EP0411910A2 - Structures légères et les procédés de fabrication - Google Patents

Structures légères et les procédés de fabrication Download PDF

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Publication number
EP0411910A2
EP0411910A2 EP90308434A EP90308434A EP0411910A2 EP 0411910 A2 EP0411910 A2 EP 0411910A2 EP 90308434 A EP90308434 A EP 90308434A EP 90308434 A EP90308434 A EP 90308434A EP 0411910 A2 EP0411910 A2 EP 0411910A2
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EP
European Patent Office
Prior art keywords
ribs
cells
core
structure core
lightweight
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP90308434A
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German (de)
English (en)
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EP0411910A3 (en
Inventor
Jitendra S. Goela
Michael Pickering
Raymond L. Taylor
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CVD Inc
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CVD Inc
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Publication of EP0411910A2 publication Critical patent/EP0411910A2/fr
Publication of EP0411910A3 publication Critical patent/EP0411910A3/en
Withdrawn legal-status Critical Current

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    • E—FIXED CONSTRUCTIONS
    • E04—BUILDING
    • E04C—STRUCTURAL ELEMENTS; BUILDING MATERIALS
    • E04C2/00—Building elements of relatively thin form for the construction of parts of buildings, e.g. sheet materials, slabs, or panels
    • E04C2/30—Building elements of relatively thin form for the construction of parts of buildings, e.g. sheet materials, slabs, or panels characterised by the shape or structure
    • E04C2/34—Building elements of relatively thin form for the construction of parts of buildings, e.g. sheet materials, slabs, or panels characterised by the shape or structure composed of two or more spaced sheet-like parts
    • E04C2/36—Building elements of relatively thin form for the construction of parts of buildings, e.g. sheet materials, slabs, or panels characterised by the shape or structure composed of two or more spaced sheet-like parts spaced apart by transversely-placed strip material, e.g. honeycomb panels

Definitions

  • This invention relates to an improved method of fabricating stiff and strong lightweight structures, and more particularly, to an improved method for the fabrication of silicon carbide (SiC) and/or silicon (Si) lightweight structures by the utilization of conventional vapor deposition techniques.
  • SiC silicon carbide
  • Si silicon
  • Such lightweight structures have utility in a variety of diverse applications including back-up structures for optical components, as structural components for automobile, aerospace and space applications, and as lightweight furniture parts for space.
  • LIDAR light detection and ranging
  • the performance of a LIDAR system depends upon the optical configuration of its receiving telescope. Often, due to space limitations such as in a shuttle borne LIDAR system, the length of the telescope is fixed. Therefore, the optical designer must select a particular shape and optics speed of the mirrors to maximize the throughput of the telescope.
  • the most critical element in the receiving telescope is the primary mirror because of its size, weight, fabrication cost, and thermal exposure to the outside world. Since the received signal is directly proportional to the area of the primary mirror, it is important to use as large a primary mirror as feasible to obtain reasonable signal levels for accurate measurement. This is particularly true when a space-borne LIDAR system is used to measure wind profiles in the troposphere on a global basis.
  • a spin casting technique has been proposed to fabricate 1.2 meter and 3.5 meter diameter glass mirror blanks containing lightweight honeycomb cells.
  • this technique is relatively faster than the conventional mirror fabrication methods and produces lightweight mirrors, the weight of these mirrors is still an order of magnitude more than permissible for many space applications.
  • the spin-casting technique is unsuitable for fabricating large mirrors of advanced ceramics such as SiC, titanium diboride (TiB2), and boron carbide (B4C) that have high melting points. These latter materials have properties superior to those of glass for large lightweight optics.
  • An object of the invention is to provide an improved method for fabricating stiff and strong lightweight structures that are characterized by extreme figure stability retention.
  • Another object of the invention is to provide an improved method enabling simplification in, reduction in time required for, and cost of fabricating stiff and strong lightweight structures.
  • a further object of the invention is to provide an improved stiff and strong lightweight structure.
  • An additional object of the invention is to provide such a structure having particular utility as back-up structure in the fabrication of lightweight mirrors.
  • Another object of the invention is to provide a stiff and strong lightweight structure comprising a plurality of ribs each of which has a length and a height that are greatly in excess of the thickness thereof, the ribs being assembled in the form of a structure having a plurality of cells and a stiffening and strengthening material coated on and enclosing the ribs, such material comprising a material that is vapor deposited on the ribs.
  • Still another object of the invention is to provide a method of fabricating a lightweight structure from a plurality of ribs each of which have substantially the same height and thickness with the height and length greatly exceeding the thickness, comprising the steps of:
  • Still another object of the invention is to provide an improved method for fabricating such an improved stiff and strong lightweight structure that is characterized by the adaptability thereof for fabrication in various predetermined configurations.
  • a further object of the invention is to provide an improved method for fabricating stiff and strong lightweight structures that is characterized by the adaptability thereof for scaling up in size.
  • the lightweight structure consists of a core to define the shape and size of the structure, overcoated with an appropriate deposit, such as SiC or Si, to give the lightweight structure strength and stiffness and to bond the lightweight structure to another surface.
  • the lightweight structure core is fabricated by bonding together thin ribs of a suitable material with a compatible bonding agent.
  • the core may consist of many honeycomb cells of appropriate shapes.
  • This core structure may be placed on a suitable substrate the surface configuration of which may be predetermined.
  • the substrate may be coated with a release agent.
  • a desired overcoat material is then deposited on the core structure by employing conventional or other appropriate deposition processes. A sufficient thickness of the overcoat material is deposited to ensure that the core is totally coated.
  • the lightweight structure so fabricated is unloaded from the deposition system and separated from the substrate. If necessary or desirable, the enclosed core material may be removed by drilling small holes in the walls of the structure, followed by burning, etching or melting of the core material away from the deposited overcoat material.
  • Fabrication of the lightweight structure in accordance with the four step process thus is as follows: (i) fabrication of a lightweight structure core; (ii) mounting of the lightweight structure core on a substrate for deposition of the overcoat material; (iii) deposition of the overcoat material to enclose the core; and (iv) core removal from the substrate.
  • the lightweight structure core may be fabricated using a metal or non-metal as the core material, including plastics, ceramics, carbon, glass, polymer, etc.
  • the main requirement for a good candidate core material is that it should be compatible with the deposition process and material.
  • Thin ribs of the core material are obtained and then assembled in the form of a honeycomb structure.
  • the ribs may be joined together at the corners and intersections with a suitable bonding agent, as known to those skilled in the art. Other joining processes such as welding, brazing, soldering, may also be used.
  • Each cell of the honeycomb structure may be in the shape of a circle, square, rectangle or a polygon.
  • the lightweight structure may also be fabricated with a combination of different cell shapes.
  • the preferred structure is the one which has the greatest stiffness for the intended application, such as one involving hexagonal cells, each of which contain six triangular cells.
  • the invention has particular utility in the fabrication of lightweight Si/SiC mirrors.
  • a complete lightweight mirror substrate may be fabricated directly in a vapor deposition chamber, in a one-step process, with no bonding agent being required to attach the SiC back-up structure to the faceplate of the mirror.
  • Figs. 1 and 2 of the drawings illustrate a lightweight structure core 10 that is fabricated from graphite ribs 12a, 12b, 12c and 14a...14f.
  • the core 10 is fabricated such that the ribs 14a...14f, which are all of the same length, form a hexagonal cell.
  • the ribs 12a, 12b and 12c intersect in the center and connect the six corners of the hexagon.
  • Ribs 12a, 12b and 12c also divide the hexagon into six triangular parts.
  • Ribs 12a, 12b and 12c are fabricated with center slots, as described further hereinafter with reference to Figs. 3 and 4, to interlock them in place.
  • the ribs all have a thickness of about 0.5 mm.(0.020 inch). Further, the ribs are all characterized in having a high ratio of the length and height thereof to their thickness. That is to say, the length and the height of each rib greatly exceeds its thickness.
  • all of the ribs have at least two adjacent surfaces that form an edge, all portions of which are located in a single plane, such as that containing the bottom edges 14g, 14h and 14i shown in Fig. 2.
  • ribs 12a, 12b and 12c may interlock with each other at the center thereof, two of the ribs, 12a and 12b, for example, as shown in Fig. 3, are provided with a single transverse slot 12d that extends slightly more than half way through the height of the rib.
  • the third rib, 12c is provided at the center thereof with opposed transverse slots 12e and 12f that extend less than half way through the height thereof.
  • Assembly of the ribs 12a...12c in operative relation is effected by placing the slots 12d of ribs 12a and 12b in interlocking relation with opposed transverse slots 12e and 12f, each of which slots extends less than half way through the height of rib 12c.
  • Ribs 14a...14f are positioned to define the outer perimeter of the structure 10, that is, to complete a hexagon, as shown.
  • the graphite ribs 12a...12c and 14a...14f may be joined with a graphite cement.
  • Graphite is a good core material because it is compatible with most deposition procedures. Further, several different types of graphite with different thermal expansion coefficients are available. A particular graphite having a thermal expansion coefficient closely matching that of an overcoat material to be deposited can be selected. A disadvantage of graphite is that it is a fragile material. Thus, difficulties may be encountered in the fabrication of lightweight structure cores with graphite rib thicknesses less than 0.5 mm. (0.020 inch). The graphite rib thickness may be reduced to less than 0.5 mm., however, by burning of the rib in air. Other strong and stiff materials such as Si, SiC, tungsten (W), molybdenum (Mo), etc. may also be used to fabricate extremely thin wall lightweight structure cores.
  • the lightweight structure core 10 is mounted in a deposition system for deposit thereon of a suitable deposition material depends upon the application for which the lightweight structure is intended to be used. If only the lightweight structure core is required without any plate or substrate at either end, the lightweight structure core may be mounted on graphite poles 16a...16f attached to a substrate 18, as shown in Fig. 2, with the edges of the ribs engaging the tips of the poles. After the deposition of the overcoat material is completed, the lightweight structure is obtained by separating the structure from the poles, as by cutting.
  • the lightweight structure core 10 either may be loosely bonded to or placed on a substrate 20 coated with a mold release substance 22, as shown in Figs. 5 and 6.
  • a suspension of graphite particles in an organic solvent may be used as the mold release coating. With such use, deposition will occur not only on the walls of the lightweight structure core 10 but also at the base thereof.
  • the lightweight structure with a base plate 24 of overcoat material formed thereon is separated from the substrate 20.
  • Fig. 7 there is illustrated a perspective view of a SiC totally enclosed graphite lightweight structure 26 fabricated by this method.
  • a lightweight structure core 10 as shown in Figs. 8 and 9, is bonded to a faceplate 28, as by flow bonding indicated at 30, and the deposition operation is performed.
  • the material of the faceplate should be compatible with the deposition process to assure adherence of the deposited material.
  • Fig. 10 illustrates a SiC enclosed graphite lightweight structure bonded to a SiC faceplate which has been fabricated by the use of this method.
  • an appropriate overcoat material may be deposited by any of the vapor deposition processes that are currently available. These processes include physical vapor deposition, sputtering, chemical vapor deposition and its different types (plasma assisted vapor deposition, low pressure vapor deposition, laser assisted vapor deposition, metal organic vapor deposition, etc.), evaporation and ion beam implantation.
  • the materials which can be deposited include metals and nonmetals (plastics, ceramics, glasses, polymers, etc.).
  • FIG. 11 schematically illustrates a chemical vapor deposition apparatus, designated 32, that may be used to fabricate SiC and Si lightweight structures in accordance with the invention.
  • This apparatus 32 includes a horizontal research furnace 34, specifically an electrically heated 3-zone Lindberg furnace, a reactant supply system 36, and an exhaust system 38.
  • furnace 34 Associated with furnace 34 is an elongated tube 40 of aluminum oxide (Al2O3) containing a reaction or deposition chamber 42 that is substantially coextensive with zone 2. Zone 2, as shown, is heated by a heating element 44 while zones 1 and 3 are heated by individually associated heating elements 46 and 48, respectively. Blocks of firebrick, designated 50 and 52, are located outside tube 40 in the regions thereof respectively associated with zones 1 and 3.
  • Al2O3 aluminum oxide
  • the deposition region within chamber 40 is indicated at 54 and, as shown, has associated therewith a mandrel 56 consisting of four sides of an open box and a baffle plate 58.
  • the pressure within chamber 42 is indicated by a pressure gauge 60.
  • the reactant supply system 36 includes a tank 60 comprising a source of argon (Ar) under pressure, a bubbler tank 62 containing methyltrichlorosilane (CH3SiCl3) or trichlorosilane (SiHCl3) through which argon from source 60 is bubbled under control of valves 64a and 64b, and a separate source (not shown) of hydrogen (H2).
  • the SiC and Si material to be deposited is fabricated by reacting Ch3SiCl3 or SiHCl3 with H2, respectively.
  • Other silane and hydrocarbon sources can be used to form SiC and Si. Both of these materials have been fabricated over a wide range of deposition temperature and reactor pressure, as shown in Table I below.
  • the reagents may be introduced into the deposition chamber 42 through a central injector (not shown).
  • the injector may be cooled with water to (i) prevent deposition in the injector and (ii) to keep the temperature of the reagents low thereby minimizing gas phase decomposition or nucleation.
  • the deposition thickness is controlled by varying the chemical vapor deposition process parameters and the deposition time. After a sufficient thickness of the material is deposited, the deposition process is terminated and the furnace is cooled very slowly to prevent cracking and distortion of the lightweight structure due to residual stresses.
  • the exhaust system 38 shown in Fig. 11 includes a vacuum pump 64, a scrubber 66, gaseous filters 68 and an oil filter 70.
  • the exhaust system 38 is provided to evacuate the gaseous reaction products that are released in the reaction chamber 42 during the deposition process.
  • Removal of the graphite core is optional. Since the deposited material completely encloses the core material, it is not necessary to remove the core material. As those skilled in the art understand, a core material can be selected the presence of which will not degrade the performance of the lightweight structure.
  • a core material can be selected the presence of which will not degrade the performance of the lightweight structure.
  • Candidate core materials are graphite, Si, glass, quartz and various metals.
  • the gaseous flow in the lightweight structure is a "stagnation" flow governed by diffusion. This tends to yield deposition nonuniformity along the cell depth where the undesired effects of stagnation flow tend to be the greatest.
  • stamination flow is meant a flow that is sluggish or lacking in activity, that is, a flow that has little motion or power of motion.
  • such stagnation flow may be minimized by providing holes 14j, as shown in Figs. 6, 7 and 9, in the walls of the lightweight structure core 10, and in particular, the walls of adjacent cells.
  • the preferred location for the holes 14j is on the walls near the base of the lightweight structure core, that is, adjacent the substrate 20, as seen in Fig. 6, and adjacent the faceplate 28, as seen in Fig. 9.
  • the SiC enclosed graphite lightweight structure shown in Fig. 7 was fabricated by the above method described in connection with the deposition apparatus shown in Fig. 11 and involving process parameters as given in TABLE I.
  • the lightweight structure core was constructed from graphite ribs about 0.5 mm. thick, 3.25 cm. long and 2.5 cm. high.
  • the deposition thickness was about 0.76 mm. (0.03 inch).
  • the lightweight structure produced was quite strong and rigid. There were no apparent stresses or cracks in the structure.
  • the chemical vapor technology of fabricating a lightweight back-up structure was demonstrated by fabricating a one cell SiC structure on the backside of a faceplate.
  • a graphite core consisting of an outer hexagonal cell with six inner triangular cells, as illustrated in Figs. 8 and 9, was constructed from graphite ribs about 0.5 mm. thick. Each side of this hexagonal cell was 3.25 cm. long and 2.50 cm. high.
  • This graphite core was placed on the backside of the SiC faceplate and then coated with SiC. This process produced a monolithic lightweight SiC structure without the use of any bonding agent.
  • a grade of graphite was used which has a thermal expansion coefficient larger than that of the chemically vapor deposited SiC.
  • a coating of Si about 0.5 mm. thick on the near-net shape SiC faceplate was applied to permit fabrication of the final optical figure.
  • the SiC faceplate was mounted such that the flow directly impinged on the replicated surface. Since the Si coating is required only on the front surface of the mirror, all other areas were masked with grafoil.
  • the mirror was polished flat to a figure of 1/5th of a wave at 0.6328 ⁇ m and a finish of ⁇ 10A RMS.
  • the aforementioned procedure may also be extended to fabricate curved Si/SiC mirrors of scaled up size and lightweight back-up structures therefor.
  • the assembly of the ribs is such that all of the ribs have at least two adjacent surfaces that form an edge, all portions of which lie in a single plane.
  • contiguous edge portions of the plurality of cells formed by the assembly of the ribs all lie in the same plane.
  • contiguous edge portions of the cells of the structure formed by the ribs when assembled, lie on a curved surface.
  • curved mirrors are more involved, as is apparent from the description provided hereinafter, due to (i) the optical fabrication of a curved surface required, and (ii) fabrication and assembly of a graphite core for the lightweight structure. In other respects, the fabrication of curved and flat mirrors is similar.
  • the graphite core is scaled. Since the thickness of the graphite ribs is kept the same during scaling, considerable care is required to assemble a large size graphite structure core.
  • Figs. 12 and 13 illustrate plan and side views, respectively, of a scaled up lightweight structure core according to the invention.
  • the lightweight structure core, designated 72, comprising a fourth embodiment of the invention has particular utility as the back-up structure for lightweight Si/SiC curved mirrors as distinguished from flat mirrors, as shown in Figs. 7 and 10. Two methods are disclosed herein for the fabrication of the lightweight structure core 72.
  • the lightweight structure core 72 is fabricated from six ribs of equal length which are positioned such that a large hexagonal cell having a depth equal to that of the ribs covers most of the backside of a circular faceplate 74. Connecting the six corners of this hexagon are three large ribs which intersect at their centers. These ribs also divide the hexagon into six equal triangular parts. These large ribs, similarly to ribs 12a, 12b and 12c shown in Figs. 3 and 4, are fabricated with center slots to interlock them in place.
  • the lightweight structure core 72 six outer sides of a large hexagon comprising ribs of a first set, all of which have the same length, and three central ribs comprising ribs of a second set, all of which have the same length, are bonded together.
  • the six triangular regions that are formed within the hexagon are filled with ribs of a third set to form smaller cells of equilateral cross section and bonded together to complete the inner region.
  • the region outside the hexagon may then be closed with ribs of a fourth set to cover as much of the circular area of the faceplate 74, as possible.
  • ribs 76, 78, 80, 82 and 84 are positioned in parallel in equally spaced apart relation.
  • the ribs 76...84 all have different lengths and are provided with uniformly spaced slots, designated 86a at the top, as shown in Figs. 14-18, respectively.
  • Each of ribs 76 and 82, as shown in Figs. 14 and 17, also include two spaced notches, designated 86b, at the top.
  • rib 84 is positioned in the top half and rib 84′ is positioned in the bottom half.
  • Additional parallel positioned and equally spaced apart ribs designated 88, 90, 92, 94 and 96, as seen in Fig. 12, all have different lengths and are provided with uniformly spaced slots, designated 98a at the bottom, as shown in Figs. 19-23, respectively, with ribs 88 and 94 also having two notches, designated 98b, at the top.
  • the ribs are made up of three parts when the slots are made into the notches.
  • rib 88 as shown in Fig. 19, comprises three parts that are designated 94, 94′ and 94 ⁇ .
  • rib 94 as shown in Fig. 22, comprises three parts athat are designated 94, 94′ and 94 ⁇ .
  • the two rib pieces, 96 and 96′ thus are positioned at opposite sides of the large hexagon, as shown.
  • FIG. 12 Further parallel positioned and equally spaced ribs, designated 100, 102, 104, 106 and 108, as seen in Fig. 12, all have different lengths and are provided with uniformly spaced slots, designated 110a, at the top and uniformly spaced slots, designated 110b, at the bottom, as shown in Figs. 24-28, respectively, with two spaced notches, each designated 112, being provided in the top of ribs 100 and 106.
  • the region outside the large hexagon may be closed by a total of 12 ribs designated 114 (or 116) and there are six ribs designated 118. Ribs 114, 116, as shown in Fig. 29, and ribs 118, as shown in Fig. 30, are not provided with any slots. For convenience of illustration, the closure segments 114, 116 and 118 are not shown in Fig. 13.
  • the scaled up in size lightweight structure core may be assembled by a second method.
  • this method which is described with reference to Figs. 31 and 32
  • three central ribs 122, 124 and 126 are first attached at the centers thereof.
  • One of these ribs, 122 has one slot in the center at the top, as shown in Fig. 33
  • another one, 124 has one slot in the center at the bottom, as shown in Fig. 34
  • the third one, 126 has two slots, with one being in the center at the bottom and the other in the center at the top, as shown in Fig. 35.
  • six ribs designated 128, 130, 132, 134, 136 and 138 are bonded to ribs 122, 124 and 126 to complete the large hexagon.
  • Each of the large triangles formed within the hexagon are then filled with smaller triangular cells.
  • ribs 140, 142 and 144 as illustrated in Fig. 37, are bonded.
  • Each of ribs 140, 142 and 144 has a top slit and a bottom slit, which slots are spaced by a cell length.
  • ribs 146, 148 and 150 which are of the same length, are locked in the center of the triangle and bonded at the edges. Such locking may be performed in the same manner as described hereinbefore.
  • one of the ribs 146 may have one slot at the bottom, another rib 148 may have one slot at the top, and the third rib 150 may have two slots, one at the top and one at the bottom, as shown in Fig. 38.
  • Rib 150 andribs 152 and 154, as shown in Fig. 39 are then locked and bonded at the edges.
  • ribs 148 and 154, and a rib 156, also as shown in Fig. 39 are locked to complete the triangle.
  • six outside closer modules are attached utilizing closure segments 158, 160, 162 as shown in Figs. 40-42, respectively, and in Fig. 31.
  • the closure segments have not been shown in Fig. 32.
  • the bottom edges of the ribs of the lightweight structure cores 72 and 72′ are not located in the same plane.
  • the structure of Figs. 1-10, as described, is appropriate for use in the fabrication of back-up structures for flat mirrors or other flat members; those of Figs. 12-42 facilitate use in the fabrication of mirrors or other members having curved surfaces. This demonstrates the adaptability of the lightweight structure core of the invention for fabrication in various configurations.
  • Fig. 43 illustrates a chemical vapor deposition system 164 that may be used to effect SiC and Si deposits on a mirror faceplate and the back-up structure therefor.
  • the system 164 includes a furnace 166 comprising a vertically positioned graphite tube 168, electrical heating elements 170 that surround tube 168, three mandrels 172, 174 and 176, and three baffle plates 178, 180 and 182.
  • the mandrels 172, 174 and 176 are arranged in series and are fabricated from high density graphite having a thermal expansion coefficient larger than that of the chemical vapor deposited SiC. Each graphite mandrel 172, 174 and 176 is held with four graphite posts which, in turn, are attached to respectively associated graphite baffle plates 178, 180 and 182.
  • Each baffle plate is supported by the circular graphite tube 168 which encloses the deposition area and isolates the latter from the graphite heating elements 170.
  • Reagents CH3SiCl3 and H2 are introduced into the bottom of the tube 170 from four water-cooled injectors 184 mounted in the bottom cover 186 of tube 168.
  • the first mandrel 172 is placed close to the injectors 184.
  • a graphite manifold 188 was used which blunted the injector flow and allowed the reagents to flow uniformly through a large central hole. This arrangement provides a more uniform deposit on all three mandrels 172, 174 and 176.
  • CH3SiCl3 is a liquid at room temperature with a vapor pressure of about 140 torr at 20°C. It is carried to the deposition region by bubbling argon through two CH3SiCl3 tanks (not shown). The CH3SiCl3 flow from the two tanks is divided into four parts which pass through the four injectors. The pressure and temperature of the CH3SiCl3 tank and the argon flow rates are maintained the same for both tanks to obtain a uniform deposition.
  • the chemical vapor deposition mirror fabrication technology was scaled from a small horizontal research furnace to a pilot-plant size production furnace capable of fabricating a 40-cm.-diameter mirror.
  • a 40-cm.-diameter mirror was designed.
  • the salient features of the arrangement are given in TABLE III.
  • the mirror design assumed a polishing load of -1 psi, a peak-to-valley intercell sag of -0.025 ⁇ m, a peak-to-valley self-weight gravity distortion between supports (20 cm. apart) of -0.025 ⁇ m, and a minimum natural frequency of 25 Hz.
  • the weight of the mirror is 2.94 kg which corresponds to a weight specification of about 19 kg per meter squared.
  • the lightweight structure consisted of 16 hexagonal cells containing a total of 96 triangular cells.
  • the cell aspect ratio defined as the cell depth to the diameter of the inscribed circle, is 1.3 for each triangular cell.
  • the scaled graphite core was placed on the backside of the SiC faceplate and coated with SiC in the pilot-plant size furnace. After this was accomplished, the SiC faceplate was separated from the graphite mandrel and the front of the faceplate was coated with chemical vapor deposited Si.
  • the structures provided are comprised of vapor deposited material such as SiC or Si in a monolithic form.
  • the structures while light in weight, are characterized by being very stiff and strong and in having extreme figure stability retention.
  • the structures are further characterized in having an extraordinary adaptability for fabrication in various predetermined configurations, for being scaled up in size, and in having utility in a variety of diverse applications including back-up structure for mirrors.

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  • Engineering & Computer Science (AREA)
  • Architecture (AREA)
  • Civil Engineering (AREA)
  • Structural Engineering (AREA)
  • Laminated Bodies (AREA)
  • Chemical Vapour Deposition (AREA)
  • Optical Elements Other Than Lenses (AREA)
EP19900308434 1989-08-03 1990-07-31 Lightweight structures and methods for the fabrication thereof Withdrawn EP0411910A3 (en)

Applications Claiming Priority (2)

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US38924889A 1989-08-03 1989-08-03
US389248 1989-08-03

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EP0411910A2 true EP0411910A2 (fr) 1991-02-06
EP0411910A3 EP0411910A3 (en) 1991-10-23

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JP (1) JPH03163501A (fr)
CA (1) CA2019697A1 (fr)
IL (1) IL94928A0 (fr)

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EP0628643A1 (fr) * 1993-06-08 1994-12-14 Cvd Incorporated Chambre triangulaire pour dispositif de dépôt en phase vapeur
US5741445A (en) * 1996-02-06 1998-04-21 Cvd, Incorporated Method of making lightweight closed-back mirror
CN105838335A (zh) * 2015-02-03 2016-08-10 日本揖斐电株式会社 准胶囊熔融盐蓄热材料
CN116699791A (zh) * 2023-08-01 2023-09-05 长春长光智欧科技有限公司 一种主动冷却椭球反射镜及其制造方法

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CA2057934C (fr) * 1991-12-18 1995-09-12 Jitendra S. Goela Methodes de fabrication de structure alveolee de faible poids
US11327208B2 (en) * 2018-05-30 2022-05-10 Raytheon Company Method of manufacture for a lightweight, high-precision silicon carbide mirror assembly

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US3507737A (en) * 1966-01-03 1970-04-21 Owens Illinois Inc Art of sealing thermally crystallizable glass,and thermally crystallizable telescope mirror blank
US4292375A (en) * 1979-05-30 1981-09-29 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Superplastically formed diffusion bonded metallic structure
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JPH0770753A (ja) * 1993-06-08 1995-03-14 Cvd Inc 蒸着による材料の製造装置、蒸着による材料の製造方法、及び化学蒸着によるシリコンカーバイド構造体の製造方法
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CN116699791A (zh) * 2023-08-01 2023-09-05 长春长光智欧科技有限公司 一种主动冷却椭球反射镜及其制造方法

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IL94928A0 (en) 1991-04-15
CA2019697A1 (fr) 1991-02-03
JPH03163501A (ja) 1991-07-15
EP0411910A3 (en) 1991-10-23

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