EP0294623A2 - Graphite holding device for heating bars in industrial furnaces - Google Patents

Graphite holding device for heating bars in industrial furnaces Download PDF

Info

Publication number
EP0294623A2
EP0294623A2 EP88107929A EP88107929A EP0294623A2 EP 0294623 A2 EP0294623 A2 EP 0294623A2 EP 88107929 A EP88107929 A EP 88107929A EP 88107929 A EP88107929 A EP 88107929A EP 0294623 A2 EP0294623 A2 EP 0294623A2
Authority
EP
European Patent Office
Prior art keywords
graphite
heating
industrial furnaces
elements
heating bars
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP88107929A
Other languages
German (de)
French (fr)
Other versions
EP0294623A3 (en
EP0294623B1 (en
Inventor
Wolfgang Dipl.-Ing. Heise
Georg Dipl.-Ing. Kell
Rolf Schuster
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Evonik Operations GmbH
Original Assignee
Degussa GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Degussa GmbH filed Critical Degussa GmbH
Priority to AT88107929T priority Critical patent/ATE69683T1/en
Publication of EP0294623A2 publication Critical patent/EP0294623A2/en
Publication of EP0294623A3 publication Critical patent/EP0294623A3/en
Application granted granted Critical
Publication of EP0294623B1 publication Critical patent/EP0294623B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00Ohmic-resistance heating
    • H05B3/62Heating elements specially adapted for furnaces
    • H05B3/66Supports or mountings for heaters on or in the wall or roof

Definitions

  • graphite heating elements serve as heating elements.
  • the heating elements are preferably designed as graphite tubes, which are arranged equidistantly over the furnace circumference and axially arranged in the direction of the furnace axis.
  • the heating elements are held in their middle area in a screwable graphite block. This type of fastening has the advantage that the heating rods can expand freely towards the front of the furnace during heating.
  • the current flow from heating element to heating element takes place via connecting pieces, which consist either of U-shaped graphite tubes or of solid graphite bodies.
  • the graphite heating elements For certain types of industrial furnaces, the graphite heating elements must be attached at their ends, i.e. near the end faces of the furnace chamber, due to the design and the subject matter.
  • Graphite blocks can in turn be used as fastening elements.
  • Graphite rings or graphite rings divided into several sectors (when graphite heating elements are connected in parallel) are also used. Blocks and rings effect both the mechanical fastening and the electrical supply. As a result, however, the heating rods are firmly clamped on both sides. The thermal linear expansion of the heating pipes therefore often leads to the graphite rings breaking.
  • the dimensions of the circular ring sectors are chosen such that the height H of the circular ring sectors is greater than the width B, measured in the direction of the heating elements. Preferably 2 ⁇ H / W ⁇ 8.
  • These graphite laminate support elements withstand the operating conditions of the furnace and are flexible enough to absorb the thermal expansion of the heating rods without reducing the mechanical strength. In addition, they have good electrical conductivity so that they can also function as current conductors.
  • the mounting elements are manufactured in such a way that appropriate rings are cut out of commercially available graphite laminate plates and, if necessary, divided into sectors, so that the heating rods can be heated section by section independently of one another.
  • the heating rods are fastened with the help of corresponding holes in the mounting elements.
  • the attachment is preferably carried out by means of a nut and lock nut.
  • the specific electrical resistance in the pressing direction of the graphite laminate is smaller by a factor of 1/65 than transverse to the pressing direction, the laminate strips are cut in such a way that the current flow direction coincides with the laminate length orientation. Moreover, since the specific electrical resistance of the graphite laminate in the layer direction is equal to that of solid graphite ( 10 ⁇ ⁇ m), the electrical characteristics of the furnace do not change.
  • the mounting element Due to the laminate layer structure of the adhesive line element perpendicular to the thermal expansion direction of the heating rods, the mounting element is flexible enough to withstand deflections of different amounts and different directions at the clamping points of the heating rods.
  • the ohmic resistance of the sectors can be adjusted relative to the ohmic resistance of the heating conductors by suitable selection of the cross section of the circular ring sectors (within the variation side of H and B).
  • the heating power supplied to the furnace at the end faces can thus be varied, i.e. the fastening elements as additional heating elements in the furnace chamber.
  • the illustration shows schematically an exemplary embodiment of the mounting elements according to the invention.
  • Two heating rods (2) are fastened at both ends in a mounting element (1) made of graphite laminate by means of a nut (3) and a lock nut (4), the mounting elements (1) having bores at these points.
  • the mounting elements (1) are in turn attached to the furnace wall via graphite blocks (5) which penetrate the furnace insulation (6).
  • the layer structure of the graphite laminate is perpendicular to the heating rod axis.

Landscapes

  • Resistance Heating (AREA)
  • Furnace Details (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Heat Treatment Of Articles (AREA)
  • Manufacture, Treatment Of Glass Fibers (AREA)
  • General Induction Heating (AREA)

Abstract

A holding element for heating bars in industrial furnaces must be as flexible as possible so that it can accommodate the thermal expansion of the heating bars. Circular rings or circular-ring sectors provided with bores and made from a flexible graphite laminate plate are used for this purpose.

Description

In Industrieöfen, insbesondere in Schutzgas- und Vakuumöfen, dienen Heizstäbe aus Graphit als Heiz­elemente. Vorzugsweise sind die Heizstäbe als Graphit­rohre ausgebildet, die äquidistant über den Ofen­umfang verteilt axial in Richtung der Ofenachse ange­ordnet sind. Zur Befestigung und zur Stromzuführung werden die Heizstäbe jeweils in ihrem mittleren Bereich in einem verschraubbaren Graphitklotz gehalten. Diese Befestigungsart hat den Vorteil, daß sich während der Erwärmung die Heizstäbe frei nach den Stirnseiten des Ofens ausdehnen können. Der Stromfluß von Heizstab zu Heizstab erfolgt über Verbindungsstücke, die ent­weder aus U-förmig gebogenen Graphitrohren oder aus massiven Graphitkörpern bestehen.In industrial furnaces, in particular in inert gas and vacuum furnaces, graphite heating elements serve as heating elements. The heating elements are preferably designed as graphite tubes, which are arranged equidistantly over the furnace circumference and axially arranged in the direction of the furnace axis. For fastening and for power supply, the heating elements are held in their middle area in a screwable graphite block. This type of fastening has the advantage that the heating rods can expand freely towards the front of the furnace during heating. The current flow from heating element to heating element takes place via connecting pieces, which consist either of U-shaped graphite tubes or of solid graphite bodies.

Bei bestimmten Industrie-Ofentypen müssen aufgrund konstruktiver und themischer Gegebenheiten die Graphit­heizstäbe jeweils an ihren Enden, also nahe den Stirn­flächen der Ofenkammer, befestigt werden. Als Befesti­gungselemente können wiederum Graphitklötze verwendet werden. Es kommen auch Graphitringe bzw. in mehrere Sektoren geteilte Graphitringe (bei Parallelschaltung von Graphitheizstäben) zum Einsatz. Klötze und Ringe bewirken sowohl die mechanische Befestigung als auch die elektrische Zuleitung. Dadurch sind jedoch die Heizstäbe beidseitig fest eingespannt. Die thermische Längenausdehnung der Heizrohre führt daher oft zum Bruch der Graphitringe.For certain types of industrial furnaces, the graphite heating elements must be attached at their ends, i.e. near the end faces of the furnace chamber, due to the design and the subject matter. Graphite blocks can in turn be used as fastening elements. Graphite rings or graphite rings divided into several sectors (when graphite heating elements are connected in parallel) are also used. Blocks and rings effect both the mechanical fastening and the electrical supply. As a result, however, the heating rods are firmly clamped on both sides. The thermal linear expansion of the heating pipes therefore often leads to the graphite rings breaking.

Es war daher Aufgabe der vorliegenden Erfindung, Halterungselemente aus Graphit für Heizstäbe in Industrieöfen zu entwickeln, die die thermische Ausdehnung der Heizstäbe im Ofenbetrieb ohne Bruch aufzunehmen vermögen und gleichzeitig eine gute elektrische Leitfähigkeit aufweisen.It was therefore an object of the present invention to develop mounting elements made of graphite for heating rods in industrial furnaces which are able to absorb the thermal expansion of the heating rods in furnace operation without breakage and at the same time have good electrical conductivity.

Diese Aufgabe wird erfindungsgemäß dadurch gelöst, daß sie aus mit entsprechenden Bohrungen versehenen Kreisringen oder Kreisringsektoren aus einer flexiblen Graphitlaminatplatte bestehen, wobei der Schichtenaufbau des Laminats senkrecht zur Heizstabachse verlaufen muß.This object is achieved according to the invention in that they consist of circular rings or circular ring sectors provided with corresponding bores made of a flexible graphite laminate plate, the layer structure of the laminate having to run perpendicular to the heating rod axis.

Die Abmessungen der Kreisringsektoren werden derart gewählt, daß die Höhe H der Kreisringsektoren größer ist als die Breite B, gemessen in Richtung der Heizstäbe. Vorzugsweise gilt 2 ≦ H/B ≦ 8.The dimensions of the circular ring sectors are chosen such that the height H of the circular ring sectors is greater than the width B, measured in the direction of the heating elements. Preferably 2 ≦ H / W ≦ 8.

Diese Halterungselemente aus Graphitlaminat widerstehen den Bedingungen des Ofenbetriebs, sind flexibel genug, um die thermische Ausdehnung der Heizstäbe aufzunehmen, ohne daß die mechanische Belastbarkeit dadurch verringert wird. Außerdem sind sie elektrisch gut leitfähig, so daß sie auch als Stromleiter fungieren können.These graphite laminate support elements withstand the operating conditions of the furnace and are flexible enough to absorb the thermal expansion of the heating rods without reducing the mechanical strength. In addition, they have good electrical conductivity so that they can also function as current conductors.

Die Halterungselemente werden derart hergestellt, daß man aus handelsüblichen Graphitlaminatplatten entsprechende Ringe herausschneidet und gegebenenfalls in Sektoren unterteilt, so daß die Heizstäbe sektionsweise unabhängig voneinander beheizt werden können. Mit Hilfe entsprechender Bohrungen in den Halterungselementen werden die Heizstäbe befestigt. Vorzugsweise erfolgt die Befestigung mittels Mutter und Kontermutter.The mounting elements are manufactured in such a way that appropriate rings are cut out of commercially available graphite laminate plates and, if necessary, divided into sectors, so that the heating rods can be heated section by section independently of one another. The heating rods are fastened with the help of corresponding holes in the mounting elements. The attachment is preferably carried out by means of a nut and lock nut.

Da der spezifische elektrische Widerstand in Preßrichtung des Graphitlaminats um den Faktor 1/65 kleiner ist als quer zur Preßrichtung, werden die Laminatstreifen so geschnitten, daß Stromflußrichtung mit der Laminatlängenorientierung zusammenfällt. Da überdies der spezifische elektrische Widerstand des Graphitlaminats in Schichtrichtung gleich dem von Massivgraphit ist (

Figure imgb0001
10Ω µm), verändern sich elektrische Kennwerte des Ofens nicht.Since the specific electrical resistance in the pressing direction of the graphite laminate is smaller by a factor of 1/65 than transverse to the pressing direction, the laminate strips are cut in such a way that the current flow direction coincides with the laminate length orientation. Moreover, since the specific electrical resistance of the graphite laminate in the layer direction is equal to that of solid graphite (
Figure imgb0001
10Ω µm), the electrical characteristics of the furnace do not change.

Durch den Laminatschichtenaufbau des Haftleitungselements senkrecht zur thermischen Dehnungsrichtung der Heizstäbe, ist des Halterungselement flexibel genug, um Auslenkungen von unterschiedlichem Betrag und unterschiedlicher Richtung an den Einspannstellen der Heizstäbe zu widerstehen.Due to the laminate layer structure of the adhesive line element perpendicular to the thermal expansion direction of the heating rods, the mounting element is flexible enough to withstand deflections of different amounts and different directions at the clamping points of the heating rods.

Durch geeignete Wahl des Querschnitts der Kreisringsektoren (im Rahmen der Variationsseite von H und B), läßt sich der Ohm'sche Widerstand der Sektoren relativ zum Ohm'schen Widerstand der Heizleiter einstellen. Damit kann die dem Ofen an den Stirnflächen zugeführte Heizleistung variiert werden, d.h. die Befestigungselemente als zusätzliche Heizelemente im Ofenraum.The ohmic resistance of the sectors can be adjusted relative to the ohmic resistance of the heating conductors by suitable selection of the cross section of the circular ring sectors (within the variation side of H and B). The heating power supplied to the furnace at the end faces can thus be varied, i.e. the fastening elements as additional heating elements in the furnace chamber.

Die Abbbildung zeigt schematisch eine beispielhafte Ausführungsform der erfindungsgemäßen Halterungselemente. Zwei Heizstäbe (2) sind an beiden Enden in je einem Halterungselement (1) aus Graphitlaminat mittels Mutter (3) und Kontermutter (4) befestigt, wobei die Halterungselemente (1) an diesen Stellen Bohrungen aufweisen. Die Halterungselemente (1) sind ihrerseits über Graphitklötze (5), die die Ofenisolation (6) durchdringen, an der Ofenwandung befestigt. Der Schichtenaufbau des Graphitlaminats verläuft senkrecht zur Heizstabachse.The illustration shows schematically an exemplary embodiment of the mounting elements according to the invention. Two heating rods (2) are fastened at both ends in a mounting element (1) made of graphite laminate by means of a nut (3) and a lock nut (4), the mounting elements (1) having bores at these points. The mounting elements (1) are in turn attached to the furnace wall via graphite blocks (5) which penetrate the furnace insulation (6). The layer structure of the graphite laminate is perpendicular to the heating rod axis.

Claims (2)

1. Halterungselemente aus Graphit für Heizstäbe in Industrieöfen,
dadurch gekennzeichnet,
daß sie aus mit entsprechenden Bohrungen versehenen Kreisringen oder Kreisringsektoren aus einer flexiblen Graphitlaminatplatte bestehen, wobei der Schichtenaufbau des Laminats senkrecht zur Heizstabachse verlaufen muß.
1. graphite support elements for heating elements in industrial furnaces,
characterized,
that they consist of appropriate circular bores or circular ring sectors made of a flexible graphite laminate plate, the layer structure of the laminate must be perpendicular to the heating rod axis.
2. Halterungselemente nach Anspruch 1,
dadurch gekennzeichnet,
daß die Höhe H und die Breite B in Heizstabrichtung der Kreisringsektroen durch die Formel 2 ≦ H/B ≦ 8 festgelegt ist.
2. mounting elements according to claim 1,
characterized,
that the height H and the width B in the direction of the heating element of the circular ring sectors are determined by the formula 2 ≦ H / W ≦ 8.
EP88107929A 1987-06-06 1988-05-18 Graphite holding device for heating bars in industrial furnaces Expired - Lifetime EP0294623B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AT88107929T ATE69683T1 (en) 1987-06-06 1988-05-18 GRAPHITE SUPPORT FOR HEATING RODS IN INDUSTRIAL FURNACES.

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19873719045 DE3719045A1 (en) 1987-06-06 1987-06-06 GRAPHITE BRACKET ELEMENTS FOR HEATING RODS IN INDUSTRIAL OVENS
DE3719045 1987-06-06

Publications (3)

Publication Number Publication Date
EP0294623A2 true EP0294623A2 (en) 1988-12-14
EP0294623A3 EP0294623A3 (en) 1989-03-22
EP0294623B1 EP0294623B1 (en) 1991-11-21

Family

ID=6329230

Family Applications (1)

Application Number Title Priority Date Filing Date
EP88107929A Expired - Lifetime EP0294623B1 (en) 1987-06-06 1988-05-18 Graphite holding device for heating bars in industrial furnaces

Country Status (9)

Country Link
US (1) US4870256A (en)
EP (1) EP0294623B1 (en)
JP (1) JPS646390A (en)
AT (1) ATE69683T1 (en)
BG (1) BG49510A3 (en)
BR (1) BR8802680A (en)
DE (2) DE3719045A1 (en)
FI (1) FI87966C (en)
IN (1) IN168656B (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6777086B2 (en) 2001-08-31 2004-08-17 Julian Norley Laminates prepared from impregnated flexible graphite sheets
US6689992B1 (en) * 2002-01-31 2004-02-10 Sierratherm Production Furnaces, Inc. Connector for an electrical heating element
SE531836C2 (en) * 2007-12-05 2009-08-25 Sandvik Intellectual Property Suspension device for conductors for electrical resistance elements
EP2610570B1 (en) * 2011-12-29 2016-11-23 Ipsen, Inc. Heating element arrangement for a vacuum heat treating furnace
DE102012209278B4 (en) * 2012-06-01 2018-04-12 Kgt Graphit Technologie Gmbh susceptor

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1873053A (en) * 1925-09-03 1932-08-23 Globar Corp Electrical heating apparatus
FR1121392A (en) * 1955-03-28 1956-08-13 Advanced training in electric ovens
FR1271869A (en) * 1960-10-15 1961-09-15 Balzers Hochvakuum Method and apparatus for supplying current to an electric resistance heater
FR1491108A (en) * 1966-09-02 1967-08-04 Australlian Atomic Energy Comm Electric resistance furnaces for heating to high temperatures
FR1513935A (en) * 1966-03-11 1968-02-16 Efco Furnaces Ltd Improvements to sets of heating elements for electric ovens
US3476862A (en) * 1968-05-16 1969-11-04 Abar Corp Electric resistance heating elements
DE8708084U1 (de) * 1987-06-06 1987-08-06 Degussa Ag, 6000 Frankfurt Halterungselemente aus Graphit für Heizstäbe in Industrieöfen

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1565398A1 (en) * 1965-09-03 1970-04-16 Atomic Energy Of Australia Heating rod for electric resistance furnaces and heating device formed using such rods
DE2646890C2 (en) * 1976-10-16 1979-09-06 Deutsche Gold- Und Silber-Scheideanstalt Vormals Roessler, 6000 Frankfurt Vacuum furnace with graphite heating
US4429403A (en) * 1981-09-30 1984-01-31 Vac-Aero International Inc. Heating element insulating and support system

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1873053A (en) * 1925-09-03 1932-08-23 Globar Corp Electrical heating apparatus
FR1121392A (en) * 1955-03-28 1956-08-13 Advanced training in electric ovens
FR1271869A (en) * 1960-10-15 1961-09-15 Balzers Hochvakuum Method and apparatus for supplying current to an electric resistance heater
FR1513935A (en) * 1966-03-11 1968-02-16 Efco Furnaces Ltd Improvements to sets of heating elements for electric ovens
FR1491108A (en) * 1966-09-02 1967-08-04 Australlian Atomic Energy Comm Electric resistance furnaces for heating to high temperatures
US3476862A (en) * 1968-05-16 1969-11-04 Abar Corp Electric resistance heating elements
DE8708084U1 (de) * 1987-06-06 1987-08-06 Degussa Ag, 6000 Frankfurt Halterungselemente aus Graphit für Heizstäbe in Industrieöfen

Also Published As

Publication number Publication date
BR8802680A (en) 1988-12-27
FI87966C (en) 1993-03-10
FI882207A0 (en) 1988-05-11
IN168656B (en) 1991-05-18
DE3719045A1 (en) 1988-12-15
DE3866287D1 (en) 1992-01-02
US4870256A (en) 1989-09-26
EP0294623A3 (en) 1989-03-22
ATE69683T1 (en) 1991-12-15
EP0294623B1 (en) 1991-11-21
BG49510A3 (en) 1991-11-15
FI882207A (en) 1988-12-07
FI87966B (en) 1992-11-30
JPS646390A (en) 1989-01-10

Similar Documents

Publication Publication Date Title
DE69433780T2 (en) Improved infrared radiation source
DE102017200881A1 (en) A honeycomb heater, method of using the same, and methods of making same
EP2619770B1 (en) Electrical power resistor
EP0294623B1 (en) Graphite holding device for heating bars in industrial furnaces
DE2011615B2 (en) GLOW CATHODE
EP1667489A2 (en) CFC radiant heater
DE2222849B2 (en) ELECTRIC HEATING DEVICE FOR RAPIDLY HEATING STREAMING MEDIA
DE1615207A1 (en) Electric heating element
DE19537418A1 (en) Thermally controlled electrical switching device
DE3234777C2 (en) Graphite mold for pressure sintering
DE102016214029A1 (en) An electric motor which can be used as a driving machine of a motor vehicle
DE3150294C2 (en) Contact device for low-resistance connection of the end pieces of two high-current superconductors
DE202022000869U1 (en) Heating device for interface reinforcement of a copper-aluminum wire clip
DE814191C (en) Electric discharge tubes with spacers for electrodes and other parts of electric discharge tubes
DE2842255B2 (en) Traveling wave tube
DE620526C (en) Induction coil with variable volume, especially for coreless induction ovens
DE1598651C2 (en) Device for differential thermal analysis
DE3304957C2 (en) High frequency coaxial power cable with cavity dielectric and process for its manufacture
DE3001622A1 (en) SUPPORTING DEVICE FOR A GLOWING CATHODE
DE976981C (en) Resistance element made of individual conductors connected in parallel
DE2517905C3 (en) Electric resistance heating element for industrial furnaces
DE3014216A1 (en) GLOWING CATHODE FOR AN ELECTRON TUBE
AT206666B (en) Temperature sensor with resistance winding
DE102020001615A1 (en) Connector section for connecting conductor elements with electrically conductive surface elements
DE445577C (en) antenna

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

17P Request for examination filed

Effective date: 19880518

AK Designated contracting states

Kind code of ref document: A2

Designated state(s): AT CH DE FR GB IT LI LU SE

PUAL Search report despatched

Free format text: ORIGINAL CODE: 0009013

AK Designated contracting states

Kind code of ref document: A3

Designated state(s): AT CH DE FR GB IT LI LU SE

17Q First examination report despatched

Effective date: 19910419

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

AK Designated contracting states

Kind code of ref document: B1

Designated state(s): AT CH DE FR GB IT LI LU SE

REF Corresponds to:

Ref document number: 69683

Country of ref document: AT

Date of ref document: 19911215

Kind code of ref document: T

ITF It: translation for a ep patent filed

Owner name: JACOBACCI & PERANI S.P.A.

ET Fr: translation filed
REF Corresponds to:

Ref document number: 3866287

Country of ref document: DE

Date of ref document: 19920102

GBT Gb: translation of ep patent filed (gb section 77(6)(a)/1977)
PLBE No opposition filed within time limit

Free format text: ORIGINAL CODE: 0009261

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT

26N No opposition filed
EPTA Lu: last paid annual fee
EAL Se: european patent in force in sweden

Ref document number: 88107929.7

REG Reference to a national code

Ref country code: CH

Ref legal event code: PUE

Owner name: DEGUSSA AKTIENGESELLSCHAFT TRANSFER- ALD VACUUM TE

REG Reference to a national code

Ref country code: GB

Ref legal event code: 732E

REG Reference to a national code

Ref country code: FR

Ref legal event code: TP

REG Reference to a national code

Ref country code: CH

Ref legal event code: PFA

Free format text: ALD VACUUM TECHNOLOGIES GMBH TRANSFER- ALD VACUUM TECHNOLOGIES AG

REG Reference to a national code

Ref country code: FR

Ref legal event code: CJ

Ref country code: FR

Ref legal event code: CA

REG Reference to a national code

Ref country code: GB

Ref legal event code: IF02

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: FR

Payment date: 20040408

Year of fee payment: 17

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: CH

Payment date: 20040413

Year of fee payment: 17

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: GB

Payment date: 20040415

Year of fee payment: 17

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: SE

Payment date: 20040421

Year of fee payment: 17

Ref country code: LU

Payment date: 20040421

Year of fee payment: 17

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: DE

Payment date: 20040422

Year of fee payment: 17

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: LU

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20050518

Ref country code: IT

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES;WARNING: LAPSES OF ITALIAN PATENTS WITH EFFECTIVE DATE BEFORE 2007 MAY HAVE OCCURRED AT ANY TIME BEFORE 2007. THE CORRECT EFFECTIVE DATE MAY BE DIFFERENT FROM THE ONE RECORDED.

Effective date: 20050518

Ref country code: GB

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20050518

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: SE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20050519

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: LI

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20050531

Ref country code: CH

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20050531

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: DE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20051201

REG Reference to a national code

Ref country code: CH

Ref legal event code: PL

EUG Se: european patent has lapsed
GBPC Gb: european patent ceased through non-payment of renewal fee

Effective date: 20050518

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: FR

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20060131

REG Reference to a national code

Ref country code: FR

Ref legal event code: ST

Effective date: 20060131

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: AT

Payment date: 20060406

Year of fee payment: 19

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: AT

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20070518