EP0405304A3 - Thin film resistors whose surface resistance values are comprised between 1m-ohms and several g-ohms and process of making it - Google Patents

Thin film resistors whose surface resistance values are comprised between 1m-ohms and several g-ohms and process of making it Download PDF

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Publication number
EP0405304A3
EP0405304A3 EP19900111587 EP90111587A EP0405304A3 EP 0405304 A3 EP0405304 A3 EP 0405304A3 EP 19900111587 EP19900111587 EP 19900111587 EP 90111587 A EP90111587 A EP 90111587A EP 0405304 A3 EP0405304 A3 EP 0405304A3
Authority
EP
European Patent Office
Prior art keywords
ohms
comprised
making
several
thin film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP19900111587
Other languages
German (de)
Other versions
EP0405304A2 (en
Inventor
Martin Dr. Hoheisel
Christine Mrotzek
Werner Mueller
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Publication of EP0405304A2 publication Critical patent/EP0405304A2/en
Publication of EP0405304A3 publication Critical patent/EP0405304A3/en
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
    • H01C7/006—Thin film resistors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/06—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
    • H01C17/075—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques
    • H01C17/08—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques by vapour deposition
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/06—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
    • H01C17/075—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques
    • H01C17/12—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques by sputtering
EP19900111587 1989-06-29 1990-06-19 Thin film resistors whose surface resistance values are comprised between 1m-ohms and several g-ohms and process of making it Withdrawn EP0405304A3 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE3921431 1989-06-29
DE3921431 1989-06-29

Publications (2)

Publication Number Publication Date
EP0405304A2 EP0405304A2 (en) 1991-01-02
EP0405304A3 true EP0405304A3 (en) 1992-06-03

Family

ID=6383944

Family Applications (1)

Application Number Title Priority Date Filing Date
EP19900111587 Withdrawn EP0405304A3 (en) 1989-06-29 1990-06-19 Thin film resistors whose surface resistance values are comprised between 1m-ohms and several g-ohms and process of making it

Country Status (2)

Country Link
EP (1) EP0405304A3 (en)
JP (1) JPH0336703A (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6351068B2 (en) 1995-12-20 2002-02-26 Mitsui Chemicals, Inc. Transparent conductive laminate and electroluminescence light-emitting element using same
TW392189B (en) * 1997-01-17 2000-06-01 Koninkl Philips Electronics Nv Method of manufacturing a cathode ray tube and a cathode ray tube
ES2185454B1 (en) * 2000-08-28 2004-05-01 Centro De Investigaciones Energeticas, Medioambientales Y Tecnologicas (C.I.E.M.A.T.) METHOD OF OBTAINING OXIDES ELECTRICAL AND TRANSPARENT CONDUCTORS THROUGH CATHODIC SPRAYING.

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2261601A1 (en) * 1974-02-15 1975-09-12 Thomson Csf Method of forming conductive layers - uses varying pressures of oxygen during ion bombardment of target

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2261601A1 (en) * 1974-02-15 1975-09-12 Thomson Csf Method of forming conductive layers - uses varying pressures of oxygen during ion bombardment of target

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
THIN SOLID FILMS. Bd. 128, Nr. 3/4, Juni 1985, LAUSANNE CH Seiten 231 - 239; BHATTACHARYYA ET AL.: 'Preparation and characterization of indium tin oxide films produced by the D.C sputtering technique' *
THIN SOLID FILMS. Bd. 162, Nr. 1, August 1988, LAUSANNE CH Seiten 119 - 127; DUTTA ET AL.: 'Variations in structural and electrical properties of magnetron-sputtered indium tin oxide films with deposition parameters' *

Also Published As

Publication number Publication date
EP0405304A2 (en) 1991-01-02
JPH0336703A (en) 1991-02-18

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