EP0433480B1 - Hollow electrode switch - Google Patents

Hollow electrode switch Download PDF

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Publication number
EP0433480B1
EP0433480B1 EP89123566A EP89123566A EP0433480B1 EP 0433480 B1 EP0433480 B1 EP 0433480B1 EP 89123566 A EP89123566 A EP 89123566A EP 89123566 A EP89123566 A EP 89123566A EP 0433480 B1 EP0433480 B1 EP 0433480B1
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EP
European Patent Office
Prior art keywords
gas discharge
low
hollow electrode
cathode
switch according
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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EP89123566A
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German (de)
French (fr)
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EP0433480A1 (en
Inventor
Klaus-D. Rohde
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Siemens AG
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Siemens AG
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Priority to DE58909869T priority Critical patent/DE58909869D1/en
Priority to EP89123566A priority patent/EP0433480B1/en
Priority to JP2411227A priority patent/JPH04109581A/en
Publication of EP0433480A1 publication Critical patent/EP0433480A1/en
Priority to US07/857,722 priority patent/US5159243A/en
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Publication of EP0433480B1 publication Critical patent/EP0433480B1/en
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01T—SPARK GAPS; OVERVOLTAGE ARRESTERS USING SPARK GAPS; SPARKING PLUGS; CORONA DEVICES; GENERATING IONS TO BE INTRODUCED INTO NON-ENCLOSED GASES
    • H01T2/00—Spark gaps comprising auxiliary triggering means
    • H01T2/02—Spark gaps comprising auxiliary triggering means comprising a trigger electrode or an auxiliary spark gap

Definitions

  • the invention relates to a low pressure gas discharge switch according to the preamble of the claim 1 with the features a) to d).
  • a predetermined gas discharge path is in generally the infinitely large plate capacitor and his ignition curve used for comparison.
  • the practical one Embodiment of such discharge paths has however, electrodes with finite dimensions. Detour discharges can by a known electrode construction Avoid using flat plate electrodes that are coaxial to each other arranged and at their edges with a relative to the electrode distance from each other small radius of curvature bent and along the inner cylindrical insulator surface are led.
  • gas discharge switches known by a pulsed low pressure gas discharge can be controlled. She switch currents of 18 kA at a voltage, for example of 25 kV.
  • the discharge switch contains an anode and a cathode with coaxial openings for the low pressure gas discharge, the edge of each other by an isolator are separated.
  • the switch chamber contains one ionizable gas filling, the pressure p of which is selected such that the ignition voltage decreases with increasing product pxd.
  • a control device which contains a hat-shaped cathode cage, which with the Cathode is electrically connected and thus on the Cathode potential is. It surrounds the back of the cathode and separates it from the area of a glow discharge.
  • a gas discharge switch is a plurality of electrodes provided which are arranged coaxially to each other and form a common discharge channel. Between the The anode and the cathode are still several intermediate electrodes arranged.
  • a low-pressure gas discharge switch can also have several Discharge channels included with a common Trigger device are provided.
  • This trigger device contains a common hollow electrode that is common to the Cathode is electrically connected.
  • the synchronous Ignition of the discharge channels is initiated by Charge carriers emerging from a pre-ionization area Enter holes in the bottom of the cage into the back of the cathode (J. Phys. E .: Sci. Instr. 20 (1987), pp. 270 to 273).
  • EP-A-0 337 192 is a low-pressure gas discharge switch of the generic type known contains two coaxial electrodes that are aligned with Bores are provided and in a central discharge area a gas discharge line for a low pressure gas discharge and an isolation area at their edges form.
  • the anode has a blind hole on the back and the back of the cathode in the majority of the examples a cathode cylinder or a so-called Cage.
  • a trigger electrode can be placed around the cathode cage be arranged bowl-shaped or hat-shaped, in addition to one such hollow electrode further electrodes may be present can be used to control and / or limit the cathode rear space serve.
  • a separate control electrode can be dispensed with and the function of pre-ionization and triggering Ignition of the gas discharge through the hollow electrode become.
  • EP-A-0 337 192 describes the structure and assignment of Cathode cage and hollow electrodes according to the individual Figures of the relevant exemplary embodiments comparatively complex.
  • US 4 280 098 a coaxial pseudo-spark switch known in which an anode and a in the discharge space associated cathode interlock and from one Control electrode are surrounded.
  • the invention is based on the object the latter known embodiment of a hollow electrode switch to improve.
  • the ignition device simplified for the hollow electrode switch become.
  • a gas discharge switch the distance between the edge of the at least cup-shaped trained hollow electrode from the effective cathode limitation limited with the related cathode potential.
  • a hat-shaped design of the Hollow electrodes can be specified by the specified dimensioning short distances and therefore suitable Specify boundary conditions for the gas discharge switch.
  • Space charge can be a hot cathode, for example be provided between the reference electrode and the Bottom of the hollow electrode is arranged.
  • the Space charge for example, also through microwave excitation or by an optical ignition device, in particular a laser beam.
  • a particularly advantageous embodiment of the hollow electrode switch consists in that for igniting the discharge gap required space charge provided by a glow discharge becomes.
  • the hollow electrode in simply to a trigger voltage source for a negative Trigger voltage connected with sufficient energy his.
  • the hollow electrode forms the anode and the opposite Opening of the hollow electrode arranged reference electrode forms the cathode for the glow discharge.
  • the hollow electrode can still to an additional voltage source with a positive potential connected for pre-ionization.
  • This pre-ionization generates a low current within the hollow electrode Glow discharge that is not yet used to ignite the discharge gap leads.
  • the ignition of the discharge path is then only through a superimposed negative Trigger pulse with steep rising edge and short duration of the trigger electrode.
  • the reference electrode receives one double function; it also forms a cathode for the Gas discharge at the discharge route and at its A cathode for the discharge path facing away from the back Glow discharge.
  • a hollow electrode switch according to FIG. 1 contains two electrodes, one as cathode 2 and the other as anode 3 are switched and of which at least the cathode 2 with at least an opening 4 is provided. In the same way the anode 3 may also be provided with at least one opening 5. Through the two openings 4 and 5 there is a discharge path 8 ignited.
  • the cathode 2 and the anode 3, which in general each form a body of revolution, are in a predetermined Distance from each other, for example about 1 can be up to 10, preferably about 2 to 5 mm. Between A discharge path 8 is ignited in the two openings 4 and 5.
  • the cathode 2 and the anode 3 consist of electrical conductive material, preferably stainless steel, and can on the Discharge path 8 generally with special uses 6 and 7 can be provided from a high-melting metal or consist entirely of this high-melting metal.
  • the diameter of the bores 4 and 5 is preferably at most as large and in particular smaller than the distance d between the electrodes 2 and 3 selected on the discharge path 8.
  • the thickness of the cathode 2 at its opening 4 is reduced, in particular the upper edge of the opening 4 may be chamfered.
  • the thickness of the anode 3 at its opening 5 can also be be diminished.
  • the cathode 2 and the anode 3 are with one electrically insulating separator connected to one part the wall of a switching chamber 14, which is made of electrical insulating material, preferably ceramic, and with a working gas is filled.
  • the trigger device for the discharge path 8 includes a hollow electrode 10 which is arranged in the switching chamber 14 in such a way that its opening faces the discharge path 8.
  • the distance A of its lower edge from the potential of its reference electrode, which is cathode 2 in this embodiment with positive switching voltage U o of, for example, 40 kV, is less than the length of the cathodic dark space of a glow discharge of the working gas.
  • the hollow electrode 10 consists of an electrically conductive material, for example stainless steel, and has at least the shape of a shell, preferably the shape of a pot, the depth T of which is greater than the length of the cathodic dark space of the glow discharge.
  • the shape of the pot of the hollow electrode 10 is preferably chosen so that the ratio of the diameter D to the pot depth T is approximately 0.2 to 2, in particular approximately 1.
  • the laterally widened base 11 is provided with compensation openings 15 and 16, fastened in the wall of the switching chamber 14 and passed through the wall with an electrically conductive connection.
  • the gas filling consists of an ionizable gas, preferably Hydrogen or deuterium or a mixture of these gases. It is also known that nitrogen or noble gases, such as for example argon or helium.
  • a trigger voltage source 17 is assigned to the hollow electrode 10, which, for example, via a limiting resistor 18 and a decoupling capacitance 19 connected to the hollow electrode 10 can be.
  • the trigger voltage source 17 delivers a trigger pulse with a steep rising edge and a negative Voltage of, for example, about 0.5 to 10 kV, preferably about 1 to 5 kV compared to the reference potential of the cathode 2, which can be, for example, earth potential.
  • the length of the Trigger pulse is at least as large as the switching delay the discharge path 8 and can be, for example, about 0.1 to 2 ⁇ s, preferably about 0.5 to 1 ⁇ s.
  • the switching chamber 14 generally also contains a gas storage device 24 for the working gas, for example hydrogen or Deuterium or a mixture of these gases.
  • a gas storage device 24 for the working gas for example hydrogen or Deuterium or a mixture of these gases.
  • This one in the figure only schematically indicated gas storage 24 is with a provided heating device not shown in the figure, whose electrical connections through the wall of the switching chamber 14 passed and designated 25 and 26.
  • the gas reservoir of the gas storage device 24 can preferably be used at the same time serve as a pressure control system for the hollow electrode switch.
  • the hollow electrode 10 can also be assigned an additional voltage source 21 for preionization, the positive voltage of which, for example, can be approximately 0.1 to 5 kV compared to the reference potential of the cathode 2 and which has a high series resistor 22 of preferably a few MOhm can be connected to the hollow electrode 10.
  • the positive voltage of the voltage source 21 is selected so that it generates a low-current glow discharge in the current range from, for example, ⁇ A to a few mA within the hollow electrode 10, which does not yet lead to breakdown at the discharge path 8. This breakdown is only initiated with the trigger pulse of the trigger voltage source 17.
  • the grounded, upper reference electrode forms the cathode 2 and the lower one forms the anode 3. If a negative switching voltage U o is applied, the upper grounded electrode forms the anode of the discharge gap 8. Regardless of the polarity of the switching voltage U o , the reference electrode referred to as cathode 2 forms the reference potential for the trigger voltage source 17 and the voltage source 21.
  • a hollow electrode switch which only has a single cathode 2 and an anode 3 contains.
  • a multi-electrode arrangement can also be used Intermediate electrodes can be provided with which a reduced Field strength between the electrodes and a corresponding one receives increased dielectric strength of the hollow electrode switch.
  • the hollow electrode switch contains a variety of individual discharge paths running in parallel arranged to each other and with a common hollow electrode, which is electrically isolated from its reference electrode and with means for producing a space charge, in particular a glow discharge. This gives you an increase the rate of current rise and a decrease in switch inductance and the switch resistance as well as a high Service life and high current carrying capacity.
  • the bottom 11 of the hollow electrode is provided with an extension 13, the free end of which faces the discharge path 8.
  • the Extension 13 has the shape of a cylinder in which the edge of the Is rounded off. This extension 13 is used to influence the glow discharge, especially the distribution of the Space charge density, inside the hollow electrode.
  • this extension 13 has the shape of a cone, the rounded tip of the discharge path 8 facing is.

Landscapes

  • Gas-Filled Discharge Tubes (AREA)
  • Ignition Installations For Internal Combustion Engines (AREA)
  • Lasers (AREA)

Description

Die Erfindung bezieht sich auf einen Niederdruck-Gasentladungsschalter gemäß dem Oberbegriff des Patentanspruches 1 mit den Merkmalen a) bis d).The invention relates to a low pressure gas discharge switch according to the preamble of the claim 1 with the features a) to d).

Die Zündspannung für eine vorgegebene Gasentladungsstrecke und ihre übliche graphische Darstellung in Abhängigkeit vom Produkt aus Gasdruck p und Elektrodenabstand D in der Zündkennlinie bildet bekanntlich unter entsprechender Berücksichtigung der Zündwahrscheinlichkeit ein wichtiges Hilfsmittel zur Kennzeichnung von elektrischen Entladungsgeräten. Bei der Ermittlung der elektrischen Spannungsfestigkeit einer vorgegebenen Gasentladungsstrecke wird im allgemeinen der unendlich große Plattenkondensator und seine Zündkennlinie zum Vergleich herangezogen. Die praktische Ausführungsform solcher Entladungsstrecken hat jedoch Elektroden mit endlichen Abmessungen. Umwegentladungen kann man durch eine bekannte Elektrodenkonstruktion mit ebenen Plattenelektroden vermeiden, die koaxial zueinander angeordnet und an ihren Rändern mit einem relativ zum Elektrodenabstand kleinen Krümmungsradius voneinander abgebogen und entlang der inneren zylindrischen Isolatoroberfläche geführt sind. Es wird somit zwischen dem abgebogenen, zylinderförmigen Randgebiet der Elektroden und der Innenwand des hohlzylindrischen Isolators stets ein Spalt gebildet. Mit dieser Ausführungsform einer Niederdruck-Gasentladungsstrecke kann auch im Nahdurchschlagsgebiet, d.h. links vom Minimum der sog. Paschenkurve, die Zündkennlinie beispielsweise für verschiedene Edel- und Molekülgase ermittelt werden. The ignition voltage for a given gas discharge path and their usual graphical representation depending of the product of gas pressure p and electrode spacing D in As is well known, the ignition characteristic curve is taken into account the ignition probability is an important one Aid for marking electrical discharge devices. When determining the electrical dielectric strength a predetermined gas discharge path is in generally the infinitely large plate capacitor and his ignition curve used for comparison. The practical one Embodiment of such discharge paths has however, electrodes with finite dimensions. Detour discharges can by a known electrode construction Avoid using flat plate electrodes that are coaxial to each other arranged and at their edges with a relative to the electrode distance from each other small radius of curvature bent and along the inner cylindrical insulator surface are led. It is therefore between the bent, cylindrical edge area of the electrodes and the inner wall of the hollow cylindrical insulator Gap formed. With this embodiment of a low-pressure gas discharge path can also be in the near-breakdown area, i.e. left of the minimum of the so-called Paschen curve, the Ignition characteristic, for example for different noble and Molecular gases can be determined.

Es sind auch Gasentladungsschalter bekannt, die durch eine gepulste Niederdruck-Gasentladung gesteuert werden. Sie schalten beispielsweise Ströme von 18 kA bei einer Spannung von 25 kV. Der Entladungsschalter enthält eine Anode und eine Kathode mit koaxialen Öffnungen für die Niederdruckgasentladung, die am Rande durch einen Isolator voneinander getrennt sind. Die Schaltkammer enthält eine ionisierbare Gasfüllung, deren Druck p so gewählt ist, daß die Zündspannung mit steigendem Produkt pxd abnimmt. Für die Gasentladung ist eine Steuereinrichtung vorgesehen, die einen hutförmigen Kathodenkäfig enthält, der mit der Kathode elektrisch leitend verbunden ist und somit auf dem Kathodenpotential liegt. Er umschließt den Kathodenrückraum und trennt diesen vom Bereich einer Glimmentladung. Die Gasentladung zwischen der Kathode und der Anode wird durch Erhöhen der Elektronendichte im Kathodenraum gezündet (Japanese Journal of Applied Physics 29 (1990), Febr., No. 2, Part. 2, Tokyo, p. L 371 - L 374).There are also gas discharge switches known by a pulsed low pressure gas discharge can be controlled. she switch currents of 18 kA at a voltage, for example of 25 kV. The discharge switch contains an anode and a cathode with coaxial openings for the low pressure gas discharge, the edge of each other by an isolator are separated. The switch chamber contains one ionizable gas filling, the pressure p of which is selected such that the ignition voltage decreases with increasing product pxd. For the gas discharge is provided with a control device, which contains a hat-shaped cathode cage, which with the Cathode is electrically connected and thus on the Cathode potential is. It surrounds the back of the cathode and separates it from the area of a glow discharge. The gas discharge between the cathode and the anode will ignited by increasing the electron density in the cathode compartment (Japanese Journal of Applied Physics 29 (1990), Febr., No. 2, Part. 2, Tokyo, p. L 371 - L 374).

In einer aus der US-PS 2 900 566 bekannten Ausführungsform eines Gasentladungsschalters ist eine Vielzahl von Elektroden vorgesehen, die koaxial zueinander angeordnet sind und einen gemeinsamen Entladungskanal bilden. Zwischen der Anode und der Kathode sind noch mehrere Zwischenelektroden angeordnet.In an embodiment known from US Pat. No. 2,900,566 a gas discharge switch is a plurality of electrodes provided which are arranged coaxially to each other and form a common discharge channel. Between the The anode and the cathode are still several intermediate electrodes arranged.

Ein Niederdruck-Gasentladungsschalter kann auch mehrere Entladungskanäle enthalten, die mit einer gemeinsamen Triggereinrichtung versehen sind. Diese Triggereinrichtung enthält eine gemeinsame Hohlelektrode, die mit der gemeinsamen Kathode elektrisch leitend verbunden ist. Die synchrone Zündung der Entladungskanäle wird eingeleitet durch Ladungsträger, die aus einem Vorionisierungsbereich durch Löcher im Boden des Käfigs in den Kathodenrückraum eintreten (J. Phys. E.: Sci. Instr. 20 (1987), S. 270 bis 273).A low-pressure gas discharge switch can also have several Discharge channels included with a common Trigger device are provided. This trigger device contains a common hollow electrode that is common to the Cathode is electrically connected. The synchronous Ignition of the discharge channels is initiated by Charge carriers emerging from a pre-ionization area Enter holes in the bottom of the cage into the back of the cathode (J. Phys. E .: Sci. Instr. 20 (1987), pp. 270 to 273).

Weiterhin ist aus der EP-A-0 337 192 ein Niederdruck-Gasentladungsschalter der gattungsgemäßen Art bekannt, der zwei koaxiale Elektroden enthält, die mit fluchtenden Bohrungen versehen sind und in einem zentralen Entladungsbereich eine Gasentladungsstrecke für eine Niederdruckgasentladung und an ihren Rändern einen Isolationsbereich bilden. Dabei hat die Anode rückseitig jeweils ein Sackloch und die Kathode in der Mehrzahl der Beispiele rückseitig einen Kathodenzylinder bzw. einen sogenannten Käfig. Um den Kathodenkäfig kann eine Triggerelektrode schalen- bzw. hutförmig angeordnet sein, wobei neben einer solchen Hohlelektrode weitere Elektroden vorhanden sein können, die zur Steuerung und/oder Begrenzung des Kathodenrückraumes dienen. Bei einer spezifischen Variante soll auf eine separate Steuerelektrode verzichtet werden können und die Funktion der Vorionisierung und der Triggerung zur Zündung der Gasentladung durch die Hohlelektrode übernommen werden.Furthermore, EP-A-0 337 192 is a low-pressure gas discharge switch of the generic type known contains two coaxial electrodes that are aligned with Bores are provided and in a central discharge area a gas discharge line for a low pressure gas discharge and an isolation area at their edges form. The anode has a blind hole on the back and the back of the cathode in the majority of the examples a cathode cylinder or a so-called Cage. A trigger electrode can be placed around the cathode cage be arranged bowl-shaped or hat-shaped, in addition to one such hollow electrode further electrodes may be present can be used to control and / or limit the cathode rear space serve. In a specific variant a separate control electrode can be dispensed with and the function of pre-ionization and triggering Ignition of the gas discharge through the hollow electrode become.

Bei der EP-A-0 337 192 sind Aufbau und Zuordnung von Kathodenkäfig und Hohlelektroden entsprechend den einzelnen Figuren der diesbezüglich relevanten Ausführungsbeispiele vergleichsweise komplex. Daneben ist aus der US 4 280 098 ein koaxial aufgebauter Pseudofunken-Schalter bekannt, bei der im Entladungsraum eine Anode und eine zugehörige Kathode ineinandergreifen und von einer Steuerelektrode umgeben sind.EP-A-0 337 192 describes the structure and assignment of Cathode cage and hollow electrodes according to the individual Figures of the relevant exemplary embodiments comparatively complex. Next to it is from the US 4 280 098 a coaxial pseudo-spark switch known in which an anode and a in the discharge space associated cathode interlock and from one Control electrode are surrounded.

Der Erfindung liegt demgegenüber die Aufgabe zugrunde, letztere bekannte Ausführungsform eines Hohlelektrodenschalters zu verbessern. Insbesondere soll die Zündeinrichtung für den Hohlelektrodenschalter vereinfacht werden.The invention is based on the object the latter known embodiment of a hollow electrode switch to improve. In particular, the ignition device simplified for the hollow electrode switch become.

Diese Aufgabe wird erfindungsgemäß gelöst durch einen Gasentladungsschalter mit der Kombination der Merkmale a) bis e) des Patentanspruchs 1. Vorteilhafte Weiterbildungen sind in den Unteransprüchen angegeben.According to the invention, this object is achieved by a Gas discharge switch with the combination of features a) to e) of claim 1. Advantageous further developments are specified in the subclaims.

Gemäß der Erfindung wird bei einem Gasentladungsschalter der Abstand zwischen dem Rand der wenigstens schalenförmig ausgebildeten Hohlelektrode von der wirksamen Kathodenbegrenzung mit dem diesbezüglichen Kathodenpotential begrenzt. Insbesondere bei einer hutförmigen Ausbildung der Hohlelektrode lassen sich durch die angegebene Dimensionierungsvorschrift geringe Abstände und damit geeignete Randbedingungen für den Gasentladungsschalter vorgeben.According to the invention, a gas discharge switch the distance between the edge of the at least cup-shaped trained hollow electrode from the effective cathode limitation limited with the related cathode potential. Especially with a hat-shaped design of the Hollow electrodes can be specified by the specified dimensioning short distances and therefore suitable Specify boundary conditions for the gas discharge switch.

Zum Erzeugen der zur Zündung der Entladungsstrecke erforderlichen Raumladung kann beispielsweise eine Glühkathode vorgesehen sein, die zwischen der Bezugselektrode und dem Boden der Hohlelektrode angeordnet ist. Ferner kann die Raumladung beispielsweise auch durch Mikrowellenanregung oder durch eine optische Zündeinrichtung, insbesondere einem Laserstrahl, erzeugt werden. To generate the necessary to ignite the discharge gap Space charge can be a hot cathode, for example be provided between the reference electrode and the Bottom of the hollow electrode is arranged. Furthermore, the Space charge, for example, also through microwave excitation or by an optical ignition device, in particular a laser beam.

Eine besonders vorteilhafte Ausführungsform des Hohlelektrodenschalters besteht darin, daß die zum Zünden der Entladungsstrecke erforderliche Raumladung durch eine Glimmentladung bereitgestellt wird. Zu diesem Zweck kann die Hohlelektrode in einfacher Weise an eine Triggerspannungsquelle für eine negative Triggerspannung mit ausreichender Energie angeschlossen sein. Die Hohlelektrode bildet die Anode und die gegenüber der Öffnung der Hohlelektrode angeordnete Bezugselektrode bildet die Kathode für die Glimmentladung.A particularly advantageous embodiment of the hollow electrode switch consists in that for igniting the discharge gap required space charge provided by a glow discharge becomes. For this purpose, the hollow electrode in simply to a trigger voltage source for a negative Trigger voltage connected with sufficient energy his. The hollow electrode forms the anode and the opposite Opening of the hollow electrode arranged reference electrode forms the cathode for the glow discharge.

In einer weiteren Ausführungsform kann die Hohlelektrode noch an eine zusätzliche Spannungsquelle mit einem positiven Potential für eine Vorionisierung angeschlossen sein. Diese Vorionisierung erzeugt innerhalb der Hohlelektrode eine stromschwache Glimmentladung, die noch nicht zum Zünden der Entladungsstrecke führt. Durch diese Glimmentladung wird die Spannungsfestigkeit an der Entladungsstrecke und damit die Stabilität des Schalters verbessert. Die Zündung der Entladungsstrecke wird dann erst durch einen überlagerten negativen Triggerimpuls mit steiler Anstiegsflanke und kurzer Dauer von der Triggerelektrode erzeugt. Die Bezugselektrode erhält eine doppelte Funktion; sie bildet zugleich eine Kathode für die Gasentladung an der Entladungsstrecke und an ihrer von der Entladungsstrecke abgewandten Rückseite eine Kathode für die Glimmentladung. In dieser Ausführungsform erhält man einen Hohlelektrodenschalter mit sehr geringer Schaltverzögerung (delay) und geringer Streuung (jitter); ferner erhält man bei diesem Hohlelektrodenschalter eine wesentlich geringere Spannungsabhängigkeit bei gleichem Druck.In a further embodiment, the hollow electrode can still to an additional voltage source with a positive potential connected for pre-ionization. This pre-ionization generates a low current within the hollow electrode Glow discharge that is not yet used to ignite the discharge gap leads. Through this glow discharge the Dielectric strength at the discharge path and thus the Improved switch stability. The ignition of the discharge path is then only through a superimposed negative Trigger pulse with steep rising edge and short duration of the trigger electrode. The reference electrode receives one double function; it also forms a cathode for the Gas discharge at the discharge route and at its A cathode for the discharge path facing away from the back Glow discharge. In this embodiment you get one Hollow electrode switch with very low switching delay (delay) and low scatter (jitter); you also get at this hollow electrode switch has a significantly lower voltage dependency at the same pressure.

Zur weiteren Erläuterung der Erfindung wird auf die Zeichnung Bezug genommen, in deren Figur 1 ein Ausführungsbeispiel eines Hohlelektrodenschalters gemäß der Erfindung schematisch veranschaulicht ist. In den Figuren 2 und 3 ist jeweils eine besondere Ausführungsform der Hohlelektrode dargestellt. To further explain the invention, reference is made to the drawing Reference, in the figure 1, an embodiment of a Hollow electrode switch according to the invention schematically illustrated is. In Figures 2 and 3 is a special one Embodiment of the hollow electrode shown.

Ein Hohlelektrodenschalter gemäß Figur 1 enthält zwei Elektroden, von denen eine als Kathode 2 und die andere als Anode 3 geschaltet sind und von denen wenigstens die Kathode 2 mit mindestens einer Öffnung 4 versehen ist. In gleicher Weise kann auch die Anode 3 mit wenigstens einer Öffnung 5 versehen sein. Durch die beiden Öffnungen 4 und 5 wird eine Entladungsstrecke 8 gezündet. Die Kathode 2 und die Anode 3, die im allgemeinen jeweils einen Rotationskörper bilden, sind in einem vorbestimmten Abstand zueinander angeordnet, der beispielsweise etwa 1 bis 10, vorzugsweise etwa 2 bis 5 mm, betragen kann. Zwischen den beiden Öffnungen 4 und 5 wird eine Entladungsstrecke 8 gezündet. Die Kathode 2 und die Anode 3 bestehen aus elektrisch leitendem Material, vorzugsweise Edelstahl, und können an der Entladungsstrecke 8 im allgemeinen noch mit besonderen Einsätzen 6 und 7 aus einem hochschmelzenden Metall versehen sein oder auch ganz aus diesem hochschmelzendem Metall bestehen. Der Durchmesser der Bohrungen 4 und 5 wird vorzugsweise höchstens so groß und insbesondere kleiner als der Abstand d der Elektroden 2 und 3 an der Entladungsstrecke 8 gewählt. Vorzugsweise ist die Dicke der Kathode 2 an ihrer Öffnung 4 vermindert, insbesondere kann der obere Rand der Öffnung 4 abgeschrägt sein. Insbesondere kann auch die Dicke der Anode 3 an ihrer Öffnung 5 vermindert sein. Die Kathode 2 und die Anode 3 sind mit einem elektrisch isolierenden Trennkörper verbunden, der einen Teil der Wand einer Schaltkammer 14 bildet, der aus elektrisch isolierendem Material, vorzugsweise Keramik, besteht und mit einem Arbeitsgas gefüllt ist.A hollow electrode switch according to FIG. 1 contains two electrodes, one as cathode 2 and the other as anode 3 are switched and of which at least the cathode 2 with at least an opening 4 is provided. In the same way the anode 3 may also be provided with at least one opening 5. Through the two openings 4 and 5 there is a discharge path 8 ignited. The cathode 2 and the anode 3, which in general each form a body of revolution, are in a predetermined Distance from each other, for example about 1 can be up to 10, preferably about 2 to 5 mm. Between A discharge path 8 is ignited in the two openings 4 and 5. The cathode 2 and the anode 3 consist of electrical conductive material, preferably stainless steel, and can on the Discharge path 8 generally with special uses 6 and 7 can be provided from a high-melting metal or consist entirely of this high-melting metal. The The diameter of the bores 4 and 5 is preferably at most as large and in particular smaller than the distance d between the electrodes 2 and 3 selected on the discharge path 8. Preferably the thickness of the cathode 2 at its opening 4 is reduced, in particular the upper edge of the opening 4 may be chamfered. In particular, the thickness of the anode 3 at its opening 5 can also be be diminished. The cathode 2 and the anode 3 are with one electrically insulating separator connected to one part the wall of a switching chamber 14, which is made of electrical insulating material, preferably ceramic, and with a working gas is filled.

Zur Triggereinrichtung für die Entladungsstrecke 8 gehört eine Hohlelektrode 10, die in der Schaltkammer 14 derart angeordnet ist, daß ihre Öffnung der Entladungsstrecke 8 zugewandt ist. Der Abstand A ihres unteren Randes vom Potential ihrer Bezugselektrode, das ist in dieser Ausführung mit positiver Schaltspannung Uo von beispielsweise 40 kV die Kathode 2, ist geringer als die Länge des kathodischen Dunkelraumes einer Glimmentladung des Arbeitsgases. Die Hohlelektrode 10 besteht aus einem elektrisch leitenden Material, beispielsweise Edelstahl, und hat wenigstens die Form einer Schale, vorzugsweise die Form eines Topfes, dessen Tiefe T größer als die Länge des kathodischen Dunkelraumes der Glimmentladung ist. Die Form des Topfes der Hohlelektrode 10 wird vorzugsweise so gewählt, daß das Verhältnis des Durchmessers D zur Topftiefe T etwa 0,2 bis 2, insbesondere etwa 1, beträgt. Der seitlich erweiterte Boden 11 ist mit Ausgleichsöffnungen 15 und 16 versehen, in der Wand der Schaltkammer 14 befestigt und mit einer elektrisch leitenden Verbindung durch die Wand hindurchgeführt.The trigger device for the discharge path 8 includes a hollow electrode 10 which is arranged in the switching chamber 14 in such a way that its opening faces the discharge path 8. The distance A of its lower edge from the potential of its reference electrode, which is cathode 2 in this embodiment with positive switching voltage U o of, for example, 40 kV, is less than the length of the cathodic dark space of a glow discharge of the working gas. The hollow electrode 10 consists of an electrically conductive material, for example stainless steel, and has at least the shape of a shell, preferably the shape of a pot, the depth T of which is greater than the length of the cathodic dark space of the glow discharge. The shape of the pot of the hollow electrode 10 is preferably chosen so that the ratio of the diameter D to the pot depth T is approximately 0.2 to 2, in particular approximately 1. The laterally widened base 11 is provided with compensation openings 15 and 16, fastened in the wall of the switching chamber 14 and passed through the wall with an electrically conductive connection.

Die Gasfüllung besteht aus einem ionisierbaren Gas, vorzugsweise Wasserstoff oder Deuterium oder einer Mischung dieser Gase. Ferner geeignet ist bekanntlich Stickstoff oder Edelgase, wie beispielsweise Argon oder Helium.The gas filling consists of an ionizable gas, preferably Hydrogen or deuterium or a mixture of these gases. It is also known that nitrogen or noble gases, such as for example argon or helium.

Der Hohlelektrode 10 ist eine Triggerspannungsquelle 17 zugeordnet, die beispielsweise über einen Begrenzungswiderstand 18 und eine Entkopplungskapazität 19 an die Hohlelektrode 10 angeschlossen sein kann. Die Triggerspannungsquelle 17 liefert einen Triggerimpuls mit steiler Anstiegsflanke und einer negativen Spannung von beispielsweise etwa 0,5 bis 10 kV, vorzugsweise etwa 1 bis 5 kV gegenüber dem Bezugspotential der Kathode 2, das beispielsweise Erdpotential sein kann. Die Länge des Triggerimpulses ist wenigstens so groß wie die Schaltverzögerung der Entladungsstrecke 8 und kann beispielsweise etwa 0,1 bis 2 µs, vorzugsweise etwa 0,5 bis 1 µs, betragen.A trigger voltage source 17 is assigned to the hollow electrode 10, which, for example, via a limiting resistor 18 and a decoupling capacitance 19 connected to the hollow electrode 10 can be. The trigger voltage source 17 delivers a trigger pulse with a steep rising edge and a negative Voltage of, for example, about 0.5 to 10 kV, preferably about 1 to 5 kV compared to the reference potential of the cathode 2, which can be, for example, earth potential. The length of the Trigger pulse is at least as large as the switching delay the discharge path 8 and can be, for example, about 0.1 to 2 µs, preferably about 0.5 to 1 µs.

Die Schaltkammer 14 enthält im allgemeinen noch einen Gasspeicher 24 für das Arbeitsgas, beispielsweise Wasserstoff oder Deuterium oder einer Mischung dieser Gase. Dieser in der Figur lediglich schematisch angedeutete Gasspeicher 24 ist mit einer in der Figur nicht näher dargestellten Heizeinrichtung versehen, deren elektrische Anschlüsse durch die Wand der Schaltkammer 14 hindurchgeführt und mit 25 und 26 bezeichnet sind. In einer bevorzugten Ausführungsform des Hohlelektrodenschalters kann das Gasreservoir des Gasspeichers 24 vorzugsweise zugleich als Druckregelungssystem für den Hohlelektrodenschalter dienen.The switching chamber 14 generally also contains a gas storage device 24 for the working gas, for example hydrogen or Deuterium or a mixture of these gases. This one in the figure only schematically indicated gas storage 24 is with a provided heating device not shown in the figure, whose electrical connections through the wall of the switching chamber 14 passed and designated 25 and 26. In a preferred embodiment of the hollow electrode switch The gas reservoir of the gas storage device 24 can preferably be used at the same time serve as a pressure control system for the hollow electrode switch.

In einer besonderen Ausführungsform des Hohlelektrodenschalters gemäß der Erfindung kann der Hohlelektrode 10 noch eine zusätzliche Spannungsquelle 21 für eine Vorionisierung zugeordnet sein, deren positive Spannung gegenüber dem Bezugspotential der Kathode 2 beispielsweise etwa 0,1 bis 5 kV betragen kann und die über einen hohen Vorwiderstand 22 von vorzugsweise einigen MOhm an die Hohlelektrode 10 angeschlossen sein kann. Die positive Spannung der Spannungsquelle 21 wird so gewählt, daß sie innerhalb der Hohlelektrode 10 eine stromschwache Glimmentladung im Strombereich von beispielsweise µA bis zu wenigen mA erzeugt, die noch nicht zum Durchschlag an der Entladungsstrecke 8 führt. Dieser Durchschlag wird erst mit dem Triggerimpuls der Triggerspannungsquelle 17 eingeleitet. Mit diesem Hohlelektrodenschalter, bei dem mit einer Wasserstoffüllung beispielsweise das Produkt p x d = 150 Pa mm beträgt, erhält man bei einer angelegten Spannung Uo zwischen der Kathode 2 und der Anode 3 von beispielsweise 30 kV und einer Größe der Hohlelektrode 10 mit beispielsweise T = D = 20 mm sowie einem Vorionisierungsstrom Iv = 0,2 mA und einem negativen Triggerimpuls von -4,5 kV eine Schaltverzögerung (delay) von etwa 50 ns und eine Streuung (jitter), die auf etwa 1 ns begrenzt ist.In a special embodiment of the hollow electrode switch according to the invention, the hollow electrode 10 can also be assigned an additional voltage source 21 for preionization, the positive voltage of which, for example, can be approximately 0.1 to 5 kV compared to the reference potential of the cathode 2 and which has a high series resistor 22 of preferably a few MOhm can be connected to the hollow electrode 10. The positive voltage of the voltage source 21 is selected so that it generates a low-current glow discharge in the current range from, for example, μA to a few mA within the hollow electrode 10, which does not yet lead to breakdown at the discharge path 8. This breakdown is only initiated with the trigger pulse of the trigger voltage source 17. With this hollow electrode switch, where the product is filled with hydrogen, for example pxd = 150 Pa mm is obtained at an applied voltage U o between the cathode 2 and the anode 3 of, for example, 30 kV and a size of the hollow electrode 10 with, for example T = D = 20 mm and a pre-ionization current I v = 0.2 mA and a negative trigger pulse of -4.5 kV, a switching delay (delay) of approximately 50 ns and a scattering (jitter), which is limited to approximately 1 ns.

Unter Umständen kann es zweckmäßig sein, insbesondere bei sehr geringem Abstand A der Hohlelektrode 10 von der Kathode 2, im Boden 11 zusätzliche Druckausgleichsöffnungen vorzusehen. Unter Umständen kann auch die hohlzylindrische Seitenwand 12 der Hohlelektrode 10 mit solchen Druckausgleichsöffnungen versehen sein.Under certain circumstances, it can be useful, especially for very small distance A of the hollow electrode 10 from the cathode 2, in Bottom 11 to provide additional pressure equalization openings. Under Under certain circumstances, the hollow cylindrical side wall 12 of the Hollow electrode 10 provided with such pressure equalization openings his.

In der dargestellten Ausführungsform gemäß Figur 1 sind die Triggerspannungsquelle 17 und die zusätzliche Spannungsquelle 21 zur Vorionisierung mit dem Boden 11 der Hohlelektrode 10 elektrisch leitend verbunden. Unter Umständen kann es jedoch zweckmäßig sein, die Triggerspannung oder die Vorionisierungsspannung oder beide an der Seitenwand 12 der Hohlelektrode 10 zuzuführen.In the illustrated embodiment according to FIG Trigger voltage source 17 and the additional voltage source 21 for pre-ionization with the bottom 11 of the hollow electrode 10 electrically connected. Under certain circumstances, however, it can be appropriate, the trigger voltage or the pre-ionization voltage or both on the side wall 12 of the hollow electrode 10 feed.

In dieser Ausführungsform des Hohlelektrodenschalters mit positiver Schaltspannung Uo bildet die geerdete, obere Bezugselektrode die Kathode 2 und die untere die Anode 3. Wird eine negative Schaltspannung Uo angelegt, so bildet die obere geerdete Elektrode die Anode der Entladungsstrecke 8. Unabhängig von der Polarität der Schaltspannung Uo bildet die als Kathode 2 bezeichnete Bezugselektrode das Bezugspotential für die Triggerspannungsquelle 17 und die Spannungsquelle 21.In this embodiment of the hollow electrode switch with positive switching voltage U o , the grounded, upper reference electrode forms the cathode 2 and the lower one forms the anode 3. If a negative switching voltage U o is applied, the upper grounded electrode forms the anode of the discharge gap 8. Regardless of the polarity of the switching voltage U o , the reference electrode referred to as cathode 2 forms the reference potential for the trigger voltage source 17 and the voltage source 21.

Im Ausführungsbeispiel ist ein Hohlelektrodenschalter beschrieben, der nur eine einzige Kathode 2 und eine Anode 3 enthält. Es kann jedoch auch eine Vielelektrodenanordnung mit Zwischenelektroden vorgesehen sein, mit der man eine verminderte Feldstärke zwischen den Elektroden und eine entsprechend erhöhte Spannungsfestigkeit des Hohlelektrodenschalters erhält.In the exemplary embodiment, a hollow electrode switch is described which only has a single cathode 2 and an anode 3 contains. However, a multi-electrode arrangement can also be used Intermediate electrodes can be provided with which a reduced Field strength between the electrodes and a corresponding one receives increased dielectric strength of the hollow electrode switch.

In einer weiteren Ausführungsform enthält der Hohlelektrodenschalter eine Vielzahl von Einzelentladungsstrecken, die parallel zueinander angeordnet und mit einer gemeinsamen Hohlelektrode, die von ihrer Bezugselektrode elektrisch isoliert ist und mit Mitteln zum Herstellen einer Raumladung, insbesondere einer Glimmentladung, versehen ist. Damit erhält man eine Erhöhung der Stromanstiegsrate und eine Verminderung der Schalterinduktivität und des Schalterwiderstandes sowie eine hohe Lebensdauer und eine hohe Strombelastbarkeit.In a further embodiment, the hollow electrode switch contains a variety of individual discharge paths running in parallel arranged to each other and with a common hollow electrode, which is electrically isolated from its reference electrode and with means for producing a space charge, in particular a glow discharge. This gives you an increase the rate of current rise and a decrease in switch inductance and the switch resistance as well as a high Service life and high current carrying capacity.

In der Ausführungsform einer Hohlelektrode 10 gemäß Figur 2 ist der Boden 11 der Hohlelektrode mit einem Fortsatz 13 versehen, dessen freies Ende der Entladungsstrecke 8 zugewandt ist. Der Fortsatz 13 hat die Form eines Zylinders, bei dem die Kante des Endes abgerundet ist. Dieser Fortsatz 13 dient zur Beeinflussung der Glimmentladung, insbesondere der Verteilung der Raumladungsdichte, innerhalb der Hohlelektrode.In the embodiment of a hollow electrode 10 according to FIG. 2 the bottom 11 of the hollow electrode is provided with an extension 13, the free end of which faces the discharge path 8. The Extension 13 has the shape of a cylinder in which the edge of the Is rounded off. This extension 13 is used to influence the glow discharge, especially the distribution of the Space charge density, inside the hollow electrode.

Gemäß Figur 3 hat dieser Fortsatz 13 die Form eines Kegels, dessen abgerundete Spitze der Entladungsstrecke 8 zugewandt ist.According to Figure 3, this extension 13 has the shape of a cone, the rounded tip of the discharge path 8 facing is.

Claims (16)

  1. Low-pressure gas discharge switch having the following features:
    a) at least two main electrodes (2, 3) are provided that are arranged at a distance d from each other in a switching chamber (14) and which constitute a cathode (2) and an anode (3) for a low-pressure gas discharge in a working gas, wherein at least the cathode (2) is provided so as to have at least one opening (4) for a discharge gap (8),
    b) the switching chamber (14) contains as a working gas an ionizable gas filling, the pressure p of which is selected so that the firing voltage of the gas discharge decreases with increasing product p x d,
    c) the gas discharge is fired by increasing the electron density in the cathode back chamber, wherein for the purposes of control and triggering at least one hollow electrode (10) is provided that has at least the form of a dish and with its opening is turned towards the discharge gap (8) between the cathode (2) and the anode (3) so that it surrounds at least the cathode back chamber,
    d) the hollow electrode (10) as the control electrode also takes on the functions of pre-ionization and triggering for the purpose of firing the gas discharge, for which purpose means are provided for generating a space charge within the hollow electrode (10) that has at least the form of a dish, characterised by the further feature:
    e) the distance (A) of the edge of the hollow electrode (10), which has at least the form of a dish, from the cathode (2) is less than the length of the cathodic dark space of a glow discharge of the working gas in the cathode back chamber.
  2. Low-pressure gas discharge switch according to claim 1, characterised in that for the glow discharge in the cathode back chamber the cathode (2) that is effective for the gas discharge is provided as the reference electrode and the control electrode that is electrically insulated therefrom and is formed as a hollow electrode (10) is provided as the anode.
  3. Low-pressure gas discharge switch according to claim 2, characterised in that the hollow electrode (10) is electroconductively connected to a trigger voltage source (17) for a negative control pulse.
  4. Low-pressure gas discharge switch according to claim 3, characterised in that the hollow electrode (10) is connected to the control voltage source (17) by way of a decoupling resistor (18) and a decoupling capacitor (19).
  5. Low-pressure gas discharge switch according to claim 3, characterised in that the hollow electrode (10) is connected to a trigger transformer.
  6. Low-pressure gas discharge switch according to claim 2, characterised in that additional means are provided for the purpose of producing the preionisation within the hollow electrode (10).
  7. Low-pressure gas discharge switch according to claim 6, characterised in that the hollow electrode (10) is connected to a voltage source (21) for a positive d.c. voltage by way of a decoupling resistor (22).
  8. Low-pressure gas discharge switch according to claim 1, characterised in that the hollow electrode (10), which has at least the form of a dish, has the shape of a pot of a given diameter and a given pot depth with an appropriate pot base (11).
  9. Low-pressure hollow (sic) discharge switch according to claim 8, characterised in that the selected ratio of the diameter D to the depth T of the pot lies in the range of 0.2 to 2.
  10. Low-pressure gas discharge switch according to claim 9, characterised in that the ratio of the diameter D to the pot depth T amounts to approximately 1.
  11. Low-pressure gas discharge switch according to claim 2, characterised in that the thickness of the cathode (2) is reduced at least at its opening (4).
  12. Low-pressure gas discharge switch according to claim 11, characterised in that the edge of the opening (4) of the cathode (2) that is turned towards the hollow electrode (10) is bevelled.
  13. Low-pressure gas discharge switch according to claim 8, characterised in that the pot base (11) of the hollow electrode (10) is provided with a projection (13).
  14. Low-pressure gas discharge switch according to claim 13, characterised by a cylindrical shape of the projection (13), the end of which that is turned towards the discharge gap (8) is provided with an edge that is rounded off (Figure 2).
  15. Low-pressure gas discharge switch according to claim 13, characterised by a conical shape of the projection (13), the rounded-off tip of which is turned towards the discharge gap (8) (Figure 3).
  16. Low-pressure gas discharge switch according to claim 1, characterised by a plurality of individual discharge gaps (8) which are arranged so as to be parallel to each other and jointly associated with which there is the hollow electrode (10) that has at least the form of a dish.
EP89123566A 1989-12-20 1989-12-20 Hollow electrode switch Expired - Lifetime EP0433480B1 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
DE58909869T DE58909869D1 (en) 1989-12-20 1989-12-20 Hollow electrode switch
EP89123566A EP0433480B1 (en) 1989-12-20 1989-12-20 Hollow electrode switch
JP2411227A JPH04109581A (en) 1989-12-20 1990-12-17 Hollow electrode switch
US07/857,722 US5159243A (en) 1989-12-20 1992-03-26 Hollow electrode switch

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP89123566A EP0433480B1 (en) 1989-12-20 1989-12-20 Hollow electrode switch

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EP0433480A1 EP0433480A1 (en) 1991-06-26
EP0433480B1 true EP0433480B1 (en) 2000-04-12

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DE4214362A1 (en) * 1992-04-30 1993-11-04 Siemens Ag Gas discharge switch - comprising two main electrodes in switching chamber, cathode having opening for igniting discharge
DE4218479A1 (en) * 1992-06-04 1993-12-09 Siemens Ag Low-pressure gas-discharge switch - places auxiliary electrode around discharge gap and connects to intermediate voltage source for radially directing field to housing wall.
DE4240198C1 (en) * 1992-11-30 1994-03-24 Siemens Ag Low pressure gas discharge switch - has circular electrode apertures at ends of gas discharge path
DE4306036C2 (en) * 1993-02-26 1996-08-22 Siemens Ag Gas discharge switch
DE4306038C2 (en) * 1993-02-26 1996-05-15 Siemens Ag Gas discharge switch
DE19753695C1 (en) * 1997-12-03 1999-07-15 Fraunhofer Ges Forschung Gas discharge switch for switching electrical currents with high current levels at high voltages
WO2006130036A1 (en) * 2005-06-02 2006-12-07 Viktor Dmitrievich Bochkov Controllable gas-discharge device

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US5159243A (en) 1992-10-27
EP0433480A1 (en) 1991-06-26
JPH04109581A (en) 1992-04-10
DE58909869D1 (en) 2000-05-18

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