EP0339306B1 - Lightsensitive composition with binders containing carboxyl groups - Google Patents

Lightsensitive composition with binders containing carboxyl groups Download PDF

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Publication number
EP0339306B1
EP0339306B1 EP89105856A EP89105856A EP0339306B1 EP 0339306 B1 EP0339306 B1 EP 0339306B1 EP 89105856 A EP89105856 A EP 89105856A EP 89105856 A EP89105856 A EP 89105856A EP 0339306 B1 EP0339306 B1 EP 0339306B1
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EP
European Patent Office
Prior art keywords
composition according
lightsensitive
lightsensitive composition
structural units
layer
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EP89105856A
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German (de)
French (fr)
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EP0339306A3 (en
EP0339306B2 (en
EP0339306A2 (en
Inventor
Manfred Dr. Sondergeld
Jonathan Dr. Goodin
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EIDP Inc
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EI Du Pont de Nemours and Co
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    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03CPHOTOSENSITIVE MATERIALS FOR PHOTOGRAPHIC PURPOSES; PHOTOGRAPHIC PROCESSES, e.g. CINE, X-RAY, COLOUR, STEREO-PHOTOGRAPHIC PROCESSES; AUXILIARY PROCESSES IN PHOTOGRAPHY
    • G03C1/00Photosensitive materials
    • G03C1/005Silver halide emulsions; Preparation thereof; Physical treatment thereof; Incorporation of additives therein
    • G03C1/04Silver halide emulsions; Preparation thereof; Physical treatment thereof; Incorporation of additives therein with macromolecular additives; with layer-forming substances
    • G03C1/053Polymers obtained by reactions involving only carbon-to-carbon unsaturated bonds, e.g. vinyl polymers
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/032Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
    • G03F7/033Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders the binders being polymers obtained by reactions only involving carbon-to-carbon unsaturated bonds, e.g. vinyl polymers
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S430/00Radiation imagery chemistry: process, composition, or product thereof
    • Y10S430/1053Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
    • Y10S430/1055Radiation sensitive composition or product or process of making
    • Y10S430/106Binder containing
    • Y10S430/107Polyamide or polyurethane

Definitions

  • the invention relates to a light-sensitive mixture with at least one addition-polymerizable, ethylenically unsaturated compound, a photoinitiator or a photoinitiator system and at least one polymeric binder which is a copolymer with in each case one or more different structural units A and B and at least one further structural unit containing carboxyl groups.
  • Photosensitive mixtures are widely used in image recording materials, in particular in the production of photoresists, solder mask and printing plates.
  • Photopolymerizable resist materials are e.g. is known from US Pat. Nos. 3,469,982 and 3,547,730, which describe a film resist with a sandwich structure in the form of a photopolymerizable layer between a cover layer and a temporary support.
  • This film resist can e.g. laminated to a copper backing, imagewise exposed, and developed to form a resist layer.
  • the resist layer produced in this way now allows selective etching, electroplating or soldering on the substrate. Particularly high demands are placed on photoresist films when they are used as a solder mask.
  • the developed, photopolymerized layer must withstand temperatures up to 300 ° C. According to the prior art, such solder mask can be produced by spraying, pouring or printing liquid mixtures on a substrate or by laminating a dry film onto a substrate.
  • the photoresist films described usually consist of a temporary or permanent support, a photopolymerizable layer which contains a polymeric binder, addition-polymerizable compounds and a photoinitiator, and a cover layer. After the imagewise exposure has taken place, optionally after lamination to a substrate, the cover layer can be removed and the photopolymerized layer developed. Some photopolymerizable mixtures can be developed with organic solvents, some with aqueous solutions.
  • the polymeric binders of such photopolymerizable image recording materials in particular those which can be developed in aqueous form, frequently contain acid functions, especially carboxyl functions.
  • these groups are disadvantageous in many further processing steps.
  • photoresists e.g. in the case of alkaline etching or gold plating, the resist is removed, in the case of solder mask, lack of moisture and insulation properties.
  • DE 33 29 443 discloses light-sensitive mixtures which contain binders with hydroxyl, alkoxy or acyloxy-substituted acid amide groups. Although a partial crosslinking of the binders can take place through a reaction of these oxygen-containing groups with hydroxyl or carboxy groups in the same or in a further binder, melamine compounds are also added to these photosensitive mixtures, especially when they are used in solder mask. However, these have the disadvantages already described.
  • the general property profile should not be negatively influenced. Good storage stability, large processing and application range and exact reproduction of even the finest picture elements should be provided.
  • a light-sensitive mixture with at least one addition-polymerizable, ethylenically unsaturated compound, a photoinitiator or a photoinitiator system and at least one polymeric binder which is a copolymer with in each case one or more different structural units A and B and at least one further one containing carboxyl groups Structural unit is.
  • the light-sensitive mixture according to the invention contains polymeric binders, the structure of which can be changed after exposure and development.
  • These binders include from structural units with adjacent carboxyl and amide groups which, after imagewise exposure and development of the photopolymerizable image recording materials, can be converted into the more hydrophobic imide groups by thermal post-treatment at 130 to 200 ° C.
  • thermal post-treatment at 130 to 200 ° C.
  • the photopolymerizable recording materials produced according to the invention include they have good storage stability at room temperature and are also stable at a laminator temperature of 120 ° C. This is all the more astonishing since the imide groups are formed by an insignificant increase in temperature during the subsequent thermal aftertreatment the thermal aftertreatment is not too long and the treatment time is not too long, since otherwise the entire photopolymerizable recording material becomes unusable.
  • EP 00 71 789 describes photopolymerizable resist layers which have improved adhesion to metallic substrate surfaces. This is achieved by introducing a certain percentage of amino functions. Since these can also be introduced, inter alia, by the reaction of binders containing maleic anhydride with aliphatic diamines, one also obtains neighboring carboxyl and amide functions, as required in the teaching according to the invention.
  • diamines are not suitable as reaction components in the sense of the idea according to the invention, since they cause discoloration of the copper before the thermal aftertreatment, moreover cannot be introduced into the binders containing dicarboxylic acid anhydrides in a controlled manner, since crosslinking can occur, and also lead to residues during development lead, due to the better liability they cause.
  • DD 219 305 describes an alkaline developable, photopolymerizable mixture which, among other things, serves as a binder.
  • a binder containing urea also causes discoloration of the copper.
  • these photopolymerizable mixtures are notable for good adhesion to polyester substrates.
  • binders containing urea adducts are not suitable for this.
  • resists produced with the light-sensitive mixture according to the invention have improved chemical and physical stability without the properties of the recording materials themselves being adversely affected.
  • the proportion of structural units A should be 5 to 95% by weight, preferably 10 to 90% by weight, and of structural units B should be 0 to 50% by weight, preferably 0 to 30% by weight.
  • the copolymers according to the invention can be obtained both by direct copolymerization of suitable monomers and by reaction of primary amines with copolymers which are formed by copolymerization of one or more ethylenically unsaturated dicarboxylic anhydrides with one or more comonomers.
  • Suitable ethylenically unsaturated dicarboxylic anhydrides for the purposes of the invention are, for example, maleic anhydride, itaconic anhydride and citraconic anhydride.
  • the proportion of the ethylenically unsaturated dicarboxylic anhydrides in the copolymers is 5 to 50% by weight, preferably 10 to 30% by weight.
  • Primary aliphatic or aromatic, optionally substituted, amines can be used as the amines according to the invention.
  • the following functional groups are suitable as substituents for this: hydroxyl, ester, halide, keto, ether and / or thioether groups.
  • Propylamine, butylamine, aminopropanol, 4-methoxyaniline, 4-aminophenol, decylamine and / or cyclohexylamine are preferably used.
  • Suitable comonomers which form the structural units A and B in the copolymer essential to the invention are unsaturated hydrocarbons, such as, for example, ethylene, propylene, substituted styrenes, butadiene and isoprene, and unsaturated carboxylic acids and their derivatives, such as (meth) acrylic acid, (meth) -Acrylic acid amides and (meth) acrylates.
  • Methyl methacrylate, methyl acrylate, acrylamide, ethyl are preferred acrylate, butyl acrylate, styrene, isoprene and butadiene are used.
  • the copolymers according to the invention should have molecular weights> 10,000, preferably from 30,000 to 80,000.
  • the proportion of the inventive copolymer containing adjacent carboxyl and amide groups in the total binder can be up to 100%.
  • the amount of the total binder is generally 20 to 90% by weight, based on the total constituents of the mixture.
  • binders can e.g. can be used in combination with the binder essential to the invention: polyacrylates, polymethacrylates, polystyrene polymers and copolymers, polyurethanes, polyesters, polyamides. Preferred are: copolymers of methyl methacrylate, (meth) acrylic acid or maleic acid semiesters with styrene and copolymers of methacrylic acid and alkyl methacrylates.
  • Suitable addition-polymerizable, ethylenically unsaturated compounds which can be used alone or in combination with other monomers include tert-butyl acrylate, ethylene glycol diacrylate, 2-hydroxypropyl methacrylate, triethylene glycol diacrylate, trimethylolpropane triacrylate and methacrylate, polyoxyethylated trimethylol-1,4-propanol-1,4-propanol-1,4-propanol-1,4-diol Dihydroxybenzene dimethacrylate, decamethylene glycol diacrylate, styrene, diallyl fumarate, lauryl acrylate, methacrylamide or xylylene-bis-acrylamide.
  • the total amount of monomers in the photosensitive mixture is 10 to 80% by weight based on the total components of the mixture.
  • photoinitiators or photoinitiator system in the light-sensitive mixture according to the invention, examples include: 9-phenylacridine, 9,10-dimethylbenz (a) phenazine, benzophenone / Michler's ketone, hexarylbisimidazole / mercaptobenzoxazole, benzil dimethyl ketal, Thioxanthones / amines.
  • the photoinitiators are generally used in an amount of 0.01 to 10% by weight.
  • the light-sensitive mixture and the image-recording materials produced therefrom can also contain further additives, e.g. Contain dyes, pigments, plasticizers, adhesion promoters, fillers and / or stabilizers.
  • further additives e.g. Contain dyes, pigments, plasticizers, adhesion promoters, fillers and / or stabilizers.
  • a mixture according to the invention is preferred in the form of a light-sensitive layer which is located on a support, i.e. in the form of an image recording material.
  • Suitable layer supports are, for example, paper, metallic supports, metal-coated supports, glass, ceramic supports or plastic films, e.g. made of polyethylene, polycarbonate, polyamide or polyester.
  • the light-sensitive mixture is applied to the layer support, for example, by spraying, dipping or pouring from a solution.
  • the layer thickness is usually 5 to 200 ⁇ m.
  • the light-sensitive mixture according to the invention is used for the production of resist materials, especially as layer transfer materials.
  • the light-sensitive mixture is applied to a temporary layer support, preferably a polyester film, and a removable plastic film is laminated on as a cover film.
  • the cover film is then removed to produce the resist image, and the light-sensitive layer is laminated onto a permanent support, usually a copper surface.
  • the material is then exposed and developed imagewise, and the temporary layer support can be removed before or after the exposure. Development takes place by washing out the unpolymerized image parts with suitable solutions, such as aqueous-alkaline solutions, organic solvents or mixtures or corresponding aqueous solutions, which may also contain surface-active substances.
  • the material is then subjected to a thermal aftertreatment. This can be done by heating the material in an electric oven, drying cabinet or using an IR lamp.
  • the temperature and the heating time depend on the composition of the resist materials used. In general, the materials are heated to 120 to 200 ° C for 10 to 60 minutes.
  • the resist layer produced in this way can then be further processed in the usual way, using the known electroplating, etching or soldering methods, without the resist being detached or underplating occurring.
  • the photopolymerized layer remaining on the support can easily be completely removed if necessary by treatment with a conventional decoating solution.
  • a conventional decoating solution e.g. strongly alkaline, aqueous solutions, which are usually used at elevated temperatures between 30 and 90 ° C in continuous machines or tanks or organic solvents such as e.g. Methylene chloride.
  • the invention has preferably been described in the above description in its application as a layer transfer material for photoresists, it is not restricted to this application. It can be used in all cases in which it is important to produce pictorial stencils or relief materials of particularly high chemical and physical resistance.
  • the following casting solution was prepared: The casting solution was applied to a 25 ⁇ m thick polyester film, so that a dry layer thickness of 42 g / m 2 was achieved.
  • the dry resist film produced under B) was laminated under standard conditions onto base material clad with 35 ⁇ m copper plating at 110 ° C. roller temperature at 2.0 m / min, exposed through a plating template at 50 mj / cm 2 and with 1% Na 2 CO 3 - Solution developed at 30 ° C in a continuous processor.
  • the clarification time was 25 seconds.
  • a plate developed in this way was treated in a commercially available MRC gold bath at a current of 1A / dm 2 without thermal treatment.
  • a peeling off of the resist and strong underplating were observed.
  • an electroplating application> 6 ⁇ m gold was achieved after 18 minutes without the resist being detached or underplating occurring.
  • the following casting solution was prepared: The dry resist film was produced as in Example 1 B.
  • the dry resist film was laminated, exposed and developed on a copper-clad base material as in Example 1C.
  • a plate developed in this way was treated without thermal treatment in the gold bath described in Example 1C. Detachment of the resist was observed after only 5 minutes (corresponding to ⁇ 2 ⁇ m gold application).
  • the following casting solution was prepared: The dry resist film was made as in Example 1B.
  • the dry resist film was processed as in Example 1C.
  • a plate developed in this way was treated without thermal treatment in the gold bath described in Example 1C. Detachment of the resist was observed after only 6 minutes (corresponding to ⁇ 2 ⁇ m gold application). After a thermal treatment of 10 minutes at 150 ° C.,> 6 ⁇ m gold was deposited after 18 minutes without the resist being detached or undergoing electroplating. Both plates could be stripped perfectly and cleanly in 3% KOH solution at 50 ° C:
  • Example 1 A dry resist film with an application weight of 42 g / m 2 was produced from this casting solution as in Example 1.
  • the dry resist film was laminated as in Example 1C, exposed to 50 mj / cm 2 and developed in 1% Na 2 CO 3 solution at 30 ° C.
  • the clarification time was 20 sec.
  • a plate developed in this way was subjected to the thermal treatment described in Example 1C Gold bath treated. Detachment of the resist was observed after only 6 minutes (corresponding to ⁇ 2 ⁇ m gold application). After a thermal treatment of 10 minutes at 150 ° C.,> 7 ⁇ m gold was deposited after 20 minutes without the resist being detached or underplating occurring.
  • the following casting solution was prepared: This solution was stirred for 1 hour. The following was then added: The casting solution was applied to a 25 ⁇ m thick polyester base with a dry layer thickness of 42 g / m 2 .
  • the dry resist film was laminated under normal conditions to base material clad with 35 ⁇ m copper at 110 ° C. roller temperature at 2.0 m / min, exposed to 60 mj / cm 2 through a galvanic template and developed in a commercial processor with 1,1,1-trichloroethane .
  • the dry resist film was processed as in Example 1C.
  • a plate developed in this way was treated without thermal treatment in the gold bath described in Example 1C. Detachment of the resist was observed after only 8 minutes (corresponding to ⁇ 3 ⁇ m gold application). After a thermal treatment of 10 minutes at 150 ° C.,> 8 ⁇ m gold was deposited after 22 minutes without the resist being detached or undergoing electroplating.
  • the casting solutions were applied to a 25 ⁇ m thick polyester film, so that a dry layer thickness of 50 ⁇ m was achieved.
  • the dry resist films A and B were laminated to a COMB conductor pattern according to IPC-SM 840A, which had previously been sprayed with tripropylene glycol diacrylate.
  • Both plates were exposed to 80 mj / cm 2 through the corresponding test template and developed with a 1% Na 2 CO 3 solution at 30 ° C.
  • both plates were each treated 1 at 150 ° C. and then exposed to 4 J / cm 2 .
  • the moisture and insulation properties were measured in accordance with the IPC Class III test conditions. The following resistances were measured:

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Description

Die Erfindung betrifft ein lichtempfindliches Gemisch, mit mindestens einer additionspolymerisierbaren, ethylenisch ungesättigten Verbindung, einem Photoinitiator oder einem Photoinitiatorsystem und mindestens einem polymeren Bindemittel, das ein Copolymer mit jeweils einer oder mehreren unterschiedlichen Struktureinheiten A und B und mindestens einer weiteren, carboxylgruppenhaltigen Struktureinheit ist. Lichtempfindliche Gemische finden vielfach Verwendung in Bildaufzeichnungsmaterialien, insbesondere bei der Herstellung von Photoresists, Lötstopmasken und Druckplatten.The invention relates to a light-sensitive mixture with at least one addition-polymerizable, ethylenically unsaturated compound, a photoinitiator or a photoinitiator system and at least one polymeric binder which is a copolymer with in each case one or more different structural units A and B and at least one further structural unit containing carboxyl groups. Photosensitive mixtures are widely used in image recording materials, in particular in the production of photoresists, solder mask and printing plates.

Photopolymerisierbare Resistmaterialien sind z.B. bekannt aus den US-Patentschriften US 3,469,982 und US 3,547,730, welche ein Filmresist mit einer Sandwichstruktur beschreiben in Form einer photopolymerisierbaren Schicht zwischen einer Deckschicht und einem temporären Träger. Dieser Filmresist kann z.B. auf eine Kupferunterlage laminiert, bildmäßig belichtet und entwickelt werden, wodurch eine Resistschicht gebildet wird.Photopolymerizable resist materials are e.g. is known from US Pat. Nos. 3,469,982 and 3,547,730, which describe a film resist with a sandwich structure in the form of a photopolymerizable layer between a cover layer and a temporary support. This film resist can e.g. laminated to a copper backing, imagewise exposed, and developed to form a resist layer.

Die so hergestellte Resistschicht erlaubt nun ein selektives Ätzen, Galvanisieren oder Löten auf dem Substrat. Besonders hohe Anforderungen werden an Photoresistfilme gestellt, wenn sie als Lötstopmaske benutzt werden. Die entwickelte, photopolymerisierte Schicht muß hierbei Temperaturen bis 300 ° C überstehen. Nach dem Stand der Technik können solche Lötstopmasken durch Spritzen, Gießen oder Drucken von flüssigen Gemischen auf ein Substrat oder auch durch Laminieren eines Trockenfilms auf ein Substrat hergestellt werden.The resist layer produced in this way now allows selective etching, electroplating or soldering on the substrate. Particularly high demands are placed on photoresist films when they are used as a solder mask. The developed, photopolymerized layer must withstand temperatures up to 300 ° C. According to the prior art, such solder mask can be produced by spraying, pouring or printing liquid mixtures on a substrate or by laminating a dry film onto a substrate.

Die beschriebenen Photoresistfilme bestehen üblicherweise aus einem temporären oder permanenten Träger, einer photopolymerisierbaren Schicht, die ein polymeres Bindemittel, additionspolymerisierbare Verbindungen und einen Photoinitiator enthält, und einer Deckschicht. Nachdem, ggf. nach dem Laminieren auf ein Substrat, die bildmäßige Belichtung erfolgt ist, kann die Deckschicht entfernt und die photopolymerisierte Schicht entwickelt werden. Manche photopolymerisierbaren Gemische sind mit organischen Lösungsmitteln entwickelbar, manche mit wäßrigen Lösungen.The photoresist films described usually consist of a temporary or permanent support, a photopolymerizable layer which contains a polymeric binder, addition-polymerizable compounds and a photoinitiator, and a cover layer. After the imagewise exposure has taken place, optionally after lamination to a substrate, the cover layer can be removed and the photopolymerized layer developed. Some photopolymerizable mixtures can be developed with organic solvents, some with aqueous solutions.

Häufig enthalten die polymeren Bindemittel solcher photopolymerisierbarer Bildaufzeichnungsmaterialien, insbesondere solcher, die wäßrig entwickelbar sind, Säurefunktionen, vor allem Carboxylfunktionen. Diese Gruppen sind jedoch in vielen weiteren Verarbeitungsschritten nachteilig. Im Falle von Photoresists beobachtet man z.B. beim alkalischen Ätzen oder Goldplating ein Ablösen der Resists, im Falle von Lötstopmasken mangelnde Feuchtigkeits- und Isolationseigenschaften.The polymeric binders of such photopolymerizable image recording materials, in particular those which can be developed in aqueous form, frequently contain acid functions, especially carboxyl functions. However, these groups are disadvantageous in many further processing steps. In the case of photoresists, e.g. in the case of alkaline etching or gold plating, the resist is removed, in the case of solder mask, lack of moisture and insulation properties.

Besonders vollständig wäßrig verarbeitbare Photopolymersysteme mit hohen Auswaschraten und u.U. schnellem Strippverhalten zeigen aufgrund ihrer hydrophilen Eigenschaften Schwächen in anderen Prozeßschritten, z.B. geringe Entwicklungsbreite, Strippen beim alkalischen Ätzen und beim Goldplating oder mangelnde Klimabeständigkeit.Particularly completely aqueous processable photopolymer systems with high washout rates and possibly Due to their hydrophilic properties, fast stripping behavior shows weaknesses in other process steps, e.g. small development latitude, stripping with alkaline etching and with gold plating or insufficient climate resistance.

Auf dem Gebiet der Photoresists ist die Modifizierung der Carboxylgruppen mit Melaminverbindungen zur Überwindung der genannten Nachteile bekannt (EP 01 15 354 und US 4,247,621). Durch den Zusatz der Melaminverbindungen kann aber die Lichtempfindlichkeit der photopolymerisierbaren Gemische verringert werden, so daß solche Gemische längere Belichtungszeiten erfordern. Weiterhin neigen manche dieser Verbindungen bei längerer Lagerung der photopolymerisierbaren Massen zur Kristallisation, was dann zur Unbrauchbarkeit der damit hergestellten Aufzeichnungsmaterialien führt.The modification of the carboxyl groups with melamine compounds to overcome the disadvantages mentioned is known in the field of photoresists (EP 01 15 354 and US 4,247,621). By adding the melamine compounds, however, the photosensitivity of the photopolymerizable mixtures can be reduced, so that such mixtures require longer exposure times. Furthermore, some of these compounds tend to crystallize when the photopolymerizable compositions are stored for a prolonged period, which then leads to the unusability of the recording materials produced therewith.

Aus der DE 33 29 443 sind lichtempfindliche Gemische bekannt, die Bindemittel mit hydroxy-, alkoxy-oder acyloxysubstituierten Säureamidgruppen enthalten. Obwohl durch eine Reaktion dieser sauerstoffhaltigen Gruppen mit Hydroxy- oder Carboxygruppen in demselben oder in einem weiteren Bindemittel eine teilweise Vernetzung der Bindemittel erfolgen kann, werden auch diesen lichtempfindlichen Gemischen, vor allem bei ihrer Verwendung in Lötstopmasken, Melaminverbindungen zugesetzt. Diese weisen aber die schon geschilderten Nachteile auf.DE 33 29 443 discloses light-sensitive mixtures which contain binders with hydroxyl, alkoxy or acyloxy-substituted acid amide groups. Although a partial crosslinking of the binders can take place through a reaction of these oxygen-containing groups with hydroxyl or carboxy groups in the same or in a further binder, melamine compounds are also added to these photosensitive mixtures, especially when they are used in solder mask. However, these have the disadvantages already described.

Aufgabe der vorliegenden Erfindung ist es daher, ein photopolymerisierbares Gemisch auf der Basis von Carboxylgruppen enthaltenden Bindemitteln zur Verfügung zu stellen, dessen Eigenschaften nach der Belichtung und Entwicklung durch eine thermische Nachbehandlung so verändert werden können, daß Resists mit verbesserten chemischen und physikalischen Eigenschaften, wie z.B. einer erhöhten Hydrolysestabilität und einer größeren mechanischen Beständigkeit gegenüber Ätzsystemen, beim Goldplating oder beim Löten, entstehen. Hierbei sollte das allgemeine Eigenschaftsprofil nicht negativ beeinflußt werden. So sollte eine gute Lagerstabilität, große Verarbeitungs-und Anwendungsbreite und eine exakte Wiedergabe auch feinster Bildelemente gegeben sein.It is therefore an object of the present invention to provide a photopolymerizable mixture based on binders containing carboxyl groups, the properties of which, after exposure and development, can be changed by a thermal aftertreatment in such a way that resists with improved chemical and physical properties, e.g. increased hydrolysis stability and greater mechanical resistance to etching systems, in gold plating or soldering. The general property profile should not be negatively influenced. Good storage stability, large processing and application range and exact reproduction of even the finest picture elements should be provided.

Diese Aufgabe wird gelöst durch ein lichtempfindliches Gemisch, mit mindestens einer additionspolymerisierbaren, ethylenisch ungesättigten Verbindung, einem Photoinitiator oder einem Photoinitiatorsystem und mindestens einem polymeren Bindemittel, das ein Copolymer mit jeweils einer oder mehreren unterschiedlichen Struktureinheiten A und B und mindestens einer weiteren, carboxylgruppenhaltigen Struktureinheit ist.This object is achieved by a light-sensitive mixture, with at least one addition-polymerizable, ethylenically unsaturated compound, a photoinitiator or a photoinitiator system and at least one polymeric binder which is a copolymer with in each case one or more different structural units A and B and at least one further one containing carboxyl groups Structural unit is.

Die Erfindung ist dadurch gekennzeichnet, daß

  • I) 5 bis 50 Gew.% des Copolymeren von einer oder mehreren unterschiedlichen, carboxylgruppenhaltigen Struktureinheiten C1 und/oder C2 gebildet werden,
  • II) der Anteil an einer oder mehreren unterschiedlichen Struktureinheiten A 5 bis 95 Gew.% beträgt,
  • 111) der Anteil an einer oder mehreren unterschiedlichen Struktureinheiten B 0 bis 50 Gew.% beträgt,
  • IV) A, B, C1 und C2 die Strukturen
    Figure imgb0001
    besitzen, worin
    • R1 für H, CH3, C2Hs, Phenyl und Alkylphenyl,
    • R2 für H, CH3, Phenyl, -COORg, -CONR10R11 und -CN,
    • R3, R4, R5 und R6 für H und Alkyl und
    • R7, R8, Rg, R10 und R11 für H, Alkyl und Aryl, welche mit Hydroxy-, Ester-, Halogenid-, Keto-, Ether-und/oder Thioethergruppen substituiert sein können, stehen.
The invention is characterized in that
  • I) 5 to 50% by weight of the copolymer are formed by one or more different structural units C1 and / or C2 containing carboxyl groups,
  • II) the proportion of one or more different structural units A is 5 to 95% by weight,
  • 111) the proportion of one or more different structural units B is 0 to 50% by weight,
  • IV) A, B, C1 and C2 the structures
    Figure imgb0001
    own what
    • R 1 is H, CH 3 , C 2 H s , phenyl and alkylphenyl,
    • R 2 for H, CH 3 , phenyl, -COORg, -CONR 10 R 11 and -CN,
    • R 3 , R 4 , R 5 and R 6 for H and alkyl and
    • R 7 , R 8 , Rg, R 10 and R 11 represent H, alkyl and aryl, which can be substituted by hydroxyl, ester, halide, keto, ether and / or thioether groups.

Das erfindungsgemäße, lichtempfindliche Gemisch enthält polymere Bindemittel, deren Struktur nach der Belichtung und Entwicklung verändert werden kann. Diese Bindemittel bestehen u.a. aus Struktureinheiten mit benachbarten Carboxyl- und Amidgruppen, die nach der bildmäßigen Belichtung und dem Entwikkeln der photopolymerisierbaren Bildaufzeichnungsmaterialien durch eine thermische Nachbehandlung bei 130 bis 200° C in die hydrophoberen Imidgruppen überführt werden können. So bleibt einerseits aufgrund der vor der thermischen Behandlung vorhandenen Carboxylgruppen eine gute Entwickelbarkeit gewährleistet, andererseits werden durch die Überführung dieser Gruppen in Imidgruppen mittels einer thermischen Nachbehandlung die nachteiligen Eigenschaften jener Carboxylgruppen eliminiert.The light-sensitive mixture according to the invention contains polymeric binders, the structure of which can be changed after exposure and development. These binders include from structural units with adjacent carboxyl and amide groups which, after imagewise exposure and development of the photopolymerizable image recording materials, can be converted into the more hydrophobic imide groups by thermal post-treatment at 130 to 200 ° C. On the one hand, good developability is ensured due to the carboxyl groups present before the thermal treatment, and on the other hand, the conversion of these groups into imide groups by means of a thermal aftertreatment eliminates the disadvantageous properties of those carboxyl groups.

Überraschend war, daß durch den Einsatz der genannten polymeren Bindemittel in dem erfindungsgemäßen Gemisch solche Resists erhalten werden können, die eine verbesserte chemische und physikalische Beständigkeit gegen Ätzlösungen, beim Goldplating und beim Löten aufweisen, ohne daß die Eigenschaften des Aufzeichnungsmaterials selbst beeinflußt werden. So weisen die erfindungsgemäß hergestellten photopolymerisierbaren Aufzeichnungsmaterialien u.a. eine gute Lagerstabilität bei Raumtemperatur auf und auch bei einer Laminatortemperatur von 120" C sind sie beständig. Dies ist um so erstaunlicher, als durch eine unwesentliche Temperaturerhöhung bei der späteren thermischen Nachbehandlung die Imidgruppen gebildet werden. Hierbei ist es außerdem erforderlich, daß die Temperatur bei der thermischen Nachbehandlung nicht zu hoch liegt und die Behandlungszeit nicht zu lang ist, da sonst das gesamte photopolymerisierbare Aufzeichnungsmaterial unbrauchbar wird.It was surprising that the use of the polymer binders mentioned in the mixture according to the invention can give those resists which have improved chemical and physical resistance to etching solutions, in gold plating and in soldering, without the properties of the recording material itself being influenced. For example, the photopolymerizable recording materials produced according to the invention include they have good storage stability at room temperature and are also stable at a laminator temperature of 120 ° C. This is all the more astonishing since the imide groups are formed by an insignificant increase in temperature during the subsequent thermal aftertreatment the thermal aftertreatment is not too long and the treatment time is not too long, since otherwise the entire photopolymerizable recording material becomes unusable.

Aus der DE 25 12 693 ist es zwar bekannt, als polymere Bindemittel Reaktionsprodukte von Styrol-Maleinsäureanhydrid-Copolymeren mit Dialkylaminen einzusetzen, so daß Copolymere mit benachbarten Carboxyl- und Amidfunktionen entstehen, da aber sekundäre Amine eingesetzt werden, erhält man so kein Bindemittel, dessen Eigenschaften nach der Belichtung und Entwicklung durch eine thermische Nachbehandlung geändert werden können. Desweiteren werden in der zitierten Schrift maximal 2/3 der Anhydridgruppen mit Amin umgesetzt, da sonst eine zu große Zahl von Carboxylgruppen eingeführt und so eine gute Haftbindung der lichtempfindlichen Schicht auf einem Metallsubstrat während der Wärmebeschichtung verhindert würde. Es war daher für den Fachmann nicht vorhersehbar, daß die erfindungsgemäßen Aufzeichnungsmaterialien, in denen keine Dicarbonsäureanhydridgruppen vorhanden sind, ohne Schwierigkeiten auf ein Substrat laminiert werden können.From DE 25 12 693 it is known to use reaction products of styrene-maleic anhydride copolymers with dialkylamines as polymeric binders, so that copolymers with adjacent carboxyl and amide functions are formed, but since secondary amines are used, no binder is obtained whose Properties after exposure and development can be changed by a thermal aftertreatment. Furthermore, a maximum of 2/3 of the anhydride groups are reacted with amine in the cited document, since otherwise an excessive number of carboxyl groups would be introduced and thus a good adhesive bond of the light-sensitive layer on a metal substrate would be prevented during the heat coating. It was therefore not foreseeable for the person skilled in the art that the recording materials according to the invention, in which no dicarboxylic acid anhydride groups are present, can be laminated onto a substrate without difficulty.

In der EP 00 71 789 werden photopolymerisierbare Resistschichten beschrieben, die eine verbesserte Haftung auf metallischen Substratoberflächen aufweisen. Dies wird erreicht durch die Einführung eines bestimmten Prozentsatzes an Aminofunktionen. Da diese u.a. auch durch die Umsetzung von Maleinsäureanhydrid enthaltenden Bindemitteln mit aliphatischen Diaminen eingeführt werden können, erhält man auch so benachbarte Carboxyl- und Amidfunktionen, wie es in der erfindungsgemäßen Lehre gefordert wird. Diamine sind aber als Reaktionskomponenten im Sinne der erfindungsgemäßen Idee nicht geeignet, da sie eine Verfärbung des Kupfers schon vor der thermischen Nachbehandlung hervorrufen, zudem nicht kontrolliert in die Dicarbonsäureanhydride enthaltenden Bindemittel eingeführt werden können, da Vernetzungen eintreten können, und außerdem zu Rückständen bei der Entwicklung führen, bedingt durch die bessere Haftung, die sie hervorrufen.EP 00 71 789 describes photopolymerizable resist layers which have improved adhesion to metallic substrate surfaces. This is achieved by introducing a certain percentage of amino functions. Since these can also be introduced, inter alia, by the reaction of binders containing maleic anhydride with aliphatic diamines, one also obtains neighboring carboxyl and amide functions, as required in the teaching according to the invention. However, diamines are not suitable as reaction components in the sense of the idea according to the invention, since they cause discoloration of the copper before the thermal aftertreatment, moreover cannot be introduced into the binders containing dicarboxylic acid anhydrides in a controlled manner, since crosslinking can occur, and also lead to residues during development lead, due to the better liability they cause.

In der DD 219 305 wird ein alkalisch entwickelbares, photopolymerisierbares Gemisch beschrieben, das als Bindemittel u.a. das Reaktionsprodukt von Ammoniak und einem Copolymeren, gebildet aus einem ungesättigten Kohlenwasserstoff, einem Maleinsäureanhydrid-Harnstoff-Addukt und Maleinsäureanhydrid, enthalten kann. Aber wie die zuvor erwähnten Diamine führt auch ein harnstoffhaltiges Bindemittel zu Verfärbungen des Kupfers. Zudem zeichnen sich, gemäß der genannten Patentschrift, diese photopolymerisierbaren Gemische durch eine gute Haftung auf Polyesterträgern aus. Da aber ein wesentliches Anwendungsgebiet des erfindungsgemäßen, lichtempfindlichen Gemischs die Herstellung von Schichtübertragungsmaterialien sein soll, sind Harnstoff-Addukte enthaltende Bindemittel hierfür nicht geeignet.DD 219 305 describes an alkaline developable, photopolymerizable mixture which, among other things, serves as a binder. may contain the reaction product of ammonia and a copolymer formed from an unsaturated hydrocarbon, a maleic anhydride-urea adduct and maleic anhydride. But like the diamines mentioned above, a binder containing urea also causes discoloration of the copper. In addition, according to the patent mentioned, these photopolymerizable mixtures are notable for good adhesion to polyester substrates. However, since an essential field of application of the light-sensitive mixture according to the invention is to be the production of layer transfer materials, binders containing urea adducts are not suitable for this.

Unter Berücksichtigung des Standes der Technik konnte der Fachmann somit nicht erwarten, daß mit dem erfindungsgemäßen, lichtempfindlichen Gemisch hergestellte Resists verbesserte chemische und physikalische Stabilität aufweisen, ohne daß die Eigenschaften der Aufzeichnungsmaterialien selbst nachteilig beeinflußt werden.Taking into account the prior art, the person skilled in the art could not therefore expect that resists produced with the light-sensitive mixture according to the invention have improved chemical and physical stability without the properties of the recording materials themselves being adversely affected.

Die erfindungswesentlichen Copolymere des Bindemittels sind aus jeweils einer oder mehreren unterschiedlichen Struktureinheiten A und B und 5 bis 50 Gew.%, bevorzugt 10 bis 30 Gew.%, einer oder mehrerer unterschiedlicher, carboxylgruppenhaltiger Struktureinheiten C1 und/oder C2 aufgebaut.

Figure imgb0002

  • R1 steht für H, CH3, C2Hs, Phenyl und Alkylphenyl, bevorzugt für H und CH3
  • R2 für H, CH3, Phenyl, -COORg, -CONR10R11 und -CN, bevorzugt für Phenyl, CO0R9 und CONR10R11
  • R3, R4, R5 und R6 für H und Alkyl und
  • R7, R8, Rg, R10 und R11 für H, Alkyl und Aryl, welche mit Hydroxy-, Ester-, Halogenid-, Keto-, Ether-und/oder Thioethergruppen substituiert sein können, bevorzugt für unsubstituierte und hydroxysubstituierte Alkyl- und Arylgruppen.
The copolymers of the binder essential to the invention are each composed of one or more different structural units A and B and 5 to 50% by weight, preferably 10 to 30% by weight, of one or more different structural units C1 and / or C2 containing carboxyl groups.
Figure imgb0002
  • R 1 represents H, CH 3 , C 2 Hs, phenyl and alkylphenyl, preferably H and CH 3
  • R 2 for H, CH 3 , phenyl, -COORg, -CONR 10 R 11 and -CN, preferably for phenyl, CO0R 9 and CONR 10 R 11
  • R 3 , R 4 , R 5 and R 6 for H and alkyl and
  • R 7 , R 8 , Rg, R10 and R11 for H, alkyl and aryl, which can be substituted with hydroxyl, ester, halide, keto, ether and / or thioether groups, preferably for unsubstituted and hydroxy-substituted alkyl and Aryl groups.

Der Anteil der Struktureinheiten A sollte 5 bis 95 Gew.%, bevorzugt 10 bis 90 Gew.%, betragen, und von den Struktureinheiten B sollten 0 bis 50 Gew.%, bevorzugt 0 bis 30 Gew.%, vorliegen.The proportion of structural units A should be 5 to 95% by weight, preferably 10 to 90% by weight, and of structural units B should be 0 to 50% by weight, preferably 0 to 30% by weight.

Die erfindungsgemäßen Copolymere können sowohl durch direkte Copolymerisation geeigneter Monomere als auch durch Umsetzung von primären Aminen mit Copolymeren, die durch Copolymerisation eines oder mehrerer ethylenisch ungesättigter Dicarbonsäureanhydride mit einem oder mehreren Comonomeren gebildet werden. Geeignete ethylenisch ungesättigte Dicarbonsäureanhydride im Sinne der Erfindung sind beispielsweise Maleinsäureanhydrid, Itaconsäureanhydrid und Citraconsäureanhydrid. Der Anteil der ethylenisch ungesättigten Dicarbonsäureanhydride in den Copolymeren beträgt 5 bis 50 Gew.%, bevorzugt 10 bis 30 Gew.%.The copolymers according to the invention can be obtained both by direct copolymerization of suitable monomers and by reaction of primary amines with copolymers which are formed by copolymerization of one or more ethylenically unsaturated dicarboxylic anhydrides with one or more comonomers. Suitable ethylenically unsaturated dicarboxylic anhydrides for the purposes of the invention are, for example, maleic anhydride, itaconic anhydride and citraconic anhydride. The proportion of the ethylenically unsaturated dicarboxylic anhydrides in the copolymers is 5 to 50% by weight, preferably 10 to 30% by weight.

Als erfindungsgemäße Amine können primäre aliphatische oder aromatische, ggf. substituierte, Amine verwendet werden. Als Substituenten kommen hierfür folgende funktionelle Gruppen in Frage: Hydroxy-, Ester-, Halogenid-, Keto-, Ether- und/oder Thioethergruppen. Bevorzugt werden Propylamin, Butylamin, Aminopropanol, 4-Methoxyanilin, 4-Aminophenol, Decylamin und/oder Cyclohexylamin verwendet.Primary aliphatic or aromatic, optionally substituted, amines can be used as the amines according to the invention. The following functional groups are suitable as substituents for this: hydroxyl, ester, halide, keto, ether and / or thioether groups. Propylamine, butylamine, aminopropanol, 4-methoxyaniline, 4-aminophenol, decylamine and / or cyclohexylamine are preferably used.

Als Comonomere, die die Struktureinheiten A und B in dem erfindungswesentlichen Copolymer bilden, eignen sich ungesättigte Kohlenwasserstoffe, wie z.B. Ethylen, Propylen, substituierte Styrole, Butadien und Isopren, und ungesättigte Carbonsäuren und ihre Derivate, wie z.B. (Meth)acrylsäure, (Meth)-acrylsäureamide und (Meth)acrylate. Bevorzugt werden Methylmethacrylat, Methylacrylat, Acrylamid, Ethylacrylat, Butylacrylat, Styrol, Isopren und Butadien eingesetzt. Die Copolymere gemäß der Erfindung sollten Molekulargewichte > 10 000, bevorzugt von 30 000 bis 80 000, aufweisen.Suitable comonomers which form the structural units A and B in the copolymer essential to the invention are unsaturated hydrocarbons, such as, for example, ethylene, propylene, substituted styrenes, butadiene and isoprene, and unsaturated carboxylic acids and their derivatives, such as (meth) acrylic acid, (meth) -Acrylic acid amides and (meth) acrylates. Methyl methacrylate, methyl acrylate, acrylamide, ethyl are preferred acrylate, butyl acrylate, styrene, isoprene and butadiene are used. The copolymers according to the invention should have molecular weights> 10,000, preferably from 30,000 to 80,000.

Der Anteil des erfindungswesentlichen, benachbarte Carboxyl- und Amidgruppen enthaltenden, Copolymeren am gesamten Bindemittel kann bis zu 100% betragen. Die Menge des gesamten Bindemittels beträgt im allgemeinen 20 bis 90 Gew.% bezogen auf die gesamten Bestandteile des Gemisches.The proportion of the inventive copolymer containing adjacent carboxyl and amide groups in the total binder can be up to 100%. The amount of the total binder is generally 20 to 90% by weight, based on the total constituents of the mixture.

Folgende Bindemittel können z.B. in Kombination mit dem erfindungswesentlichen Bindemittel eingesetzt werden: Polyacrylate, Polymethacrylate, Polystyrol-Polymere und -Copolymere, Polyurethane, Polyester, Polyamide. Bevorzugt werden: Copolymere von Methylmethacrylat, (Meth)acrylsäure oder Maleinsäurehalbester mit Styrol und Copolymere von Methacrylsäure und Alkylmethacrylate.The following binders can e.g. can be used in combination with the binder essential to the invention: polyacrylates, polymethacrylates, polystyrene polymers and copolymers, polyurethanes, polyesters, polyamides. Preferred are: copolymers of methyl methacrylate, (meth) acrylic acid or maleic acid semiesters with styrene and copolymers of methacrylic acid and alkyl methacrylates.

Geeignete additionspolymerisierbare, ethylenisch ungesättigte Verbindungen, die allein oder in Kombination mit anderen Monomeren verwendet werden können, umfassen tert.-Butylacrylat, Ethylenglykoldiacrylat, 2-Hydroxypropylmethacrylat, Triethylenglykoldiacrylat, Trimethylolpropantriacrylat und -methacrylat, polyoxyethyliertes Trimethylolpropantriacrylat, 1,4-Diisopropenylbenzol, 1,4-Dihydroxybenzoldimethacrylat, Decamethylenglykoldiacrylat, Styrol, Diallylfumarat, Laurylacrylat, Methacrylamid oder Xylylen-bis-acrylamid.Suitable addition-polymerizable, ethylenically unsaturated compounds which can be used alone or in combination with other monomers include tert-butyl acrylate, ethylene glycol diacrylate, 2-hydroxypropyl methacrylate, triethylene glycol diacrylate, trimethylolpropane triacrylate and methacrylate, polyoxyethylated trimethylol-1,4-propanol-1,4-propanol-1,4-propanol-1,4-diol Dihydroxybenzene dimethacrylate, decamethylene glycol diacrylate, styrene, diallyl fumarate, lauryl acrylate, methacrylamide or xylylene-bis-acrylamide.

Die Gesamtmenge an Monomeren in dem lichtempfindlichen Gemisch beträgt 10 bis 80 Gew.% bezogen auf die gesamten Bestandteile des Gemischs.The total amount of monomers in the photosensitive mixture is 10 to 80% by weight based on the total components of the mixture.

Als Photoinitiatoren oder Photoinitiatorsystem in dem erfindungsgemäßen lichtempfindlichen Gemisch können praktisch alle für diesen Zweck bekannten Verbindungen verwendet werden, als Beispiele seien genannt: 9-Phenylacridin, 9,10-Dimethylbenz(a)phenazin, Benzophenon/Michlers Keton, Hexarylbisimidazol/Mercaptobenzoxazol, Benzildimethylketal, Thioxanthone/Amine. Die Photoinitiatoren werden allgemein in einer Menge von 0,01 bis 10 Gew.% verwendet.Practically all compounds known for this purpose can be used as photoinitiators or photoinitiator system in the light-sensitive mixture according to the invention, examples include: 9-phenylacridine, 9,10-dimethylbenz (a) phenazine, benzophenone / Michler's ketone, hexarylbisimidazole / mercaptobenzoxazole, benzil dimethyl ketal, Thioxanthones / amines. The photoinitiators are generally used in an amount of 0.01 to 10% by weight.

Das lichtempfindliche Gemisch und die daraus hergestellten Bildaufzeichnungsmaterialien können noch weitere Zusätze wie z.B. Farbstoffe, Pigmente, Weichmacher, Haftvermittler, Füllstoffe und/oder Stabilisatoren enthalten.The light-sensitive mixture and the image-recording materials produced therefrom can also contain further additives, e.g. Contain dyes, pigments, plasticizers, adhesion promoters, fillers and / or stabilizers.

Bevorzugt wird ein Gemisch gemäß der Erfindung in Form einer lichtempfindlichen Schicht, die sich auf einem Schichtträger befindet, d.h. in Form eines Bildaufzeichnungsmaterials, verwendet. Geeignete Schichtträger sind beispielsweise Papier, metallische Träger, metallkaschierte Träger, Glas, keramische Träger oder Kunststoffolien, z.B. aus Polyethylen, Polycarbonat, Polyamid oder Polyester. Das Aufbringen des lichtempfindlichen Gemischs auf den Schichtträger erfolgt beispielsweise durch Sprühen, Tauchen oder Gießen aus einer Lösung. Die Schichtdicke beträgt gewöhnlich 5 bis 200 um.A mixture according to the invention is preferred in the form of a light-sensitive layer which is located on a support, i.e. in the form of an image recording material. Suitable layer supports are, for example, paper, metallic supports, metal-coated supports, glass, ceramic supports or plastic films, e.g. made of polyethylene, polycarbonate, polyamide or polyester. The light-sensitive mixture is applied to the layer support, for example, by spraying, dipping or pouring from a solution. The layer thickness is usually 5 to 200 µm.

Insbesonders wird das erfindungsgemäße, lichtempfindliche Gemisch zur Herstellung von Resistmaterialien, vor allem als Schichtübertragungsmaterialien, verwendet. Hierzu wird das lichtempfindliche Gemisch auf einen temporären Schichtträger, vorzugsweise eine Polyesterfolie, aufgebracht und als Deckfolie eine entfernbare Kunststoffolie auflaminiert. Zur Herstellung des Resistbildes wird dann die Deckfolie abgezogen, und die lichtempfindliche Schicht auf einen permanenten Träger, meist eine Kupferoberfläche, auflaminiert. Das Material wird dann bildmäßig belichtet und entwickelt, wobei der temporäre Schichtträger vor oder nach der Belichtung entfernt werden kann. Die Entwicklung erfolgt durch Auswaschen der nicht polymerisierten Bildteile mit geeigneten Lösungen, wie z.B. wäßrig-alkalische Lösungen, organische Lösungsmittel bzw. -gemische oder entsprechende wäßrige Lösungen, die ferner auch oberflächenaktive Substanzen enthalten können.In particular, the light-sensitive mixture according to the invention is used for the production of resist materials, especially as layer transfer materials. For this purpose, the light-sensitive mixture is applied to a temporary layer support, preferably a polyester film, and a removable plastic film is laminated on as a cover film. The cover film is then removed to produce the resist image, and the light-sensitive layer is laminated onto a permanent support, usually a copper surface. The material is then exposed and developed imagewise, and the temporary layer support can be removed before or after the exposure. Development takes place by washing out the unpolymerized image parts with suitable solutions, such as aqueous-alkaline solutions, organic solvents or mixtures or corresponding aqueous solutions, which may also contain surface-active substances.

Nach dem Entwicklungsvorgang wird das Material dann einer thermischen Nachbehandlung unterworfen. Diese kann durch Erhitzen des Materials in einem Elektroofen, Trockenschrank oder mittels einer IR-Lampe durchgeführt werden. Die Temperatur und die Heizdauer hängen von der Zusammensetzung der verwendeten Resistmaterialien ab. Im allgemeinen werden die Materialien 10 bis 60 Minuten auf 120 bis 200 ° C erhitzt.After the development process, the material is then subjected to a thermal aftertreatment. This can be done by heating the material in an electric oven, drying cabinet or using an IR lamp. The temperature and the heating time depend on the composition of the resist materials used. In general, the materials are heated to 120 to 200 ° C for 10 to 60 minutes.

Anschließend kann die so hergestellte Resistschicht in üblicher Weise, unter Benutzung der bekannten Galvanisier-, Ätz- oder Lötmethoden, weiterbehandelt werden, ohne daß der Resist abgelöst wird oder Untergalvanisieren auftritt. Die auf dem Träger verbliebene, photopolymerisierte Schicht kann ggf. durch Behandlung mit einer üblichen Entschichtungslösung leicht vollständig entfernt werden. Hierfür eignen sich z.B. stark alkalische, wäßrige Lösungen, die in der Regel bei erhöhter Temperatur zwischen 30 und 90 ° C in Durchlaufmaschinen oder Tanks angewendet werden oder organische Lösungsmittel wie z.B. Methylenchlorid.The resist layer produced in this way can then be further processed in the usual way, using the known electroplating, etching or soldering methods, without the resist being detached or underplating occurring. The photopolymerized layer remaining on the support can easily be completely removed if necessary by treatment with a conventional decoating solution. For this, e.g. strongly alkaline, aqueous solutions, which are usually used at elevated temperatures between 30 and 90 ° C in continuous machines or tanks or organic solvents such as e.g. Methylene chloride.

Obwohl die Erfindung in der vorstehenden Beschreibung bevorzugt in ihrer Anwendung als Schichtübertragungsmaterial für Photoresists beschrieben wurde, ist sie nicht auf diese Anwendung beschränkt. Sie ist in allen Fällen anwendbar, in denen es darauf ankommt, bildmäßige Schablonen bzw. Reliefmaterialien von besonders hoher chemischer und physikalischer Beständigkeit zu erzeugen.Although the invention has preferably been described in the above description in its application as a layer transfer material for photoresists, it is not restricted to this application. It can be used in all cases in which it is important to produce pictorial stencils or relief materials of particularly high chemical and physical resistance.

Die nachfolgenden Beispiele sollen die Erfindung erläutern.The following examples are intended to explain the invention.

Beispiel 1example 1 A) Herstellung des amid- und carboxylgruppenhaltigen CopolymerenA) Preparation of the copolymer containing amide and carboxyl groups

20 g eines Copolymeren aus Methylmethacrylat/Styrol/Maleinsäureanhydrid (SZ = 115 =̂ 20,43 mMol Maleinsäure/20 g Polymer) wurden in 100 ml Methylenchlorid bei Raumtemperatur gelöst. 1,3 g (=̂ 22,47 mMol) Propylamin in 100 ml Methylenchlorid wurden zu der Polymerlösung gegeben. Es trat Erwärmung auf 25° C ein. Nach 4stündigem Rühren bei Raumtemperatur wurde das Polymer durch Eingießen der Lösung in 1 I Petrolether (40-60 ° C) ausgefällt, abfiltriert und im Vakuum getrocknet. Das IR-Spektrum zeigte keine Carbonylschwingungen bei 1860 cm-1 und 1780 cm-1 mehr.20 g of a copolymer of methyl methacrylate / styrene / maleic anhydride (SZ = 115 = ̂ 20.43 mmol maleic acid / 20 g polymer) were dissolved in 100 ml methylene chloride at room temperature. 1.3 g (= ̂ 22.47 mmol) of propylamine in 100 ml of methylene chloride were added to the polymer solution. Warming to 25 ° C occurred. After stirring for 4 hours at room temperature, the polymer was precipitated by pouring the solution into 1 liter of petroleum ether (40-60 ° C.), filtered off and dried in vacuo. The IR spectrum no longer showed carbonyl vibrations at 1860 cm -1 and 1780 cm -1 .

B) Herstellung eines TrockenresistfilmsB) Production of a dry resist film

Es wurde folgende Gießlösung hergestellt:

Figure imgb0003
Die Gießlösung wurde auf eine 25 um dicke Polyesterfolie aufgebracht, so daß eine Trockenschichtdicke von 42 g/m2 erzielt wurde.The following casting solution was prepared:
Figure imgb0003
The casting solution was applied to a 25 μm thick polyester film, so that a dry layer thickness of 42 g / m 2 was achieved.

C) Verwendung des unter B) hergestellten TrockenresistfilmesC) Use of the dry resist film produced under B)

Der unter B) hergestellte Trockenresistfilm wurde unter üblichen Bedingungen auf mit 35 um Kupferauflage kaschiertes Basismaterial bei 110 C Walzentemperatur mit 2,0 m/min auflaminiert, durch eine Galvanovorlage mit 50 mj/cm2 belichtet und mit einer 1%igen Na2C03-Lösung bei 30 °C in einem Durchlaufprozessor entwickelt. Die Klärzeit betrug 25 sec. Eine so entwickelte Platte wurde ohne thermische Behandlung in einem handelsüblichen MRC-Goldbad bei einer Stromstärke von 1A/dm2 behandelt. Bereits nach 6 min, entsprechend einem Galvanoauftrag < 2 um Gold, wurde ein Ablösen des Resists und starkes Untergalvanisieren beobachtet. Wurde eine wie oben entwickelte Platte jedoch 5 min bei 150 ° C thermisch behandelt, so wurde nach 18 min ein Galvanoauftrag > 6 um Gold erreicht, ohne daß der Resist abgelöst wurde oder Untergalvanisieren auftrat.The dry resist film produced under B) was laminated under standard conditions onto base material clad with 35 μm copper plating at 110 ° C. roller temperature at 2.0 m / min, exposed through a plating template at 50 mj / cm 2 and with 1% Na 2 CO 3 - Solution developed at 30 ° C in a continuous processor. The clarification time was 25 seconds. A plate developed in this way was treated in a commercially available MRC gold bath at a current of 1A / dm 2 without thermal treatment. Already after 6 minutes, corresponding to an electroplating <2 μm gold, a peeling off of the resist and strong underplating were observed. However, if a plate developed as above was thermally treated at 150 ° C. for 5 minutes, then an electroplating application> 6 μm gold was achieved after 18 minutes without the resist being detached or underplating occurring.

Beide Platten konnten anschließend in 3%iger KOH bei 50 ° C einwandfrei und sauber entschichtet werden:

Figure imgb0004
Both plates could then be stripped perfectly and cleanly in 3% KOH at 50 ° C:
Figure imgb0004

Beispiel 2Example 2 A) Herstellung des PolymerenA) Preparation of the polymer

20 g (=̂ 20,43 mMol Maleinsäure) des Copolymeren aus Beispiel 1A wurden in 300 ml Methylenchlorid bei Raumtemperatur gelöst. 1,53 g (=̂ 20,4 mMol) 1-Amino-2-propanol wurden in 50 ml Methylenchlorid gelöst und unter Rühren zu der Polymerlösung getropft. Es trat Erwärmung auf 27° C ein. Nach 4stündiger Reaktionszeit wurde das Polymer durch Eingießen in 2,5 I Petrolether (40-60 C) ausgefällt, abfiltriert und im Vakuum getrocknet. Im IR-Spektrum wurden keine Carbonylschwingungen bei 1860 cm-1 und 1780 cm-1 mehr gefunden.20 g (= ̂ 20.43 mmol maleic acid) of the copolymer from Example 1A were dissolved in 300 ml of methylene chloride at room temperature. 1.53 g (= ̂ 20.4 mmol) of 1-amino-2-propanol were dissolved in 50 ml of methylene chloride and added dropwise to the polymer solution with stirring. Warming to 27 ° C occurred. After a reaction time of 4 hours, the polymer was precipitated by pouring it into 2.5 l of petroleum ether (40-60 ° C.), filtered off and dried in vacuo. No carbonyl vibrations at 1860 cm -1 and 1780 cm -1 were found in the IR spectrum.

B) Herstellung eines TrockenresistfilmsB) Production of a dry resist film

Es wurde folgende Gießlösung hergestellt:

Figure imgb0005
Die Herstellung des Trockenresistfilms erfolgte wie in Beispiel 1 B.The following casting solution was prepared:
Figure imgb0005
The dry resist film was produced as in Example 1 B.

C) Verwendung des unter B) hergestellten TrockenresistfilmesC) Use of the dry resist film produced under B)

Der Trockenresistfilm wurde wie in Beispiel 1 C auf ein mit Kupfer kaschiertes Basismaterial auflaminiert, belichtet und entwickelt. Eine so entwickelte Platte wurde ohne thermische Behandlung in dem in Beispiel 1 C beschriebenen Goldbad behandelt. Es wurde bereits nach 5 min( entsprechenden < 2 um Goldauftrag) ein Ablösen des Resists beobachtet.The dry resist film was laminated, exposed and developed on a copper-clad base material as in Example 1C. A plate developed in this way was treated without thermal treatment in the gold bath described in Example 1C. Detachment of the resist was observed after only 5 minutes (corresponding to <2 μm gold application).

Nach einer thermischen Behandlung von 10 min bei 150° C konnten dagegen nach 22 min > 8 um Gold abgeschieden werden, ohne daß der Resist abgelöst wurde oder Untergalvanisieren eintrat.On the other hand, after a thermal treatment of 10 minutes at 150 ° C.,> 8 μm gold could be deposited after 22 minutes without the resist being detached or underplating occurring.

Beide Platten konnten anschließend in 3%iger KOH bei 50 ° C einwandfrei und sauber entschichtet werden:Both plates could then be stripped perfectly and cleanly in 3% KOH at 50 ° C:

Figure imgb0006
Figure imgb0006

Beispiel 3Example 3 A) Herstellung des PolymerenA) Preparation of the polymer

100 g (=̂ 0,102 Mol Maleinsäure) des Copolymeren aus Beispiel 1A wurden in 500 ml Tetrahydrofuran bei Raumtemperatur gelöst. 12 g (=̂ 0,11 Mol) p-Aminophenol wurden in 100 ml Tetrahydrofuran gelöst und zu der Polymerlösung gegeben. Es wurde auf 40° C erwärmt und 4 h bei dieser Temperatur gerührt. Das Polymer wurde durch Eingießen der Lösung in 3 I Petrolether (40-60 ° C) ausgefällt, abfiltriert und im Vakuum getrocknet. Im IR-Spektrum wurden keine Carbonylschwingungen bei 1860 cm-1 und 1780 cm-1 mehr gefunden.100 g (= ̂ 0.102 mol of maleic acid) of the copolymer from Example 1A were dissolved in 500 ml of tetrahydrofuran at room temperature. 12 g (= ̂ 0.11 mol) of p-aminophenol were dissolved in 100 ml of tetrahydrofuran and added to the polymer solution. The mixture was heated to 40 ° C. and stirred at this temperature for 4 h. The polymer was precipitated by pouring the solution into 3 l of petroleum ether (40-60 ° C.), filtered off and dried in vacuo. No carbonyl vibrations at 1860 cm -1 and 1780 cm -1 were found in the IR spectrum.

B) Herstellung des TrockenresistfilmsB) Production of the dry resist film

Es wurde folgende Gießlösung hergestellt:

Figure imgb0007
Der Trockenresistfilm wurde wie in Beispiel 1 B hergestellt.The following casting solution was prepared:
Figure imgb0007
The dry resist film was made as in Example 1B.

C) Verbindungen des unter B) hergestellten TrockenresistfilmesC) Compounds of the dry resist film produced under B)

Der Trockenresistfilm wurde wie in Beispiel 1C verarbeitet. Eine so entwickelte Platte wurde ohne thermische Behandlung in dem in Beispiel 1 C beschriebenen Goldbad behandelt. Es wurde bereits nach 6 min (entsprechend < 2 um Goldauftrag) ein Ablösen des Resists beobachtet. Nach einer thermischen Behandlung von 10 min bei 150 ° C wurden nach 18 min > 6 um Gold abgeschieden, ohne daß der Resist abgelöst wurde oder Untergalvanisieren eintrat. Beide Platten konnten in 3%iger KOH-Lösung bei 50 ° C einwandfrei und sauber entschichtet werden:The dry resist film was processed as in Example 1C. A plate developed in this way was treated without thermal treatment in the gold bath described in Example 1C. Detachment of the resist was observed after only 6 minutes (corresponding to <2 μm gold application). After a thermal treatment of 10 minutes at 150 ° C.,> 6 μm gold was deposited after 18 minutes without the resist being detached or undergoing electroplating. Both plates could be stripped perfectly and cleanly in 3% KOH solution at 50 ° C:

Figure imgb0008
Figure imgb0008

Beispiel 4Example 4

Es wurde folgende Gießlösung hergestellt: InThe following casting solution was prepared: In

Figure imgb0009
Figure imgb0009

Es wurden 1,64 g iso-Propanolamin zugegeben und 1 h gerührt. Dieser Lösung wurde weiterhin zugesetzt:

Figure imgb0010
Aus dieser Gießlösung wurde wie in Beispiel 1 ein Trockenresistfilm mit 42 g/m2 Auftragsmasse hergestellt. Der Trockenresistfilm wurde wie in Beispiel 1C laminiert, mit 50 mj/cm2 belichtet und in 1%iger Na2C03-Lösung bei 30° C entwickelt. Die Klärzeit betrug 20 sec.1.64 g of isopropanolamine were added and the mixture was stirred for 1 hour. The following was further added to this solution:
Figure imgb0010
A dry resist film with an application weight of 42 g / m 2 was produced from this casting solution as in Example 1. The dry resist film was laminated as in Example 1C, exposed to 50 mj / cm 2 and developed in 1% Na 2 CO 3 solution at 30 ° C. The clarification time was 20 sec.

Eine so entwickelte Platte wurde ohne thermische Behandlung in dem in Beispiel 1C beschriebenen Goldbad behandelt. Es wurde bereits nach 6 min (entsprechend < 2 um Goldauftrag) ein Ablösen des Resists beobachtet. Nach einer thermischen Behandlung von 10 min bei 150° C wurden nach 20 min > 7 µm Gold abgeschieden, ohne daß der Resist abgelöst wurde oder Untergalvanisieren eintrat.A plate developed in this way was subjected to the thermal treatment described in Example 1C Gold bath treated. Detachment of the resist was observed after only 6 minutes (corresponding to <2 μm gold application). After a thermal treatment of 10 minutes at 150 ° C.,> 7 μm gold was deposited after 20 minutes without the resist being detached or underplating occurring.

Beide Platten konnten in 3%iger KOH-Lösung bei 55 ° C einwandfrei und sauber entschichtet werden:Both plates could be stripped perfectly and cleanly in 3% KOH solution at 55 ° C:

Figure imgb0011
Figure imgb0011

Beispiel 5Example 5

Es wurde folgende Gießlösung hergestellt:

Figure imgb0012
Diese Lösung wurde 1 h gerührt. Anschließend wurde weiter zugegeben:
Figure imgb0013
Die Gießlösung wurde auf eine 25 um dicke Polyesterunterlage mit einer Trockenschichtdicke von 42 g/m2 aufgebracht.The following casting solution was prepared:
Figure imgb0012
This solution was stirred for 1 hour. The following was then added:
Figure imgb0013
The casting solution was applied to a 25 μm thick polyester base with a dry layer thickness of 42 g / m 2 .

Der Trockenresistfilm wurde unter üblichen Bedingungen auf mit 35 um Kupfer kaschiertes Basismaterial bei 110 C Walzentemperatur mit 2,0 m/min auflaminiert, mit 60 mj/cm2 durch eine Galvanovorlage belichtet und in einem handelsüblichen Processor mit 1,1,1-Trichlorethan entwickelt.The dry resist film was laminated under normal conditions to base material clad with 35 μm copper at 110 ° C. roller temperature at 2.0 m / min, exposed to 60 mj / cm 2 through a galvanic template and developed in a commercial processor with 1,1,1-trichloroethane .

Der Trockenresistfilm wurde wie in Beispiel 1C verarbeitet. Eine so entwickelte Platte wurde ohne thermische Behandlung in dem in Beispiel 1 C beschriebenen Goldbad behandelt. Es wurde bereits nach 8 min (entsprechend < 3 um Goldauftrag) ein Ablösen des Resists beobachtet. Nach einer thermischen Behandlung von 10 min bei 150 ° C wurden nach 22 min > 8 um Gold abgeschieden, ohne daß der Resist abgelöst wurde oder Untergalvanisieren eintrat.The dry resist film was processed as in Example 1C. A plate developed in this way was treated without thermal treatment in the gold bath described in Example 1C. Detachment of the resist was observed after only 8 minutes (corresponding to <3 μm gold application). After a thermal treatment of 10 minutes at 150 ° C.,> 8 μm gold was deposited after 22 minutes without the resist being detached or undergoing electroplating.

Beide Platten konnten in Methylenchlorid/Methanol (95/5) einwandfrei und sauber entschichtet werden.Both plates could be stripped perfectly and cleanly in methylene chloride / methanol (95/5).

Beispiel 6Example 6

Es wurden folgende Gießlösungen hergestellt:

Figure imgb0014
The following casting solutions were produced:
Figure imgb0014

Die Gießlösungen wurden auf eine 25 um dicke Polyesterfolie aufgebracht, so daß eine Trockenschichtdicke von 50 um erreicht wurde.The casting solutions were applied to a 25 μm thick polyester film, so that a dry layer thickness of 50 μm was achieved.

Die Trockenresistfilme A und B wurden auf ein COMB-Leiterzugmuster entsprechend IPC-SM 840A auflaminiert, die zuvor mit Tripropylenglygoldiacrylat besprüht worden waren.The dry resist films A and B were laminated to a COMB conductor pattern according to IPC-SM 840A, which had previously been sprayed with tripropylene glycol diacrylate.

Beide Platten wurden mit jeweils 80 mj/cm2 durch die entsprechende Testvorlage belichtet und mit einer 1%igen Na2C03-Lösung bei 30 ° C entwickelt.Both plates were exposed to 80 mj / cm 2 through the corresponding test template and developed with a 1% Na 2 CO 3 solution at 30 ° C.

Beide Platten wurden nach der Entwicklung jeweils 1 bei 150° C behandelt und anschließend mit 4 J/cm2 belichtet. Die Messung der Feuchtigkeits- und Isolationseigenschaften wurde entsprechend den IPC Class III Testbedingungen durchgeführt. Es wurden folgende Widerstände gemessen:

Figure imgb0015
After development, both plates were each treated 1 at 150 ° C. and then exposed to 4 J / cm 2 . The moisture and insulation properties were measured in accordance with the IPC Class III test conditions. The following resistances were measured:
Figure imgb0015

Claims (10)

1. A lightsensitive composition comprising
a) at least one addition-polymerizable, ethylenically unsaturated compound,
b) a photoinitiator or a photoinitiator system and
c) at least one copolymeric binder containing one or more structural units A and B and at least one additional structural unit containing carboxyl groups,
characterized in that
I) 5 to 50 percent by weight of the copolymer is formed from one or more different structural units C1, C2 or combinations thereof containing carboxyl groups,
II) the proportion of one or more different structural units A is 5 to 95 percent by weight,
III) the proportion of one or more different structural units B is 0 to 50 percent by weight and
IV) A, B, C1 and C2 have the structures
Figure imgb0017
in which
R1 = H, CH3, C2Hs, phenyl and alkylphenyl
R2 = H, CH3, phenyl, -COOR9, -CONR10R11 and -CN,
R3, R4, Rs, and R6 = H and alkyl and
R7, R8, Rg, R10 and R11 = H, alkyl and aryl, which is unsubstituted or substituted with hydroxy, ester, halogen, keto, ether or thioether groups.
2. A lightsensitive composition according to claim 1 characterized in that the specified copolymer is present as the only binder.
3. A lightsensitive composition according to claim 1 or 2 characterized in that the specified copolymer is the reaction product of a copolymer formed from one or more ethylenically unsaturated dicarboxylic acid anhydrides and one or more ethylenically unsaturated compounds with primary amine.
4. A lightsensitive composition according to claim 3 characterized in that maleic acid anhydride, itaconic acid anhydride or citraconic acid anhydride is used as an ethylenically unsaturated dicarboxylic acid anhydride.
5. A lightsensitive composition according to claim 3 or 4 characterized in that unsubstituted or hydroxy substituted alkyl or aryl amine is used.
6. A lightsensitive composition according to claims 3 to 5 characterized in that styrene, isoprene, butadiene, (meth)acrylic acid, (meth)acrylamides or (meth)acrylates are used as comonomers.
7. A lightsensitive composition according to claims 1 to 6 characterized in that it is used in the form of a solid, transferable layer on a support of synthetic resin film and optionally one or more cover sheets are used.
8. A lightsensitive composition according to claims 1 to 7 characterized in that it is used in the form of a solid layer on a metallic support or a metal-clad support.
9. Use of the lightsensitive composition according to claims 1 to 8 in layer transfer materials for the production of photoresist layers and solder masks.
10. Use of the lightsensitive composition according to claims 1 to 8 in an image recording process comprising imagewise exposure of a layer consisting of a photopolymerizable composition according to the invention, following development by washing-off of the unexposed areas, and thermal posttreatment at 130 ° C to 200 C.
EP89105856A 1988-04-29 1989-04-04 Use of a lightsensitive composition with binders containing carboxyl groups in image recording Expired - Lifetime EP0339306B2 (en)

Applications Claiming Priority (2)

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DE3814567A DE3814567A1 (en) 1988-04-29 1988-04-29 PHOTOPOLYMERIZABLE COMPOSITIONS COMPRISING CARBOXYL GROUPS CONTAINING BINDER
DE3814567 1988-04-29

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EP0339306B2 (en) 1999-10-06
KR900016798A (en) 1990-11-14
JPH0297502A (en) 1990-04-10
DE3814567C2 (en) 1990-05-17
US4987054A (en) 1991-01-22
JPH0420923B2 (en) 1992-04-07
BR8901961A (en) 1989-12-05
DE3814567A1 (en) 1989-11-09
EP0339306A2 (en) 1989-11-02

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