+−111伝播距離−1,θII
IIIII7)場合、振幅が0.9d B 。
However, unlike TV VIP filters, for example, the center frequency is 70 MHz and the 3 dB passband width is 23 MHz.
When configuring a filter with a very wide fractional bandwidth such as Hz, in addition to the above-mentioned unnecessary waves, spurious waves called surface wave type spurious waves become relatively large, and within the passband, for example, 1NbOG So fo = 70M days 7.3 (
jB Bandwidth -23M+-111 Propagation distance -1, θII
III7), the amplitude is 0.9d B .

周期が約6M1−1zといった大きなうねりがあられれ
る。これは、比帯域幅が広いため、重付は電極の対数が
少なくなって]ンダクタンスが小さくなり、この結果所
望の表面波に比べて、重付は電極の最端電極指から発生
する表面波型スプリアスが相対的に大きくなり、2つの
波の伝播距離差からくる位相のずれによる干渉のIII
が目立ってくるからである。
Large undulations with a period of about 6M1-1z can be seen. This is due to the wide fractional bandwidth, which reduces the number of logarithms of the electrode, resulting in a smaller inductance, which results in a smaller inductance than the desired surface wave. Type spurious becomes relatively large, and interference due to phase shift due to difference in propagation distance between two waves occurs.
This is because it becomes noticeable.

このような表面波型スプリアスを低減する手段は、例え
ば特開昭56−122215@公報に開示され、その代
表例が第4図に示されている。第4図は、くし波状電極
の端に、互いに長さの異なる電極指2、22.23.2
4を、繰り返し周期がλ/4になるように波の伝播方向
に配置したものである。
A means for reducing such surface wave type spurious is disclosed in, for example, Japanese Patent Laid-Open No. 122215/1983, and a representative example thereof is shown in FIG. FIG. 4 shows electrode fingers 2, 22, 23, and 2 having different lengths at the ends of the comb-like electrode.
4 are arranged in the wave propagation direction so that the repetition period is λ/4.

このように構成すると、電極指21と電極指23の斜線
部分により生ずる不要な表面波応答が、λ/2の差をも
つため、互いに逆相となり相殺される。
With this configuration, the unnecessary surface wave responses caused by the hatched portions of the electrode fingers 21 and 23 have a difference of λ/2, so that they are in opposite phases and cancel each other out.

電極指22.24の斜線部により生ずる不要な表面波応
答も同様に相殺される。
Unwanted surface wave responses caused by the shaded portions of electrode fingers 22, 24 are similarly canceled out.

(発明が解決しようとする問題点) ところが、第4図の構成では、良さの異なる電極指2、
22.23.24を波の伝播方向に沿って形成している
ので、伝播方向と直角の方向において表面波の伝播時間
が異なり、この結果波面が湾曲し、周波数特性が悲化す
るという問題点を有している。
(Problems to be Solved by the Invention) However, in the configuration shown in FIG. 4, the electrode fingers 2, which have different qualities,
22, 23, and 24 are formed along the wave propagation direction, the propagation time of the surface waves differs in the direction perpendicular to the propagation direction, resulting in a curved wave front and a worsening of the frequency characteristics. have.

(問題点を解決J−るための手段) 重付は電極の対向電極側の最端電極指を、互いに(N+
 1/ 2)λ0の距離を隔てた、複数の電極指部分を
電気的に接続してなる電極指によって構成するとともに
、その複数の電極指部分の重付は電極側から゛奇数番目
の電極指部分の指長さの合泪と、偶数番目の電極指部分
の指長さの合計とをほぼ等しく構成した弾性表面波フィ
ルタである。
(Means for resolving the problem) For weighting, connect the extreme electrode fingers on the opposing electrode side to each other (N+
1/2) It is composed of electrode fingers formed by electrically connecting a plurality of electrode finger parts separated by a distance of λ0, and the weighting of the plurality of electrode finger parts is from the odd-numbered electrode finger from the electrode side. This is a surface acoustic wave filter in which the sum of the finger lengths of the sections and the sum of the finger lengths of even-numbered electrode finger sections are approximately equal.

(作用) (N+1/ 2)λOずらせた最端電極指によって、対
向電極からみた不要波は大きさが等しく、位相が互いに
反対のものが存在し、したがって対向電極側において互
いに打ち消されてしまう。しかも、この最端電極指によ
り、電極のある領域とない領域の比が変わることはない
(Function) Due to the extreme electrode fingers shifted by (N+1/2)λO, unnecessary waves seen from the opposing electrodes have equal magnitudes and mutually opposite phases, so that they cancel each other out on the opposing electrode side. Moreover, the ratio of the area with electrodes and the area without electrodes does not change due to this endmost electrode finger.

(実施例) 以下、この発明の実施例を図面を参照しつつ詳述する。(Example) Embodiments of the present invention will be described in detail below with reference to the drawings.

第1図において、圧電基板1上に、例えば入力電極とな
る重付けくし歯状電極2が形成されこの電極2から所定
距離隔てて出力電極となる正規型くし歯状電極3が形成
されている。重付は電極2は、所定の通過特性、例えば
中心周波数が70M Hz 、 3dB通過帯域幅が2
3M l−1zの通過特性を得るため、交さ幌型付けが
施され、かつTTE除去の目的で対の電極指からなるス
プリット電極で構成されている。この重付は電極2のホ
ット側くし歯電極4における対向電極3側の最端電極指
対6.7のうち、対向電極3側の電極指7は、電極2に
おりる所定のピッチで配列されかつ所望表面波を励振さ
せる電極指部分7aと、この指部分7aより波の伝播方
向にλo/2だ(J対向電極3側にずらせて、表面波の
励振に寄与しない電極指部分7bとで構成されている。
In FIG. 1, on a piezoelectric substrate 1, for example, a weighted comb-shaped electrode 2, which serves as an input electrode, is formed, and a regular comb-shaped electrode 3, which serves as an output electrode, is formed at a predetermined distance from this electrode 2. . The weight is that the electrode 2 has predetermined pass characteristics, for example, a center frequency of 70 MHz and a 3 dB pass band width of 2.
In order to obtain the transmission characteristics of 3M l-1z, a cross-top pattern is applied, and a split electrode consisting of a pair of electrode fingers is used for the purpose of TTE removal. This weighting is such that among the pair of extreme electrode fingers 6.7 on the counter electrode 3 side of the hot-side comb-tooth electrode 4 of the electrode 2, the electrode fingers 7 on the counter electrode 3 side are arranged at a predetermined pitch so that they fall on the electrode 2. An electrode finger portion 7a that is oriented and excites the desired surface wave, and an electrode finger portion 7b that is shifted toward the J counter electrode 3 side and does not contribute to the excitation of the surface wave. It consists of

しかも、これらの電極指部分7a、7bは互いにほぼ等
しい長さa/2を有し、合計の長さaが一方の電極指と
ほぼ等しく ’t>るように構成され、かつ電気的に接
続されている。この実施例では重付は電極2のアース側
くし歯電極5においても、最端電極指対8.9のうちの
外側の電極指9が、上)本の電極指部分?a、 7bと
同様に、λ0/2の距離をあけた2つの電極指部分9a
、9bからなる折り曲げ電極指で構成されている。
In addition, these electrode finger portions 7a and 7b have approximately equal lengths a/2, are configured such that the total length a is approximately equal to one electrode finger, and are electrically connected. has been done. In this embodiment, even in the ground-side comb-like electrode 5 of the electrode 2, the outer electrode finger 9 of the outermost electrode finger pair 8.9 is the uppermost electrode finger portion. Similar to a and 7b, two electrode finger portions 9a separated by a distance of λ0/2
, 9b.

このように構成すると、最端電極指7から発生する表面
波形スプリアスは、電極指部分7aに基づくスプリアス
と電極指部分7bに基づくスプリアスとがλ0/2に相
当する@間差でもって出力側電極3にあられれるので、
互いに相殺されることになる。また、アース側くし歯電
極5の最端電♂へにおいてはスプリアスレベルが比較的
小さいが、同様に相殺される。例えば、従来では通過帯
域内に振幅幅が0.9d B、周期が約6M1−1zの
うねりが発生していたのが、この実施例によれば0.5
dBPl[のうねりとなり、実用上十分な平坦性が1q
られる。しかも、電極バスバーとは逆の中央側に配置さ
れる電極指部分7aがスブリッ1〜電極として本来の表
面波の励振にも寄与するので、周波数特性に悪影響を与
えずに、通過帯域の平坦化をはかることができる。
With this configuration, the surface waveform spurious generated from the endmost electrode finger 7 is generated at the output side electrode with a difference between the spurious based on the electrode finger portion 7a and the spurious based on the electrode finger portion 7b, which corresponds to λ0/2. Hail to 3, so
They will cancel each other out. Further, although the spurious level is relatively small at the terminal end of the comb-shaped electrode 5 on the ground side, it is canceled out in the same way. For example, in the past, waviness with an amplitude width of 0.9 dB and a period of about 6M1-1z was generated within the passband, but according to this embodiment, the waviness is 0.5 dB.
dBPl [waviness, and practically sufficient flatness is 1q
It will be done. Moreover, since the electrode finger portion 7a located on the center side opposite to the electrode bus bar also contributes to the original excitation of the surface wave as a sub-electrode, the pass band can be flattened without adversely affecting the frequency characteristics. can be measured.

第2図は第2の実施例を示し、上記実施例との相違点は
最端電極指としてダミーの電極指を用いたことにある。
FIG. 2 shows a second embodiment, which differs from the above embodiments in that a dummy electrode finger is used as the endmost electrode finger.

すなわち、重付は電極2には、対向電極2側における最
端部に、すなわち最も対向電極2寄りの電極指7.9の
さらに外側に、ダミーの最端電極指10.11が付は加
えられている。この最端ダミー電極指10.11は上記
実施例と同様に、隣りの電極指7.9どほぼ同じ電極指
長さをもち、そのほぼ中央部で波の伝播方向にλo/2
の距離ずらせて折り曲げることによって構成されている
That is, the electrode 2 has a dummy end electrode finger 10.11 added to the end of the electrode 2 on the side of the counter electrode 2, that is, further outside the electrode finger 7.9 closest to the counter electrode 2. It is being This endmost dummy electrode finger 10.11 has approximately the same electrode finger length as the adjacent electrode finger 7.9, and has approximately the same length as the adjacent electrode finger 7.9, and λo/2 in the wave propagation direction at approximately the center thereof.
It is constructed by bending at a distance of .

第3図は第3の実施例を示し、最端電極指12.13が
それぞれ3ツノ電極指部分12a 、 12b 、 1
2c 。
FIG. 3 shows a third embodiment, in which the endmost electrode fingers 12.13 each have three horn electrode finger portions 12a, 12b, 1.
2c.

および13a 、 13b 、 13cで構成されたも
のである。
and 13a, 13b, and 13c.

電極指部分12a 、 12b 、 12cは指部分1
2aから対向電極3側に向って順次λ0/2の間隔をあ
(づて指部分12b 、12cが配置されている。アー
ス側の電極指部13a 、 13b 、13cも同様に
λo/2の間隔でもって構成されている。
Electrode finger portions 12a, 12b, and 12c are finger portion 1
Finger portions 12b and 12c are arranged successively from 2a toward the counter electrode 3 side at intervals of λ0/2. Similarly, the electrode finger portions 13a, 13b, and 13c on the ground side are also spaced at intervals of λo/2. It is composed of

(効果) この発明によれば、比帯域幅の広いフィルタにおいても
、所定の表面波の励振に悪影響を与えることなく、表面
波形スプリアスを抑圧でき、より平坦な通過帯域特性が
一得られる。特に、表面波の波面を乱すこともない。
(Effects) According to the present invention, even in a filter with a wide fractional bandwidth, surface waveform spurious can be suppressed without adversely affecting the excitation of a predetermined surface wave, and a flatter passband characteristic can be obtained. In particular, it does not disturb the wavefront of surface waves.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図、第2図および第3図はそれぞれこの発明による
弾性表面波フィルタの実施例を示す図、第4図は従来例
を示す図である。 1は圧電基板、2は重付は電極、3は正規型電極、7.
10.12は最端電極指、7a、 7b、10a 、 
10b 、12a 、 12b 、 12c 、は電極
指部分である。
FIG. 1, FIG. 2, and FIG. 3 each show an embodiment of a surface acoustic wave filter according to the present invention, and FIG. 4 shows a conventional example. 1 is a piezoelectric substrate, 2 is a weighted electrode, 3 is a regular type electrode, 7.
10.12 are the extreme electrode fingers, 7a, 7b, 10a,
10b, 12a, 12b, 12c are electrode finger portions.

Claims (2)

【特許請求の範囲】[Claims] (1)入出力くし歯状電極のうち少なくとも一方の電極
が重付け電極で構成された弾性表面波フィルタにおいて
、前記重付け電極の少なくともホット側くし歯電極の対
向電極側の最端電極指が互いに(N+1/2)λ_0の
距離を隔てた、複数の電極指部分を電気的に接続してな
る電極指によって構成され、かつこれらの複数の電極指
部分の重付け電極側から奇数番目の電極指部分の指長さ
の合計と、偶数番目の電極指部分の指長さの合計とがほ
ぼ等しくなるように構成されたことを特徴とする弾性表
面波装置。 ただし、N=0、1、2・・・、λ_0は中心周波数に
おける表面波の波長である。
(1) In a surface acoustic wave filter in which at least one of the input and output comb-shaped electrodes is constituted by a weighted electrode, at least the most extreme electrode finger on the opposite electrode side of the hot-side comb-shaped electrode of the weighted electrode An electrode finger formed by electrically connecting a plurality of electrode finger portions separated from each other by a distance of (N+1/2)λ_0, and an odd-numbered electrode from the weighted electrode side of the plurality of electrode finger portions. 1. A surface acoustic wave device characterized in that the total length of the finger portions is approximately equal to the total length of the even-numbered electrode finger portions. However, N=0, 1, 2..., λ_0 is the wavelength of the surface wave at the center frequency.
(2)前記重付け電極は、対の電極指からなるスプリッ
ト形電極で構成された、特許請求の範囲第(1)項記載
の弾性表面波フィルタ。
(2) The surface acoustic wave filter according to claim 1, wherein the weighted electrode is constituted by a split electrode consisting of a pair of electrode fingers.
JP28164484A 1984-12-26 1984-12-26 Surface acoustic wave filter Granted JPS61154212A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP28164484A JPS61154212A (en) 1984-12-26 1984-12-26 Surface acoustic wave filter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP28164484A JPS61154212A (en) 1984-12-26 1984-12-26 Surface acoustic wave filter

Publications (2)

Publication Number Publication Date
JPS61154212A true JPS61154212A (en) 1986-07-12
JPH0312485B2 JPH0312485B2 (en) 1991-02-20

Family

ID=17641972

Family Applications (1)

Application Number Title Priority Date Filing Date
JP28164484A Granted JPS61154212A (en) 1984-12-26 1984-12-26 Surface acoustic wave filter

Country Status (1)

Country Link
JP (1) JPS61154212A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05505081A (en) * 1990-03-30 1993-07-29 シーメンス アクチエンゲゼルシヤフト Split-finger type surface wave transducer that suppresses reflections at the end fingers

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5846887A (en) * 1981-09-16 1983-03-18 Japanese National Railways<Jnr> Control device of linear motor
JPS5883418A (en) * 1981-11-12 1983-05-19 Toshiba Corp Surface acoustic wave device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5846887A (en) * 1981-09-16 1983-03-18 Japanese National Railways<Jnr> Control device of linear motor
JPS5883418A (en) * 1981-11-12 1983-05-19 Toshiba Corp Surface acoustic wave device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05505081A (en) * 1990-03-30 1993-07-29 シーメンス アクチエンゲゼルシヤフト Split-finger type surface wave transducer that suppresses reflections at the end fingers

Also Published As

Publication number Publication date
JPH0312485B2 (en) 1991-02-20

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