EP0300319A2 - Piezoelectric driven resonance system for ultrasonic atomising of a fluid - Google Patents

Piezoelectric driven resonance system for ultrasonic atomising of a fluid Download PDF

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Publication number
EP0300319A2
EP0300319A2 EP88111066A EP88111066A EP0300319A2 EP 0300319 A2 EP0300319 A2 EP 0300319A2 EP 88111066 A EP88111066 A EP 88111066A EP 88111066 A EP88111066 A EP 88111066A EP 0300319 A2 EP0300319 A2 EP 0300319A2
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EP
European Patent Office
Prior art keywords
worktop
resonance system
base plate
plate
neck
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EP88111066A
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German (de)
French (fr)
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EP0300319B1 (en
EP0300319A3 (en
Inventor
Johannes Dr. Däges
Klaus Dipl.-Ing. Van Der Linden
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Siemens AG
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Siemens AG
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B17/00—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups
    • B05B17/04—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods
    • B05B17/06—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations
    • B05B17/0607—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers
    • B05B17/0623—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers coupled with a vibrating horn
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B3/00—Methods or apparatus specially adapted for transmitting mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B3/04—Methods or apparatus specially adapted for transmitting mechanical vibrations of infrasonic, sonic, or ultrasonic frequency involving focusing or reflecting

Definitions

  • the invention is in the field of devices for generating resonant vibrations in the ultrasonic frequency range. It can be used in the structural design of a piezoelectrically excitable, resonant system with which liquids are atomized.
  • a known device for liquid atomization consists of a rotationally symmetrical metal body with a piezoceramic vibrator coupled to the base of the metal body.
  • the metal body of this (executing a bending vibration) resonance system has three areas, namely a disk-shaped base plate, a vibrating plate referred to as a “work plate” and a web connecting the base plate and the work plate and lying in the axis of symmetry of the metal body.
  • the worktop is used to hold a liquid. Aerosols that can be generated with such a resonance system have droplet diameters that are largely non-respiratory. Such a resonance system is therefore not very suitable for the production of aerosols for inhalation purposes.
  • the invention is based on a resonance system with the features of the preamble of claim 1. It is based on the object of improving the resonance system in such a way that, with the smallest possible electrical excitation power, a droplet diameter of the aerosol of less than 15 micrometers can be achieved in order to further increase the aerosol's ability to move into the lungs.
  • the piezoceramic ultrasonic vibrator is a vibrator working in thickness resonance
  • the base plate of the metal body has a parabolic cover surface opposite the base surface
  • the worktop is plate-shaped or bowl-shaped
  • the center of the Worktop is located in or near the actual focal point of the parabolic cover surface or the focal point of the parabolic cover surface reflected through the neck on the base surface of the base plate.
  • the term “parabolic top surface” is understood to mean a surface that reflects the ultrasound waves that strike into a focal point. Approximately, this can also be a spherical surface or a surface adapted to a paraboloid from annular partial surfaces (truncated cone surfaces with different cone opening angles).
  • the ultrasonic waves fed into the metal body by the piezoceramic thickness transducer are on the parabolic top surface reflected from the base plate and focused through the neck into the area of the worktop. Since the ultrasonic waves hit the worktop at an angle of inclination, some of these sound waves are reflected in the direction of the edge of the worktop; another part runs as a surface wave in the direction of the edge. This ensures an even distribution of the liquid to be atomized on the worktop and thus uniform atomization over the entire atomization period. In addition, the liquid surface is close to the optimal atomization point during the entire atomization process.
  • aerosols are generated in which more than 50% of the atomizable volume is in droplets with a diameter of less than or equal to 15 ⁇ m and the most common droplet diameter is less than or equal to 5 ⁇ m.
  • compliance with a specific resonance frequency is ensured in such a resonance system within the framework of manageable manufacturing tolerances.
  • the metal body of the resonance system can be designed such that the base of the base plate is a circular ring, and that the base plate merges into a conical neck which penetrates the central opening of the circular ring beyond the base plate. This results in a relatively compact design of the resonance system.
  • the piezoceramic thickness transducer also has the shape of a circular ring in this case.
  • the worktop can be integrated directly into the neck, in that the neck is designed as a truncated cone with a plate-shaped or bowl-shaped depression at the tapering end.
  • the focal point of the ultrasonic waves can be placed in the hollow of the cone tip and thus directly in the liquid to be atomized.
  • the metal body can also be designed such that the conical neck at the tapered end merges into the plate or bowl-shaped worktop in the form of an extension. This enables the atomization of a larger amount of liquid.
  • a particularly advantageous embodiment of the metal body is that the disk-shaped base plate on the side of the parabolic cover surface near the axis of symmetry merges into the neck carrying the worktop.
  • the ultrasonic waves are reflected twice before they hit the worktop. Interference effects associated with this double reflection, bundle dislocations (DE-Z "Material Institute", 1965, page 281 ff.) And reentry of the ultrasound waves into the piezoceramic lead to parallel beam displacements, which improves the feeding of the ultrasound into the liquid to be atomized. This can be further taken into account by a special design of the worktop.
  • This configuration consists in the fact that the side part of the worktop forms a conical jacket, and that the transition area between the neck and the plate-shaped worktop and the inclination of the side part relative to the central part of the worktop is selected such that ultrasonic waves reflected on the worktop are directed into the side part and be reflected several times in the direction of the plate.
  • the dimensioning of the resonance system depends on the speed of sound in the metal body, which is preferably made of chromium-nickel steel, and on the desired frequency.
  • the frequency should be in the favorable transmission range of the piezoceramic thickness transducer. Since the continuous atomization of a liquid is preferably carried out using standing ultrasound waves, the ultrasound path in the metal body should be a multiple of half the wavelength, in particular 6-28 times.
  • the thickness of the disk-shaped base plate approximately twice as large as the ultrasonic wavelength and to dimension the diameter of the plate-shaped worktop with approximately three times this wavelength.
  • the diameter of the base surface of the disk-shaped base plate should be approximately ten times this wavelength.
  • the one-piece metal body 1 shown is - geometrically speaking - a ring part which is penetrated by a cone with a parabolically shaped underside 4, the ring part and the cone having the same axis of symmetry 10 and the same outside diameter.
  • the metal body 1 thus has a disk-shaped base plate 2 with a flat, annular base surface 3 running perpendicular to the axis of symmetry or rotation 10 and with an opposite symmetrical parabolic cover surface 4; it also has a conically tapering neck 5, which penetrates the annular base surface 3, that is, protrudes therefrom, and which is formed at the tapered end with a plate-shaped or bowl-shaped recess 6.
  • the recess 6 in the neck 5 also forms the worktop of the resonance system. It is intended to hold a liquid to be atomized.
  • the center of the depression 6 is located in or near the actual focal point F1 of the base area 4.
  • the ultrasound oscillator 7 which in the present case is ring-shaped, is coupled to the flat base area 3, which runs perpendicular to the axis of symmetry 10. It lies symmetrically to the axis of symmetry 10. It operates in what is known as a thickness resonance.
  • the resonance system is constructed on the basis of the exemplary embodiment according to FIG. 1.
  • a one-piece, rotationally symmetrical metal body 11 is provided, which consists of a disk-shaped base plate 12 with a flat, ring-shaped base surface 13, an opposite parabolic cover surface 14 and a conically tapering neck 15.
  • the neck 15 also protrudes from the base 13 here.
  • a plate-shaped overhanging part 16 is provided, which is molded onto the tapered end of the neck 15.
  • the plate-shaped worktop 16 has the shape of an extension and has a flat central part and a tapered side part (conical plate wall).
  • the resonance system is excited via an electrically loadable piezoceramic ring body 17, which is coupled to the metal body 11 (preferably made of chromium-nickel steel) on the base surface 13, e.g. is glued.
  • the common axis of symmetry is designated 20.
  • An ultrasound wave US excited by the piezoceramic ring body 17, which also works here as a thickness oscillator, is reflected on the parabolic cover surface 14 and focused in the vicinity of the center of the plate-shaped worktop 16 at the focal point F2.
  • the liquid on the worktop 16 is atomized as a result.
  • an oscillatable, rotationally symmetrical metal body 21 has a disk-shaped base plate 22, the base surface 23 of which is designed as a flat circular surface. Opposite it is a parabolic cover surface 24.
  • the base plate 22 merges on the side of its parabolic cover surface 24 in the region of the axis of symmetry 30 via a neck 25 into a plate-shaped worktop 26.
  • This plate 26 has a flat central part 28 and a tapered side part 29 (conical plate wall).
  • the entire resonance system is rotationally symmetrical with respect to the axis of symmetry 30.
  • a piezoceramic thickness transducer 27 is here cylindrical (with a circular coupling surface) and glued to the flat base surface 23 and thereby coupled.
  • An ultrasonic wave US1 excited by the thickness transducer 27 is reflected both at the parabolic cover surface 24 and at the interface 23 between the thickness transducer 27 and the base plate 22 and is focused towards the center of the plate-shaped work plate 26.
  • the focal point F3 of the ultrasonic waves US1 is a mirror image of the focal point of the parabolic surface 24, the base surface 23 forming the mirror surface.
  • the focussing point F3 of the ultrasound wave US1 and the atomization location lie here on the same side of the base area 23.
  • the transition area between the neck 25 and the plate-shaped worktop 26 and the inclination of the side part 29 against the central part 28 are chosen accordingly.
  • a circumferential, ring-shaped notch 33 - preferably on the underside of the plate wall 29 as shown on the left - in the vicinity of the plate edge shields the plate edge from the ultrasonic waves. As a result, it calms down the liquid on the worktop 26 in the edge region.
  • the diameter of the plate-shaped worktop 26 is approximately three times the ultrasonic wavelength in the metal body 21, the diameter of the neck 25 and the plate middle part is approximately one Wavelength, a height of Neck 25 of likewise approximately one wavelength, a thickness of the base plate 22 of twice the wavelength and a diameter of the base surface 23 of approximately ten times the wavelength have proven to be expedient.
  • the thickness of the piezoceramic thickness transducer 27 preferably corresponds to approximately half the wavelength of the excited ultrasound wave in the thickness transducer 27.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)
  • Special Spraying Apparatus (AREA)

Abstract

Zur Erzeugung lungengängiger Aerosole wird ein Resonanzsystem verwendet, das einen rotationssymmetrischen Metallkörper (21) mit einer scheibenförmigen Grundplatte (22), eine Arbeitsplatte (26) und einen die Grundplatte (22) mit der Arbeitsplatte (26) verbindenden Hals (25) sowie einen piezokeramischen Ultraschall-Dickenschwinger (27) umfaßt. Der Schwinger (27) ist an die ebene, senkrecht zur Symmetrieachse (30) des Metallkörpers (21) verlaufende Grundfläche (23) der Grundplatte (22) angekoppelt. Die gegenüberliegende Deckfläche (24) der Grundplatte (22) ist parabolisch ausgebildet. Der Mittelpunkt der Arbeitsplatte (26) liegt in der Nähe des - gegebenenfalls zur Grundfläche (23) der Grundplatte (22) gespiegelten - Brennpunktes (F3) der parabolischen Deckfläche (24). Durch diesen Aufbau werden die von dem Dickenschwinger (27) angeregten Ultraschallwellen (US1) in den Bereich der Arbeitsplatte (26) fokussiert, und die auf der Arbeitsplatte (26) befindliche Flüssigkeit wird in feine Partikel zerstäubt.A resonance system is used to generate respirable aerosols, which has a rotationally symmetrical metal body (21) with a disk-shaped base plate (22), a worktop (26) and a neck (25) connecting the base plate (22) with the worktop (26) and a piezoceramic one Ultrasonic thickness transducer (27) comprises. The oscillator (27) is coupled to the flat base surface (23) of the base plate (22), which runs perpendicular to the axis of symmetry (30) of the metal body (21). The opposite top surface (24) of the base plate (22) is parabolic. The center of the worktop (26) is in the vicinity of the focal point (F3) of the parabolic top surface (24), which is possibly mirrored to the base surface (23) of the base plate (22). With this construction, the ultrasonic waves (US1) excited by the thickness transducer (27) are focused in the area of the worktop (26) and the liquid on the worktop (26) is atomized into fine particles.

Description

Die Erfindung liegt auf dem Gebiet der Geräte zum Erzeugen von Resonanzschwingungen im Ultraschall-Frequenzbereich. Sie ist bei der konstruktiven Ausgestaltung eines piezoelektrisch anregbaren, resonanzfähigen Systems anwendbar, mit dem Flüssigkeiten zerstäubt werden.The invention is in the field of devices for generating resonant vibrations in the ultrasonic frequency range. It can be used in the structural design of a piezoelectrically excitable, resonant system with which liquids are atomized.

Ein bekanntes Gerät (DE-A1-20 32 433) zur Flüssigkeitszerstäu­bung besteht aus einem rotationssymmetrischen Metallkörper mit einem an die Grundfläche des Metallkörpers angekoppelten piezokeramischen Schwinger. Der Metallkörper dieses (eine Biegeschwingung ausführenden) Resonanzsystems weist dabei drei Bereiche auf, nämlich eine scheibenförmige Grundplatte, eine als "Arbeitsplatte" bezeichnete Schwingplatte und einen die Grundplatte und die Arbeitsplatte verbindenden, in der Symmetrieachse des Metallkörpers liegenden Steg. Die Arbeits­platte dient der Aufnahme einer Flüssigkeit. Mit einem derarti­gen Resonanzsystem erzeugbare Aerosole weisen Tröpfchendurch­messer auf, die zu einem großen Teil nicht lungengängig sind. Ein solches Resonanzsystem ist daher für die Erzeugung von Aerosolen für Inhalationszwecke wenig geeignet.A known device (DE-A1-20 32 433) for liquid atomization consists of a rotationally symmetrical metal body with a piezoceramic vibrator coupled to the base of the metal body. The metal body of this (executing a bending vibration) resonance system has three areas, namely a disk-shaped base plate, a vibrating plate referred to as a “work plate” and a web connecting the base plate and the work plate and lying in the axis of symmetry of the metal body. The worktop is used to hold a liquid. Aerosols that can be generated with such a resonance system have droplet diameters that are largely non-respiratory. Such a resonance system is therefore not very suitable for the production of aerosols for inhalation purposes.

Zur Verbesserung des bekannten Flüssigkeitszerstäubers ist bereits vorgeschlagen worden (EU-A-0 246 515 = VPA 86 P 3180 E, Veröffentlichungstag 25.11.1987), bei kegelig ausgebildeter Grundplatte die Arbeitsplatte als Hohlspiegel auszubilden und über einen speziell dimensionierten Hals mit der kegeligen Grundplatte zu verbinden. Dadurch lassen sich bei Anregung in Dickenresonanz sehr kleine Flüssigkeitsvolumina (kleiner oder gleich 15 Mikroliter) ohne ein mechanisches Tröpfchenfilter bei geringer elektrischer Anregungsleistung sowie ohne Ankopplung über ein Flüssigkeitsmedium in Tröpfchen mit einem Durchmesser von kleiner oder gleich 40 Mikrometer zerstäuben. Die Schwing­frequenz dieses Resonanzsystems liegt dabei im Megahertz-Bereich.To improve the known liquid atomizer, it has already been proposed (EU-A-0 246 515 = VPA 86 P 3180 E, publication date November 25, 1987) to design the worktop as a concave mirror in the case of a conical base plate and to connect it to the conical base plate via a specially dimensioned neck connect. This allows very small liquid volumes (less than or equal to 15 microliters) when excited in thickness resonance without a mechanical droplet filter with low electrical excitation power and without coupling Atomize over a liquid medium into droplets with a diameter of less than or equal to 40 micrometers. The oscillation frequency of this resonance system is in the megahertz range.

Die Erfindung geht von einem Resonanzsystem mit den Merkmalen des Oberbegriffes des Patentanspruches 1 aus. Ihr liegt die Aufgabe zugrunde, das Resonanzsystem derart zu verbessern, daß bei möglichst kleiner elektrischer Anregungsleistung ein Tröpfchendurchmesser des Aerosols von kleiner als 15 Mikrometer erzielt werden kann, um die Lungengängigkeit des Aerosols weiter zu steigern.The invention is based on a resonance system with the features of the preamble of claim 1. It is based on the object of improving the resonance system in such a way that, with the smallest possible electrical excitation power, a droplet diameter of the aerosol of less than 15 micrometers can be achieved in order to further increase the aerosol's ability to move into the lungs.

Zur Lösung dieser Aufgabe ist gemäß der Erfindung vorgesehen, daß der piezokeramische Ultraschall-Schwinger ein in Dicken­resonanz arbeitender Schwinger ist, daß die Grundplatte des Metallkörpers eine der Grundfläche gegenüberliegende parabolische Deckfläche aufweist, daß die Arbeitsplatte tellerförmig oder schalenförmig ausgebildet ist, und daß der Mittelpunkt der Arbeitsplatte im oder in der Nähe des eigent­lichen Brennpunktes der parabolischen Deckfläche oder des an der Grundfläche der Grundplatte durch den Hals hindurch gespie­gelten Brennpunktes der parabolischen Deckfläche liegt.To achieve this object, it is provided according to the invention that the piezoceramic ultrasonic vibrator is a vibrator working in thickness resonance, that the base plate of the metal body has a parabolic cover surface opposite the base surface, that the worktop is plate-shaped or bowl-shaped, and that the center of the Worktop is located in or near the actual focal point of the parabolic cover surface or the focal point of the parabolic cover surface reflected through the neck on the base surface of the base plate.

Unter dem Begriff "parabolische Deckfläche" wird im Rahmen der Erfindung eine Fläche verstanden, die die auftreffenden Ultraschallwellen in einen Brennpunkt reflektiert. Näherungsweise kann es sich hierbei auch um eine Kugelfläche oder um eine einem Paraboloid angepaßte Fläche aus ringförmigen Teilflächen (Kegelstumpfoberflächen mit verschiedenen Kegel­öffnungswinkeln) handeln.In the context of the invention, the term “parabolic top surface” is understood to mean a surface that reflects the ultrasound waves that strike into a focal point. Approximately, this can also be a spherical surface or a surface adapted to a paraboloid from annular partial surfaces (truncated cone surfaces with different cone opening angles).

Bei einem derart ausgestalteten Resonanzsystem werden die von dem piezokeramischen Dickenschwinger in den Metallkörper eingespeisten Ultraschallwellen an der parabolischen Deckfläche der Grundplatte reflektiert und durch den Hals hindurch in den Bereich der Arbeitsplatte fokussiert. Da die Ultraschallwellen unter einem Neigungswinkel auf die Arbeitsplatte treffen, wird ein Teil dieser Schallwellen in Richtung des Randes der Arbeitsplatte reflektiert; ein weiterer Teil läuft als Ober­flächenwelle in Richtung des Randes. Dadurch wird eine gleichmäßige Verteilung der zu zerstäubenden Flüssigkeit auf der Arbeitsplatte und damit eine gleichmäßige Zerstäubung über den gesamten Zerstäubungszeitraum erreicht. Außerdem befindet sich die Flüssigkeitsoberfläche während des gesamten Zer­stäubungsvorganges in der Nähe des optimalen Zerstäubungs­punktes. Demzufolge werden bei einer Anregungsleistung kleiner/gleich 20 W Aerosole erzeugt, bei denen mehr als 50 % des zerstäubbaren Volumens in Tröpfchen mit einem Durchmesser kleiner/gleich 15 µm vorliegt und der häufigste Tröpfchen­durchmesser kleiner/gleich 5 µm ist. Im übrigen ist bei einem derartigen Resonanzssystem im Rahmen gut beherrschbarer Her­stellungstoleranzen die Einhaltung einer bestimmten Resonanz­frequenz gewährleistet.In a resonance system designed in this way, the ultrasonic waves fed into the metal body by the piezoceramic thickness transducer are on the parabolic top surface reflected from the base plate and focused through the neck into the area of the worktop. Since the ultrasonic waves hit the worktop at an angle of inclination, some of these sound waves are reflected in the direction of the edge of the worktop; another part runs as a surface wave in the direction of the edge. This ensures an even distribution of the liquid to be atomized on the worktop and thus uniform atomization over the entire atomization period. In addition, the liquid surface is close to the optimal atomization point during the entire atomization process. Accordingly, with an excitation power of less than or equal to 20 W aerosols are generated in which more than 50% of the atomizable volume is in droplets with a diameter of less than or equal to 15 μm and the most common droplet diameter is less than or equal to 5 μm. In addition, compliance with a specific resonance frequency is ensured in such a resonance system within the framework of manageable manufacturing tolerances.

In Weiterbildung der Erfindung kann der Metallkörper des Resonanzsystems so ausgebildet sein, daß die Grundfläche der Grundplatte ein Kreisring ist, und daß die Grundplatte in einen kegelförmigen Hals übergeht, der die zentrale Öffnung des Kreisringes über die Grundplatte hinaus durchdringt. Dadurch erhält man eine relativ kompakte Ausgestaltung des Resonanz­systems. Der piezokeramische Dickenschwinger hat in diesem Fall ebenfalls die Form eines Kreisringes.In a further development of the invention, the metal body of the resonance system can be designed such that the base of the base plate is a circular ring, and that the base plate merges into a conical neck which penetrates the central opening of the circular ring beyond the base plate. This results in a relatively compact design of the resonance system. The piezoceramic thickness transducer also has the shape of a circular ring in this case.

Bei dieser Ausgestaltung kann die Arbeitsplatte direkt in den Hals integriert sein, indem der Hals als Kegelstumpf mit einer teller- oder schalenförmigen Vertiefung am spitz zulaufenden Ende ausgebildet ist. Bei dieser Ausführungsform kann der Fokussierungspunkt der Ultraschallwellen in die Aushöhlung der Kegelspitze und damit direkt in die zu zerstäubende Flüssigkeit gelegt werden.In this embodiment, the worktop can be integrated directly into the neck, in that the neck is designed as a truncated cone with a plate-shaped or bowl-shaped depression at the tapering end. In this embodiment, the focal point of the ultrasonic waves can be placed in the hollow of the cone tip and thus directly in the liquid to be atomized.

Man kann den Metallkörper aber auch so ausbilden, daß der kegelförmige Hals am spitz zulaufenden Ende in Form einer Erweiterung in die teller- oder schalenförmig gestaltete Arbeitsplatte übergeht. Dadurch ist die Zerstäubung einer größeren Flüssigkeitsmenge ermöglicht.However, the metal body can also be designed such that the conical neck at the tapered end merges into the plate or bowl-shaped worktop in the form of an extension. This enables the atomization of a larger amount of liquid.

Eine besonders vorteilhafte Ausgestaltung des Metallkörpers besteht darin, daß die scheibenförmige Grundplatte auf der Seite der parabolischen Deckfläche in der Nähe der Symme­trieachse in den die Arbeitsplatte tragenden Hals übergeht. Bei dieser Ausführungsform werden die Ultraschallwellen zweimal reflektiert, bevor sie auf die Arbeitsplatte treffen. Mit dieser zweifachen Reflexion verbundene Interferenzeffekte, Bündelversetzungen (DE-Z "Materialprüfung", 1965, Seite 281 ff.) und Wiedereintritt der Ultraschallwellen in die Piezokeramik führen dabei zu parallelen Strahlverschiebungen, wodurch die Einspeisung des Ultraschalls in die zu zerstäubende Flüssigkeit verbessert wird. Dem kann durch eine spezielle Ausgestaltung der Arbeitsplatte weiter Rechnung getragen werden. Diese Ausgestaltung besteht darin, daß das Seitenteil der Arbeitsplatte einen Kegelmantel bildet, und daß der Über­gangsbereich zwischen dem Hals und der tellerförmigen Arbeits­platte sowie die Neigung des Seitenteils gegenüber dem Mittel­teil der Arbeitsplatte so gewählt ist, daß an der Arbeitsplatte reflektierte Ultraschallwellen in das Seitenteil gelenkt und dort in Richtung des Tellerrandes mehrfach reflektiert werden.A particularly advantageous embodiment of the metal body is that the disk-shaped base plate on the side of the parabolic cover surface near the axis of symmetry merges into the neck carrying the worktop. In this embodiment, the ultrasonic waves are reflected twice before they hit the worktop. Interference effects associated with this double reflection, bundle dislocations (DE-Z "Materialprüfung", 1965, page 281 ff.) And reentry of the ultrasound waves into the piezoceramic lead to parallel beam displacements, which improves the feeding of the ultrasound into the liquid to be atomized. This can be further taken into account by a special design of the worktop. This configuration consists in the fact that the side part of the worktop forms a conical jacket, and that the transition area between the neck and the plate-shaped worktop and the inclination of the side part relative to the central part of the worktop is selected such that ultrasonic waves reflected on the worktop are directed into the side part and be reflected several times in the direction of the plate.

Die Dimensionierung des Resonanzsystems ist abhängig von der Schallgeschwindigkeit in dem Metallkörper, der vorzugsweise aus Chrom-Nickel-Stahl besteht, und von der gewünschten Frequenz. Die Frequenz sollte im günstigen Übertragungsbereich des piezokeramischen Dickenschwingers liegen. Da die kontinuier­liche Zerstäubung einer Flüssigkeit bevorzugt mit stehenden Ultraschallwellen erfolgt, sollte die Ultraschallaufstrecke in dem Metallkörper ein Vielfaches der halben Wellenlänge betragen, insbesondere das 6 - 28fache.The dimensioning of the resonance system depends on the speed of sound in the metal body, which is preferably made of chromium-nickel steel, and on the desired frequency. The frequency should be in the favorable transmission range of the piezoceramic thickness transducer. Since the continuous atomization of a liquid is preferably carried out using standing ultrasound waves, the ultrasound path in the metal body should be a multiple of half the wavelength, in particular 6-28 times.

Im Hinblick auf die Ausführung mit zweifacher Reflexion der Ultraschallwellen hat es sich als zweckmäßig erwiesen, die Dicke der scheibenförmigen Grundplatte etwa doppelt so groß wie die Ultraschallwellenlänge zu wählen und den Durchmesser der tellerförmigen Arbeitsplatte mit etwa dem Dreifachen dieser Wellenlänge zu bemessen. Der Durchmesser der Grundfläche der scheibenförmigen Grundplatte sollte etwa das Zehnfache dieser Wellenlänge betragen. Dabei sollte die Halshöhe, d. h. der Abstand zwischen dem Scheitelpunkt der parabolischen Deckfläche und dem Mittelpunkt der tellerförmigen Arbeitsplatte, zweckmäßigerweise gleich der einfachen Wellenlänge sein.With regard to the design with double reflection of the ultrasonic waves, it has proven to be expedient to choose the thickness of the disk-shaped base plate approximately twice as large as the ultrasonic wavelength and to dimension the diameter of the plate-shaped worktop with approximately three times this wavelength. The diameter of the base surface of the disk-shaped base plate should be approximately ten times this wavelength. The neck height, i.e. H. the distance between the vertex of the parabolic cover surface and the center of the plate-shaped worktop, expediently be equal to the simple wavelength.

Drei Ausführungsbeispiele des neuen Resonanzsystems sind in den Figuren 1 bis 3 dargestellt. Dabei zeigt

  • Fig. 1 ein Resonanzsystem, bei dem im Betrieb einfache Reflexion der Ultraschallwellen vorliegt und eine Arbeitsplatte in den Hals integriert ist,
  • Fig. 2 ein Resonanzsystem, bei dem einfache Reflexion vorliegt und eine Arbeitsplatte als tellerförmiges Teil an den Hals angeformt ist, und
  • Fig. 3 eine Ausführungsform, bei dem die Ultraschallwellen zwei­fach reflektiert werden, bevor sie auf eine an den Hals anschließende tellerförmige Arbeitsplatte treffen.
Three exemplary embodiments of the new resonance system are shown in FIGS. 1 to 3. It shows
  • 1 shows a resonance system in which there is a simple reflection of the ultrasonic waves during operation and a worktop is integrated in the neck,
  • Fig. 2 shows a resonance system in which there is simple reflection and a worktop is formed as a plate-shaped part on the neck, and
  • Fig. 3 shows an embodiment in which the ultrasonic waves are reflected twice before they hit a plate-shaped worktop adjoining the neck.

Fig. 1 zeigt ein Schwing- oder Resonanzsystem, das aus einem zu einer Symmetrie- oder Rotationsachse 10 symmetrischen, schwin­gungsfähigen Metallkörper 1 insbesondere aus Chrom-Nickel-Stahl und einem piezokeramischen Dickenschwinger 7 für Ultraschall besteht. Bei dem dargestellten einstückigen Metallkörper 1 handelt es sich - geometrisch gesehen - um ein Ringteil, das von einem Kegel mit einer parabolisch geformten Unterseite 4 durchdrungen ist, wobei das Ringteil und der Kegel dieselbe Symmetrieachse 10 und denselben Außendurchmesser aufweisen.1 shows an oscillation or resonance system which consists of an oscillatable metal body 1 which is symmetrical about an axis of symmetry or rotation 10, in particular made of chromium-nickel steel and a piezoceramic thickness transducer 7 for ultrasound. The one-piece metal body 1 shown is - geometrically speaking - a ring part which is penetrated by a cone with a parabolically shaped underside 4, the ring part and the cone having the same axis of symmetry 10 and the same outside diameter.

Der Metallkörper 1 besitzt somit eine scheibenförmige Grund­platte 2 mit einer ebenen, senkrecht zur Symmetrie- oder Rotationsachse 10 verlaufenden ringförmigen Grundfläche 3 und mit einer gegenüberliegenden symmetrischen parabolischen Deckfläche 4; er besitzt weiter einen kegelförmig zulaufenden Hals 5, der die ringförmige Grundfläche 3 durchdringt, also aus dieser herausragt, und der am spitz zulaufenden Ende mit einer tellerförmigen oder schalenförmigen Vertiefung 6 ausgebildet ist. Die Vertiefung 6 bildet im Hals 5 zugleich die Arbeitsplatte des Resonanzsystems. Sie ist zur Aufnahme einer zu zerstäubenden Flüssigkeit vorgesehen. Der Mittelpunkt der Vertiefung 6 liegt im oder in der Nähe des eigentlichen Brennpunktes F1 der Grund­fläche 4. Der vorliegend ringförmig ausgebildete Ultraschall-­Schwinger 7 ist an die ebene, senkrecht zur Symmetrieachse 10 verlaufende Grundfläche 3 angekoppelt. Er liegt symmetrisch zur Symmetrieachse 10. Er arbeitet beim Betrieb in sogenannnter Dickenresonanz.The metal body 1 thus has a disk-shaped base plate 2 with a flat, annular base surface 3 running perpendicular to the axis of symmetry or rotation 10 and with an opposite symmetrical parabolic cover surface 4; it also has a conically tapering neck 5, which penetrates the annular base surface 3, that is, protrudes therefrom, and which is formed at the tapered end with a plate-shaped or bowl-shaped recess 6. The recess 6 in the neck 5 also forms the worktop of the resonance system. It is intended to hold a liquid to be atomized. The center of the depression 6 is located in or near the actual focal point F1 of the base area 4. The ultrasound oscillator 7, which in the present case is ring-shaped, is coupled to the flat base area 3, which runs perpendicular to the axis of symmetry 10. It lies symmetrically to the axis of symmetry 10. It operates in what is known as a thickness resonance.

Eine nach elektrischer Beaufschlagung vom piezokeramischen Dickenschwinger 7 angeregte Ultraschallwelle US wird in den Metallkölrper 1 übertragen, dort an der parabolischen Deck­fläche 4 reflektiert und damit in Richtung auf die schalen­förmige Vertiefung 6 fokussiert. Hier im Brennpunkt F1, also praktisch im Bereich der gesamten Vertiefung 6, führt die Ultraschallwelle US zur Zerstäubung der Flüssigkeit in feine Partikel.An ultrasonic wave US excited by the electrical impingement of the piezoceramic thickness transducer 7 is transmitted into the metal body 1, where it is reflected on the parabolic cover surface 4 and thus focused in the direction of the bowl-shaped depression 6. Here at the focal point F1, ie practically in the area of the entire recess 6, the ultrasonic wave US leads to atomization of the liquid into fine particles.

Bei dem Ausführungsbeispiel gemäß Fig. 2 ist das Resonanzsystem in Anlehnung an das Ausführungsbeispiel gemäß Fig. 1 aufgebaut. Hier ist ein einstückiger rotationssymmetrischer Metallkörper 11 vorgesehen, der aus einer scheibenförmigen Grundplatte 12 mit einer ebenen, ringförmigen Grundfläche 13, einer gegen­überliegenden parabolischen Deckfläche 14 und einem kegelförmig sich verjüngenden Hals 15 besteht. Der Hals 15 ragt auch hier wieder aus der Grundfläche 13 heraus. Als Arbeitsplatte ist hier ein tellerförmiges überkragendes Teil 16 vorgesehen, das an das spitz zulaufende Ende des Halses 15 angeformt ist. Die tellerförmige Arbeitsplatte 16 hat die Form einer Erweiterung und besitzt einen ebenen Mittelteil und ein kegelig verlaufendes Seitenteil (kegelige Tellerwand).In the exemplary embodiment according to FIG. 2, the resonance system is constructed on the basis of the exemplary embodiment according to FIG. 1. Here, a one-piece, rotationally symmetrical metal body 11 is provided, which consists of a disk-shaped base plate 12 with a flat, ring-shaped base surface 13, an opposite parabolic cover surface 14 and a conically tapering neck 15. The neck 15 also protrudes from the base 13 here. As a countertop here a plate-shaped overhanging part 16 is provided, which is molded onto the tapered end of the neck 15. The plate-shaped worktop 16 has the shape of an extension and has a flat central part and a tapered side part (conical plate wall).

Die Anregung des Resonanzsystems erfolgt über einen elektrisch beaufschlagbaren piezokeramischen Ringkörper 17, der mit dem Metallkörper 11 (bevorzugt aus Chrom-Nickel-Stahl) an der Grundfläche 13 gekoppelt, z.B. verklebt ist. Die gemeinsame Symmetrieachse ist mit 20 bezeichnet. Eine von dem piezokera­mischen Ringkörper 17, der auch hier als Dickenschwinger arbeitet, angeregte Ultraschallwelle US wird an der paraboli­schen Deckfläche 14 reflektiert und in die Nähe des Mittel­punktes der tellerförmigen Arbeitsplatte 16 im Brennpunkt F2 fokussiert. Die auf der Arbeitsplatte 16 befindliche Flüssig­keit wird dadurch zerstäubt.The resonance system is excited via an electrically loadable piezoceramic ring body 17, which is coupled to the metal body 11 (preferably made of chromium-nickel steel) on the base surface 13, e.g. is glued. The common axis of symmetry is designated 20. An ultrasound wave US excited by the piezoceramic ring body 17, which also works here as a thickness oscillator, is reflected on the parabolic cover surface 14 and focused in the vicinity of the center of the plate-shaped worktop 16 at the focal point F2. The liquid on the worktop 16 is atomized as a result.

Bei dem Ausführungsbeispiel gemäß Fig. 3 besitzt ein schwin­gungsfähiger, rotationssymmetrischer Metallkörper 21 eine scheibenförmige Grundplatte 22, deren Grundfläche 23 als ebene Kreisfläche ausgebildet ist. Ihr gegenüber liegt eine parabolische Deckfläche 24. Die Grundplatte 22 geht auf der Seite ihrer parabolischen Deckfläche 24 im Bereich der Symmetrie­achse 30 über einen Hals 25 in eine tellerförmige Arbeitsplatte 26 über. Diese Platte 26 weist ein ebenes Mittelteil 28 und ein kegelig verlaufendes Seitenteil 29 (kegelige Tellerwand) auf. Das gesamte Resonanzsystem ist rotationssymmetrisch zur Symmetrieachse 30. Ein piezokeramischer Dickenschwinger 27 ist hier zylindrisch (mit kreisförmiger Koppelfläche) gestaltet sowie mit der ebenen Grundfläche 23 verklebt und dadurch ge­koppelt. Eine von dem Dickenschwinger 27 angeregte Ultraschall­welle US1 wird sowohl an der parabolischen Deckfläche 24 als auch an der Grenzfläche 23 zwischen dem Dickenschwinger 27 und der Grundplatte 22 reflektiert und zum Mittelpunkt der teller­förmigen Arbeitsplatte 26 hin fokussiert. Bei diesem Ausführungs­ beispiel liegt der Fokussierungspunkt F3 der Ultraschallwellen US1 also spiegelbildlich zum Brennpunkt der parabolischen Fläche 24, wobei die Grundfläche 23 die Spiegelfläche bildet. Mit anderen Worten: Der Fokussierungspunkt F3 der Ultraschall­welle US1 und der Zerstäubungsort liegen hier auf derselben Seite der Grundfläche 23.In the exemplary embodiment according to FIG. 3, an oscillatable, rotationally symmetrical metal body 21 has a disk-shaped base plate 22, the base surface 23 of which is designed as a flat circular surface. Opposite it is a parabolic cover surface 24. The base plate 22 merges on the side of its parabolic cover surface 24 in the region of the axis of symmetry 30 via a neck 25 into a plate-shaped worktop 26. This plate 26 has a flat central part 28 and a tapered side part 29 (conical plate wall). The entire resonance system is rotationally symmetrical with respect to the axis of symmetry 30. A piezoceramic thickness transducer 27 is here cylindrical (with a circular coupling surface) and glued to the flat base surface 23 and thereby coupled. An ultrasonic wave US1 excited by the thickness transducer 27 is reflected both at the parabolic cover surface 24 and at the interface 23 between the thickness transducer 27 and the base plate 22 and is focused towards the center of the plate-shaped work plate 26. In this execution For example, the focal point F3 of the ultrasonic waves US1 is a mirror image of the focal point of the parabolic surface 24, the base surface 23 forming the mirror surface. In other words, the focussing point F3 of the ultrasound wave US1 and the atomization location lie here on the same side of the base area 23.

Bei der Reflexion der Ultraschallwellen an der Grenzfläche Dickenschwinger 27/Grundplatte 22 treten Interferenzerscheinun­gen, aber auch Bündelversetzungen auf, die zu Parallelver­schiebungen der Ultraschallwellen führen, beispielsweis zu der Ultraschallwelle US2. Infolge des Neigungswinkels zwischen den auftreffenden Ultraschallwellen und der tellerförmigen Arbeitsplatte 26 dringt ein erster Teil der jeweiligen Ultra­schallwelle in die auf die Arbeitsfläche 26 aufgebrachte Flüssigkeit ein; ein zweiter Teil läuft als Oberflächenwelle in Richtung auf den Tellerrand 31; ein dritter Teil wird an der Grenzfläche reflektiert. Von dem reflektierten dritten Teil gelangt ein Teil in die Tellerwand 29 und durch weitere Reflexionen in der Tellerwand 29 zum Tellerrand 31, was rechts im Seitenteil 29 gestrichelt angedeutet ist. Der Übergangs­bereich zwischen dem Hals 25 und der tellerförmigen Arbeits­platte 26 sowie die Neigung des Seitenteils 29 gegen das Mittelteil 28 sind entsprechend gewählt. Eine umlaufende, ringförmige Einkerbung 33 - vorzugsweise auf der Unterseite der Tellerwand 29 wie links eingezeichnet - in der Nähe des Teller­randes schirmt den Tellerrand vor den Ultraschallwellen ab. Sie bewirkt dadurch eine Beruhigung der auf der Arbeitsplatte 26 befindlichen Flüssigkeit im Randbereich.When the ultrasonic waves are reflected at the interface between the thickness transducer 27 and the base plate 22, interference phenomena, but also bundle dislocations occur, which lead to parallel displacements of the ultrasonic waves, for example to the ultrasonic wave US2. As a result of the angle of inclination between the incident ultrasonic waves and the plate-shaped worktop 26, a first part of the respective ultrasonic wave penetrates into the liquid applied to the working surface 26; a second part runs as a surface wave in the direction of the plate rim 31; a third part is reflected at the interface. A part of the reflected third part reaches the plate wall 29 and by further reflections in the plate wall 29 to the plate edge 31, which is indicated by dashed lines in the right side part 29. The transition area between the neck 25 and the plate-shaped worktop 26 and the inclination of the side part 29 against the central part 28 are chosen accordingly. A circumferential, ring-shaped notch 33 - preferably on the underside of the plate wall 29 as shown on the left - in the vicinity of the plate edge shields the plate edge from the ultrasonic waves. As a result, it calms down the liquid on the worktop 26 in the edge region.

Bei Wahl einer zur Zerstäubung positionierten Flüssigkeitsmenge von ca. 15 Mikrolitern hat sich bei dem Ausführungsbeispiel gemäß Figur 3 ein Durchmesser der tellerförmigen Arbeitsplatte 26 von ca. dem Dreifachen der Ultraschallwellenlänge in dem Metallkörper 21, ein Durchmesser des Halses 25 und des Tellermittelteils von ca. einer Wellenlänge, eine Höhe des Halses 25 von ebenfalls ca. einer Wellenlänge, eine Dicke der Grundplatte 22 von dem Doppelten der Wellenlänge und ein Durchmesser der Grundfläche 23 von etwa dem Zehnfachen der Wellenlänge als zweckmäßig erwiesen. Die Dicke des piezo­keramischen Dickenschwingers 27 entspricht bevorzugt etwa der halben Wellenlänge der angeregten Ultraschallwelle in dem Dickenschwinger 27.In the embodiment according to FIG. 3, when a quantity of liquid of approximately 15 microliters is positioned for atomization, the diameter of the plate-shaped worktop 26 is approximately three times the ultrasonic wavelength in the metal body 21, the diameter of the neck 25 and the plate middle part is approximately one Wavelength, a height of Neck 25 of likewise approximately one wavelength, a thickness of the base plate 22 of twice the wavelength and a diameter of the base surface 23 of approximately ten times the wavelength have proven to be expedient. The thickness of the piezoceramic thickness transducer 27 preferably corresponds to approximately half the wavelength of the excited ultrasound wave in the thickness transducer 27.

Claims (12)

1. Piezoelektrisch anregbares Resonanzsystem zur Zerstäubung einer Flüssigkeit, mit einem schwingungsfähigen, rotationssym­metrischen Metallkörper (1, 11, 21) mit einer scheibenförmigen Grundplatte (2, 12, 22), einer Arbeitsplatte (6, 16, 26) und einem die Arbeitsplatte (6, 16, 26) mit der Grundplatte (2, 12, 22) verbindenden Hals (5, 15, 25) sowie mit einem piezokerami­schen Ultraschall-Schwinger (7, 17, 27), der an eine ebene, senkrecht zur Symmetrieachse (10, 20, 30) verlaufende Grund­fläche (3, 13, 23) der Grundplatte (2, 12, 22) angekoppelt ist, dadurch gekennzeichnet, a) daß der piezokeramische Ultraschall-Schwinger (7, 17, 27) ein in Dickenresonanz arbeitender Schwinger ist, b) daß die Grundplatte (2, 12, 22) des Metallkörpers (1, 11, 21) eine der Grundfläche (3, 13, 23) gegenüberliegende parabolische Deckfläche (4, 14, 24) aufweist, c) daß die Arbeitsplatte (6, 16, 26) tellerförmig oder schalenförmig ausgebildet ist, und d) daß der Mittelpunkt der Arbeitsplatte (6, 16, 26) im oder in der Nähe
d1) des eigentlichen Brennpunktes (F1, F2) der parabolischen Deckfläche (4, 14) oder
d2) des an der Grundfläche (23) der Grundplatte (22) durch den Hals (25) hindurch gespiegelten Brennpunktes (F3) der paraboli­schen Deckfläche (24)
liegt. 1. Piezoelectrically excitable resonance system for atomizing a liquid, with an oscillatable, rotationally symmetrical metal body (1, 11, 21) with a disk-shaped base plate (2, 12, 22), a worktop (6, 16, 26) and one the worktop (6 , 16, 26) with the base plate (2, 12, 22) connecting the neck (5, 15, 25) and with a piezoceramic ultrasonic transducer (7, 17, 27) which is connected to a flat, perpendicular to the axis of symmetry (10, 20, 30) extending base surface (3, 13, 23) of the base plate (2, 12, 22) is coupled, characterized in that a) that the piezoceramic ultrasonic oscillator (7, 17, 27) is an oscillator working in thickness resonance, b) that the base plate (2, 12, 22) of the metal body (1, 11, 21) has a parabolic cover surface (4, 14, 24) opposite the base surface (3, 13, 23), c) that the worktop (6, 16, 26) is plate-shaped or bowl-shaped, and d) that the center of the worktop (6, 16, 26) in or near
d1) the actual focal point (F1, F2) of the parabolic top surface (4, 14) or
d2) the focal point (F3) of the parabolic cover surface (24) which is mirrored on the base surface (23) of the base plate (22) through the neck (25)
lies. 2. Resonanzsystem nach Anspruch 1, dadurch gekennzeichnet, daß die Grundfläche (3, 13) der Grundplatte (2, 12) ein Kreisring ist, und daß die Grundplatte (2, 12) in einen kegelförmigen Hals (5, 15) übergeht, der die zentrale Öffnung des Kreisringes über die Grundfläche (3, 15) hinaus durchdringt.2. Resonance system according to claim 1, characterized in that the base (3, 13) of the base plate (2, 12) is a circular ring, and that the base plate (2, 12) merges into a conical neck (5, 15) which penetrates the central opening of the annulus beyond the base (3, 15). 3. Resonanzsystem nach Anspruch 2, dadurch gekennzeichnet, daß der Hals (5) als Kegelstumpf mit einer tellerförmigen Vertiefung (6) am spitz zulaufenden Ende ausgebildet ist (Fig. 1).3. Resonance system according to claim 2, characterized in that the neck (5) is designed as a truncated cone with a plate-shaped recess (6) at the tapered end (Fig. 1). 4. Resonanzsystem nach Anspruch 2, dadurch gekennzeichnet, daß der kegelförmige Hals (15) am spitz zulaufenden Ende in Form einer Erweiterung in die teller- oder schalenförmige Arbeitsplatte (16) übergeht (Fig. 2)..4. Resonance system according to claim 2, characterized in that the conical neck (15) at the tapered end in the form of an extension into the plate or bowl-shaped worktop (16) merges (Fig. 2) .. 5. Resonanzsystem nach Anspruch 1, dadurch gekennzeichnet, daß die scheibenförmige Grund­platte (22) auf der Seite der parabolischen Deckfläche (24) im Bereich der Symmetrieachse (30) in den Hals (25), der die Arbeitsplatte (26) trägt, übergeht (Fig. 3).5. Resonance system according to claim 1, characterized in that the disc-shaped base plate (22) on the side of the parabolic cover surface (24) in the region of the axis of symmetry (30) in the neck (25) which carries the worktop (26) merges ( Fig. 3). 6. Resonanzsystem nach Anspruch 5, dadurch gekennzeichnet, daß das Seitenteil (29) der Arbeitsplatte (26) kegelig ausgebildet ist, und daß der Übergangsbereich zwischen dem Hals (25) und der tellerförmigen Arbeitsplatte (26) sowie die Neigung des Seitenteiles (29) gegen das Mittelteil (28) der Arbeitsplatte (26) so gewählt sind, daß an der Arbeitsplatte (26) reflektierte Ultraschall­wellen in das Seitenteil (29) gelenkt und dort in Richtung des Tellerrandes (31) mehrfach reflektiert werden.6. Resonance system according to claim 5, characterized in that the side part (29) of the worktop (26) is conical, and that the transition region between the neck (25) and the plate-shaped worktop (26) and the inclination of the side part (29) against the central part (28) of the worktop (26) are selected such that ultrasound waves reflected on the worktop (26) are directed into the side part (29) and are reflected several times in the direction of the plate rim (31). 7. Resonanzsystem nach Anspruch 6,dadurch gekennzeichnet, daß das Seitenteil (29) in der Nähe des Tellerrandes (31) mit einer umlaufenden Einkerbung (33) versehen ist.7. Resonance system according to claim 6, characterized in that the side part (29) in the vicinity of the plate edge (31) is provided with a circumferential notch (33). 8. Resonanzsystem nach Anspruch 5, 6 oder 7, dadurch gekennzeichnet, daß die Dicke der scheiben­förmigen Grundplatte (22) etwa doppelt so groß ist wie die Wellenlänge des Ultraschalls in der Grundplatte (22).8. Resonance system according to claim 5, 6 or 7, characterized in that the thickness of the disc-shaped base plate (22) is approximately twice as large as the wavelength of the ultrasound in the base plate (22). 9. Resonanzsystem nach einem der Ansprüche 5 bis 8, dadurch gekennzeichnet, daß der Durchmesser der tellerförmigen Arbeitsplatte (26) etwa das Dreifache der Ultraschallwellenlänge beträgt.9. Resonance system according to one of claims 5 to 8, characterized in that the diameter of the plate-shaped worktop (26) is approximately three times the ultrasonic wavelength. 10. Resonanzsystem nach einem der Ansprüche 5 bis 9, dadurch gekennzeichnet, daß der Durchmesser der Grundfläche (23) der Grundplatte (22) etwa das Zehnfache der Ultraschallwellenlänge beträgt.10. Resonance system according to one of claims 5 to 9, characterized in that the diameter of the base surface (23) of the base plate (22) is approximately ten times the ultrasonic wavelength. 11. Resonanzsystem nach einem der Ansprüche 5 bis 10, dadurch gekennzeichnet, daß der Durchmesser des Halses (25) etwa gleich der einfachen Ultraschallwellenlänge ist.11. Resonance system according to one of claims 5 to 10, characterized in that the diameter of the neck (25) is approximately equal to the simple ultrasonic wavelength. 12. Resonanzsystem nach einem der Ansprüche 5 bis 11, dadurch gekennzeichnet, daß die Höhe des Halses (25) etwa gleich der einfachen Wellenlänge des Ultraschalls im Metallkörper (21) ist.12. Resonance system according to one of claims 5 to 11, characterized in that the height of the neck (25) is approximately equal to the simple wavelength of the ultrasound in the metal body (21).
EP88111066A 1987-07-22 1988-07-11 Piezoelectric driven resonance system for ultrasonic atomising of a fluid Expired - Lifetime EP0300319B1 (en)

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Also Published As

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JPS6451162A (en) 1989-02-27
DE3854634D1 (en) 1995-12-07
EP0300319B1 (en) 1995-11-02
US4888516A (en) 1989-12-19
DE3724629A1 (en) 1989-02-02
ATE129651T1 (en) 1995-11-15
EP0300319A3 (en) 1990-05-09
CA1307555C (en) 1992-09-15
JP2543493B2 (en) 1996-10-16

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