EP0411345A2 - Feeding and dosing equipment for the lapping mixture in polishing machines for lapping, grinding or polishing - Google Patents
Feeding and dosing equipment for the lapping mixture in polishing machines for lapping, grinding or polishing Download PDFInfo
- Publication number
- EP0411345A2 EP0411345A2 EP90113032A EP90113032A EP0411345A2 EP 0411345 A2 EP0411345 A2 EP 0411345A2 EP 90113032 A EP90113032 A EP 90113032A EP 90113032 A EP90113032 A EP 90113032A EP 0411345 A2 EP0411345 A2 EP 0411345A2
- Authority
- EP
- European Patent Office
- Prior art keywords
- feeding
- lapping
- upper working
- dosing device
- mixture
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B57/00—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
- B24B57/02—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents for feeding of fluid, sprayed, pulverised, or liquefied grinding, polishing or lapping agents
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
Definitions
- the invention relates to a feed and metering device for the lapping mixture in finishing machines for lapping, fine grinding or polishing with a vertical-axis arrangement of two working disks.
- the feed and metering device according to the invention for the lapping mixture is characterized in fine processing machines according to the preamble of claim 1, characterized in that the lapping mixture is distributed in one or more ring channels on the back of the upper working disk with the aid of a stripping device rotating relative to the upper working disk and can be fed to the effective space via bores, the stripping device consisting of several centrically to the axis
- the stripper arranged on the upper working disc has its own drive which, when the speed falls below the predetermined speed limit of the upper working disc, sets this device into a rotation that is preferably opposite to that of the disc.
- the lapping mixture is fed to the wipers via a vertical flow tube with free exit of the lapping mixture, to which, on the one hand, a drip tube is arranged in parallel with a receiving funnel pointing sideways to the end of the flow tube, on which, on the other hand, a jet nozzle is directed , which can be loaded with a pulsating air flow which is controllable in its strength and / or pulsation frequency.
- the lapping mixture A is supplied via a vertical flow tube 1 with a free outlet at the beveled end 2.
- a drip tube 3 is arranged in parallel with a receiving funnel 4 pointing sideways towards the end of the flow tube, on which a jet nozzle 5 is directed, which deflects the lapping mixture A partially in the direction C into the funnel 4, depending on its strength and / or pulsation frequency, by means of the air flow B, while the remaining amount reaches the receiving container 7 in the direction D via the outlet connection 6 and from here is returned via line 8 to flow tube 1.
- the deflected lapping mixture portion then reaches one or more ring channels 10 on the rear of the upper working disk 11 and from there via bores 12 into the active space 13 between the upper and lower working disk 11, 14 as can be seen in FIG becomes.
- the lapping mixture is evenly distributed according to FIG. 2 with the aid of a stripping device 15 which rotates relatively to the upper working disk 11, by means of scrapers 16 in one or more ring channels 10 with bores 12 to the active space 13.
- the stripping device 15 consists of several perpendicular to the axis X of the upper working disk 11 arranged wipers 16 with their own drive 17, which sets this device 15 when the speed falls below a predetermined speed limit of the upper working disc 11 in a preferably opposite rotation to the disc rotation.
- the drive 17 of the stripping device 15 is secured here against rotation by the guide rod 20 on the machine structure 21; on the other hand, it makes the pendulum movement of the upper working disk 11 as can be seen via the joint bearing 18.
- the stripping device is fastened by means of the bearing 22 and the holder of the drive 17 by means of the bearing 23 to the carrier 24 of the upper working disk 11, the stripping device being e.g. can be set in rotation via a belt drive 25.
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
Description
Die Erfindung bezieht sich auf eine Zuführ- und Dosiereinrichtung für das Läppgemisch bei Feinbearbeitungsmaschinen zum Läppen, Feinschleifen oder Polieren mit vertikal-achsiger Anordnung zweier Arbeitsscheiben.The invention relates to a feed and metering device for the lapping mixture in finishing machines for lapping, fine grinding or polishing with a vertical-axis arrangement of two working disks.
Aufgrund der universellen Verwendbarkeit derartiger Feinbearbeitungsmaschinen ist es von Vorteil, die Zufuhr des Läppgemisches in den Wirkraum mit einer der Bearbeitungsaufgabe angepaßten Menge und Gleichmäßigkeit sicherzustellen. Es ist die Aufgabe der Zuführ- und Dosiereinrichtung, dies in Abhängigkeit der jeweils zu bearbeitenden Teilespezifikation und der gewählten Zerspanungsbedingungen steuerbar zu ermöglichen, was mit der Erfindung erreicht wird.Due to the universal applicability of such fine processing machines, it is advantageous to ensure the supply of the lapping mixture into the effective space with a quantity and uniformity adapted to the processing task. It is the task of the feed and metering device to enable this to be controlled in a manner dependent on the part specification to be processed in each case and the selected machining conditions, which is achieved with the invention.
Zur Lösung dieser Aufgabe kennzeichnet sich die erfindungsgemäße Zuführ- und Dosiereinrichtung für das Läppgemisch bei Feinbearbeitungsmaschinen nach dem Oberbegriff von Anspruch 1 dadurch, daß das Läppgemisch mit Hilfe einer zur oberen Arbeitsscheibe relativ drehenden Abstreifeinrichtung in einem oder mehreren Ringkanälen an der Rückseite der oberen Arbeitsscheibe verteilt und dem Wirkraum über Bohrungen zuführbar ist, wobei die Abstreifeinrichtung aus mehreren zentrisch zur Achse der oberen Arbeitsscheibe angeordneten Abstreifern besteht mit eigenem Antrieb, der diese Einrichtung beim Unterschreiten einer vorgegebenen Drehzahlgrenze der oberen Arbeitsscheibe in eine zur Scheibendrehung vorzugsweise gegensinnige Rotation versetzt.To achieve this object, the feed and metering device according to the invention for the lapping mixture is characterized in fine processing machines according to the preamble of claim 1, characterized in that the lapping mixture is distributed in one or more ring channels on the back of the upper working disk with the aid of a stripping device rotating relative to the upper working disk and can be fed to the effective space via bores, the stripping device consisting of several centrically to the axis The stripper arranged on the upper working disc has its own drive which, when the speed falls below the predetermined speed limit of the upper working disc, sets this device into a rotation that is preferably opposite to that of the disc.
Nach einem weiteren Gedanken der Erfindung erfolgt die Zufuhr des Läppgemisches zu den Abstreifern über ein senkrechtes Strömungsrohr mit freiem Austritt des Läppgemisches, zu welchem einerseits parallel versetzt ein Tropfrohr angeordnet ist mit seitwärts auf das Ende des Strömungsrohres weisendem Aufnahmetrichter, auf welchen andererseits eine Strahldüse gerichtet ist, welche mit einem pulsierenden Luftstrom beschickbar ist, der in seiner Stärke und/oder Pulsationsfrequenz steuerbar ist.According to a further concept of the invention, the lapping mixture is fed to the wipers via a vertical flow tube with free exit of the lapping mixture, to which, on the one hand, a drip tube is arranged in parallel with a receiving funnel pointing sideways to the end of the flow tube, on which, on the other hand, a jet nozzle is directed , which can be loaded with a pulsating air flow which is controllable in its strength and / or pulsation frequency.
In der Zeichnung ist eine bevorzugte Ausführungsform der Zuführ- und Dosiereinrichtung gemäß der Erfindung als Ausführungsbeispiel dargestellt und nachfolgend beschrieben und zwar zeigen:
- Figur 1 die schematische Darstellung der dosierten Zufuhr des Läppgemisches und
Figur 2 die schematische Darstellung der Verteilung desselben.
- Figure 1 is a schematic representation of the metered supply of the lapping mixture and
- Figure 2 is a schematic representation of the distribution of the same.
Wie sich aus der Zeichnung in Figur 1 ergibt, erfolgt die Zufuhr des Läppgemisches A über ein senkrechtes Strömungsrohr 1 mit freiem Austritt am angeschrägten Ende 2. Hierzu ist parallel versetzt ein Tropfrohr 3 angeordnet mit seitwärts auf das Ende des Strömungsrohres weisendem Aufnahmetrichter 4, auf welchen eine Strahldüse 5 gerichtet ist, die mittels des Luftstromes B das Läppgemisch A teilweise in Richtung C in den Trichter 4 steuerbar abhängig von seiner Stärke und/oder Pulsationsfrequenz ablenkt, während die Restmenge in Richtung D über den Ablaufstutzen 6 in den Aufnahmebehälter 7 gelangt und von hier aus über die Leitung 8 zum Strömungsrohr 1 zurückgeführt wird.As can be seen from the drawing in FIG. 1, the lapping mixture A is supplied via a vertical flow tube 1 with a free outlet at the
Vom Ausfluß 9 eines oder mehrerer Tropfrohre 3 gelangt der abgelenkte Läppgemischanteil sodann in einen oder mehrere Ringkanäle 10 an der Rückseite der oberen Arbeitsscheibe 11 und von dort über Bohrungen 12 in den Wirkraum 13 zwischen der oberen und unteren Arbeitsscheibe 11, 14 wie aus Figur 2 ersichtlich wird.From the
Die gleichmäßige Verteilung des Läppgemisches geschieht entsprechend Figur 2 mit Hilfe einer zur oberen Arbeitsscheibe 11 relativ drehenden Abstreifeinrichtung 15 mittels Abstreifern 16 in einem oder mehreren Ringkanälen 10 mit Bohrungen 12 zum Wirkraum 13. Hierbei besteht die Abstreifeinrichtung 15 aus mehreren senkrecht zur Achse X der oberen Arbeitsscheibe 11 angeordneten Abstreifern 16 mit eigenem Antrieb 17, der diese Einrichtung 15 beim Unterschreiten einer vorgegebenen Drehzahlgrenze der oberen Arbeitsscheibe 11 in eine zur Scheibendrehung bevorzugt gegensinnige Rotation versetzt.The lapping mixture is evenly distributed according to FIG. 2 with the aid of a
Bei pendelnder Aufhängung der oberen Arbeitsscheibe 11 mittels Gelenklager 18 an der Pinole 19 ist der Antrieb 17 der Abstreifeinrichtung 15 hier über die Führungsstange 20 am Maschinenaufbau 21 gegen Mitdrehen gesichert; er macht dagegen die Pendelbewegung der oberen Arbeitsscheibe 11 wie ersichtlich über das Gelenklager 18 mit. Hierbei sind die Abstreifeinrichtung mittels der Lagerung 22 sowie die Halterung des Antriebs 17 mittels der Lagerung 23 am Träger 24 der oberen Arbeitsscheibe 11 befestigt, wobei die Abstreifeinrichtung z.B. über einen Riementrieb 25 in Drehung versetzbar ist.When the upper working
Claims (8)
daß das Läppgemisch mit Hilfe einer zur oberen Arbeitsscheibe relativ drehenden Abstreifeinrichtung in einem oder mehreren Ringkanälen an der Rückseite der oberen Arbeitsscheibe verteilt und dem Wirkraum über Bohrungen zuführbar ist.1. Feeding and dosing device for the lapping mixture in the case of finishing machines for lapping, fine grinding or polishing with a vertical-axis arrangement of two working disks, characterized in that
that the lapping mixture is distributed in one or more ring channels on the back of the upper working disk with the aid of a wiping device which rotates relatively to the upper working disk and can be fed to the working space via bores.
daß die Abstreifeinrichtung aus mehreren zentrisch zur Achse der oberen Arbeitsscheibe angeordneten Abstreifern besteht mit eigenem Antrieb, der diese Einrichtung beim Unterschreiten einer vorgegebenen Drehzahlgrenze der oberen Arbeitsscheibe in eine zur Scheibendrehung vorzugsweise gegensinnige Rotation versetzt.2. Feeding and dosing device according to claim 1, characterized in that
that the stripping device consists of a plurality of strippers arranged centrally with respect to the axis of the upper working disk, which drives this device when the speed falls below a predetermined speed limit of the upper working disk in a rotation which is preferably opposite to that of the disk.
daß bei pendelnder Aufhängung der oberen Arbeitsscheibe der Antrieb der Abstreifeinrichtung gegen Drehung um die Achse der oberen Arbeitsscheibe gesichert ist, jedoch deren Pendelbewegung mitvollzieht.3. Feeding and dosing device according to claim 2, characterized in that
that when the upper working disc is suspended, the drive of the scraper device is secured against rotation about the axis of the upper working disc, but does follow its pendulum movement.
daß die Abstreifeinrichtung sowie die Halterung des Antriebs mittels Lagerung am Träger der oberen Arbeitsscheibe derart befestigt sind, daß sich keine Rückwirkung aus der Drehung der Arbeitsscheibe ergibt.4. Feeding and dosing device according to claim 2 or 3, characterized in that
that the scraper and the holder of the drive are attached by means of storage on the carrier of the upper working disc in such a way that there is no reaction results from the rotation of the working disc.
daß die Zufuhr des Läppgemisches zu den Abstreifern über ein senkrechtes Strömungsrohr mit freiem Austritt des Läppgemisches erfolgt, zu welchem einerseits parallel versetzt ein Tropfrohr angeordnet ist mit seitwärts auf das Ende des Strömungsrohres weisendem Aufnahmetrichter, auf welchen andererseits eine Strahldüse gerichtet ist, welche mit einem pulsierenden Luftstrom beschickbar ist, der in seiner Stärke und/oder Pulsationsfrequenz steuerbar ist.5. Feeding and dosing device according to one of claims 1 to 4, characterized in that
that the supply of the lapping mixture to the wipers takes place via a vertical flow tube with free exit of the lapping mixture, to which, on the one hand, a drip tube is arranged in parallel with a receiving funnel pointing sideways to the end of the flow tube, on which, on the other hand, a jet nozzle is directed, which has a pulsating Air flow can be fed, which is controllable in its strength and / or pulsation frequency.
daß das Ende des Strömungsrohres bezogen auf die Strömungsrichtung abgeschrägt ist.6. Feeding and dosing device according to claim 5, characterized in that
that the end of the flow tube is beveled with respect to the direction of flow.
daß das Strömungsrohr über einem Auffangbehälter endet, welcher der Rückführung der Restmenge des Läppgemisches dient.7. Feeding and dosing device according to one of claims 5 or 6, characterized in that
that the flow tube ends above a collecting container which serves to return the remaining amount of the lapping mixture.
daß der Ausfluß aus einem oder mehreren Tropfrohren oberhalb eines oder mehrerer Ringkanäle auf der Rückseite der oberen Arbeitsscheibe vorgesehen ist.8. Feeding and dosing device according to one of the preceding claims, characterized in that
that the outflow from one or more drip pipes is provided above one or more ring channels on the back of the upper working disc.
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19893925274 DE3925274A1 (en) | 1989-07-31 | 1989-07-31 | Supply and dispensing mechanism for lapping mixt. |
DE3925274 | 1989-07-31 | ||
DE4016335 | 1990-05-21 | ||
DE19904016335 DE4016335A1 (en) | 1989-07-31 | 1990-05-21 | FEEDING AND DOSING DEVICE FOR THE LAPPING MIXTURE FOR FINISHING MACHINES FOR LAPPING, FINISHING OR POLISHING |
Publications (3)
Publication Number | Publication Date |
---|---|
EP0411345A2 true EP0411345A2 (en) | 1991-02-06 |
EP0411345A3 EP0411345A3 (en) | 1991-04-10 |
EP0411345B1 EP0411345B1 (en) | 1993-09-22 |
Family
ID=25883566
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP90113032A Expired - Lifetime EP0411345B1 (en) | 1989-07-31 | 1990-07-07 | Feeding and dosing equipment for the lapping mixture in polishing machines for lapping, grinding or polishing |
Country Status (3)
Country | Link |
---|---|
US (1) | US5109631A (en) |
EP (1) | EP0411345B1 (en) |
DE (1) | DE59002816D1 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP3835393A1 (en) | 2019-12-13 | 2021-06-16 | Warezak, Tomasz | Brown coal pellets |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5762543A (en) * | 1995-11-30 | 1998-06-09 | Speedfam Corporation | Polishing apparatus with improved product unloading |
US6149506A (en) * | 1998-10-07 | 2000-11-21 | Keltech Engineering | Lapping apparatus and method for high speed lapping with a rotatable abrasive platen |
US5993298A (en) * | 1997-03-06 | 1999-11-30 | Keltech Engineering | Lapping apparatus and process with controlled liquid flow across the lapping surface |
US5967882A (en) * | 1997-03-06 | 1999-10-19 | Keltech Engineering | Lapping apparatus and process with two opposed lapping platens |
US6120352A (en) * | 1997-03-06 | 2000-09-19 | Keltech Engineering | Lapping apparatus and lapping method using abrasive sheets |
US5910041A (en) * | 1997-03-06 | 1999-06-08 | Keltech Engineering | Lapping apparatus and process with raised edge on platen |
US6048254A (en) * | 1997-03-06 | 2000-04-11 | Keltech Engineering | Lapping apparatus and process with annular abrasive area |
US6036585A (en) * | 1997-03-31 | 2000-03-14 | Nippei Toyama Corporation | Grinder and grinding method |
US6102777A (en) * | 1998-03-06 | 2000-08-15 | Keltech Engineering | Lapping apparatus and method for high speed lapping with a rotatable abrasive platen |
JP3909619B2 (en) * | 1998-05-19 | 2007-04-25 | 独立行政法人理化学研究所 | Apparatus and method for mirror processing of magnetic disk substrate |
IT1396287B1 (en) * | 2009-09-28 | 2012-11-16 | Biesse Spa | CONTINUOUS DISTRIBUTOR |
KR101660898B1 (en) * | 2014-08-13 | 2016-09-28 | 주식회사 엘지실트론 | Apparatus for supplying slurry and polishing apparatus including the same |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
BE507816A (en) * | 1951-05-19 | |||
DE2346325A1 (en) * | 1973-09-14 | 1975-03-27 | Waldrich Werkzeugmasch | DOSING DEVICE FOR LIQUIDS CONTAINING GRANULATED SOLIDS, IN PARTICULAR LEAK LIQUID |
DE2440978A1 (en) * | 1974-08-27 | 1976-03-18 | Jmj Werkzeugmaschinen Gmbh | PROCESS AND MACHINE FOR PLAN, PLANPARALLEL AND OUTDOOR ROUND LAPS |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US267783A (en) * | 1882-11-21 | Island | ||
US1476863A (en) * | 1922-01-17 | 1923-12-11 | Floyd C Weaver | Machine for making true plane surfaces |
US2973605A (en) * | 1959-11-09 | 1961-03-07 | Carman Lab Inc | Lapping machine |
-
1990
- 1990-07-07 DE DE90113032T patent/DE59002816D1/en not_active Expired - Fee Related
- 1990-07-07 EP EP90113032A patent/EP0411345B1/en not_active Expired - Lifetime
- 1990-07-16 US US07/554,144 patent/US5109631A/en not_active Expired - Fee Related
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
BE507816A (en) * | 1951-05-19 | |||
DE2346325A1 (en) * | 1973-09-14 | 1975-03-27 | Waldrich Werkzeugmasch | DOSING DEVICE FOR LIQUIDS CONTAINING GRANULATED SOLIDS, IN PARTICULAR LEAK LIQUID |
DE2440978A1 (en) * | 1974-08-27 | 1976-03-18 | Jmj Werkzeugmaschinen Gmbh | PROCESS AND MACHINE FOR PLAN, PLANPARALLEL AND OUTDOOR ROUND LAPS |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP3835393A1 (en) | 2019-12-13 | 2021-06-16 | Warezak, Tomasz | Brown coal pellets |
Also Published As
Publication number | Publication date |
---|---|
DE59002816D1 (en) | 1993-10-28 |
EP0411345A3 (en) | 1991-04-10 |
US5109631A (en) | 1992-05-05 |
EP0411345B1 (en) | 1993-09-22 |
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