EP0352688B1 - Vacuum pump - Google Patents

Vacuum pump Download PDF

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Publication number
EP0352688B1
EP0352688B1 EP89113558A EP89113558A EP0352688B1 EP 0352688 B1 EP0352688 B1 EP 0352688B1 EP 89113558 A EP89113558 A EP 89113558A EP 89113558 A EP89113558 A EP 89113558A EP 0352688 B1 EP0352688 B1 EP 0352688B1
Authority
EP
European Patent Office
Prior art keywords
zone
pump
stator
gas
rotor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP89113558A
Other languages
German (de)
French (fr)
Other versions
EP0352688A1 (en
Inventor
Jacques Long
Denis Perrillat-Amede
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel CIT SA
Original Assignee
Alcatel CIT SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
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Application filed by Alcatel CIT SA filed Critical Alcatel CIT SA
Publication of EP0352688A1 publication Critical patent/EP0352688A1/en
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/02—Units comprising pumps and their driving means
    • F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/5806—Cooling the drive system
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
    • F04D29/584—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps cooling or heating the machine
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
    • F04D29/5853—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps heat insulation or conduction
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2260/00—Function
    • F05D2260/60—Fluid transfer
    • F05D2260/607—Preventing clogging or obstruction of flow paths by dirt, dust, or foreign particles

Definitions

  • the present invention relates to a vacuum pump, of the molecular or turbomolecular type.
  • molecular and turbomolecular pumps must not suck up certain gases, because these can condense on the walls at low temperature, and because of the compression exerted by the pump.
  • This liquid or solid condensate can cause deterioration, blockage and seizure of the pump.
  • the cause of this condensation is that current pumps are cooled to eliminate the thermal power dissipated by the electric drive motor, and the thermal power developed by the compression of the gas. Consequently, the temperature of the internal walls of the pump is close to ambient temperature, and promotes condensation.
  • the first addition No. 81,075 to French patent 1,304,689 describes a vertical axis turbomolecular pump comprising a lubrication circuit comprising a reservoir located below the pump and in which the lubricant accumulates by gravity, a pump auxiliary ensuring the suction and sending of oil to the organs to be lubricated.
  • the tank is surrounded at its upper part by a jacket traversed by a circulation of cooling water in order to prevent oil vapors from rising towards the high vacuum.
  • the upper part of the pump at the level of the pumping discs, is relatively cold, despite the fact that the pumping casing includes a heating resistor to ensure the steaming and consequently the degassing of the walls of the pump. Moreover, this heating is only carried out when the pump is stopped or at a reduced speed.
  • An object of the present invention is to provide a vacuum pump provided with means for eliminating any risk of condensation.
  • the subject of the present invention is a pump of the molecular or turbomolecular type comprising a stator and a rotor driven in rotation by a motor, the stator comprising a first zone, situated at the right of the rotor where the gas suction takes place and a second zone, in the vicinity of the drive motor, cooled by a circulation of fluid, said first zone being provided with a heating means, characterized in that the first and second zones are separated by a thermal impedance element, said heating means maintaining the temperature of said first zone above the condensation threshold of the aspirated gas.
  • said heating means is a heating collar enclosing at least part of the first zone of the stator.
  • said thermal impedance element is a ring or washer made of a material chosen from stainless steel, ceramic or a synthetic material.
  • the single figure is a schematic view, partially cut axially, of a molecular pump according to the invention.
  • reference 1 designates the suction port of the pump.
  • the latter comprises a stator 2 and a rotor 3.
  • the latter is integral with a shaft 4 and rotates on ball bearings 5 and 6.
  • the shaft is rotated by an electric motor 7.
  • the calorific power dissipated by the pump is evacuated by a circulation of water 8.
  • the gas sucked in 1 is compressed, from the top of the figure downwards, by the helical groove 9 of decreasing section, then continues its compression from the bottom to the top of the figure in another groove 10 of section decreasing.
  • the discharge takes place downwards through a pipe 11.
  • the pump is provided with means for maintaining, at a temperature above the condensation temperature of the aspirated gas, the part of the stator in contact with the gas.
  • a heating collar 12 in contact with the stator on at least one part situated in line with the suction grooves.
  • the rest of the pump is kept at low temperature by the circulation of water.
  • This element introduces a thermal barrier between the two parts of the stator and prevents the immediate dissipation by the circulation of water of the calories provided by the heating element.
  • the thermal impedance element is for example a ring or washer made of stainless steel, or ceramic or synthetic material.
  • the thermal impedance element 13 will make it possible to maintain, between the two parts of the stator, a temperature difference ⁇ ⁇ equal to P / c, if P denotes the power of the heating element 12 and c the conductance of the element 13.
  • a thermal impedance element having a conductance of 1 watt / ° C associated with a 40 watt heating element, will make it possible to obtain a temperature difference close to 40 degrees C.
  • the nature, shape and material of the thermal impedance will be adjusted according to the desired temperature difference, taking into account the nature of the gas to be pumped and the power of the heating element.
  • the invention applies to all molecular or turbomolecular type pumps, in particular in their applications in the chemical industry and in the semiconductor industry.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Electrophonic Musical Instruments (AREA)

Abstract

A molecular or turbomolecular type of pump comprising a stator (2) and a rotor (3) rotated by a motor (7), the stator having a first zone overlying the rotor and in which gas is admitted, and a second zone adjacent to the drive motor and cooled by a flow of fluid (8), the pump being characterized in that the first zone is provided with heater (12) for maintaining the temperature of the first zone above the condensation threshold of the gas being admitted, with the first and second zones being separated from each other by a thermal impedance element (13).

Description

La présente invention concerne une pompe à vide, du type moléculaire ou turbomoléculaire.The present invention relates to a vacuum pump, of the molecular or turbomolecular type.

Actuellement, les pompes moléculaires et turbomoléculaires, ne doivent pas aspirer certains gaz, car ceux-ci peuvent se condenser sur les parois à basse température, et à cause de la compression exercée par la pompe. Ces condensats liquides ou solides peuvent provoquer la détérioration, l'obstruction et le grippage de la pompe. La cause de cette condensation est que les pompes actuelles sont refroidies pour éliminer la puissance thermique dissipée par le moteur électrique d'entraînement, et la puissance thermique développée par la compression du gaz. En conséquence la température des parois internes de la pompe est voisine de la température ambiante, et favorise la condensation.Currently, molecular and turbomolecular pumps must not suck up certain gases, because these can condense on the walls at low temperature, and because of the compression exerted by the pump. This liquid or solid condensate can cause deterioration, blockage and seizure of the pump. The cause of this condensation is that current pumps are cooled to eliminate the thermal power dissipated by the electric drive motor, and the thermal power developed by the compression of the gas. Consequently, the temperature of the internal walls of the pump is close to ambient temperature, and promotes condensation.

Ainsi, la première addition n° 81 075 au brevet français 1 304 689 décrit une pompe turbomoléculaire à axe vertical comportant un circuit de lubrification comportant un réservoir situé au-dessous de la pompe et dans lequel le lubrifiant s'accumule par gravité, une pompe auxiliaire assurant l'aspiration et l'envoi de l'huile vers les organes à lubrifier. Le réservoir est entouré à sa partie supérieure d'une chemise parcourue par une circulation d'eau de refroidissement afin d'éviter que des vapeurs d'huile ne remontent vers le vide poussé. Ainsi, la partie supérieure de la pompe, au niveau des disques de pompage, est relativement froide, malgré que le carter de pompage comporte une résistance de chauffage pour assurer l'étuvage et par suite le dégazage des parois de la pompe. D'ailleurs, ce chauffage n'est effectué qu'à l'arrêt de la pompe ou à une vitesse réduite.Thus, the first addition No. 81,075 to French patent 1,304,689 describes a vertical axis turbomolecular pump comprising a lubrication circuit comprising a reservoir located below the pump and in which the lubricant accumulates by gravity, a pump auxiliary ensuring the suction and sending of oil to the organs to be lubricated. The tank is surrounded at its upper part by a jacket traversed by a circulation of cooling water in order to prevent oil vapors from rising towards the high vacuum. Thus, the upper part of the pump, at the level of the pumping discs, is relatively cold, despite the fact that the pumping casing includes a heating resistor to ensure the steaming and consequently the degassing of the walls of the pump. Moreover, this heating is only carried out when the pump is stopped or at a reduced speed.

Un but de la présente invention est de réaliser une pompe à vide munie de moyens pour éliminer tout risque de condensation.An object of the present invention is to provide a vacuum pump provided with means for eliminating any risk of condensation.

La présente invention a pour objet une pompe du type moléculaire ou turbomoléculaire comprenant un stator et un rotor entraîné en rotation par un moteur, le stator comprenant une première zone, située au droit du rotor où s'effectue l'aspiration des gaz et une seconde zone, au voisinage du moteur d'entraînement, refroidie par une circulation de fluide, ladite première zone étant munie d'un moyen de chauffage, caractérisée en ce que la première et la seconde zones sont séparées par un élément d'impédance thermique, ledit moyen de chauffage maintenant la température de ladite première zone au-dessus du seuil de condensation du gaz aspiré.The subject of the present invention is a pump of the molecular or turbomolecular type comprising a stator and a rotor driven in rotation by a motor, the stator comprising a first zone, situated at the right of the rotor where the gas suction takes place and a second zone, in the vicinity of the drive motor, cooled by a circulation of fluid, said first zone being provided with a heating means, characterized in that the first and second zones are separated by a thermal impedance element, said heating means maintaining the temperature of said first zone above the condensation threshold of the aspirated gas.

Avantageusement, ledit moyen de chauffage est un collier chauffant enserrant au moins une partie de la première zone du stator.Advantageously, said heating means is a heating collar enclosing at least part of the first zone of the stator.

De préférence, ledit élément d'impédance thermique est un anneau ou rondelle réalisé dans un matériau choisi parmi l'acier inoxydable, la céramique ou une matière synthétique.Preferably, said thermal impedance element is a ring or washer made of a material chosen from stainless steel, ceramic or a synthetic material.

L'invention sera bien comprise par la description donnée ci-après d'une pompe à vide conforme à l'invention, qui n'est bien entendu qu'un exemple illustratif et nullement limitatif.The invention will be better understood from the description given below of a vacuum pump according to the invention, which is of course only an illustrative example and in no way limitative.

Dans le dessin, la figure unique est une vue schématique, partiellement coupée axialement, d'une pompe moléculaire conforme à l'invention.In the drawing, the single figure is a schematic view, partially cut axially, of a molecular pump according to the invention.

Dans la figure, la référence 1 désigne l'orifice d'aspiration de la pompe. Cette dernière comprend un stator 2 et un rotor 3. Ce dernier est solidaire d'un arbre 4 et tourne sur des roulements à billes 5 et 6. L'arbre est entraîné en rotation par un moteur électrique 7.In the figure, reference 1 designates the suction port of the pump. The latter comprises a stator 2 and a rotor 3. The latter is integral with a shaft 4 and rotates on ball bearings 5 and 6. The shaft is rotated by an electric motor 7.

La puissance calorifique dissipée par la pompe est évacuée par une circulation d'eau 8.The calorific power dissipated by the pump is evacuated by a circulation of water 8.

Le gaz aspiré en 1 est comprimé, du haut de la figure vers le bas, par la rainure hélicoïdale 9 de section décroissante, puis continue sa compression du bas vers le haut de la figure dans une autre rainure 10 de section décroissante. Le refoulement s'effectue vers le bas par une canalisation 11.The gas sucked in 1 is compressed, from the top of the figure downwards, by the helical groove 9 of decreasing section, then continues its compression from the bottom to the top of the figure in another groove 10 of section decreasing. The discharge takes place downwards through a pipe 11.

Conformément à l'invention, la pompe est munie de moyens pour maintenir, à une température supérieure à la température de condensation du gaz aspiré, la partie du stator en contact avec le gaz. Pour parvenir à ce résultat, on peut utiliser, comme le montre la figure, un collier chauffant 12 en contact avec le stator sur au moins une partie située au droit des rainures d'aspiration.According to the invention, the pump is provided with means for maintaining, at a temperature above the condensation temperature of the aspirated gas, the part of the stator in contact with the gas. To achieve this result, it is possible to use, as shown in the figure, a heating collar 12 in contact with the stator on at least one part situated in line with the suction grooves.

Le reste de la pompe est maintenu à température basse par la circulation d'eau.The rest of the pump is kept at low temperature by the circulation of water.

Par ailleurs, on dispose entre la partie du stator maintenue à basse température (côté moteur) et la partie du stator chauffée (côté rainures de compression), un élément 13 d'impédance thermique.Furthermore, there is between the part of the stator maintained at low temperature (motor side) and the heated part of the stator (compression groove side), an element 13 of thermal impedance.

Cet élément introduit une barrière thermique entre les deux parties du stator et empêche la dissipation immédiate par la circulation d'eau des calories apportées par l'élément chauffant.This element introduces a thermal barrier between the two parts of the stator and prevents the immediate dissipation by the circulation of water of the calories provided by the heating element.

L'élément d'impédance thermique est par exemple un anneau ou rondelle en acier inoxydable, ou en céramique ou en matière synthétique.The thermal impedance element is for example a ring or washer made of stainless steel, or ceramic or synthetic material.

L'élément d'impédance thermique 13 permettra à maintenir, entre les deux parties du stator, un écart de température Δ ϑ égal à P/c, si P désigne la puissance de l'élément chauffant 12 et c la conductance de l'élément 13.The thermal impedance element 13 will make it possible to maintain, between the two parts of the stator, a temperature difference Δ ϑ equal to P / c, if P denotes the power of the heating element 12 and c the conductance of the element 13.

A titre d'exemple, un élément d'impédance thermique, ayant une conductance de 1 watt/°C associé à un élément chauffant de 40 watts, permettra d'obtenir un écart de température voisin de 40 degrés C.For example, a thermal impedance element, having a conductance of 1 watt / ° C associated with a 40 watt heating element, will make it possible to obtain a temperature difference close to 40 degrees C.

On ajustera la nature, la forme et le matériau de l'impédance thermique en fonction de l'écart de température souhaité compte tenu de la nature du gaz à pomper et de la puissance de l'élément chauffant.The nature, shape and material of the thermal impedance will be adjusted according to the desired temperature difference, taking into account the nature of the gas to be pumped and the power of the heating element.

L'invention s'applique à toutes pompes de type moléculaire ou turbomoléculaire, en particulier dans leurs applications dans le domaine de l'industrie chimique et celle des semiconducteurs.The invention applies to all molecular or turbomolecular type pumps, in particular in their applications in the chemical industry and in the semiconductor industry.

Claims (3)

  1. A molecular or turbomolecular type of pump comprising a stator (2) and a rotor (3) rotated by a motor (7), the stator having a first zone overlying the rotor and in which gas is admitted, and a second zone adjacent to the drive motor and cooled by a flow of fluid (8), said first zone being provided with heater means (12), the pump being characterized in that the first and second zones are separated from each other by a thermal impedance element (13), said heater means (12) maintaining the temperature of said first zone above the condensation threshold of the gas being admitted.
  2. A pump according to claim 1, characterized in that said heater means is constituted by a heating collar (12) surrounding at least a portion of the first zone of the stator.
  3. A pump according to claim 1 or 2, characterized in that said thermal impedance element (13) is a ring or washer made of a material selected from: stainless steel; ceramics; and synthetic material.
EP89113558A 1988-07-27 1989-07-24 Vacuum pump Expired - Lifetime EP0352688B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR8810120 1988-07-27
FR8810120A FR2634829B1 (en) 1988-07-27 1988-07-27 VACUUM PUMP

Publications (2)

Publication Number Publication Date
EP0352688A1 EP0352688A1 (en) 1990-01-31
EP0352688B1 true EP0352688B1 (en) 1995-07-05

Family

ID=9368828

Family Applications (1)

Application Number Title Priority Date Filing Date
EP89113558A Expired - Lifetime EP0352688B1 (en) 1988-07-27 1989-07-24 Vacuum pump

Country Status (7)

Country Link
US (1) US4929151A (en)
EP (1) EP0352688B1 (en)
JP (1) JPH0772558B2 (en)
AT (1) ATE124757T1 (en)
DE (1) DE68923330T2 (en)
ES (1) ES2074063T3 (en)
FR (1) FR2634829B1 (en)

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Also Published As

Publication number Publication date
JPH0772558B2 (en) 1995-08-02
ES2074063T3 (en) 1995-09-01
ATE124757T1 (en) 1995-07-15
FR2634829A1 (en) 1990-02-02
JPH0270994A (en) 1990-03-09
DE68923330T2 (en) 1995-11-23
DE68923330D1 (en) 1995-08-10
US4929151A (en) 1990-05-29
FR2634829B1 (en) 1990-09-14
EP0352688A1 (en) 1990-01-31

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