EP0143079A3 - Method of producing a microvalve device and application of this method for obtaining a light modulator - Google Patents

Method of producing a microvalve device and application of this method for obtaining a light modulator Download PDF

Info

Publication number
EP0143079A3
EP0143079A3 EP84810556A EP84810556A EP0143079A3 EP 0143079 A3 EP0143079 A3 EP 0143079A3 EP 84810556 A EP84810556 A EP 84810556A EP 84810556 A EP84810556 A EP 84810556A EP 0143079 A3 EP0143079 A3 EP 0143079A3
Authority
EP
European Patent Office
Prior art keywords
obtaining
layer
producing
application
light modulator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP84810556A
Other languages
German (de)
French (fr)
Other versions
EP0143079A2 (en
Inventor
André Perret
Raymond Vuilleumier
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre Electronique Horloger SA
Original Assignee
Centre Electronique Horloger SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre Electronique Horloger SA filed Critical Centre Electronique Horloger SA
Publication of EP0143079A2 publication Critical patent/EP0143079A2/en
Publication of EP0143079A3 publication Critical patent/EP0143079A3/en
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09F—DISPLAYING; ADVERTISING; SIGNS; LABELS OR NAME-PLATES; SEALS
    • G09F9/00—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements
    • G09F9/30—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements
    • G09F9/37—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements being movable elements
    • G09F9/372—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements being movable elements the positions of the elements being controlled by the application of an electric field

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Optical Integrated Circuits (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)

Abstract

Le procédé de l'invention comporte les étapes suivantes.
- réalisation d'une première grille (4) présentant des alvéoles (2);
- obtention d'un support plan par dépôt d'une couche de matière organique (5);
- réalisation d'une deuxième grille (20) sur la couche (5);
- dépôt d'une fine couche métallique (26) et gravure dans cette couche des volets (23); et
- élimination de la couche (5) dans les alvéoles (2), en vue de libérer les volets (23). The method of the invention comprises the following steps.
- Production of a first grid (4) having cells (2);
- obtaining a flat support by depositing a layer of organic material (5);
- production of a second grid (20) on the layer (5);
- deposit of a thin metallic layer (26) and etching in this layer of flaps (23); and
- elimination of the layer (5) in the cells (2), in order to release the flaps (23).

EP84810556A 1983-11-18 1984-11-15 Method of producing a microvalve device and application of this method for obtaining a light modulator Withdrawn EP0143079A3 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CH6199/83 1983-11-18
CH6199/83A CH654686A5 (en) 1983-11-18 1983-11-18 METHOD FOR MANUFACTURING A DEVICE WITH MINIATURE SHUTTERS AND APPLICATION OF SUCH A METHOD FOR OBTAINING A DEVICE FOR MODULATING LIGHT.

Publications (2)

Publication Number Publication Date
EP0143079A2 EP0143079A2 (en) 1985-05-29
EP0143079A3 true EP0143079A3 (en) 1986-07-30

Family

ID=4305834

Family Applications (1)

Application Number Title Priority Date Filing Date
EP84810556A Withdrawn EP0143079A3 (en) 1983-11-18 1984-11-15 Method of producing a microvalve device and application of this method for obtaining a light modulator

Country Status (5)

Country Link
US (1) US4584056A (en)
EP (1) EP0143079A3 (en)
JP (1) JPS60120389A (en)
CA (1) CA1256683A (en)
CH (1) CH654686A5 (en)

Families Citing this family (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL8402201A (en) * 1984-07-12 1986-02-03 Philips Nv PASSIVE DISPLAY.
NL8600697A (en) * 1986-01-09 1987-08-03 Philips Nv IMAGE DISPLAY DEVICE AND A METHOD FOR MANUFACTURING IT.
EP0290093A1 (en) * 1987-05-07 1988-11-09 Koninklijke Philips Electronics N.V. Electroscopic fluid display and method of manufacturing thereof
US4960486A (en) * 1988-06-06 1990-10-02 Brigham Young University Method of manufacturing radiation detector window structure
DE3841488A1 (en) * 1988-12-09 1990-06-13 Zeiss Carl Fa COORDINATE MEASURING DEVICE WITH ONE OR SEVERAL ALUMINUM GUIDE ELEMENTS
CH682523A5 (en) * 1990-04-20 1993-09-30 Suisse Electronique Microtech A modulation matrix addressed light.
DE4237296A1 (en) * 1992-11-05 1994-05-11 Hahn Schickard Inst Fuer Mikro High resolution display
US5463200A (en) * 1993-02-11 1995-10-31 Lumonics Inc. Marking of a workpiece by light energy
FR2710161B1 (en) * 1993-09-13 1995-11-24 Suisse Electronique Microtech Miniature array of light shutters.
AU9124298A (en) * 1997-08-28 1999-03-16 Mems Optical, Inc. System for controlling light including a micromachined foucault shutter ar ray and a method of manufacturing the same
US6201633B1 (en) 1999-06-07 2001-03-13 Xerox Corporation Micro-electromechanical based bistable color display sheets
US6268908B1 (en) * 1999-08-30 2001-07-31 International Business Machines Corporation Micro adjustable illumination aperture
US6443637B1 (en) 2000-03-15 2002-09-03 Eastman Kodak Company Camera with electrostatic light valve that functions as diaphragm
US6325554B1 (en) 2000-03-15 2001-12-04 Eastman Kodak Company Camera with electrostatic light valve that functions as image reflecting mirror for viewfinder
US20110121179A1 (en) * 2007-06-01 2011-05-26 Liddiard Steven D X-ray window with beryllium support structure
US7737424B2 (en) * 2007-06-01 2010-06-15 Moxtek, Inc. X-ray window with grid structure
CA2692742A1 (en) * 2007-07-09 2009-01-15 Brigham Young University Methods and devices for charged molecule manipulation
US20100285271A1 (en) * 2007-09-28 2010-11-11 Davis Robert C Carbon nanotube assembly
US8498381B2 (en) 2010-10-07 2013-07-30 Moxtek, Inc. Polymer layer on X-ray window
US9305735B2 (en) 2007-09-28 2016-04-05 Brigham Young University Reinforced polymer x-ray window
US8247971B1 (en) 2009-03-19 2012-08-21 Moxtek, Inc. Resistively heated small planar filament
US20100239828A1 (en) * 2009-03-19 2010-09-23 Cornaby Sterling W Resistively heated small planar filament
US7983394B2 (en) * 2009-12-17 2011-07-19 Moxtek, Inc. Multiple wavelength X-ray source
US8804910B1 (en) 2011-01-24 2014-08-12 Moxtek, Inc. Reduced power consumption X-ray source
US8750458B1 (en) 2011-02-17 2014-06-10 Moxtek, Inc. Cold electron number amplifier
US8929515B2 (en) 2011-02-23 2015-01-06 Moxtek, Inc. Multiple-size support for X-ray window
US9174412B2 (en) 2011-05-16 2015-11-03 Brigham Young University High strength carbon fiber composite wafers for microfabrication
US9076628B2 (en) 2011-05-16 2015-07-07 Brigham Young University Variable radius taper x-ray window support structure
US8989354B2 (en) 2011-05-16 2015-03-24 Brigham Young University Carbon composite support structure
CN115019651B (en) * 2022-06-20 2023-05-23 昆山国显光电有限公司 Crimping display module and production process thereof

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2322416A1 (en) * 1975-08-27 1977-03-25 Philips Nv ELECTROSTATIC CONTROLLED IMAGE REPRODUCTION DEVICE
GB2071896A (en) * 1980-03-11 1981-09-23 Centre Electron Horloger Miniature display device

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3574012A (en) * 1969-01-06 1971-04-06 Aerojet General Co Trimetallic masks and method
FR2094458A5 (en) * 1970-06-22 1972-02-04 Usine Metal Doloise
DE2512086C3 (en) * 1975-03-19 1978-11-30 Siemens Ag, 1000 Berlin Und 8000 Muenchen Process for the production of self-supporting, thin metal structures
US4170512A (en) * 1977-05-26 1979-10-09 Massachusetts Institute Of Technology Method of manufacture of a soft-X-ray mask
JPS5844644A (en) * 1981-09-10 1983-03-15 Toshiba Corp Manufacturing method for mask for color picture tube

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2322416A1 (en) * 1975-08-27 1977-03-25 Philips Nv ELECTROSTATIC CONTROLLED IMAGE REPRODUCTION DEVICE
GB2071896A (en) * 1980-03-11 1981-09-23 Centre Electron Horloger Miniature display device

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
ELECTRONICS INTERNATIONAL, vol. 56, no. 14, juillet 1983, pages 81-82, New York, US; R.T. GALLAGHER: "Microshutters flip to form characters in dot-matrix display" *

Also Published As

Publication number Publication date
CH654686A5 (en) 1986-02-28
CA1256683A (en) 1989-07-04
EP0143079A2 (en) 1985-05-29
US4584056A (en) 1986-04-22
JPS60120389A (en) 1985-06-27

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Legal Events

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PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

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Effective date: 19870124

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Effective date: 19880830

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18D Application deemed to be withdrawn

Effective date: 19890310

RIN1 Information on inventor provided before grant (corrected)

Inventor name: VUILLEUMIER, RAYMOND

Inventor name: PERRET, ANDRE