EP0406723B1 - Transducer for vacuum measurement - Google Patents
Transducer for vacuum measurement Download PDFInfo
- Publication number
- EP0406723B1 EP0406723B1 EP90112459A EP90112459A EP0406723B1 EP 0406723 B1 EP0406723 B1 EP 0406723B1 EP 90112459 A EP90112459 A EP 90112459A EP 90112459 A EP90112459 A EP 90112459A EP 0406723 B1 EP0406723 B1 EP 0406723B1
- Authority
- EP
- European Patent Office
- Prior art keywords
- transmitter
- measuring transducer
- sensor
- transducer according
- supply
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L21/00—Vacuum gauges
- G01L21/30—Vacuum gauges by making use of ionisation effects
- G01L21/34—Vacuum gauges by making use of ionisation effects using electric discharge tubes with cold cathodes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/08—Means for indicating or recording, e.g. for remote indication
- G01L19/083—Means for indicating or recording, e.g. for remote indication electrical
Definitions
- the invention relates to a transducer for a vacuum meter designed as a transmitter.
- transducers for vacuum measurement require a high level of electrical supply and supply relatively small signals (for example current signals on the order of a few ⁇ -amperes).
- relatively small signals for example current signals on the order of a few ⁇ -amperes.
- a high electronic effort for signal processing is therefore required.
- the overall systems are very complex, so that additional monitoring and control systems are necessary.
- Examples of vacuum gauges that require the electronics outlined are the ionization vacuum gauges. These measure the pressure using the particle number density. Some of the molecules or atoms in the gas space are ionized. The ions generated transfer their charge to an electrode of the system. The very small ion current generated in this way is a measure of the pressure. The ions are formed either in a discharge with a high electric field strength or by collision with electrons. Ionization vacuum meters therefore require either a high-voltage supply or a power supply for the relatively high heating current and an anode voltage. Because of the very small Measuring voltages also require a high level of signal processing.
- gas friction vacuum meter Another example of a vacuum measuring device with a sensor that requires a particularly high supply effort is the gas friction vacuum meter.
- the gas friction dependent on pressure at low gas pressures is used to generate a measurement signal.
- a steel ball is used as the measuring element, which is hung in a magnetic field without contact. This ball is set in rotation by electromagnetic impulses. After reaching a high speed, the drive is switched off so that the speed decreases more or less rapidly under the influence of the pressure-dependent gas friction. The decrease in speed per unit of time is therefore a measure of the prevailing pressure.
- the sensors of partial pressure vacuum gauges also require a high supply effort.
- Your transducer includes an ion source, a separation system and an ion trap.
- the ion source and separation system (quadrupole, mass-dispersive deflection field or the like) require a wide variety of voltages for operation, the quadrupole separation system, for example, a high DC voltage and a high-frequency AC voltage.
- Vacuum meters of the type described on the market include an operating device which has an operating, display, supply control and monitoring function.
- This operating device is relatively large and must be arranged where the pressure to be monitored is displayed and / or the associated measured values are processed further.
- the actual sensor must be located where the recipient to be monitored for pressure is.
- a trouble-free transmission of the relatively small sensor signal to the control gear is not possible over arbitrary distances due to non-ideal cables and / or external interference, so that the known vacuum meters can only be used where the distance between control gear and sensor is not too large, ie that they can only be used to a limited extent.
- the present invention has for its object to design a vacuum measuring device of the type mentioned in such a way that it can also be used reliably where the distance between the measuring location and the monitoring location is relatively large.
- a transmitter is a transducer that transforms the signals from a sensor in order to adapt them to downstream evaluation devices. Since a transmitter no longer includes the evaluation devices themselves, its housing can be significantly smaller than the housing for the previously known vacuum meter operating devices. It is therefore possible to accommodate the transmitter directly at the measuring location or at least in the vicinity of the measuring location, depending on whether the sensor is in the transmitter housing or not.
- the transmission of the signals from the sensor to the signal processing electronics is possible even when the sensor is not in the transmitter housing, because of the short distance without interference.
- the electronics located within the transmitter housing are used to supply voltage and to process and convert the measurement signals into a digital or analog output signal, preferably into a standardized output signal with four to twenty milliamperes. The transmission of this output signal over long distances, for example - when used in a large system - to a display device located in a control room, is possible without interference. Circuits for control purposes and condition monitoring can also be located in the transmitter housing.
- a transmitter of the type according to the invention can be operated with a low supply voltage, usually 24 volts DC. This supply voltage has established itself in larger systems.
- a particularly advantageous measure consists in electrically isolating functional areas located within the transmitter housing. This results in excellent performance data and reliable operation.
- the figure shows a transmitter 1 designed according to the invention. It is divided into three circuits, the supply circuit 2, the high-voltage and signal conditioning circuit 3 and the output circuit 4.
- the sensor or measuring tube is located in the high-voltage and signal conditioning circuit 3 and is designated by 5 .
- the measuring tube can also be located outside the transmitter 1. This variant is indicated by dashed lines; the measuring tube is designated 5 '.
- Components of the supply circuit 2 are the two-pole supply voltage connection 6 (for example 24 V), a supply voltage filter 7, a single-pole connection socket 8 for the remotely controllable switching on and off of the transmitter 1, and the LEDs 9, 11 and 12.
- the LED 9 is used for monitoring the operating state.
- the light emitting diode 11 indicates the supply status.
- the light-emitting diode 12 is used for monitoring the condition of the Penning measuring system.
- the high voltage and signal conditioning circuit 3 there are the electronic components 13 for the high voltage generation, switching components 14 for the voltage supply of the components in the circuit 3, various stages 15 for the signal conditioning (such as logarithmers, characteristic equalization, temperature compensation and the like) and, as already mentioned, the measuring tube 5, if it is not arranged outside.
- a logarithmic equalization of the characteristic curve enables simple assignment to Measured value possible using a mathematically describable formula. Tables are not required.
- the stages for supplying power to the components in this circuit are designated 16. Furthermore, there is the current source 17 for generating an output signal, for example between 4 and 20 milliamperes. Via the measurement signal output 18, the output signal reaches the remotely located, not shown display device.
- the different circuits 2, 3 and 4 are electrically isolated from each other.
- a transformer is used, which comprises the windings contained in blocks 21, 22 and 23.
- Blocks 21 and 22 are used to electrically isolate circuits 2 and 3 with respect to the supply voltage.
- Block 23 also has this task for the purpose of galvanically isolating circuits 2 and 4.
- the switching means 24 are provided which comprise an optocoupler for the electrical isolation of the circuits 2 and 3.
- the transmitter expediently delivers an output signal in the range between 4 and 20 mA.
- the switching means are selected or the electronic components are dimensioned such that - as long as the Penning is not ready for operation - output 18 supplies a measured value which is outside the measuring range, for example 2 mA.
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Description
Die Erfindung bezieht sich auf einen als Transmitter ausgeführten Meßwertaufnehmer für ein Vakuummeter.The invention relates to a transducer for a vacuum meter designed as a transmitter.
Bei Meßwertaufnehmern für die Vakuummessung besteht das besondere Problem, daß die jeweiligen Sensoren klein und/oder empfindlich sind, einen hohen elektrischen Versorgungsaufwand benötigen und relativ kleine Signale (beispielsweise Stromsignale in der Größenordnung von einigen µ-Ampere) liefern. Neben dem hohen Versorgungsaufwand ist deshalb auch ein hoher elektronischer Aufwand für die Signalaufbereitung erforderlich. Schließlich sind die Gesamtsysteme sehr komplex, so daß zusätzliche Überwachungs- und Steuerungssysteme notwendig sind.The particular problem with transducers for vacuum measurement is that the respective sensors are small and / or sensitive, require a high level of electrical supply and supply relatively small signals (for example current signals on the order of a few μ-amperes). In addition to the high supply effort, a high electronic effort for signal processing is therefore required. Finally, the overall systems are very complex, so that additional monitoring and control systems are necessary.
Beispiele für Vakuummeßgeräte, die den geschilderten Elektronik-Aufwand erfordern, sind die Ionisationsvakuummeter. Diese messen den Druck über die Teilchenzahldichte. Ein Teil der sich im Gasraum befindenden Moleküle oder Atome wird ionisiert. Die erzeugten Ionen geben ihre Ladung an eine Elektrode des Systems ab. Der so erzeugte, sehr kleine Ionenstrom ist ein Maß für den Druck. Die Bildung der Ionen erfolgt entweder in einer Entladung bei hoher elektrischer Feldstärke oder durch Stoß mit Elektronen. Ionisationsvakuummeter benötigen deshalb entweder eine Hochspannungsversorgung oder eine Stromversorgung für den relativ hohen Heizstrom sowie eine Anodenspannung. Wegen der sehr kleinen Meßspannungen ist außerdem ein hoher Signalaufbereitungsaufwand erforderlich.Examples of vacuum gauges that require the electronics outlined are the ionization vacuum gauges. These measure the pressure using the particle number density. Some of the molecules or atoms in the gas space are ionized. The ions generated transfer their charge to an electrode of the system. The very small ion current generated in this way is a measure of the pressure. The ions are formed either in a discharge with a high electric field strength or by collision with electrons. Ionization vacuum meters therefore require either a high-voltage supply or a power supply for the relatively high heating current and an anode voltage. Because of the very small Measuring voltages also require a high level of signal processing.
Ein weiteres Beispiel für ein Vakuummeßgerät mit einem Sensor, der einen besonders hohen Versorgungsaufwand erfordert, ist das Gasreibungsvakuummeter. Bei diesem Gerät wird die bei niedrigen Gasdrücken druckabhängige Gasreibung zur Erzeugung eines Meßsignales genutzt. Als Meßelement wird beispielsweise eine Stahlkugel verwendet, die in einem Magnetfeld berührungsfrei auf gehängt ist. Durch elektromagnetische Impulse wird diese Kugel in Rotation versetzt. Nach dem Erreichen einer hohen Drehzahl wird der Antrieb abgeschaltet, so daß die Drehzahl unter dem Einfluß der druckabhängigen Gasreibung mehr oder weniger rasch abnimmt. Die Drehzahlabnahme pro Zeiteinheit ist deshalb ein Maß für den herrschenden Druck.Another example of a vacuum measuring device with a sensor that requires a particularly high supply effort is the gas friction vacuum meter. With this device the gas friction dependent on pressure at low gas pressures is used to generate a measurement signal. For example, a steel ball is used as the measuring element, which is hung in a magnetic field without contact. This ball is set in rotation by electromagnetic impulses. After reaching a high speed, the drive is switched off so that the speed decreases more or less rapidly under the influence of the pressure-dependent gas friction. The decrease in speed per unit of time is therefore a measure of the prevailing pressure.
Schließlich benötigen auch die Sensoren von Partialdruck-Vakuummeßgeräten einen hohen Versorgungsaufwand. Ihr Meßwertaufnehmer umfaßt einen Ionenquelle, ein Trennsystem und einen Ionenfänger. Ionenquelle und Trennsystem (Quadrupol, massendispersiven Ablenkfeld o. dgl.) benötigen zum Betrieb die verschiedensten Spannungen, das Quadrupol-Trennsystem beispielsweise eine hohe Gleichspannung sowie eine hochfrequente Wechselspannung.Finally, the sensors of partial pressure vacuum gauges also require a high supply effort. Your transducer includes an ion source, a separation system and an ion trap. The ion source and separation system (quadrupole, mass-dispersive deflection field or the like) require a wide variety of voltages for operation, the quadrupole separation system, for example, a high DC voltage and a high-frequency AC voltage.
Auf dem Markt angebotene Vakuummeter der geschilderten Art umfassen ein Betriebsgerät, das Bedien-, Anzeige, Versorgungs-Steuerungs- und Überwachungsfunktion hat. Dieses Betriebsgerät ist relativ groß und muß dort angeordnet werden, wo der zu überwachende Druck angezeigt und/oder die zugehörigen Meßwerte weiter verarbeitet werden. Der eigentliche Sensor muß sich aber dort befinden, wo sich der auf Druck zu überwachende Rezipient befindet. Eine störungsfreie Übertragung des relativ kleinen Sensor-Signales bis zum Betriebsgerät ist wegen nicht idealer Leitungen und/oder äußerer Störungen nicht über beliebige Distanzen möglich, so daß die vorbekannten Vakuummmeter nur dort eingesetzt werden können, wo der Abstand zwischen Betriebsgerät und Sensor nicht zu groß ist, d. h. daß sie nur begrenzt einsetzbar sind.Vacuum meters of the type described on the market include an operating device which has an operating, display, supply control and monitoring function. This operating device is relatively large and must be arranged where the pressure to be monitored is displayed and / or the associated measured values are processed further. However, the actual sensor must be located where the recipient to be monitored for pressure is. A trouble-free transmission of the relatively small sensor signal to the control gear is not possible over arbitrary distances due to non-ideal cables and / or external interference, so that the known vacuum meters can only be used where the distance between control gear and sensor is not too large, ie that they can only be used to a limited extent.
Der vorliegenden Erfindung liegt die Aufgabe zugrunde, ein Vakuummeßgerät der eingangs genannten Art derart zu gestalten, daß es auch dort zuverlässig einsetzbar ist, wo die Distanz zwischen dem Meßort und dem Überwachungsort relativ groß ist.The present invention has for its object to design a vacuum measuring device of the type mentioned in such a way that it can also be used reliably where the distance between the measuring location and the monitoring location is relatively large.
Erfindungsgemäß wird diese Aufgabe nach dem Anspruch 1 gelöst.According to the invention, this object is achieved according to claim 1.
Ein Transmitter ist ein Meßwandler, der die Umformung der Signale eines Sensors durchführt, um diese an nachgeschaltete Auswertegeräte anzupassen. Da ein Transmitter die Auswertegeräte selbst nicht mehr umfaßt, kann sein Gehäuse wesentlich kleiner als das Gehäuse für die vorbekannten Vakuummeter-Betriebsgeräte sein. Es besteht deshalb die Möglichkeit, den Transmitter unmittelbar am Meßort oder zumindest in der Nähe des Meßortes unterzubringen, abhängig davon, ob sich der Sensor im Transmitter-Gehäuse befindet oder nicht. Die Übertragung der Signale des Sensors zur Signalverarbeitungs-Elektronik ist auch dann, wenn sich der Sensor nicht im Transmitter-Gehäuse befindet, wegen des geringen Abstandes ohne Störungen möglich. Die innerhalb des Transmitter-Gehäuses befindliche Elektronik dient der Spannungs-Versorgung sowie der Meßsignalaufbereitung und -wandlung in ein digitales oder analoges Ausgangssignal, vorzugsweise in ein genormtes Ausgangssignal mit vier bis zwanzig Milliampere. Die Übertragung dieses Ausgangssignales über weite Strecken, beispielsweise - beim Einsatz in einer großen Anlage - bis zu einem in einer Warte befindlichen Anzeigegerät, ist störungsfrei möglich. Auch Schaltungen für Steuerungszwecke und Zustandsüberwachungen können sich im Transmitter-Gehäuse befinden.A transmitter is a transducer that transforms the signals from a sensor in order to adapt them to downstream evaluation devices. Since a transmitter no longer includes the evaluation devices themselves, its housing can be significantly smaller than the housing for the previously known vacuum meter operating devices. It is therefore possible to accommodate the transmitter directly at the measuring location or at least in the vicinity of the measuring location, depending on whether the sensor is in the transmitter housing or not. The transmission of the signals from the sensor to the signal processing electronics is possible even when the sensor is not in the transmitter housing, because of the short distance without interference. The electronics located within the transmitter housing are used to supply voltage and to process and convert the measurement signals into a digital or analog output signal, preferably into a standardized output signal with four to twenty milliamperes. The transmission of this output signal over long distances, for example - when used in a large system - to a display device located in a control room, is possible without interference. Circuits for control purposes and condition monitoring can also be located in the transmitter housing.
Ein Transmitter der erfindungsgemäßen Art kann mit einer Versorgungskleinspannung, üblicherweise 24 Volt Gleichspannung, betrieben werden. Diese Versorgungsspannung hat sich in größeren Anlagen durchgesetzt.A transmitter of the type according to the invention can be operated with a low supply voltage, usually 24 volts DC. This supply voltage has established itself in larger systems.
Eine besonders vorteilhafte Maßnahme besteht darin, eine galvanische Trennung von innerhalb des Transmitter-Gehäuses befindlichen Funktionsbereichen vorzunehmen. Dadurch ergeben sich ausgezeichnete Leistungsdaten und ein zuverlässiger Betrieb.A particularly advantageous measure consists in electrically isolating functional areas located within the transmitter housing. This results in excellent performance data and reliable operation.
Weitere Vorteile und Einzelheiten der Erfindung sollen anhand eines in der Figur dargestellten Ausführungsbeispieles für Kaltkathoden-Ionisationsvakuummeter erläutert werden.Further advantages and details of the invention will be explained on the basis of an exemplary embodiment for cold cathode ionization vacuum meters shown in the figure.
Die Figur zeigt einen erfindungsgemäß gestalteten Transmitter 1. Er ist aufgeteilt in drei Kreise, den Versorgungskreis 2, den Hochspannungs- und Signalaufbereitungskreis 3 und den Ausgangskreis 4. Der Sensor bzw. die Meßröhre befindet sich im Hochspannungs- und Signalaufbereitungskreis 3 und ist mit 5 bezeichnet. Alternativ kann sich die Meßröhre auch außerhalb des Transmitters 1 befinden. Diese Variante ist gestrichelt angedeutet; die Meßröhre ist mit 5' bezeichnet.The figure shows a transmitter 1 designed according to the invention. It is divided into three circuits, the
Bestandteile des Versorgungskreises 2 sind der zweipolige Versorgungsspannungsanschluß 6 (beispielsweise 24 V), ein Versorgungsspannungsfilter 7, eine einpolige Anschlußbuchse 8 zur fernsteuerbaren Ein- und Ausschaltung des Transmitters 1 sowie die Leuchtdioden 9, 11 und 12. Die Leuchtdiode 9 dient der Betriebs-Zustandsüberwachung. Die Leuchtdiode 11 zeigt den Versorgungszustand an. Die Leuchtdiode 12 dient - wie weiter unten noch erläutert - der Zustandsüberwachung des Penning-Meßsystems.Components of the
Im Hochspannungs- und Signalaufbereitungskreis 3 befinden sich die elektronischen Bauelemente 13 für die Hochspannungserzeugung, Schaltbauteile 14 für die Spannungsversorgung der im Kreis 3 befindlichen Bauelemente, verschiedene Stufen 15 für die Signalaufbereitung (wie Logarithmierer, Kennlinienentzerrung, Temperaturkompensation und dergleichen) sowie, wie bereits erwähnt, die Meßröhre 5, wenn sie nicht außerhalb angeordnet ist.
Durch eine logarithmische Entzerrung der Kennlinie (Ausgangssignal als Funktion des Druckes) wird eine einfache Zuordnung zum Meßwert über eine mathematisch beschreibbare Formel möglich. Tabellen sind nicht erforderlich.In the high voltage and
A logarithmic equalization of the characteristic curve (output signal as a function of pressure) enables simple assignment to Measured value possible using a mathematically describable formula. Tables are not required.
Im Ausgangskreis 4 sind die Stufen zur Spannungsversorgung der in diesem Kreis befindlichen Bauteile mit 16 bezeichnet. Weiterhin befindet sich dort die Stromquelle 17 für die Erzeugung eines Ausgangssignales, beispielsweise zwischen 4 und 20 Milliampere. Über den Meßsignalausgang 18 gelangt das Ausgangssignal zum entfernt angeordneten, nicht dargestellten Anzeigegerät.In the
Die verschiedenen Kreise 2, 3 und 4 sind galvanisch voneinander getrennt. Dazu dient zunächst ein Transformator, der die in den Blöcken 21, 22 und 23 enthaltenen Wicklungen umfaßt. Mit Hilfe der Blöcke 21 und 22 erfolgt die galvanische Trennung der Kreise 2 und 3 in Bezug auf die Versorgungsspannung. Diese Aufgabe hat auch der Block 23 zum Zwecke der galvanischen Trennung der Kreise 2 und 4.The
Um das Penning-Meßsystem im Kreis 3 mit Hilfe der im Kreis 2 befindlichen Leuchtdiode 12 überwachen zu können, sind die Schaltmittel 24 vorgesehen, die einen Optokoppler zur galvanischen Trennung der Kreise 2 und 3 umfassen.In order to be able to monitor the Penning measuring system in the
Zur galvanischen Trennung im Bereich des Signalweges zwischen den Kreisen 3 und 4 dient die Stufe 25, über die die Schaltmittel 15 und 17 induktiv, kapazitiv oder optisch miteinander gekoppelt sind.The
Zweckmäßig liefert der Transmitter ein Ausgangssignal im Bereich zwischen 4 und 20 mA. Um am Ausgangssignal erkennen zu können, ob die Meßröhre 5, 5′ betriebsbereit ist, d. h. ob das Penning gezündet hat, sind die Schaltmittel so ausgewählt bzw. die elektronischen Bauteile so bemessen, daß - solange das Penning nicht betriebsbereit ist - vom Ausgang 18 ein Meßwert geliefert wird, der außerhalb des Meßbereichs liegt, beispielsweise 2 mA.The transmitter expediently delivers an output signal in the range between 4 and 20 mA. In order to be able to recognize from the output signal whether the measuring tube 5, 5 'is ready for operation, d. H. whether the Penning has ignited, the switching means are selected or the electronic components are dimensioned such that - as long as the Penning is not ready for operation -
Claims (7)
- Measuring transducer constructed as a transmitter (1) for a vacuum meter having a sensor (5, 5') and with electronic circuits accommodated in a transmitter casing for the processing and transformation of the signals output by the sensor, characterized in that the vacuum meter is an ionisation vacuum meter, a gas friction vacuum meter or a partial pressure vacuum meter with a sensor requiring electrical supply, that the electronic circuits serving the sensor supply are also housed in the transmitter housing, with a supply circuit (2), a high-voltage and signal processing circuit (3) and an output circuit (4) being accommodated in the transmitter casing and electrically isolated from one another.
- Measuring transducer according to claim 1,
characterized in that a transformer, and optocoupler or similar device are used to provide electrical isolation of the circuits (2, 3, 4). - Measuring transducer according to one of the preceding claims, characterized in that the sensor (5, 5') is located outside the transmitter (1).
- Measuring transducer according to one of the preceding claims, characterized in that light-emitting diodes (9, 11, 12) are provided for status monitoring.
- Measuring transducer according to one of the preceding claims, characterized in that electronic components (power supply unit 17) are provided to supply an output signal in the range between 4 and 20 milliamperes.
- Measuring transducer according to claim 5,
characterized in that electronic components (power supply 17) are provided, which deliver an output signal lying outside the measuring range, preferably at two milliamperes, as long as the measuring tubes (5, 5') are not in the stand-by mode. - Measuring transducer according to claim 6,
characterized in that one component in the signal processing circuit (15) is a logarithmic stage serving to correct the output signal characteristic.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE8908069U DE8908069U1 (en) | 1989-07-01 | 1989-07-01 | |
| DE8908069U | 1989-07-01 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| EP0406723A2 EP0406723A2 (en) | 1991-01-09 |
| EP0406723A3 EP0406723A3 (en) | 1991-06-05 |
| EP0406723B1 true EP0406723B1 (en) | 1994-08-17 |
Family
ID=6840706
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| EP90112459A Expired - Lifetime EP0406723B1 (en) | 1989-07-01 | 1990-06-29 | Transducer for vacuum measurement |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US5191799A (en) |
| EP (1) | EP0406723B1 (en) |
| JP (1) | JP2807059B2 (en) |
| DE (2) | DE8908069U1 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19526394A1 (en) * | 1995-07-19 | 1997-01-23 | Siemens Ag | Vacuum detection system for vacuum switch tube |
| US9726566B2 (en) * | 2015-04-29 | 2017-08-08 | Honeywell International Inc. | Vacuum pressure gauge |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3321701A (en) * | 1963-07-08 | 1967-05-23 | Bell Telephone Labor Inc | Ionization manometer which compares an ion neutralized electron beam flow with an unneutralized beam flow |
| US4270091A (en) * | 1978-01-25 | 1981-05-26 | Varian Associates, Inc. | Apparatus and method for measuring pressures and indicating leaks with optical analysis |
| DE8134476U1 (en) * | 1981-11-26 | 1982-04-08 | Leybold-Heraeus GmbH, 5000 Köln | OPERATING AND DISPLAY DEVICE FOR VACUUM METER |
| DE3431517C2 (en) * | 1984-08-28 | 1986-09-04 | Kernforschungsanlage Jülich GmbH, 5170 Jülich | Method for measuring pressure with a gas friction vacuum meter and a gas friction vacuum meter for carrying out the method |
-
1989
- 1989-07-01 DE DE8908069U patent/DE8908069U1/de not_active Expired
-
1990
- 1990-06-27 US US07/544,525 patent/US5191799A/en not_active Expired - Fee Related
- 1990-06-29 EP EP90112459A patent/EP0406723B1/en not_active Expired - Lifetime
- 1990-06-29 DE DE59006820T patent/DE59006820D1/en not_active Expired - Fee Related
- 1990-07-02 JP JP2172837A patent/JP2807059B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| US5191799A (en) | 1993-03-09 |
| JPH03215727A (en) | 1991-09-20 |
| DE59006820D1 (en) | 1994-09-22 |
| EP0406723A2 (en) | 1991-01-09 |
| DE8908069U1 (en) | 1989-11-02 |
| EP0406723A3 (en) | 1991-06-05 |
| JP2807059B2 (en) | 1998-09-30 |
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