EP0407548A1 - Deuterium lamp for spectral analysis devices. - Google Patents

Deuterium lamp for spectral analysis devices.

Info

Publication number
EP0407548A1
EP0407548A1 EP90902241A EP90902241A EP0407548A1 EP 0407548 A1 EP0407548 A1 EP 0407548A1 EP 90902241 A EP90902241 A EP 90902241A EP 90902241 A EP90902241 A EP 90902241A EP 0407548 A1 EP0407548 A1 EP 0407548A1
Authority
EP
European Patent Office
Prior art keywords
layer
interference filter
deuterium lamp
aluminum oxide
quartz glass
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP90902241A
Other languages
German (de)
French (fr)
Other versions
EP0407548B1 (en
Inventor
Werner Schwarz
Horst Kremmling
Guenter Thomas
Hans-Georg Lotz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Heraeus Noblelight GmbH
Original Assignee
Leybold AG
Heraeus Instruments GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold AG, Heraeus Instruments GmbH filed Critical Leybold AG
Publication of EP0407548A1 publication Critical patent/EP0407548A1/en
Application granted granted Critical
Publication of EP0407548B1 publication Critical patent/EP0407548B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/38—Devices for influencing the colour or wavelength of the light
    • H01J61/40—Devices for influencing the colour or wavelength of the light by light filters; by coloured coatings in or on the envelope

Definitions

  • the invention relates to a deuterium lamp with a discharge bulb made of quartz glass for spectral analysis devices, in particular spectrophotometers, in which the radiation generated passes through a partial region of the bulb.
  • Deuterium lamps of the type characterized above are, for example, from the brochure "Deuterium lamps - D 800/900 series" (D 310 686 / 2C 7.86 / VN Ko). C. Heraeus GmbH known. These deuterium larapen provide a continuous line-free spectrum in the ultraviolet spectral range between 160 and 360 nm. They are used in particular in photometric devices, preferably spectral analysis devices.
  • the bulb of these deuterium lamps is made of quartz glass, whereby the use of synthetic quartz glass enables the lamp bulb to be transparent for wavelengths up to approx. 160 nm.
  • Deuterium lamps of this previously known type have proven themselves very well in their operation. They are characterized by a long service life and, in particular, high radiation stability. However, it has been shown that when using these lamps for the detection of very low concentrations the
  • the object of the present invention is to further reduce the level of the radiation noise of the deuterium lamps characterized at the outset while maintaining the aforementioned favorable properties of the known deuterium lamps.
  • the interference filter multiple layer has an absorption edge at a wavelength in the range from about 190 to 200 nm, but as high as possible for wavelengths greater than 200 nm Has transmission.
  • a pair of layers is understood to mean a combination of an aluminum oxide and a silicon dioxide or magnesium fluoride layer.
  • the interference filter multilayer has a steep absorption edge in the wavelength range from approximately 190 to 200 nm.
  • Radiation noise levels can be reduced by at least more than 50%.
  • the deuterium lamps provided with interference filters designed according to the invention are not only distinguished by the steep absorption edge in the range from 190 to 200 nm, but also by the fact that they have an extraordinarily high transmission for the longer-wave UV radiation at a wavelength greater than 200 nm , that is to say precisely the radiation which is to be used for carrying out spectral-analytical investigations.
  • the lamps according to the invention have not changed in terms of their service life compared to deuterium lamps without an interference filter multilayer; also has the transmission of the UV radiation with a wavelength greater than 200 nm does not undergo any disadvantageous change, even at operating times that exceed 1500 hours.
  • it should also be emphasized that ozone formation does not interfere with the spectral analysis and the operating personnel.
  • interference filter layer combination of aluminum s ⁇ niumoxid and silica.
  • the uppermost layer of the interference filter facing away from the surface of the quartz glass bulb consists of silicon dioxide.
  • the interference filter multiple layers are layers that are vapor-deposited in particular in a vacuum.
  • this does not preclude the possibility that, in addition to vapor-deposited layers, other interference filter layers applied in the usual way can also be used.
  • each layer of the interference filter is ⁇ / 4, where ⁇ is the limiting wavelength of the absorption edge, which is approximately 190 nm.
  • the reference number 1 denotes the quartz glass bulb which contains deuterium and on whose surface the filter 3 made of an interference multilayer is applied.
  • the deuterium lamp is supplied with electrical current via the current leads 2.
  • the cathode and anode of the deuterium lamp are arranged in the metallic housing 4. The generated radiation passes through the opening in the housing 4 designated by the reference number 5 and then through the quartz glass bulb 1 and the filter 3.
  • FIG. 2 shows a transmission curve of a deuterium lamp bulb with an interference multilayer applied according to the invention, the wavelength in nm on the abscissa and the transmission on the ordinate are plotted in percent.
  • the transmission curve clearly shows that the deuterium lamp provided with the interference filter multilayer according to the invention has a steep absorption edge in the range from 190 to 200 nm and that for UV wavelengths greater than 200 nm the transmission to values in the range from 80 to 90% increases and is maintained.
  • the interference filter multilayer is applied to the quartz glass lamp bulb, for example, as described below.
  • the layer sequence given in the table below with a total of 40 individual layers was produced on a quar glass lamp bulb.
  • the tubular quartz glass flask with a diameter of 30 mm was clamped in a spherical holder which rotated at a distance of approx. 50 cm above the evaporator sources.
  • the quartz glass bulb was brought to a temperature of 300 ° C. during the coating by radiant heating.
  • the coating materials silicon dioxide on the one hand and aluminum oxide on the other hand were evaporated alternately from two electron beam guns (type ESV 14).
  • the evaporation plant was pressurized to within 30 minutes
  • the layer structure and the control of the evaporator sources were carried out by means of an optical layer thickness measuring device of known design.
  • the quartz glass bulb produced in this way had a transmission in the spectral range above 200 nm, the maximum of which exceeded 90%, at the same time the transmission below 200 nm was less than 20%.
  • the second layer of the interference filter - in the table layer number 2 - and the (nl) th layer - in the table the 39th layer - are so-called adaptation layers to reduce the waviness of the transmission curve acts.

Landscapes

  • Spectrometry And Color Measurement (AREA)
  • Optical Filters (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

PCT No. PCT/EP90/00114 Sec. 371 Date Sep. 10, 1990 Sec. 102(e) Date Sep. 10, 1990 PCT Filed Jan. 20, 1990 PCT Pub. No. WO90/09032 PCT Pub. Date Aug. 9, 1990.A deuterium lamp with a quartz glass bulb for spectral analyzers is disclosed. At least the portion of the quartz glass bulb through which the radiation produced passes is provided on its outer surface with a multiple interference filter layer; the physical layer thickness of each layer is in the range from 10 to 70 nm. The multiple layer comprises atlternating aluminum oxide and silicon dioxide, or magnesium fluoride. The interference filter layers are preferably vapor-deposited in a vacuum.

Description

- I - - I -
"Deuterium-Lampe für Spektralanalyse-Vorrichtungen""Deuterium lamp for spectral analysis devices"
Die Erfindung betrifft eine Deuterium-Lampe mit einem Entladungskolben aus Quarzglas für Spektralanalyse-Vorrichtungen, insbesondere Spektralfotometer, bei der die erzeugte Strahlung durch einen Teilbereich des Kolbens hindurchtritt.The invention relates to a deuterium lamp with a discharge bulb made of quartz glass for spectral analysis devices, in particular spectrophotometers, in which the radiation generated passes through a partial region of the bulb.
Deuterium-Lampen der vorstehend charakterisierten Art sind beispielsweise aus dem Prospekt "Deuteriumlampen - Baureihe D 800/900" (D 310 686/2C 7.86/VN Ko) der . C. Heraeus GmbH bekannt. Diese Deuterium-Larapen liefern ein kontinuier¬ liches linienfreies Spektrum im ultravioletten Spektralbereich zwischen 160 und 360 nm. Sie werden insbesondere in fotometrischen Vorrichtungen, vorzugs¬ weise Spektralanalyse-Vorrichtungen, eingesetzt. Der Kolben dieser Deuterium-Lampen besteht aus Quarzglas, wobei bei Verwendung von synthetischem Quarzglas die Durchlässigkeit des Lampenkolbens für Wellenlängen bis ca. 160 nm ermöglicht wird. Deuterium-Lampen dieser vorbekannten Art haben sich in ihrem Betrieb sehr bewährt. Sie zeichnen sich durch lange Lebensdauer und insbesondere hohe Strahlungsstabilität aus. Es hat sich jedoch gezeigt, daß bei Verwendung dieser Lampen zum Nachweis sehr geringer Konzentrationen dasDeuterium lamps of the type characterized above are, for example, from the brochure "Deuterium lamps - D 800/900 series" (D 310 686 / 2C 7.86 / VN Ko). C. Heraeus GmbH known. These deuterium larapen provide a continuous line-free spectrum in the ultraviolet spectral range between 160 and 360 nm. They are used in particular in photometric devices, preferably spectral analysis devices. The bulb of these deuterium lamps is made of quartz glass, whereby the use of synthetic quartz glass enables the lamp bulb to be transparent for wavelengths up to approx. 160 nm. Deuterium lamps of this previously known type have proven themselves very well in their operation. They are characterized by a long service life and, in particular, high radiation stability. However, it has been shown that when using these lamps for the detection of very low concentrations the
Strahlungsrauschen der Lampe ein begrenzender Faktor ist. Die bekanntenRadiation noise from the lamp is a limiting factor. The well-known
-4 DDeeuutteerriiuumm--LLaammppeenn bb<esitzen einen Strahlungsrauschpegel von etwa 2 x 10 AU (Absoption ünits). Aufgabe der vorliegenden Erfindung ist es, den Pegel des Strahlungs- rauschens der eingangs charakterisierten Deuterium-Lampen weiter zu vermindern unter Beibehaltung der vorgenannten günstigen Eigenschaften der bekannten Deuterium-Lampen.-4 DDeeuutteerriiuumm - LLaammppeenn bb <there is a radiation noise level of about 2 x 10 AU (absorption option). The object of the present invention is to further reduce the level of the radiation noise of the deuterium lamps characterized at the outset while maintaining the aforementioned favorable properties of the known deuterium lamps.
Gelöst wird diese Aufgabe für Deuterium-Lampen der eingangs charakterisierten Art erfindungsgemäß dadurch, daß wenigstens der Kolben-Teilbereich auf seiner Außenoberfläche eine Interferenzfilter-Mehrfachschicht aus im Wechsel Aluminium-Oxid und Siliziumdioxid oder Magnesiumfluorid aufweist, wobei die physikalische Schichtdicke jeder Schicht im Bereich von 10 bis 70 nm liegt und die der Kolbenoberfläche zugekehrte erste wirksame Schicht des Interferenz¬ filters aus Aluminiumoxid besteht, und die Interferenzfilter-Mehrfachschicht eine Absorptionskante bei einer Wellenlänge im Bereich von etwa 190 bis 200 nm aufweist, jedoch für Wellenlängen größer als 200 nm eine möglichst hohe Transmission besitzt. Bei den erfindungsgemäßen Deuterium-Lampen hat es sich bewährt, für die Interferenzfilter-Mehrfachschicht wenigstens zehn Schichtpaare vorzusehen. Unter einem Schichtpaar wird dabei eine Kombination aus einer Aluminiumoxid- und einer Siliziumdioxid- oder Magnesium- fluorid-Schicht verstanden. Die Interferenzfilter-Mehrfachschicht weist erfindungsgemäß eine steile Absorptionskante im Wellenlängenbereich von etwa 190 bis 200 nm auf.This task is solved according to the invention for deuterium lamps of the type characterized in the introduction in that at least the bulb partial area has an interference filter multiple layer on its outer surface made of alternating aluminum oxide and silicon dioxide or magnesium fluoride, the physical layer thickness of each layer being in the range of 10 is up to 70 nm and the first effective layer of the interference filter facing the piston surface consists of aluminum oxide, and the interference filter multiple layer has an absorption edge at a wavelength in the range from about 190 to 200 nm, but as high as possible for wavelengths greater than 200 nm Has transmission. In the deuterium lamps according to the invention, it has proven useful to provide at least ten pairs of layers for the interference filter multilayer. A pair of layers is understood to mean a combination of an aluminum oxide and a silicon dioxide or magnesium fluoride layer. According to the invention, the interference filter multilayer has a steep absorption edge in the wavelength range from approximately 190 to 200 nm.
Durch die erfindungsgemäße Ausbildung der Deuterium-Lampe konnte derDue to the inventive design of the deuterium lamp, the
Strahlungsrauschpegel um mindestens mehr als 50 % vermindert werden. BeiRadiation noise levels can be reduced by at least more than 50%. at
Erhöhung der Schichtpaarzahl konnte sogar eine Verminderung um etwa eineIncreasing the number of pairs of layers could even decrease by approximately one
Größenordnung erzielt werden, d. h. der Pegel des Strahlungsrauschens konnteOrder of magnitude can be achieved, d. H. the level of radiation noise could
-5 auf einen Wert von 2 x 10 AU abgesenkt werden. Die mit erfindungsgemäß ausgebildeten Interferenzfiltern versehenen Deuterium-Lampen zeichnen sich nicht nur durch die steile Absorptionskante im Bereich von 190 bis 200 nm aus, sondern auch dadurch, daß sie bei einer Wellenlänge größer als 200 nm eine außerordentlich hohe Transmission für die längerwellige UV-Strahlung besitzen, also gerade die Strahlung, die man für die Durchführung von spektral¬ analytischen Untersuchungen nutzen will. Die erfindungsgemäßen Lampen haben sich bezüglich ihrer Lebensdauer gegenüber Deuterium-Lampen ohne Interferenz¬ filter-Mehrfachschicht nicht geändert; auch hat die Transmission der UV-Strahlung mit einer Wellenlänge größer als 200 nm keine nachteilige Ände¬ rung erfahren, selbst bei Betriebszeiten, die 1500 Stunden übersteigen. Als weiterer Vorteil der erfindungsgemäßen Deuterium-Lampen ist noch hervorzu¬ heben, daß eine die Spektralanalyse sowie das Bedienungspersonal störende Ozonbildung nicht stattfindet.-5 can be reduced to a value of 2 x 10 AU. The deuterium lamps provided with interference filters designed according to the invention are not only distinguished by the steep absorption edge in the range from 190 to 200 nm, but also by the fact that they have an extraordinarily high transmission for the longer-wave UV radiation at a wavelength greater than 200 nm , that is to say precisely the radiation which is to be used for carrying out spectral-analytical investigations. The lamps according to the invention have not changed in terms of their service life compared to deuterium lamps without an interference filter multilayer; also has the transmission of the UV radiation with a wavelength greater than 200 nm does not undergo any disadvantageous change, even at operating times that exceed 1500 hours. As a further advantage of the deuterium lamps according to the invention, it should also be emphasized that ozone formation does not interfere with the spectral analysis and the operating personnel.
Besonders bewährt haben sich Interferenzfilter-Schichtkombinationen von Alumi¬ niumoxid und Siliziumdioxid. Bei diesen Schichtkombinationen besteht die oberste der Oberfläche des Quarzglaskolbens abgekehrte Schicht des Interfe¬ renzfilters aus Siliziumdioxid.Have proved particularly suitable interference filter layer combination of aluminum s ¬ niumoxid and silica. In these layer combinations, the uppermost layer of the interference filter facing away from the surface of the quartz glass bulb consists of silicon dioxide.
Wenn jedoch eine Interferenzfilter-Schichtkombination aus Aluminiumoxid und Magnesiumfluorid verwendet wird, so empfiehlt es sich, die oberste der Ober¬ fläche des Quarzglaskolbens abgekehrte Schicht des Interferenzfilters aus Aluminiumoxid herzustellen.However, if an interference filter-layer combination of aluminum oxide and magnesium fluoride is used, it is advisable to produce the top layer of the interference filter made of aluminum oxide facing away from the surface of the quartz glass bulb.
Bei den erfindungsgemäßen Deuterium-Lampen sind die Interferenzfilter-Mehr¬ fachschichten insbesondere im Vakuum aufgedampfte Schichten. Dies schließt jedoch nicht aus, daß außer aufgedampften Schichten auch andere, in üblicher Weise aufgebrachte Interferenzfilterschichten brauchbar sind.In the deuterium lamps according to the invention, the interference filter multiple layers are layers that are vapor-deposited in particular in a vacuum. However, this does not preclude the possibility that, in addition to vapor-deposited layers, other interference filter layers applied in the usual way can also be used.
Die Dicke jeder Schicht des Interferenzfilters beträgtΛ/4, wobei λ die Grenz-Wellenlänge der Absorptionskante ist, die bei etwa 190 nm liegt.The thickness of each layer of the interference filter is Λ / 4, where λ is the limiting wavelength of the absorption edge, which is approximately 190 nm.
Anhand der Figur 1 wird eine erfindungsgemäß ausgebildete schematisch darge¬ stellte Deuterium-Lampe nachfolgend beschrieben.A schematically illustrated deuterium lamp designed according to the invention is described below with reference to FIG.
Mit der Bezugsziffer 1 ist der Quarzglaskolben bezeichnet, der Deuterium ent¬ hält und auf dessen Oberfläche das Filter 3 aus einer Interferenz-Mehrfach¬ schicht aufgebracht ist. Die Deuterium-Lampe wird über die Stromzuführungen 2 mit elektrischen Strom versorgt. In dem metallischen Gehäuse 4 sind Kathode und Anode der Deuterium-Lampe angeordnet. Die erzeugte Strahlung tritt durch die mit der Bezugsziffer 5 bezeichnete Öffnung im Gehäuse 4 und danach durch den Qüarzglaskolben 1 und das Filter 3 hindurch.The reference number 1 denotes the quartz glass bulb which contains deuterium and on whose surface the filter 3 made of an interference multilayer is applied. The deuterium lamp is supplied with electrical current via the current leads 2. The cathode and anode of the deuterium lamp are arranged in the metallic housing 4. The generated radiation passes through the opening in the housing 4 designated by the reference number 5 and then through the quartz glass bulb 1 and the filter 3.
In Figur 2 ist eine Transmissionskurve eines Deuterium-Lampenkolbens mit auf¬ gebrachter erfindungsgemäßer Interferenz-Mehrfachschicht dargestellt, wobei auf der Abszisse die Wellenlänge in nm und auf der Ordinate die Transmission in Prozent aufgetragen sind. Die Transmissionskurve zeigt deutlich, daß die mit erfindungsgemäßer Interferenzfilter-Mehrfachschicht versehene Deuteri¬ um-Lampe eine steile Absorptionskante im Bereich von 190 bis 200 nm besitzt und daß für UV-Wellenlängen größer als 200 nm die Transmission auf Werte im Bereich von 80 bis 90 % ansteigt und beibehalten wird.FIG. 2 shows a transmission curve of a deuterium lamp bulb with an interference multilayer applied according to the invention, the wavelength in nm on the abscissa and the transmission on the ordinate are plotted in percent. The transmission curve clearly shows that the deuterium lamp provided with the interference filter multilayer according to the invention has a steep absorption edge in the range from 190 to 200 nm and that for UV wavelengths greater than 200 nm the transmission to values in the range from 80 to 90% increases and is maintained.
Die Aufbringung der Interferenzfilter-Mehrfachschicht auf den Quarzglaslampen¬ kolben erfolgt beispielsweise wie nachstehend beschrieben.The interference filter multilayer is applied to the quartz glass lamp bulb, for example, as described below.
In einer Vakuum-Au amp anläge des Types A1100Q (Hersteller: Leybold AG, Hanau) wurde auf einem Quarglas-Lampenkolben die in der nachstehenden Tabelle angegebene Schichtenfolge mit insgesamt 40 Einzelschichten erzeugt. Der röhrenförmige Quarzglaskolben mit einem Durchmesser von 30 mm war dabei in einer kalottenförmigen Halterung eingespannt, die oberhalb der Verdampfer¬ quellen in einem Abstand von ca. 50 cm rotierte. Der Quarzglaskolben wurde während der Beschichtung durch eine Strahlungsbeheizung auf eine Temperatur von 300°C gebracht. Die Beschichtungsmaterialien Siliziumdioxid einerseits und Aluminiumoxyd andererseits wurden aus zwei Elektronenstrahlkanonen (Type ESV 14) abwechselnd verdampft.In a vacuum system of the A1100Q type (manufacturer: Leybold AG, Hanau), the layer sequence given in the table below with a total of 40 individual layers was produced on a quar glass lamp bulb. The tubular quartz glass flask with a diameter of 30 mm was clamped in a spherical holder which rotated at a distance of approx. 50 cm above the evaporator sources. The quartz glass bulb was brought to a temperature of 300 ° C. during the coating by radiant heating. The coating materials silicon dioxide on the one hand and aluminum oxide on the other hand were evaporated alternately from two electron beam guns (type ESV 14).
Die Aufdampfanläge wurde innerhalb von 30 Minuten auf einen Druck vonThe evaporation plant was pressurized to within 30 minutes
-4 5 x 10 Pa evakuiert. Nach einer Heizzeit von einer Stunde wurde der Quarz¬ glaskolben in einer Argonatmosphäre bei einem Druck von 5 Pa 10 Minuten lang in einer Glimmentladung vorbehandelt. Anschließend wurden bei einem Sauer--4 5 x 10 Pa evacuated. After a heating time of one hour, the quartz glass bulb was pretreated in a glow discharge in an argon atmosphere at a pressure of 5 Pa for 10 minutes. Subsequently, an acid
-2 stoffpartialdrucle von 2 x 10 Pa die Schichten aus Siliziumdioxid und-2 layers of 2 x 10 Pa, the layers of silicon dioxide and
Aluminiumdioxid in abwechselnder Reihenfolge und mit den angegebenen Schicht¬ dicken (s. Tabelle) aufgedampft.Evaporated aluminum dioxide in alternating order and with the specified layer thicknesses (see table).
Der Schichtaufbau und die Steuerung der Verdampferquellen erfolgte mittels eines optischen Schichtdickenmeßgerätes bekannter Bauart.The layer structure and the control of the evaporator sources were carried out by means of an optical layer thickness measuring device of known design.
Der solchermaßen hergestellte Quarzglaskolben besaß im Spektralbereich ober¬ halb 200 nm eine Transmission, deren Maximum 90% überstieg, wobei gleichzeitig die Transmission unterhalb von 200 nm weniger als 20% betrug. TabelleThe quartz glass bulb produced in this way had a transmission in the spectral range above 200 nm, the maximum of which exceeded 90%, at the same time the transmission below 200 nm was less than 20%. table
Schichtnummer Schichtmaterial optische Dicke physikal.Dicke(ca)Layer number Layer material Optical thickness Physical thickness (approx.)
3.3rd
A12°3 2. SiO_ 1. A1 2 ° 3 2. SiO_ 1.
23 23
QuarzglaskolbenQuartz glass bulb
Es ist noch anzumerken, daß es sich bei der 2. Schicht des Interferenzfilters - in der Tabelle Schichtnummer 2 - sowie der (n-l)-ten Schicht - in der Tabel¬ le die 39. Schicht - um sogenannte Anpassungsschichten zur Verringerung der Welligkeit der Transmissionskurve handelt. It should also be noted that the second layer of the interference filter - in the table layer number 2 - and the (nl) th layer - in the table the 39th layer - are so-called adaptation layers to reduce the waviness of the transmission curve acts.

Claims

Patentansprüche Claims
1. Deuterium-Lampe mit einem Entladungskolben aus Quarzglas für Spektral¬ analyse-Vorrichtungen, insbesondere Spektralfotometer, bei der die er¬ zeugte Strahlung durch einen Teilbereich des Kolbens hindurchtritt, da¬ durch gekennzeichnet, daß wenigstens der Kolben-Teilbereich auf seiner Außenober läche eine Interferenzfilter-Mehrfachschicht aus im Wechsel Aluminium-Oxid und Siliziumdioxid oder Magnesiumfluorid aufweist, wobei die physikalische Schichtdicke jeder Schicht im Bereich von 10 bis 70 nm liegt und die der Kolbenoberfläche zugekehrte erste wirksame Schicht des Interferenzfilters aus Aluminiumoxid besteht, und die Interferenz¬ filter-Mehrfachschicht eine Absorptionskante bei einer Wellenlänge im Bereich von etwa 190 bis 200 nm aufweist, jedoch für Wellenlängen größer als 200 nm eine möglichst hohe Transmission besitzt.1. Deuterium lamp with a discharge bulb made of quartz glass for spectral analysis devices, in particular spectrophotometers, in which the generated radiation passes through a partial area of the bulb, characterized in that at least the partial bulb area has a surface on its outer surface Interference filter multilayer comprising alternating aluminum oxide and silicon dioxide or magnesium fluoride, the physical layer thickness of each layer being in the range from 10 to 70 nm and the first effective layer of the interference filter facing the piston surface consisting of aluminum oxide, and the interference filter multilayer has an absorption edge at a wavelength in the range from approximately 190 to 200 nm, but has the highest possible transmission for wavelengths greater than 200 nm.
2. Deuterium-Lampe nach Anspruch 1, dadurch gekennzeichnet, daß die Inter¬ ferenzfilter-Mehrfachschicht aus wenigstens zehn Schichtpaaren besteht, wobei ein Schichtpaar aus einer Aluminiumoxid- und einer Silizium¬ dioxid- oder Magnesiumfluorid-Schicht besteht.2. Deuterium lamp according to claim 1, characterized in that the interference filter multilayer consists of at least ten pairs of layers, wherein a pair of layers consists of an aluminum oxide and a silicon dioxide or magnesium fluoride layer.
3. Deuterium-Lampe nach den Ansprüchen 1 oder 2, dadurch gekennzeichnet, daß im Falle der Interferenzfilter-Schichtkombination Aluminiumoxid/Siliziumdioxid die oberste, der Oberfläche des Quarz¬ glas-Kolbens abgekehrte Schicht des Interferenzfilters aus Siliziumdioxid besteht. -1-3. Deuterium lamp according to claims 1 or 2, characterized in that in the case of the interference filter-layer combination aluminum oxide / silicon dioxide, the top, the surface of the quartz glass bulb layer of the interference filter consists of silicon dioxide. -1-
4. Deuterium-Lampe nach Anspruch 1 oder 2, dadurch gekennzeichnet, daß im Falle der Interferenzfilter-Schichtkombination4. Deuterium lamp according to claim 1 or 2, characterized in that in the case of the interference filter layer combination
Aluminiumoxid/Magnesiumfluorid die oberste, der Oberfläche des Quarz¬ glas-Kolbens abgekehrte Schicht des Interferenzfilters aus Aluminiumoxid besteht.Aluminum oxide / magnesium fluoride, the uppermost layer of the interference filter facing away from the surface of the quartz glass bulb consists of aluminum oxide.
5. Deuterium-Lampe nach einem oder mehreren der vorhergehenden Ansprüche, dadurch gekennzeichnet, daß die Interferenzfilterschichten im Vakuum auf¬ gedampfte Schichten sind.5. Deuterium lamp according to one or more of the preceding claims, characterized in that the interference filter layers are evaporated layers in vacuum.
6. Deuterium-Lampe nach einem oder mehreren der vorhergehenden Ansprüche, dadurch gekennzeichnet, daß die Dicke jeder Schicht des Interferenz¬ filters 7V/4 beträgt, mit 7V. = Grenz-Wellenlänge der Absorptions-Kante. 6. Deuterium lamp according to one or more of the preceding claims, characterized in that the thickness of each layer of the Interferenz¬ filter is 7V / 4, with 7V. = Limit wavelength of the absorption edge.
EP90902241A 1989-01-25 1990-01-20 Deuterium lamp for spectral analysis devices Expired - Lifetime EP0407548B1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE3902144A DE3902144A1 (en) 1989-01-25 1989-01-25 DEUTERIUM LAMP FOR SPECTRAL ANALYSIS DEVICES
DE3902144 1989-01-25
PCT/EP1990/000114 WO1990009032A1 (en) 1989-01-25 1990-01-20 Deuterium lamp for spectral analysis devices

Publications (2)

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EP0407548A1 true EP0407548A1 (en) 1991-01-16
EP0407548B1 EP0407548B1 (en) 1995-09-06

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US (1) US5117150A (en)
EP (1) EP0407548B1 (en)
JP (1) JPH0834769B2 (en)
AT (1) ATE127616T1 (en)
DE (2) DE3902144A1 (en)
WO (1) WO1990009032A1 (en)

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ATE127616T1 (en) 1995-09-15
JPH03503817A (en) 1991-08-22
DE59009610D1 (en) 1995-10-12
EP0407548B1 (en) 1995-09-06
WO1990009032A1 (en) 1990-08-09
JPH0834769B2 (en) 1996-03-29
DE3902144A1 (en) 1990-08-02
US5117150A (en) 1992-05-26
DE3902144C2 (en) 1992-03-12

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