EP0144524A3 - Getter pump for high-vacuum and gas discharge plants - Google Patents

Getter pump for high-vacuum and gas discharge plants Download PDF

Info

Publication number
EP0144524A3
EP0144524A3 EP84109514A EP84109514A EP0144524A3 EP 0144524 A3 EP0144524 A3 EP 0144524A3 EP 84109514 A EP84109514 A EP 84109514A EP 84109514 A EP84109514 A EP 84109514A EP 0144524 A3 EP0144524 A3 EP 0144524A3
Authority
EP
European Patent Office
Prior art keywords
gas discharge
getter
getter pump
groups
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP84109514A
Other languages
German (de)
French (fr)
Other versions
EP0144524A2 (en
Inventor
Hinrich Dr. Rer. Nat. Dipl.-Phys. Heynisch
Erwin Dr. rer. nat. Hübner
Heinz Ing. grad. Mägdefessel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Publication of EP0144524A2 publication Critical patent/EP0144524A2/en
Publication of EP0144524A3 publication Critical patent/EP0144524A3/en
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J7/00—Details not provided for in the preceding groups and common to two or more basic types of discharge tubes or lamps
    • H01J7/14—Means for obtaining or maintaining the desired pressure within the vessel
    • H01J7/18—Means for absorbing or adsorbing gas, e.g. by gettering
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/02—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by absorption or adsorption

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Abstract

Die Erfindung bezieht sich auf eine Getter-Pumpe für Hochvakuum- und Gasentladungsanlagen mit in einem Pumpgefäß (3) angeordneten Getterkörpern (1) aus nichtver­ dampfendem Gettermaterial und zugehörigen Heizelmenten (2). Mit dieser Getter- Pumpe soll die Herstellung eines Hochvakuums im Druckbereich ab 10⁻³ mbar und besser durch nichtverdampfende Getter ermöglicht werden. Erfin­ dungsgemäß ist hierzu vorgesehen, daß die Heizelemente (2) parallel geschaltet sind oder mehrere Heizelemente (2) gruppenweise in Reihe geschaltet und die Gruppen entwe­ der parallel geschaltet oder einzeln herausgeführt sind. The invention relates to a getter pump for High vacuum and gas discharge systems in one Pump vessel (3) arranged getter bodies (1) made of non-ver steaming getter material and associated heating elements (2). With this getter pump, the manufacture of a High vacuum in the pressure range from 10⁻³ mbar and better be made possible by non-evaporating getters. Erfin appropriately, it is provided that the heating elements (2) are connected in parallel or several heating elements (2) connected in groups in groups and the groups either which are connected in parallel or individually.

Die erfindungsgemäße Getter-Pumpe ist in Hochvaku­ um- und Gasentladungsanlagen verwendbar. The getter pump according to the invention is in high vacuum transfer and gas discharge systems can be used.

EP84109514A 1983-09-09 1984-08-09 Getter pump for high-vacuum and gas discharge plants Withdrawn EP0144524A3 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19833332608 DE3332608A1 (en) 1983-09-09 1983-09-09 GETTER PUMP FOR HIGH VACUUM AND GAS DISCHARGE SYSTEMS
DE3332608 1983-09-09

Publications (2)

Publication Number Publication Date
EP0144524A2 EP0144524A2 (en) 1985-06-19
EP0144524A3 true EP0144524A3 (en) 1986-10-08

Family

ID=6208668

Family Applications (1)

Application Number Title Priority Date Filing Date
EP84109514A Withdrawn EP0144524A3 (en) 1983-09-09 1984-08-09 Getter pump for high-vacuum and gas discharge plants

Country Status (2)

Country Link
EP (1) EP0144524A3 (en)
DE (1) DE3332608A1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1205085B (en) * 1987-06-24 1989-03-10 Getters Spa VACUUM INSULATED ELECTRIC SUPERCONDUCTOR WITH THE USE OF A GETTER DEVICE
IT1295340B1 (en) * 1997-10-15 1999-05-12 Getters Spa HIGH SPEED GAS ABSORPTION GETTER PUMP

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2988265A (en) * 1958-03-21 1961-06-13 Nat Res Corp Vacuum device
FR2327817A1 (en) * 1972-08-10 1977-05-13 Getters Spa GAS FIXATORS DEVICE AND COMPOSITION
GB1586676A (en) * 1976-11-03 1981-03-25 Getters Spa Modular getter pumps

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2988265A (en) * 1958-03-21 1961-06-13 Nat Res Corp Vacuum device
FR2327817A1 (en) * 1972-08-10 1977-05-13 Getters Spa GAS FIXATORS DEVICE AND COMPOSITION
GB1586676A (en) * 1976-11-03 1981-03-25 Getters Spa Modular getter pumps

Also Published As

Publication number Publication date
DE3332608A1 (en) 1985-03-28
EP0144524A2 (en) 1985-06-19

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Legal Events

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PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

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PUAL Search report despatched

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Effective date: 19870326

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Effective date: 19870902

STAA Information on the status of an ep patent application or granted ep patent

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18W Application withdrawn

Withdrawal date: 19880613

RIN1 Information on inventor provided before grant (corrected)

Inventor name: HEYNISCH, HINRICH, DR. RER. NAT. DIPL.-PHYS.

Inventor name: MAEGDEFESSEL, HEINZ, ING. GRAD.

Inventor name: HUEBNER, ERWIN, DR. RER. NAT.