EP0466874A1 - Electrostatic radial field micromotor obtained by photolithographic micromanufacture and method of manufacture thereof - Google Patents

Abstract

The invention relates to a radial field electrostatic micromotor, produced by photolithographic microfabrication. This motor comprises a stator provided with several groups (Gn) of electrodes angularly offset from each other around an axis of rotation of the micromotor, an electrically conductive rotor, at least one arm of which carries a counter-electrode able to come cooperate with the electrodes of the stator to form between the latter an air gap, and a guide ring intended to drive the rotor in rotation and possibly in translation, this micromotor being characterized in that the rotor comprises at least one element forming a bridge (40a -f) which is arranged at least partly above an electrostatic field plane (PCE) of the micromotor, this element which constitutes a raised arm of the rotor carrying one or more mechanically or electrically functional members (26, 151, 161 ) capable of cooperating with one or more complementary members (4, 152, 162) located in or outside the electrostatic field plane and inside or outside the group of electrodes of the stator. This micromotor can be used to drive step by step, in continuous rotation or in bi-directional rotation of an extremely miniaturized mechanism.

Description

 ELECTROSTATIC KICROHOTEL'R WITH RADIAL FIELD

PERFORMED BY PHOTOLITHOGRAPHIC MICRQFABRICATION

AND METHOD FOR PRODUCING SUCH A MICROMOTOR

The invention relates to an electrostatic micromotor with radial field, produced by a photolithographic microfabrication technique.

This type of motor is called a micromotor because of the very small dimensions of some of its components, which are close to a micron (1 • 10 ^"6 meter).

The manufacturing technique of this micromotor is similar to that used in the production of integrated electronic circuits. This technique consists in forming by chemical vapor deposition different layers which are then structured by means of masks of appropriate shape, associated with chemical attacks or with plasma.

These micromotors, thanks to their dimensions, can be used in very diverse applications where force transducers controlled by an electrical signal must be extremely miniaturized. Among these numerous applications, one counts in particular: watchmaking, robotics, IT, electronic equipment for the reproduction of sound and image, aeronautics and aerospace, but also biomedical engineering . An engine of this type is described in the publication of the minutes of the IEEE conference of the group "Micro Electro Mechanical Systems" which was held from February 20 to 22, 1989 in Sait Lake City, USA. This motor comprises, on the one hand, a stator provided with several electrodes angularly offset around an axis of rotation of the micromotor, and on the other hand, an electrically conductive rotor comprising four arms, one end of which forms a counter-electrode is suitable coming to evolve next to each stator electrode.

The stator electrodes which are made of polysilicon are structured on a wafer formed of a substrate coated with dielectric layers, and they are electrically connected to a control circuit. The rotor which is also made of polysilicon has a guide part from which extend four arms. One of the counter electrodes is formed at the end of each arm. The guide part, the arms and the counter-electrodes are made in the same median plane which is perpendicular to the axis of rotation of the rotor and which coincides with the median plane of the stator electrodes. This plane therefore forms an electrostatic field plane in which the rotor pivots which, for this purpose, is engaged with a slight radial clearance via its guide portion, on a central ring forming a bearing likewise made of polysilicon and capable of to be supplied electrically by a ground plane formed between this ring and one of the insulating layers of the substrate.

The essential problem encountered with this type of micro-motor is the level of the supplied motor torque or useful torque which is insufficient.

In addition, this micromotor has no arrangement allowing it to both drive a mechanism, that is to say to transmit this torque.

Thus, the object of the present invention is to remedy these drawbacks by proposing an electrostatic micromotor produced by photolithographic microfabrication comprising means making it possible both to transmit the driving torque to an external mechanism and to raise this torque to a sufficient level.

To this end, the invention relates to an electrostatic micromotor with a radial field of the type comprising: a stator comprising at least one group of several electrodes angularly displaced around an axis of rotation of the micromotor, these electrodes which are electrically connected to a control circuit being supported by a substrate, a rotor, preferably made at least in part of an electrically conductive material, comprising at least one counter electrode capable of coming to evolve opposite each electrode of the stator, substantially in the same plane called the electrostatic field plane, the clearance left between said counter-electrode and the corresponding electrodes forming an air gap, a ring forming a bearing which is capable of being electrically supplied and which is integral with said substrate, said rotor being guided in rotation, and optionally in translation, around this ring by means of a guide part of which said counter-electrode is integral, characterized in that said rotor comprises at least one bridge element which is disposed at- above the electrostatic field plane, this element which constitutes a raised arm of the rotor carrying one or more mechanically or electrically functional organs, ^" capable of cooperating with one or more complementary organs situated in or outside the electrostatic field plane and inside or outside of said stator electrode group.

It is therefore understood that the arrangement of this bridge element formed at a higher level with respect to the stator electrodes makes it possible to have on the same rotor arm several counter-electrodes arranged in a comb and cooperating interdigitatively with other groups of electrodes provided on the stator. This increases the number of air gaps and substantially corresponds to the useful torque. In addition, this bridge element makes it possible to provide on the rotor a torque transmission element constituted by a pinion or by a toothed wheel. It will be observed that the arrangement of this bridge-forming element allows the combination of the aforementioned characteristics, which makes it possible to respond simultaneously to the two problems posed (transmission and increase in torque), without increasing the thickness of the micromotor and at lower cost thanks to a limited number of steps in the photolithographic manufacturing process.

The present invention also relates to a process for photolithographic realization of an electrostatic motor, characterized in that it consists: a) - preferably to provide substantially over the entire surface of a substrate, a first electrically conductive layer intended to supply a central ring capable of guiding and contacting a guide part of a rotor of the micromotor, b) - providing at least one first electrically insulating layer on this conductive layer, c) - structuring conductive tracks on the first insulating layer, these tracks being intended to supply stator electrodes via a micromotor control circuit, d) - to deposit at least partially on the preceding layers preferably a layer having a protective function and a function of reducing friction and electrical insulation , e) - to structure, with the interposition of a first sacrificial layer, at least one group of angular electrodes ent deca¬ lated around an axis of rotation of the micromotor, as well as simultaneously the guide portion of the rotor and at least one counter electrode of the rotor, f) - to be structured above these electrodes and these counter electrodes as well as above this guide portion, with the interposition of a second sacrificial layer, said central ring as well as at least one bridge element constituting a raised arm of the rotor intended to be associated with at least one mechanically or electrically functional member, such as a pinion or a wheel, g) - then eliminating the sacrificial layers by chemical attack.

However, other characteristics and advantages of the invention will appear on reading the detailed description which follows, given with reference to the appended drawings which are given solely by way of example, and in which: FIG. 1 is a top view of a first embodiment of the micromotor according to the invention equipped with power supply terminals; Figure 2 is a half sectional view taken along line II-II of Figure 1; Figure 3 is a partial top view of a second embodiment of the micromotor according to the invention; Figure 4 is a top view of the micromotor according to the invention, according to a third embodiment; Figure -5 is a half-section view taken along line VV of Figure 4; - Figures 6 and 7 are respectively half-views in section of a fourth and a fifth embodiment of the invention; Figure 8 is a top view of a sixth embodiment of the micromotor according to the invention; Figure 9 is a half-sectional view taken along line IX-IX of Figure 8; Figures 10, 11 and 12 are respectively half-views in section of a seventh, an eighth and a ninth embodiment of the invention; Figure 13 is a half-sectional view of a tenth embodiment of the invention, taken along the line XIII-XIII of Figure 14; Figure 14 is a partially broken away top view of the embodiment of Figure 13; Figure 14a is an enlarged view of a bridge member and a pinion of Figure 14; Figure 15 is a top view of an eleventh embodiment of the micromotor according to the invention; Figure 15a is a partial sectional view taken along the line XV-XV A of Figure 15; and FIGS. 16 to 45 show half-views in section of the steps of the process for producing the micromotor according to the invention.

Referring first to Figures 1 and 2, there will be described a first embodiment of the electrostatic micromotor according to the invention. This radial field electrostatic micromotor comprises a stator 1 which is provided with several electrodes 4 supported by a plane substrate 2 of substantially rectangular shape.

We will define below as a "group" of electrodes G several electrodes 4 arranged substantially on the same circumference, while we will define as a "set" of electrodes E, several neighboring electrodes arranged on different circumferences.

Each group of electrodes G1, £ 2 and G3 comprises several electrodes 4 in the form of a circular sector which are arranged one next to the other in a concentric manner substantially at the same distance from an axis of rotation A of the rotor. Thus, each ^"group of electrodes Gl, G2 and G3 in the form of a discontinuous ring appropriately divided so that each electrode 4 constitutes a unitary element, electrically independent of its neighbors in the same group.

With particular reference to FIG. 1, it can be seen that the three groups of electrodes G1, G2, and G3 are arranged coaxially, their common axis being coincident with the axis of rotation A of the micromotor. It will also be observed that this motor comprises several sets of electrodes E1 to E6, formed by neighboring electrodes but which belong to different groups and which are arranged opposite one another and coincidentally, in the same geometric sector of the stator.

More particularly, the micromotor shown in FIG. 1 comprises three groups of electrodes G1, G2 and G3 while it comprises six sets of electrodes E1 to E6 respectively.

All the electrodes 4 within the same set E are n electrically connected to each other by a common supply track 6 which is connected to a supply terminal 8 capable of being connected to an electronic control circuit, not shown ¬ smelled.

The feed tracks 6 comprise two characteristic parts 6a and 6b, the part 6a on which the corresponding supply terminal 8 rests having in plan a substantially rectangular shape, while the part 6b, which allows the connection between the electrodes 4 and the part 6a, has a segment shape of a width much smaller than that of the part 6a.

For this purpose, it is noted that the width of the part 6b directly placed under the sets of electrodes E1 to E6 is much smaller than the arc length of each electrode 4.

The electrodes 4 are connected to the segment 6b of their supply track 6 by means of a support 10 in the form of a circular sector rising in a direction normal to the substrate 2. This support 10 has a width and a length arc infé¬ laughing at the electrode 4 which it supports, the pairs of supports 10 - electrodes 4 as well as the segment 6b of the corresponding supply track 6 being substantially centered on the same radius of the rotor. The supports 10 of the same set of electrodes E are thus arranged on the same geometric sector. The motor represented in FIGS. 1 and 2 further comprises a rotor 20 which consists of a guide part 22 forming a hub which has substantially the shape of an annular disc from which extend, in a co nary manner and towards the 'outside the axis of rotation A, four arms 2 ^' 4 angularly offset from each other by an angle of 90 °. Each arm 24 comprises in the vicinity of its free end 24a a number of counter-electrodes 26 having a configuration identical to that of the electrodes 4, namely in the circular sector.

These counter-electrodes 26 are also arranged in "groups" and in "sets" as defined above. Consequently, each group gl to g4 comprises several counter-electrodes 26 arranged on the same circumference but angularly offset from one another, while the assemblies el to e4 respectively comprise the counter-electrodes 26 formed inside the same geometric sector, that is to say the counter-electrodes 26 of different groups which are substantially centered on the same radius and which are therefore arranged opposite one another, substantially coincidentally.

It will therefore be noted that, in this embodiment, this rotor comprises four groups gl to g4 and four sets el to e4 of counter-electrodes 26.

The rotor 20, which is shaped to be able to rotate relative to the stator 1, is guided in rotation by a ring or button 30 which forms a bearing and whose free end carries a collar 32 which traps the rotor 20 by limiting the axial displacement of the guide portion 22 which is mounted with a slight clearance ^ on the outer cylindrical periphery 34 of this ring. The ring 30 is integral with the substrate 2 and is anchored securely thereon. Being made of an electrically conductive material, it can be supplied electrically via a ground plane 36 which is connected to a supply terminal 38 externally accessible to be connected to the electronic control circuit, not shown. The guide portion 22 of the rotor 20 comprises, on its face 22b disposed opposite the stator 1, protruding elements 23 suscep¬ tible to come into contact on one of the face FI of the stator 1. Referring more particularly to FIG. 2, it can be seen that the stator 1 is made up of a stack of several layers, called thin layers, which are either conductive or insulating, these layers as well as all the other constituent elements tifs of the micromotor being produced by a photolithographic microfabrica¬ tion process called surface micromachining, the steps of which will be explained in more detail below. Thus, this stator 1 can be defined as a pellet (since its dimensions are extremely small) laminated in its thickness. Its dimensions

-3 -3 sions are approximately 1 • 10 meter (1mm) side and 0.4 • 10 meter

(0.4 mm) thick. The electrodes 4 of the stator 1 are all supported by a support 10 projecting from the pellet P in a direction parallel to the axis of rotation A of the micromotor, these electrodes 4 are all located at a distance D from the face FI, in a same plane called the PCE electrostatic field plane.

Furthermore, in this embodiment, the counter-electrodes 26 of the rotor 20 are connected to the arm 24 which supports them respectively by means of a connecting lug 28 extending from the corresponding arm 24 towards the face FI of the pellet P. The counter-electrodes 26 are therefore formed on the rotor 20 so that they can come to be placed in the electrostatic field plane PCE, in particular during the excitation of the electrodes 4 by the electronic circuit of micromotor control. By particularly observing FIGS. 1 and 2, it will be noted that the radial space 37 which is left between two adjacent electrodes 4 of the same assembly E is such that it makes it possible to accommodate a counter-electrode 26 of the rotor 20. In addition , thanks to the shape of the electrodes 4 and the counter electrodes 26 in a circular segment, and to the coaxial arrangement of the different groups of electrodes Gl to G3 and of the groups of counter electrodes gl to g4, the counter electrodes 26 of the rotor 20 are engaged on either side of the electrodes 4 of the rotor and are able to come to evolve opposite each electrode 4 of one or more groups G1 to G3, to allow the rotor 20 to be driven in rotation. It will therefore be noted that, thanks to this construction, a structure in the form of an interdigitated fine comb has been constituted.

The clearance J left between each counter-electrode 26 and the electro¬ of the 4 in coincidence forms an air gap EF. A structure has thus been produced in which the number of air gaps is multiplied, and this without increasing the thickness of the micromotor.

For each arm 24, six air gaps EF1 to EF6 have been provided, which gives for the micromotor 4 (arms) x 6, ie 24 air gaps (only the first six being referenced).

It has been determined that the increase in this number of air gaps compared to a conventional motor allows, in substantially the same proportions, the increase in the transmissible motor torque.

This very advantageous characteristic of the invention was made possible inter alia by a particular structure of the rotor 20, and in particular of the arms 24.

Indeed, each arm 24 is made up of several elements forming a bridge 40 which are arranged above the PCE elec¬ trostatic field plane. In this embodiment, each arm 24 is formed over its entire length essentially by four elements forming a bridge 40a, 40b, 40c and 40d formed one in the extension of the other substantially on the same geometric axis corresponding to the one of the radius of the rotor 20. The first elements 40a connect the guide part 22 to the counter-electrodes 26 of the first group of counter-electrodes gl which is located inside the circle formed by the first group of electrodes Gl. These first elements 40a are connected to the periphery of the guide part 22 by the intermediary of connecting lugs 28 which are anchored on the face 22a of the guide part 22, opposite the pellet P which forms the stator. The other end of these first bridge elements 40a supports under it the counter electrode 26 of the first group of counter electrodes gl, while it is extended radially to the rotor by a second bridge element 40 b at the end of which s 'extends normally another connecting tab 28 which is anchored solid¬ ment on one of the counter electrodes 26 of the second group g2. Thus follow each other on each arm 24 two other elements forming bridge 40c and 40d which respectively support the counter-electrodes 26 of the third and fourth groups of counter-electrodes g3 and g4. Thus, the four arms 24 are in this embodiment arranged completely outside the ^{electrostatic} field plane PCE in part in a raised plane PS substantially parallel to the latter. The raised plane PS substantially coincides with the plane in which the collar 32 of the ring 30 is formed.

Each arm 24 therefore consists of two types of bridge elements 40, the first type 40a consisting of a transverse beam 42 which is located in the upper plane PS and at the two ends of which extend two connecting lugs respectively. 28. The second type of bridge element, represented by elements 40b to 40d, consists of a beam 42 made integrally with the previous one and comprising only one connecting lug 28. The connecting lugs 28 of these two types of bridge elements also all come in one piece with their corresponding beam 42, while they are anchored to the underlying element (to the guide part 22 or to a counter-electrode 26) during the photolithographic production process which will be explained below.

Preferably, the bridge elements 40a to 40d, the guide portion 22, the counter electrodes 26, the electrodes 4 with their support 10, the electrical supply tracks 6, the supply terminals 8, 38 and the ring forming a bearing 30 are made of a polycrystal such as polysilicon. These elements could be made of another conductive material or a metallic material such as tungsten, chromium, aluminum or another alloy. As for the substrate 2, it is preferably made of semiconductor silicon, but it can also be made of another crystalline semiconductor material such as quartz, diamond or gallium arsenide.

The ground plane 36 which is formed substantially over the entire surface of the substrate 2 consists of a portion of the silicon of the substrate which is electrically doped. Above this ground plane 36, substantially over the entire substrate 2, a layer 50 of silicon dioxide (SiO) is formed, forming an electrically insulating layer, on the one hand between the rotor 20 and the substrate 2, and d on the other hand, between the electrodes 4 and the substrate 2. Above this this layer 50 is formed a first layer 52 of silicon nitride (Sι ^' ₃ N ₄ ) on which the electrical supply tracks are structured 6. On these tracks and on the first layer 52 is deposited a second layer of silicon nitride 54 allowing inter alia to protect the layer of silicon dioxide 50 during chemical attacks, but also to prevent electrical breakdown between the rotor 20 and the substrate 2. The supply terminals 8 and 38 are moreover covered with an ine layer aluminum 56.

Referring now to FIG. 3 which represents a second embodiment of the micromotor according to the invention, it will be noted that the rotor 60 has only one arm 24 in the vicinity of the free end of which are provided as a "set" four counter-electrodes 26. This rotor 60 therefore comprises only one set ell of counter-electrodes 26, this micromotor also comprising several groups and several sets of electrodes 4, namely three groups G1, G2, G3 and six assemblies El to E6 partially shown as shaped as in the first embodiment. If in the first embodiment of Figures 1 and 2 the electrical supply of the ring 30 via the ground plane 36 and the power supply terminal 38 is optional, it is however essential in this second embodiment to allow the micromotor operation.

Referring now to Figures 4 and 5, there is shown a third embodiment of the electrostatic micromotor according to the invention.

The rotor 70 of this micromotor has four arms 74 but it could consist of a single arm, as shown in FIG. 3.

The micromotor according to this third embodiment only comprises one group of counter-electrodes g31 and only two groups of electrodes G31 and G32 respectively. It also includes six sets of electrodes E31 to E36 respectively. However, the rotor 70 does not have a characteristic counter electrode assembly since each arm 74 has only one counter electrode 26. In this embodiment, each set of electrodes E31 to E36 respectively comprises two electrodes 4. The arms 74 are formed .respectively of a single element forming a bridge 40a, one end of which is connected to the guide part 22 by a connecting lug 28, while the other opposite end which is located at the outside the first group of electrodes G31, between the latter and the second group G32, carries a counter-electrode 26 by means of another connecting lug 28. The beam 42 of each element forming a bridge 40a partially overlaps the first group α'electrode G31. Thus, in this embodiment, the arrangement of the first and second groups of electrodes G31 and G32 arranged coaxially and between which the counter-electrode 26 formed at the end of each arm 74 moves, makes it possible to obtain, for each arm 74, a second air gap EF32 (in addition to an air gap EF31) which already increases the transmissible mechanical torque of the micromotor.

Thus, in this embodiment, on each arm, for n bridge element (n = 1 in this case) associated with n counter electrode which cooperates with n + 1 groups of electrodes, 2 x n air gaps are obtained. With K arms, we get 2 x n x K air gaps.

In the fourth embodiment shown in FIG. 6, the arm 84 has two bridge elements 40a, 40b respectively, the second bridge element 40b being formed in the extension of the first 40a, as if it were attached to the element forming bridge 40a of the embodiment described above. In this fourth embodiment, each arm 84 has two counter electrodes 26, so that this micromotor comprises two groups of electrodes G41 and G42 associated with two groups of counter electrodes g41 and g42 to constitute, per arm 84, three air gaps EF41 to EF43. Thus, in this embodiment, each arm comprises n (in this case n = 2) bridge elements arranged one in the extension of the other, associated with n counter-electrodes cooperating with n groups of counter-electrodes to form 2 n -1 air gaps per arm. For the complete motor, we obtain with K arms, K x (2 n-1) air gaps.

In the embodiment of FIG. 7, three groups of electrodes G51 to G53 are provided, cooperating with only two groups of counter-electrodes g51 and g52. Four air gaps EF51 to 54 have been formed by arm 94, therefore one more compared to the embodiment of FIG. 6. Thus, for n elements forming a bridge per arm 94, the micromotor according to this fifth embodiment comprises n + 1 groups of electrodes G51 to G53 which form two by two an annular electrostatic field zone in which the counter-electrodes 26 of one of the two groups g51 and g52 move. Thus, it is observed that in this embodiment, 94 arms have been provided per arm forming bridge elements associated with n counter-electrodes cooperating with n + 1 groups of electrodes to form 2 xn air gaps, for K arm 94, K x is obtained. 2 x air gaps.

In all of these embodiments, one or more bridge elements 40a, 40b are provided for each arm, each associated with a single counter-electrode 26 cooperating electrostatically, sometimes with two groups of electrodes between which it operates, sometimes with a single (G43) outside of which it is arranged relative to the axis of rotation A of the rotor.

Anyway, it is understood that the rotor comprises at least one bridge element which is disposed above the PCE electrostatic field plane to form a raised arm of the rotor able to overlap at least one group of electrodes in s extending beyond it.

In these embodiments of FIGS. 4 to 7, each element forming a bridge, overlapping a group of electrodes, brings the counter-electrode which it carries outside the circle formed by this group. Thus, each bridge-forming element constituting a raised arm is capable of carrying an electrically functional member, namely a counter-electrode, capable of cooperating with one or more complementary members, namely one or more electrodes, situated in the plane PCE electrostatic field sensor.

Referring now to Figures 8 and 9, there is shown a sixth embodiment of the micromotor according to the invention. In this embodiment, each arm 104 is constituted by an extension 105 of the guide part 22, which comes integrally with the latter and which is formed in the same plane as the latter. At the end of this extension 105 is formed a counter-electrode 26 also coming in one piece with this extension 105 and also made in the same plane.

This arm 104 comprises a single bridge element 40a, the first end of which is anchored on the counter-electrode 26 of the first group g61 by means of a connecting lug 28, and the second end of which is anchored on a counter - additional electrode, said second counter electrode. This second counter electrode belongs to a second group of g62 counter electrodes, the connection between the beam 42 of the bridge element 40a and this second counter-electrode being produced by means of a connecting tab 28. These two groups of counter-electrodes g61 and g62 are arranged on either side other of a single group of electrodes G61, so that two air gaps EF61 and EF62 have been formed per arm 104. In this embodiment for each arm 104, n bridge element (s) 40a comprising n respectively are provided +1 counter-electrodes 26 cooperating with n group (s) of electrodes G61 to form 2 xn air gaps. More particularly for the entire engine which comprises K arms 104, for n element (s) forming a bridge, there are K x 2 x air gaps.

In a seventh embodiment of the micromotor according to the invention shown in FIG. 10, as in the previous embodiment, only one bridge element 40a per arm 114 of the rotor 110 has been provided. This element 40a has two counter electrodes 26, arranged at each of its ends. Thus, the micromotor also comprises two groups of counter electrodes g71 and g72, but which are here associated with two groups of electrodes G71 and G72. In this embodiment, three air gaps EF71 to EF73 were formed per arm. For each arm of the rotor, there are arranged n bridge elements comprising respectively n + 1 counter-electrodes cooperating with n + 1 groups of electrodes to form 2 x n + 1 air gaps. For the micromotor, we obtain K x (2 x n + 1) air gaps.

In the embodiment of FIG. 11, a second bridge element 40b is provided for each arm 124 which has at its end a third counter-electrode 26. Thus, compared to the previous embodiment, a third is arranged group of g83 counter electrodes. In this embodiment, for each arm 124, two bridge elements 40a and 40b are provided, associated with three counter-electrodes 26 forming on the whole micromo¬ tor three groups of counter-electrodes gδl to g83. For each arm 124, these three counter-electrodes 26 cooperate with two groups of electrodes Gδl and G82, which forms four air gaps. More particularly, for each arm 124, there are provided n bridge elements associated with n + 1 counter-electrodes cooperating with n groups of electrodes which form per arm 2 xn air gaps and for the micromotor K x 2 xn air gaps. In this embodiment, it will be noted that the terminal counter electrode of the group g83 which is formed at the free end of the second bridge element 40b is arranged outside the second group of electrodes G82.

This design is analogous to that of the embodiment of FIGS. 8 and 9 in which the additional counter electrode of the second group g62 is arranged outside the single group of electrodes G61.

Referring now to Figure 12, there is shown a ninth embodiment of the micromotor according to the invention. In this embodiment, each arm 134 comprises two bridge elements 40a and 40b associated with three counter electrodes 26 which cooperate here with three groups of electrodes G91, G92 and G93 respectively. Thus, for each arm 134, n bridge elements have been arranged which respectively have n + 1 counter-electrodes cooperating with n + 1 groups of electrodes to form 2 x n + 1 entre¬ irons. For the micromotor, we obtain with K arms 134, K x (2 x n + 1) air gaps.

Referring now to .figures 13, 14 and 14a there is shown a tenth embodiment of the micromotor according to the invention, in which the rotor 140 comprises a pinion 151 shaped to be able to mesh with a wheel 152 of a drive mechanism, not shown. The pinion 151 is made integral with the guide portion 22 of the rotor 150 by means of four bridge elements 40e angularly offset from each other by approximately 90 °.

In this exemplary embodiment, as can be seen particularly in FIGS. 13 and 14a, the bridge element 40e consists of a portion of beam 42a of very short length extending transversely to the axis A and secured to a connecting lug 28 anchored on the upper face of the guide portion 22. The pinion 151 and the beam portion 42a of which it is integral, as well as the connecting lug 28, are made of material and can be structured , as will be understood below, during the same manufacturing step.

Thus, the bridge element 40e which rises above the electrostatic field plane PCE carries the pinion 151 which forms a mechanically functional element capable of cooperating with a complementary member constituted by the wheel 152 of the mechanism to be driven, this complementary member 152 being located outside the electrostatic field plane PCE, inside the three groups of electrodes 5 G101 to G103 and of the four groups of counter electrodes glOl to gl04. In another example not shown, the connecting lug 28 is formed directly under the pinion 151, in line with the latter, the beam part 42a being omitted.

FIGS. 15 and 15a represent an eleventh embodiment of the micromotor according to the invention, in which each arm 154 has at its free end, beyond the counter-electrodes 26, an additional bridge element 40f which comprises at its end a wheel 161 intended to mesh with a pinion 162 of a mechanism to be driven. The bridge element 40f has a length approximately three times greater than the bridge element 40a which supports the two counter-electrodes 26 of the first and second groups of counter-electrodes glll and gll2 (the configuration of this motor being close to that of the embodiment of Figures 8 and 9). Thus, the wheel 161 which is arranged outside the group of electrodes Q Glll and groups of counter-electrodes glll and gll2 is spaced laterally from the electrodes 4 and does not interfere electrostatically with the latter. As best seen in FIG. 15a, this wheel 161 is formed outside of the electrostatic field plane since it is supported by a beam 42b of the bridge element 40f, which is formed in the extension of the beam 42 of the bridge element 40a. It will be specified here that the bridge elements 40a and 40f as well as the wheel 161 are made of material and are produced during the same manufacturing step.

It will be noted that in all of these embodiments which have just been described, on the one hand the counter-electrodes 26 of the rotor and on the other hand the elements 4 of the stator are produced in geometric sectors having a substantially equal center angle. In addition, each group of counter-electrodes 26 comprises four counter-electrodes whose respective median axes Xce are offset from each other by an angle XI of approximately 90 °, while each group of electrodes comprises six electrodes whose axes Xe are respectively offset by an angle X2 of about 60 ^e . So we can note that when the counter-electrode (s) 26 of two diametrically opposite arms are substantially in coincidence with a set E of electrodes 4, the counter-electrode (s) 26 of the other two arms partially overlap two other sets of electrodes 4 simultaneously of the stator 1. Thus, when the counter-electrode (s) 26 of two diametrically opposite arms have been electrostatically attracted by two diametrically opposite sets of electrodes 4, the other counter-electrode (s) of the other arms are already engaged in the assembly of electrodes 4 which will be able to attract them. We therefore understand that to operate this motor, we simultaneously supply two supply terminals which are connected to two sets of electrodes (or two electrodes) diametrically opposite (s), then we then supply the terminals power supply which are connected to the two sets of electrodes (or to the electrodes) adjacent to the previous ones. A rotary field is therefore produced which makes it possible to operate the micromotor in continuous rotation or in step-by-step, unidirectional or bidirectional rotation. We therefore built an electrostatic motor with a radial field, with variable capacity and of the anti-synchronous type since the rotor turns in the opposite direction to the applied field.

Indeed, with reference to FIG. 1, assuming that it is the sets E2 and E5 of electrodes which have just been supplied, it is noted that the rotor will move in the clockwise direction (arrow R) since the sets e2 and e4 of the counter-electrodes will come to coincide with the above-mentioned sets E2 and E5. At the same time, the sets of counter electrodes el and e3 overlapped the sets El and E4 of electrodes. Thus, in order to advance the motor by a following step, it will be necessary to supply the sets El and E4 of electrodes simultaneously (arrow S). We therefore observe that we have moved from a supply of the set E2 (and E5) to the set El (and E4), which is therefore an opposite direction to the clockwise direction (and to the direction arrow R).

Referring now to FIGS. 16 to 46, a method of photolithographic microfabrication of an electrostatic micromotor will be described below, such as that of the first embodiment described with reference to FIGS. 1 and 2. 16

Note that these figures are very schematic and that they do not correspond exactly to the scale of the previous figures. The different components of the micromotor do not have the same dimensional proportions in these figures.

These Figures 16 to 46 correspond respectively to thirty phases of the manufacturing process.

In phase 1, a layer 200 of silicon dioxide (SiO 2) is cleaned by thermal oxidation on the substrate 2 which is preferably made of silicon (Si).

In phase 2, the layer of silicon dioxide 200 is used to structure, using an appropriate mask M1 and by chemical attack using an acid, such as buffered hydrofluoric acid called BHF. a large opening to the substrate 2 and per¬ put access to its upper face.

In phase 3, two layers 202 and 204 of Si0 ₂ are deposited over the entire surface of the pellet P by chemical vapor deposition, the layer 202 comprising doping impurities, of type (n), hereinafter referred to as "dopant ".

Then, in phase 4, the pellet P is subjected to annealing in order to diffuse the doping oxide layer 202 in order to dop a large part of the substrate 2, except for its peripheral edge located under the layer 200.

Then, in phase 5, we attack the layers 202 and 204 of Si0 „to leave only the peripheral layer of silicon dioxide 200 as well as a doped region of the substrate 2. The doped region of the substrate 2 forms the ground plane 36, while the peripheral layer 200 forms part of the insulating layer 50 of the stator 1. In this same phase, a new layer 206 of SiO is deposited on the doped region 36 and on the peripheral layer 50 by chemical vapor deposition , which forms a diffusion barrier towards the outside of the pellet P.

Thus, in these five manufacturing phases, among other things, an approximately electrically conductive layer 36 which, as can be seen in FIG. 2, is intended to supply the ring, substantially over the entire surface of the substrate 2. central 30.

This layer 36 will supply the rotor and its counter-electrodes. 19

Reference will now be made to FIGS. 21 to 22 which represent the following phases of the method according to the invention.

In the sixth phase, a layer 208 of SiO intended to allow electrical insulation between the ground plane 36 and the electrodes 4 which will be deposited and structured subsequently is formed by thermal oxidation over the entire surface of the pellet P.

In phase 7, a layer 210 of silicon nitride (Si ^ ^) is deposited by chemical vapor deposition at low pressure. In these two phases 6 and 7 which form a second important step in the process, a first electrically insulating layer 208 has been provided which corresponds to the layer 50 shown in FIG. 2. The layer 210 will form the layer 52 (FIG. 2).

Reference will now be made to FIGS. 23 to 28 which respectively represent the eighth to the thirteenth phases of the method according to the invention.

In phase 8, a first layer of polysilicon 212 is deposited by chemical vapor deposition at low pressure over the entire surface of the pellet P, that is to say on the layer 210 of Si ₃ N "previously deposited. . For a better understanding of this process, reference this layer of polysilicon 212 "PolySi I".

In phase 9, this layer of poly¬ silicon is electrically doped by depositing on it, by chemical vapor deposition, a layer of dopant oxide 214 by then subjecting the pellet P to an annealing allowing diffusion of the doping towards the PolySi I layer.

In phase 10, a layer of dopant oxide deposited in phase 9 is structured by a set of mask M2 and with BHF acid.

In phase 11, the layer 212 of polysilicon I is structured by plasma photolithography with the mask set M2, which reveals the layer 210 of silicon nitride deposited in phase 7.

Then, in phase 12, the residue of doping oxide from layer 214 is attacked with BHF acid in order to completely release the layer 212 of polysilicon I which has been structured. So in this step (phases 8 to 12), conductive tracks 6 (see FIG. 1) made of polysilicon, intended to supply the electrodes 4 of the stator, have been structured using the mask set M2. In phase 13, a second layer of silicon nitride Si ₃ N _£ is deposited over the entire pellet P by chemical vapor deposition at low pressure. This second layer of silicon nitride protects the underlying layers during subsequent chemical attacks and has, during the operation of the engine, a role of reducing the coefficient of friction (the rotor 22 can come to bear by the protruding elements 23 on the rotor 1, see figure 2). This layer 216 also has a function of improving the mechanical characteristics of the micro-motor by providing protection against wear. It corresponds to layer 54 of FIG. 2.

It will be noted that other materials, such as diamond, can fulfill this function and be deposited in place of the Sι ^" ₃ N ₄ .

In phase 14, a layer 218 of phosphorus-doped glass, generally referred to by the British abbreviation "PSG", is deposited on the pellet P.

In phase 15, the pellet P is subjected to annealing in order to flatten the outer face of the layer 218. This layer 218 will be called the "PSG I" layer.

In phase 16, openings in the PSG layer I are structured by means of a mask M3 to form, as will be explained below, the protruding elements 23 of the rotor 22. This structuring in the layer PSG I is made by chemical attack with buffered hydrofluoric acid.

In phase 17, a layer of doping oxide 219 is deposited by chemical vapor deposition allowing the recovery of the second layer 216 of silicon nitride which was discovered during the chemical attack.

In phase 18, additional openings in the layer 218 of PSG I are structured by a set of masks M4 to allow the production of the supports 10 of the electrodes 4 of the stator, as will be seen in the following steps. This photo! Ithographic structuring is done with plasma. It will therefore be noted that in this phase 18 we removed certain regions of the layer 218 in line with certain parts of the conductive tracks 6, but that we also attacked part of the layer of silicon nitride 216 lying above these parts of conductive tracks 6. In phase 19, a second layer 220 of pυlysil iciurr, called polysilicon II, is deposited on the pellet P pεr a chemical deposition in the vapor phase at low pressure.

In phase 20, this second layer of polysilicon II is structured by plasma photolithography by a set of masks M5, in order to define the guide part 22, the electrodes 4 of the stator, the counter-electrodes 26 of the rotor, as well as optionally the supply terminals 8 which are intended to allow the supply of the electrodes 4 of the stator. In this phase, the extensions 105 of FIGS. 9 to 15 can also be structured simultaneously.

In phase 21, the part of the layer 218 of PSG I which is not located below the structural elements 22, 4, 26 and 8 is structured by the set of masks M5 and also with plasma. layer 218 of PSGI which is under these structural elements constitutes a sacrificial layer which will be subsequently eliminated by chemical attack. It will therefore be noted that in steps 14 to 21, at least one group of electrodes 4 of the stator shaped around the axis of rotation of the micromotor has been structured with the interposition of a first sacrificial layer, angularly offset (FIG. 1) , as well as simultaneously the guide part 22 of the rotor, at least one counter-electrode 26 of the rotor and preferably the supply terminals 8 as well as possibly the extensions 105. These phases 14 to 21 therefore constitute an essential additional step of the method according to the invention.

In phase 22 (FIG. 37), a second layer 222 of phosphorus-doped glass (PSG II) is deposited by chemical vapor deposition on the functional elements which have just been structured in the preceding phases.

In phase 23, part of this second layer 222 of PSG II is attacked by plasma photolithographic structuring, as well as certain regions of the two layers of silicon nitride 216, 210 and of the layer of silicon dioxide 50. In this phase, therefore, the production of the central ring 30 is prepared as well as that of the terminals 38 supplying the ground plane 36. This structuring is done by a set of masks M6.

In phase 24, certain parts of the second layer are again structured by plasma photolithography with an M7 mask. 222 of PSG II to allow the anchoring on the guide portion 22 and on the counter-electrodes 26 of the connecting lugs 28, as well as possibly the production of a supply terminal 39 (FIG. 31) allowing the supply tracks 6.

In phase 25, a third layer 224 of polysilicon, called polysilicon III, is deposited by chemical vapor deposition at low pressure on the entire face of the pellet P.

Then, in phase 26, the third layer 224 of polysilicon III is structured by plasma photolithography with a mask M8 _. the functional parts you want. Part of the second layer 222 of phosphorus-doped glass (PSG II) is thus released.

In phase 27, a layer 226 of SiO doping oxide is deposited over the entire pellet P by vapor phase deposition, then annealing the pellet P allowing doping of the second and third layers of polysilicon II and III respectively. also making conductive.

In phase 28, some of the most accessible sacrificial layers (that is to say the parts exposed on the surface) are attacked with acid to prepare an aluminum deposit on the supply terminals.

It is therefore understood that in these phases 22 to 28, there has been structured with the interposition of a second sacrificial layer and above the guide portion 22, electrodes 4 of the rotor and supply terminals 8, on the one hand the central guide ring 30, but also several bridge elements 40 which constitute, as explained above, raised arms of the rotor associated with mechanically or electrically functional members.

In this process, a counter-electrode 26 is shown only as a functional element, but of course, it could have been represented the pinion 151 or the wheel 161, respectively in FIGS. 14 and 15.

In phase 29, an aluminum layer 228 is deposited by evaporation on the pellet P. In phase 30, the aluminum layer 228 is structured using an M9 mask so as to leave only one film on the terminals 8 and 38 and allow connection with an electronic control circuit, not shown.

In phase 31, the remaining sacrificial layers formed respectively by the two layers of phosphorus doped glass PSG I and PSG II are attacked using buffered hydrofluoric acid (BHF) for a relatively long time.

It will be noted that to facilitate the chemical attack on the underlying sacrificial layers, the guide portion 22 of the rotor has suitably distributed through axial openings 25 (for example made in phase 20) allowing better irrigation of the acid. attack.

Furthermore, although only one electrode 4 of the rotor has been shown, it is obvious that several groups of coaxial electrodes can be produced simultaneously, such as the groups G1 to G3 of FIG. 1. Instead supply terminals 8, a group of electrodes 4 can be formed by eliminating the aluminum layer thereon.

Likewise, several groups of counter-electrodes can be produced simultaneously and with the same layer, such as the groups gl to g4 of FIG. 1, arranged on either side of the groups of electrodes.

G. The bridge elements 40a to 40d are also produced simultaneously. They are made with another layer of polysilicon (inter alia the layer of polysilicon III) than the electrodes and the counter-electrodes. The bridge elements being arranged one in the extension of the other, their connecting tab 26 is anchored on the guide part 22 or on the corresponding counter-electrode (s) which are formed by underlying layers.

It is therefore understood that thanks to the arrangement of the elements forming a bridge which can advantageously be produced at the same time as the central ring 30, it has been possible both to respond to the problem of the transmission of torque by a judicious mechanical connection between the rotor and a pinion or a toothed wheel, and to the problem of increasing the transferable engine torque by multiplying the number of air-gaps, thanks to the construction of an interdigitated structure.

Claims

1. Electrostatic radial field micromotor, produced by photolithographic microfabrication, of the type comprising a stator (1) comprising at least one group (G) of several electrodes (4) angularly offset around an axis of rotation 5 (A) of the micromotor, these electrodes (4) which are electrically connected to a control circuit being supported by a substrate (2), a rotor (20, 60 - 160), preferably made at least in part from an electrically conductive material, comprising at least one counter-electrode (26) capable of coming to evolve opposite each electrode (4) of the stator (1), substantially in the same plane called the electrostatic field plane (PCE), the clearance left between said counter-electrode ( 26) and the corresponding electrodes (4) forming an air gap, - a ring (30) forming a bearing which is capable of being electrically supplied and which is integral with said substrate (2), said rotor being guided in rotation, and possibly ment in transla¬ tion, around this ring (30) via a guide portion (22) which is integral with said counter electrode, characterized 0 in that said rotor comprises at least one element forming a bridge (40a -f) which is arranged at least partially above the electrostatic field plane (PCE), this element which constitutes a raised arm of the rotor carrying one or more mechanically or electrically functional members (26, 151, 161) capable of cooperating with one or more complementary members (4, 152, 162) located in or outside the electrostatic field plane (PCE) and inside or outside said group (G) of stator electrodes (1) .

2. Micromotor according to claim 1, characterized in that said member is constituted by said counter-electrode (26) of the rotor Q which is formed between said group of electrodes forming a first group (Gl) and a second group of electrodes (G2) formed coaxially with the first, the clearance left between said counter electrode (26) and the second group of electrodes (G2) forming a second air gap.

3. Micromotor according to claim 1, characterized in that each arm of the roter (80) comprises n bridge elements arranged one in the extension of the other, these n bridge elements (40a, 40b) respectively comprising n counter-electrodes ( 26) cooperating interdigitally with at least n groups (G41, G42) of electrodes arranged -άe coaxially (4), to form at least 2 x n-1 air gaps.

4. Micromotor according to claim 3, characterized in that it comprises n + 1 groups of electrodes (Gδl, G52, G53) forming two by two an electrostatic field zone in which one of the counter-electrodes moves (26) to form 2 xn air gaps.

5. Micromotor according to claim 1, characterized in that said member is constituted by an additional counter-electrode (26), called second counter-electrode, this second counter-electro¬ being formed outside the group of electrodes of the stator (G61), the clearance left between this second counter-electrode and the group of electrodes (Gδl) forming an additional air gap.

6. Micromotor according to claim 5, characterized in that each arm of the rotor comprises n bridge elements formed one in the extension of the other, these n bridge elements respectively comprising n + 1 counter-electrodes cooperating with at least n groups of 'electrodes (Gδl, G82) to form at least 2 xn air gaps.

7. Micromotor according to claim 6, characterized in that it comprises n + 1 groups (G91, G92 and G93) of electrodes to form, with the n + 1 counter-electrodes, 2 x n + 1 air gaps.

8. Micromotor according to claim 1, characterized in that the member of the bridge-forming element consists of a pinion (151) or a wheel (161) shaped to come into gear with respectively a wheel or a pinion a mechanism to train.

9. Micromotor according to claim 8, and one of claims 1, 2, or 5, characterized in that the bridge element comprises, in addition to an electrically functional member constituted by a counter-electrode (26 ) of the rotor, a pinion or a wheel.

10. Micromotor according to claim 8, and according to one of claims 3, 4, 6 or 7, characterized in that the umpteenth element forming a bridge or element forming a terminal bridge comprises the wheel (161).

11. Micromotor according to one of the preceding claims, characterized in that said pinion (151) or said wheel (161) are made integral with the rotor by means of at least two bridge elements (40e, 40f), preferably arranged on the rotor diametrically opposite.

12. Micromotor according to claim 11, characterized in that said pinion (151) or said wheel (161) is integral with the rotor by means of four arms offset from each other by about 90 ^e .

13. A method of photo-ithegraphic production of an electrostatic motor, such as that of claims 1 to 12, characterized in that it consists of: a) - preferably to be formed substantially over the entire surface of a substrate ( 2), a first electrically conductive layer (36) intended to supply a central ring (30) capable of guiding and contacting a guide part (20) of a rotor of the micromotor, b) - providing at least a first layer electrically insulating (50) on this conductive layer, c) - to structure conductive tracks (6) on said first insulating layer (50), these tracks being intended to supply electrodes (4) of the stator (1) by the 'through a micromotor control circuit, d) - at least partially depositing on the preceding layers preferably a layer having a protective function and a function of reducing friction and electrical insulation, e) - â structure, with the interposition of a first sacrificial layer (218), at least one group (Gl) of electrodes (4) angularly offset around an axis A of rotation of the micromotor, as well as said guide portion (22) of the rotor and at least one counter electrode (26) of the rotor (20), f) - to be structured above these electrodes (4) and these counter electrodes (26) as well as above this guide part (22), with the interposition of a second sacrificial layer (222), said central ring (30) as well as at least one bridge element (40) constituting a raised arm of the rotor intended to be associated with at least one member (26, 151, 161) mechanically or electrically functional, such as a pinion or a wheel, g) - then eliminating by chemical attack the sacrificial layers (218, 222).

14. The method of claim 13, characterized in that in step f) is simultaneously structured supply terminals (8, 38) and electrodes (4).

15. Method according to claim 13 or 14, characterized in that in step e) at least one extension forming an arm (105) is designed to form the mechanical connection between the guide part (22) of the rotor and the or the counter-electrodes (26).

16. Method according to one of claims 13 to 15, characterized in that in step e) simultaneously structures several groups of electrodes (G) formed coaxially.

17. Method according to claim 15 or 16, characterized in that in step e) a plurality of counter-electrodes are arranged, arranged on either side of the group or groups of counter-electrodes.

18. The method of claim 16 or 17, characterized in that in step f) several bridge elements are produced simultaneously (40a-f) substantially aligned one in the extension of the other, coming to bond to a counter electrode under - corresponding corres¬ ponding.