EP0509973A1 - Tank bottom diaphragm valve - Google Patents

Tank bottom diaphragm valve Download PDF

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Publication number
EP0509973A1
EP0509973A1 EP92850028A EP92850028A EP0509973A1 EP 0509973 A1 EP0509973 A1 EP 0509973A1 EP 92850028 A EP92850028 A EP 92850028A EP 92850028 A EP92850028 A EP 92850028A EP 0509973 A1 EP0509973 A1 EP 0509973A1
Authority
EP
European Patent Office
Prior art keywords
diaphragm
valve
passage
tank bottom
valve according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP92850028A
Other languages
German (de)
French (fr)
Other versions
EP0509973B1 (en
Inventor
Ronald G. Butler
Richard D. Randall
Wayne R. Houck
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TDK Micronas GmbH
ITT Inc
Original Assignee
Deutsche ITT Industries GmbH
ITT Industries Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Deutsche ITT Industries GmbH, ITT Industries Inc filed Critical Deutsche ITT Industries GmbH
Publication of EP0509973A1 publication Critical patent/EP0509973A1/en
Application granted granted Critical
Publication of EP0509973B1 publication Critical patent/EP0509973B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00Other details not peculiar to particular types of valves or cut-off apparatus

Definitions

  • This invention relates to diaphragm valves, and more particularly to diaphragm valves which are designed to mount to tank bottoms of sterile vessels.
  • Similar devices include ball valves, quarter turn valves which have a ported sphere and a pair of seats in a housing. When open, fluid flows from one end of the valve through the ball and out the other end. Rotating the ball 90 degrees closes the valve and prevents fluid flow.
  • the ball may be fixed or floating Plunger valves are linear motion valves which create a seal by forcing an elastomeric boot into a seat area. When the valve opens, the boot convolutes on itself to provide fluid flow.
  • a ram valve is a linear motion valve which consists of a spindle/ piston combination. The seal is typically metal to metal.
  • Another linear motion valve similar to a ram valve is the kettle valve, but a molded elastomer seal, mushroom shaped, is on the end of the shaft.
  • valves are not ideally suited to process fluids in the pharmaceutical/bioprocessing industries. These valves have many limitations including too large in size, they generate a large sump at the vessel bottom and generate crevices in which bacteria can grow, they trap fluid in ball cavity which requires cavity fillers and steam ports to clean, they have poor interior finish and have non-streamlined fluid passages, they do not isolate the working parts from the line fluid, they do not provide positive closure and are not autoclavable, and they contain welds, i.e. mounting flange is normally welded to valve body.
  • the tank bottom diaphragm valve according to the invention overcomes the above problems by employing the inherent design features of the diaphragm valves which include positive closure, zero pockets, minimal contact surfaces, streamlined fluid passage, bonnet isolation, and ease of maintenance.
  • the tank bottom diaphragm valve of the invention provides a clean, totally drainable means to isolate the vessel from downstream process piping, and the overall dimensional envelope is minimal and all materials of construction are FDA compliant and autoclavable.
  • An object of the invention is to provide a tank bottom diaphragm valve which mounts directly on a tank bottom and provides positive isolation between the vessel and downstream piping with minimal dead space.
  • an elastomer or plastic diaphragm when closed, seals against a body weir contour to seal the valve. Opening the valve creates a smooth, crevice free passageway to downstream piping.
  • the valve is drainable, which prevents contaminants resulting from trapped fluids.
  • valve body/flange is one piece, machined from either bar stock or a forging, and can be welded directly to the tank.
  • Other designs are multi-piece, using bolted fasteners or weldments. The elimination of additional welds improves the valve body integrity and reduces sources of contamination.
  • the diaphragm seal area is very close to the bottom of the tank and a smooth transition insures proper solution mixing.
  • a diaphragm valve designed to mount in a tank bottom 10 is illustrated.
  • the stainless steel valve body 11 is normally welded about its periphery 11a to the tank bottom.
  • a tube extension 12 which may include a flange 12a is welded at the buttweld lip, point 11b at the exit passage 11c.
  • the diaphram valve includes a elastomer or TFE diaphragm 13, a steel or stainless steel finger plate 14, a zinc, iron, or coated iron compressor 15, a stainless steel pin 16, a steel or stainless steel thrust bearing 17, a steel or stainless steel set screw 18, an iron, or coated iron handwheel 19, a stainless steel spindle 20, a plastic shim washer 21, a brass or stainless steel bushing 22, and a bonnet 23 made of iron, coated iron, bronze, steel, or stainless steel.
  • Bonnet 23 is fixed to the valve body 11 by studs and nuts (not shown) in a normal manner.
  • Typical coating materials are nylon and PVDF.
  • the drain thru port centerline 11g is as close to the body centerline 11h as possible This minimizes the dead space from the tank bottom to the valve diaphragm seal.
  • the fluid In many tank applications, the fluid must be continually mixed and kept in solution. A minimum dead space is crucial to insure continuous mixing.
  • the valve body must have a smooth, crevice-free exit passageway.
  • Figure 4 shows several key geometry relationships which exist in the valve body.
  • Centerline 26 of exit port 11c is perpendicular to axis 25.
  • a typical tank bottom has a slope angle of 15 to 20 degrees and the valve body angle 11i matches this slope to insure a smooth transition from the tank to valve body as shown in Figs. 1 and 2.
  • a second transition (11j) occurs on some valve sizes to blend the valve body toward the diaphragm seal area. This reduces the vertical dead space and insures proper mixing of process fluid within tank.
  • Drainability is the key to a successful tank valve application and the valve body is designed to insure drainability.
  • the body's bonnet mounting face 11k has an angular relationship to the top planar surface 11m.
  • the angular relationship is established from a combination of the valve stroke and diaphragm geometry in the open position. In the preferred embodiment angle is approximately 30 degrees from the horizontal plane which is parallel to surface 11m.
  • the orientation is such that the surface 13a of diaphragm 13 at its lowest point (shown in Fig. 1) in the full open position is equal to or higher than the high point of the connection surface 11e to the downstream passage 11c. It is of great importance that no pockets exist in which fluids can be trapped.
  • the valve minimum wall thicknesses must insure adequate strength to withstand pressure up to 150 PSI within the tank.
  • the passage 11f from tank to valve and the passage 11c from the valve to downstream piping must be sufficiently large so as not to restrict flow.
  • a tank must drain quickly to avoid rings in the tank on which contamination can grow.
  • Another feature of the valve body is the ability to have a buttweld tube extension 12, tri-clamp, or other end available on the downstream side.
  • the body 11, being unitary and cylindrical in shape, may be welded to the tank bottom throughout a 360 degree potential rotation to accommodate the downstream piping.
  • Fig. 5 shows a bottom view of the valve taken along lines B-B of Fig. 4. It shows the valve body 11 less the bonnet and diaphragm assembly.
  • the tank drain passage 11f, the weir centerline 25, centerline 26 of exit passage 11c which connects to the downstream piping are illustrated.
  • the bonnet mounting face 11k has a plurality of tapped holes 27 for mounting the bonnet.

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Valve Housings (AREA)
  • Float Valves (AREA)
  • Self-Closing Valves And Venting Or Aerating Valves (AREA)
  • Safety Valves (AREA)

Abstract

A diaphragm valve which mounts directly on a tank bottom provides positive isolation between the vessel and downstream piping. When closed, the diaphragm seals against the valve body weir to seal the valve, and when opened, the valve provides a smooth, crevice free, drainable passageway to the downstream piping.

Description

    Background of the Invention
  • This invention relates to diaphragm valves, and more particularly to diaphragm valves which are designed to mount to tank bottoms of sterile vessels.
  • Similar devices include ball valves, quarter turn valves which have a ported sphere and a pair of seats in a housing. When open, fluid flows from one end of the valve through the ball and out the other end. Rotating the ball 90 degrees closes the valve and prevents fluid flow. The ball may be fixed or floating Plunger valves are linear motion valves which create a seal by forcing an elastomeric boot into a seat area. When the valve opens, the boot convolutes on itself to provide fluid flow. A ram valve is a linear motion valve which consists of a spindle/ piston combination. The seal is typically metal to metal. Another linear motion valve similar to a ram valve is the kettle valve, but a molded elastomer seal, mushroom shaped, is on the end of the shaft.
  • The foregoing valves are not ideally suited to process fluids in the pharmaceutical/bioprocessing industries. These valves have many limitations including too large in size, they generate a large sump at the vessel bottom and generate crevices in which bacteria can grow, they trap fluid in ball cavity which requires cavity fillers and steam ports to clean, they have poor interior finish and have non-streamlined fluid passages, they do not isolate the working parts from the line fluid, they do not provide positive closure and are not autoclavable, and they contain welds, i.e. mounting flange is normally welded to valve body.
  • The state of the art of diaphragm valves are known from the following U.S. patents:
       1,497,275   3,250,511
       2,186,833   3,349,795
       2,605,991   3,623,700
       2,616,164   3,628,770
       2,725,211   3,631,882
       2,892,613   4,505,451
       3,134,286   4,596,268
       3,134,571
  • The state of the art for valves used in connection tanks are known from the following U.S. patents:
       2,679,860
       3,665,946
       3,895,651
       3,918,678
       4,836,236
  • The tank bottom diaphragm valve according to the invention overcomes the above problems by employing the inherent design features of the diaphragm valves which include positive closure, zero pockets, minimal contact surfaces, streamlined fluid passage, bonnet isolation, and ease of maintenance. The tank bottom diaphragm valve of the invention provides a clean, totally drainable means to isolate the vessel from downstream process piping, and the overall dimensional envelope is minimal and all materials of construction are FDA compliant and autoclavable.
  • Summary of the Invention:
  • An object of the invention is to provide a tank bottom diaphragm valve which mounts directly on a tank bottom and provides positive isolation between the vessel and downstream piping with minimal dead space.
  • According to the broader aspects of the invention when closed, an elastomer or plastic diaphragm seals against a body weir contour to seal the valve. Opening the valve creates a smooth, crevice free passageway to downstream piping. The valve is drainable, which prevents contaminants resulting from trapped fluids.
  • A feature of the invention is that the valve body/flange is one piece, machined from either bar stock or a forging, and can be welded directly to the tank. Other designs are multi-piece, using bolted fasteners or weldments. The elimination of additional welds improves the valve body integrity and reduces sources of contamination. The diaphragm seal area is very close to the bottom of the tank and a smooth transition insures proper solution mixing.
  • Brief Description of the Drawings:
  • Other objects, features and advantages of the present invention will become more fully apparent from the following detailed description of the preferred embodiment, the appended claims, and the accompanying drawings in which:
    • Fig. 1 is a cross-sectional view of the tank bottom valve in the open position;
    • Fig. 2 is a cross-sectional view of the tank bottom valve shown in Fig. 1 in the closed position;
    • Fig. 3 is a top view of the valve body;
    • Fig. 4 is a cross-sectional view of the valve body of Fig. 3 taken along lines A-A; and
    • Fig. 5 is a bottom view of the valve body as viewed from lines B-B of Fig. 4.
    Detailed Description of the Embodiment:
  • Referring to Fig. 1, a diaphragm valve designed to mount in a tank bottom 10 is illustrated. The stainless steel valve body 11 is normally welded about its periphery 11a to the tank bottom. A tube extension 12 which may include a flange 12a is welded at the buttweld lip, point 11b at the exit passage 11c.
  • In addition to the valve body 11, the diaphram valve includes a elastomer or TFE diaphragm 13, a steel or stainless steel finger plate 14, a zinc, iron, or coated iron compressor 15, a stainless steel pin 16, a steel or stainless steel thrust bearing 17, a steel or stainless steel set screw 18, an iron, or coated iron handwheel 19, a stainless steel spindle 20, a plastic shim washer 21, a brass or stainless steel bushing 22, and a bonnet 23 made of iron, coated iron, bronze, steel, or stainless steel. Bonnet 23 is fixed to the valve body 11 by studs and nuts (not shown) in a normal manner. Typical coating materials are nylon and PVDF.
  • Turning of hand wheel 19 will cause movement of spindle 20 along axis 25. Referring additionally to Fig. 2, the spindle 20 has moved the diaphragm 13 into a closed position in which the diaphragm 13 closes against concave seat 11d to close drain thru passage 11f. Although a hand wheel is shown, other means such as pneumatic or electrical actuators may be used to move the spindle.
  • Referencing Fig. 3, it can be seen that the drain thru port centerline 11g is as close to the body centerline 11h as possible This minimizes the dead space from the tank bottom to the valve diaphragm seal. In many tank applications, the fluid must be continually mixed and kept in solution. A minimum dead space is crucial to insure continuous mixing. The valve body must have a smooth, crevice-free exit passageway.
  • Figure 4 shows several key geometry relationships which exist in the valve body. Centerline 26 of exit port 11c is perpendicular to axis 25. A typical tank bottom has a slope angle of 15 to 20 degrees and the valve body angle 11i matches this slope to insure a smooth transition from the tank to valve body as shown in Figs. 1 and 2. A second transition (11j) occurs on some valve sizes to blend the valve body toward the diaphragm seal area. This reduces the vertical dead space and insures proper mixing of process fluid within tank.
  • Drainability is the key to a successful tank valve application and the valve body is designed to insure drainability. The body's bonnet mounting face 11k has an angular relationship to the top planar surface 11m. The angular relationship is established from a combination of the valve stroke and diaphragm geometry in the open position. In the preferred embodiment angle
    Figure imgb0001
    is approximately 30 degrees from the horizontal plane which is parallel to surface 11m. The orientation is such that the surface 13a of diaphragm 13 at its lowest point (shown in Fig. 1) in the full open position is equal to or higher than the high point of the connection surface 11e to the downstream passage 11c. It is of great importance that no pockets exist in which fluids can be trapped. Also, the valve minimum wall thicknesses must insure adequate strength to withstand pressure up to 150 PSI within the tank.
  • Also critical to the design of the body are the drain passages. The passage 11f from tank to valve and the passage 11c from the valve to downstream piping must be sufficiently large so as not to restrict flow. A tank must drain quickly to avoid rings in the tank on which contamination can grow. Another feature of the valve body is the ability to have a buttweld tube extension 12, tri-clamp, or other end available on the downstream side. The body 11, being unitary and cylindrical in shape, may be welded to the tank bottom throughout a 360 degree potential rotation to accommodate the downstream piping.
  • Fig. 5 shows a bottom view of the valve taken along lines B-B of Fig. 4. It shows the valve body 11 less the bonnet and diaphragm assembly. The tank drain passage 11f, the weir centerline 25, centerline 26 of exit passage 11c which connects to the downstream piping are illustrated. The bonnet mounting face 11k has a plurality of tapped holes 27 for mounting the bonnet.
  • While the present invention has been disclosed in connection with a preferred embodiment thereof, it should be understood that there may be other embodiments which fall within the spirit and scope of the invention as defined by the following claims.

Claims (20)

  1. A diaphragm valve for a tank bottom comprising:
       a valve body for fixidely attaching to said tank bottom, said body having a drain thru passage and exit passage with a transverse weir there between; and
       means angularly mounted with respect to said drain thru passage of said body for movement of a diaphragm against and away from said weir to effect closure and opening of said drain thru passage.
  2. The valve according to claim 1, wherein said diaphragm in an open position has its lowest surface point equal to or higher than the exit passage.
  3. The valve according to claim 1, wherein said means for movement of said diaphragm is isolated from said drain thru passage by said diaphragm.
  4. The valve according to claim 1, wherein said valve body is a unitary formed body in which the surface mounted to the tank body is at an angle of approximately 30 degrees with respect to the surface for mounting said means for movement of said diaphragm.
  5. A tank bottom diaphragm valve comprising:
       a unitary formed, cylindrically shaped, valve body, said body having a first planar surface for securing to said tank bottom and a second planar surface formed at an angle to said first surface;
       said body having a drain thru passage and an exit passage with a transverse weir extending across said passages;
       a bonnet being secured to said second surface and having mounted therein compressor means;
       a diaphragm being positioned between said compressor and said weir for movement toward and away from, and having it periphery fixed between said second surface and bonnet; and
       said diaphragm in an open position, away from said weir, has its lowest surface point equal to or higher than the exit passage.
  6. The valve according to claim 5 wherein the axis of the drain thru passage is perpendicular to said first surface.
  7. The valve according to claim 6, wherein the axis of said exit passage is angularly displaced with respect to the axis of the drain thru passage.
  8. The valve according to claim 5 wherein said angle is approximately 30 degrees.
  9. The valve according to claim 5 wherein the drain thru passage has an initial slope of approximately 15 to 20 degrees from said first surface.
  10. The valve according to claim 5 including a tube extension welded to said body at the exit passage.
  11. A diaphragm valve for a tank bottom comprising:
       a valve body for fixidely attaching to said tank bottom, said body having a drain thru passage with an axis perpendicular to said tank bottom and exit passage angularly displaced there from with a transverse weir there between; and
       bonnet means mounted said body and containing means for movement of a diaphragm against and away from said weir to effect closure and opening of said drain thru passage.
  12. The valve according to claim 11, wherein said diaphragm in an open position has its lowest surface point higher than the exit passage.
  13. The valve according to claim 12, wherein said means for movement of said diaphragm is isolated from said drain thru passage by said diaphragm.
  14. The valve according to claim 13, wherein said valve body is a unitary formed body in which the surface mounted to the tank body is at an angle of approximately 30 degrees with the surface for mounting said bonnet means.
  15. A tank bottom diaphragm valve comprising in combination:
       a unitary formed, cylindrically shaped, valve body, said body having a first planar surface for securing to said tank bottom and a second planar surface formed at an angle to said first surface;
       said body having a drain thru passage and an exit passage with a transverse weir extending across said passages;
       a bonnet being secured to said second surface and having mounted therein compressor means;
       a diaphragm being positioned between said compressor and said weir for movement toward and away from, and having it periphery fixed between said second surface and bonnet; and
       said diaphragm in an open position, away from said weir, has its lowest surface point equal to or higher than the exit passage.
  16. The combination according to claim 15 wherein the axis of the drain thru passage is perpendicular to said first surface.
  17. The combination according to claim 16 the axis of said exit passage is perpendicular with respect to the axis of said compressor means.
  18. The combination according to claim 17 wherein said angle is approximately 30 degrees.
  19. The valve according to claim 18 wherein the drain thru passage has an initial slope of approximately 15 to 20 degrees from said first surface.
  20. The valve according to claim 19 including a secondary slope greater than said initial slope.
EP92850028A 1991-04-17 1992-02-11 Tank bottom diaphragm valve Expired - Lifetime EP0509973B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US07/686,715 US5277401A (en) 1991-04-17 1991-04-17 Tank bottom diaphragm valve
US686715 1991-04-17

Publications (2)

Publication Number Publication Date
EP0509973A1 true EP0509973A1 (en) 1992-10-21
EP0509973B1 EP0509973B1 (en) 1995-04-05

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Family Applications (1)

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EP92850028A Expired - Lifetime EP0509973B1 (en) 1991-04-17 1992-02-11 Tank bottom diaphragm valve

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US (1) US5277401A (en)
EP (1) EP0509973B1 (en)
CA (1) CA2066398C (en)
DE (1) DE69201901T2 (en)
ES (1) ES2073905T3 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1253417A2 (en) * 2001-04-20 2002-10-30 Iff Creatif-Engineering René Sampling valve for sampling liquid or gas probes from conduits or containers
EP1490613A1 (en) * 2002-03-18 2004-12-29 Entegris, Inc. Fully drainable weir valve

Families Citing this family (11)

* Cited by examiner, † Cited by third party
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CA2141286C (en) * 1995-01-27 1998-05-26 Gary E. Steadman Truck mounted tank having low center of gravity
US6575431B2 (en) * 1999-09-14 2003-06-10 Spears Manufacturing Co. Weir-type diaphragm valve with raised arcuate bead
EP1269055A4 (en) * 2000-03-09 2005-09-21 Nl Technologies Ltd Sanitary drain valve design
US6289933B1 (en) 2000-08-02 2001-09-18 Garitech Systems Inc. Diaphragm valve
US20050236599A1 (en) * 2001-03-09 2005-10-27 Newberg Douglas A Sanitary drain valve design
US7311292B2 (en) * 2002-08-06 2007-12-25 Fedegari Autoclavi Spa Sanitary diaphragm valve
JP4427689B2 (en) * 2004-07-08 2010-03-10 オークマ株式会社 Machine Tools
US7869955B2 (en) * 2008-01-30 2011-01-11 Chevron U.S.A. Inc. Subsurface prediction method and system
US8740177B2 (en) 2011-07-05 2014-06-03 Rain Bird Corporation Eccentric diaphragm valve
US9243718B2 (en) 2012-08-27 2016-01-26 Itt Manufacturing Enterprises Llc. Diaphragm valve having spherically-shaped valve body and diaphragm sealing surface
US9587759B2 (en) 2013-09-20 2017-03-07 Itt Manufacturing Enterprises Llc Quick release valve compressor

Citations (1)

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Publication number Priority date Publication date Assignee Title
GB518286A (en) * 1938-08-20 1940-02-22 Saunders Valve Co Ltd Improvements in and relating to fluid controlling valves

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US3134570A (en) * 1960-05-16 1964-05-26 Saunders Valve Co Ltd Diaphragm valve
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GB2002877B (en) * 1977-08-16 1982-06-30 Niemand C Fluid valves
IL63319A0 (en) * 1981-07-15 1981-10-30 Kim Production Ltd Improved diaphragm valve
US4819691B1 (en) * 1986-10-21 1997-09-23 Steridose Systems Ab Valve device
US4836236A (en) * 1987-07-29 1989-06-06 Ladisch Thomas P Flush sealing tank valve with diaphgram
US4784174A (en) * 1987-07-29 1988-11-15 A. O. Smith Corporation Drain and shutoff valve assembly
DK247989D0 (en) * 1989-05-22 1989-05-22 Novo Nordisk As CONE VALVE

Patent Citations (1)

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Publication number Priority date Publication date Assignee Title
GB518286A (en) * 1938-08-20 1940-02-22 Saunders Valve Co Ltd Improvements in and relating to fluid controlling valves

Non-Patent Citations (1)

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Title
WO-A- 90/14 539 (NOVO NORDISK A/S) *

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1253417A2 (en) * 2001-04-20 2002-10-30 Iff Creatif-Engineering René Sampling valve for sampling liquid or gas probes from conduits or containers
EP1253417A3 (en) * 2001-04-20 2003-09-10 Iff Creatif-Engineering René Sampling valve for sampling liquid or gas probes from conduits or containers
EP1490613A1 (en) * 2002-03-18 2004-12-29 Entegris, Inc. Fully drainable weir valve
EP1490613A4 (en) * 2002-03-18 2005-09-07 Entegris Inc Fully drainable weir valve

Also Published As

Publication number Publication date
DE69201901T2 (en) 1995-12-14
CA2066398A1 (en) 1992-10-18
EP0509973B1 (en) 1995-04-05
DE69201901D1 (en) 1995-05-11
US5277401A (en) 1994-01-11
ES2073905T3 (en) 1995-08-16
CA2066398C (en) 1997-09-30

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