EP0142083A3 - Method and apparatus for the production of metallic coatings - Google Patents

Method and apparatus for the production of metallic coatings Download PDF

Info

Publication number
EP0142083A3
EP0142083A3 EP84112870A EP84112870A EP0142083A3 EP 0142083 A3 EP0142083 A3 EP 0142083A3 EP 84112870 A EP84112870 A EP 84112870A EP 84112870 A EP84112870 A EP 84112870A EP 0142083 A3 EP0142083 A3 EP 0142083A3
Authority
EP
European Patent Office
Prior art keywords
plasma
metal
steel
ionized state
metal ions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP84112870A
Other languages
German (de)
French (fr)
Other versions
EP0142083A2 (en
Inventor
Arnulf Dr. Diener
Hans Dr. Kettler
Ulrich Dr. Tenhaven
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fried Krupp AG Hoesch Krupp
Original Assignee
Hoesch AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hoesch AG filed Critical Hoesch AG
Publication of EP0142083A2 publication Critical patent/EP0142083A2/en
Publication of EP0142083A3 publication Critical patent/EP0142083A3/en
Withdrawn legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating

Abstract

Verfahren zum kontinuierlichen Herstellen hochwertiger metallischer Überzüge auf Stahlband unter Verwendung eines Plasmas. Um bei einem solchen Verfahren auf ein schnell laufendes Stahlband kontinuierlich eine beidseitige hochwertige Beschichtung in einfacher Weise aufbringen zu können, wobei auch bei verhältnismäßig breiten Stahlbän­ dern, bevorzugterweise mit einer Breite von mehr als 1.000 mm, eine enge Schichtdickentoleranz sowohl über die Band­ länge als auch über die Bandbreite erzielt werden soll und das Verfahren insgesamt durchzuführen ist, schlägt die Erfindung vor, daß ein oder mehrere Metalle oder Metallegierungen in einem ersten Schritt in einem thermischen Plasma aus nicht oxidierendem Gas kontinuierlich verdampft und selbst in den hoch ionisierten Zustand des thermischen Plasmas überführt werden und in einem zweiten Schritt bei einem gegenüber dem Außendruck um 100 Pa bis 5.000 Pa erhöhten Druck die in diesem Plasma vorhandenen Metallionen elektrostatisch auf der Oberfläche des Stahlbandes abgeschieden werden, das Stahlband während des Beschichtens auf einer gleichmäßigen Temperatur gehalten und bei einer Gesch­ windigkeit von 40 m/min bis 600 m/min beschichtet wird, wobei der erste Schritt, nämlich die Überführung des Metalls oder der Metallegierung in den hoch ionisierten Zustand und der zweite Schritt, nämlich das Abscheiden der Metallionen, örtlich getrennt nacheinander durchgefüht werden. Process for the continuous production of high quality using metallic coatings on steel tape of a plasma. To use such a procedure on a fast running steel belt continuously one on both sides apply high-quality coating in a simple manner can, even with relatively wide steel belts , preferably with a width of more than 1,000 mm, a narrow layer thickness tolerance both over the band length as well as across the range and that The invention proposes to carry out the entire method before that one or more metals or metal alloys in a first step in a thermal plasma from not oxidizing gas continuously evaporates and even in the transferred to the highly ionized state of the thermal plasma and in a second step with one another the external pressure increased by 100 Pa to 5,000 Pa metal ions present in this plasma electrostatically be deposited on the surface of the steel strip that Steel strip during coating on one kept constant temperature and at a business windiness from 40 m / min to 600 m / min is coated, the first step being the transfer of the metal or the metal alloy in the highly ionized state and the second step, namely the deposition of the metal ions, be carried out separately one after the other.

EP84112870A 1983-11-11 1984-10-25 Method and apparatus for the production of metallic coatings Withdrawn EP0142083A3 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE3340840 1983-11-11
DE3340840 1983-11-11

Publications (2)

Publication Number Publication Date
EP0142083A2 EP0142083A2 (en) 1985-05-22
EP0142083A3 true EP0142083A3 (en) 1987-04-29

Family

ID=6214081

Family Applications (1)

Application Number Title Priority Date Filing Date
EP84112870A Withdrawn EP0142083A3 (en) 1983-11-11 1984-10-25 Method and apparatus for the production of metallic coatings

Country Status (4)

Country Link
US (2) US4587135A (en)
EP (1) EP0142083A3 (en)
JP (1) JPS60116785A (en)
CA (1) CA1232230A (en)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2595572B1 (en) * 1986-03-12 1989-06-16 France Implant PROCESS FOR THE MANUFACTURE OF SURGICAL IMPLANTS AT LEAST PARTIALLY COATED WITH A METAL COMPOUND, AND IMPLANTS PERFORMED ACCORDING TO SAID METHOD
JPH0649933B2 (en) * 1987-09-18 1994-06-29 日本鋼管株式会社 Plated steel plate for cans
US5364660A (en) * 1989-07-21 1994-11-15 Minnesota Mining And Manufacturing Company Continuous atmospheric pressure CVD coating of fibers
EP0572673B1 (en) * 1991-11-21 1997-06-25 Nisshin Steel Co., Ltd. Method of forming layer of evaporation coating
JPH0718465A (en) * 1993-06-30 1995-01-20 Kawasaki Steel Corp Continuous heating method for metallic strip and continuous production of metallic strip having excellent surface characteristic
GB9522062D0 (en) * 1995-10-27 1996-01-03 Rolls Royce Plc A seal and a chamber having a seal
GB2326647B (en) * 1997-06-25 2001-12-19 Gen Vacuum Equipment Ltd Apparatus for and method of vacuum metallizing
DE19847774C2 (en) * 1998-10-16 2002-10-17 Peter Foernsel Device for the plasma treatment of rod-shaped or thread-like material
EP1209252A3 (en) * 2000-09-15 2002-11-27 Shipley Co. L.L.C. Continuous coating apparatus
JP4822378B2 (en) * 2001-02-06 2011-11-24 株式会社ブリヂストン Film forming apparatus and film forming method
KR20060014803A (en) * 2004-08-12 2006-02-16 삼성전자주식회사 Method of controlling crystal surface morphology by means of metal adsorption
US20110121108A1 (en) * 2009-11-24 2011-05-26 Stephan Rodewald Plasma polymerization nozzle
NL2004177C2 (en) * 2010-02-01 2011-08-03 Levitech B V Dynamic fluid valve and method for establishing the same.

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR615699A (en) * 1925-12-07 1927-01-13 American Mach & Foundry Metal coating method and apparatus
GB973805A (en) * 1959-12-04 1964-10-28 Grasenick Fritz Improvements in and relating to methods of applying coatings to carriers
BE716922A (en) * 1968-06-20 1968-12-02
LU54113A1 (en) * 1967-07-17 1969-05-21
NL6918217A (en) * 1969-12-04 1971-06-08 Apparatus for evaporating metal on a - wire or strip
US3693582A (en) * 1969-02-24 1972-09-26 Cockerill Apparatus for applying a metal coating to an elongated metal article
FR2253352A5 (en) * 1973-12-04 1975-06-27 Commissariat Energie Atomique Plasma oven for refractory coating surfaces - is connected to water-cooled target carrier by condensation chamber

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3010009A (en) * 1958-09-29 1961-11-21 Plasmadyne Corp Method and apparatus for uniting materials in a controlled medium

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR615699A (en) * 1925-12-07 1927-01-13 American Mach & Foundry Metal coating method and apparatus
GB973805A (en) * 1959-12-04 1964-10-28 Grasenick Fritz Improvements in and relating to methods of applying coatings to carriers
LU54113A1 (en) * 1967-07-17 1969-05-21
BE716922A (en) * 1968-06-20 1968-12-02
US3693582A (en) * 1969-02-24 1972-09-26 Cockerill Apparatus for applying a metal coating to an elongated metal article
NL6918217A (en) * 1969-12-04 1971-06-08 Apparatus for evaporating metal on a - wire or strip
FR2253352A5 (en) * 1973-12-04 1975-06-27 Commissariat Energie Atomique Plasma oven for refractory coating surfaces - is connected to water-cooled target carrier by condensation chamber

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
IBM TECHNICAL DISCLOSURE BULLETIN, vol. 19, no. 5, October 1976, Seiten 1518-1520, New York, US; P.C. KARR: "Vacuum deposition of material films on substrates utilizing controlled plasma" *

Also Published As

Publication number Publication date
US4635586A (en) 1987-01-13
EP0142083A2 (en) 1985-05-22
CA1232230A (en) 1988-02-02
US4587135A (en) 1986-05-06
JPS60116785A (en) 1985-06-24

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Effective date: 19871030

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Inventor name: DIENER, ARNULF, DR.

Inventor name: TENHAVEN, ULRICH, DR.

Inventor name: KETTLER, HANS, DR.