EP0124440A1 - Spectromètre de masse à grande luminosité - Google Patents

Spectromètre de masse à grande luminosité Download PDF

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Publication number
EP0124440A1
EP0124440A1 EP84400846A EP84400846A EP0124440A1 EP 0124440 A1 EP0124440 A1 EP 0124440A1 EP 84400846 A EP84400846 A EP 84400846A EP 84400846 A EP84400846 A EP 84400846A EP 0124440 A1 EP0124440 A1 EP 0124440A1
Authority
EP
European Patent Office
Prior art keywords
sextupole
magnetic sector
plane
spectrometer
image plane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP84400846A
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German (de)
English (en)
French (fr)
Inventor
Bernard Rasser
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Cameca SAS
Original Assignee
Cameca SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cameca SAS filed Critical Cameca SAS
Publication of EP0124440A1 publication Critical patent/EP0124440A1/fr
Withdrawn legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/28—Static spectrometers
    • H01J49/30—Static spectrometers using magnetic analysers, e.g. Dempster spectrometer

Definitions

  • the present invention relates to mass spectrometers, whatever their type (thermionization, gas, ...), and relates more particularly to the brightness of the magnetic sector and the possibility of multicollection, that is to say the possibility of simultaneously placing several analysis collectors in the image plane of the spectrometer.
  • the brightness of the magnetic sector is limited, for a given resolution, by the opening aberrations of the magnetic sector. It is known to reduce and even cancel these opening aberrations by a suitable choice of the radii of curvature of the input and output faces of the magnetic sector, but this generally results in an increase in the angle of inclination of the image plane with respect to the normal to the optical axis of exit of the magnetic sector; this angle can then reach a large value (80 ° and more) a multicollection analysis is no longer possible because the different collectors relating to the different masses must be placed in the image plane without the collectors closest to the sector magnetic screen in front of those who are furthest away from it; and, even when possible, problems with electron rebounds and secondary electrons distort the analysis.
  • spectrometers comprising an input sextupole and an output sextupole and to cancel the opening aberrations by adjusting the excitation of the input sextupole or the curvature of the input face of the sector magnetic and the curvature of the exit face of the magnetic sector or the excitation of the exit sextupole and keeping fixed the two other parameters; in such sextupoles it is also known to cancel the angle of inclination of the image plane by modifying the distances sample-magnetic sector and magnetic sector-image plane, but this adjustment completely disturbs an adjustment which would have been made to cancel the aberrations and these can be significant when the tilt of the image plane is reduced to zero.
  • the object of the present invention is to avoid these drawbacks and to allow a multicollection analysis in a mass spectrometer whose aperture aberrations are corrected in the radial plane and whose image plane is rectified normally at the optical output axis. .
  • a mass spectrometer comprising, in series on its optical axis, a magnetic sector, an output sextupole, an image plane, is characterized in that the coupling coefficient k of the sextupole and the radii of curvature, RI , R2, input and output faces of the magnetic sector have values such that, simultaneously, the aberration coefficients A and B, relating to the shifts in the radial plane, due to the aberrations in the radial plane and in the plane axial, are less than 1 in absolute value, and the tilt angle of the image plane is less than 10 ° in absolute value.
  • the spectrometer according to FIG. 1 differs from conventional spectrometers by the presence of both the curvatures of the input and output faces of the magnetic sector and of the two sextupoles 4 and 6 whose roles will be indicated in the following.
  • the sensitivity results, in particular, from the luminosity of the magnetic sector.
  • the brightness is limited mainly by the aberrations of opening in the radial plane, that is to say in the plane of FIG. 1.
  • Figure 2 is a geometric diagram relating to the opening aberrations in a spectrometer.
  • the magnetic sector of radius R in FIG. 1 gives, with certain ions, from point H (point of the optical axis situated at the level of the screen) an image situated, in the image plane, at J. This image is marred by an opening aberration whose width in the radial plane is RA a 2 + R. B.
  • the term RA a corresponds to the fact that a ray coming from the point H, contained in the radial plane and making an angle a with the optical axis, does not pass through the point J after having crossed the magnetic sector but remains in the radial plane and intersects the axis Jy (Jy perpendicular to the optical axis in the radial plane) at a distance RA ⁇ 2 from J;
  • the term RB ⁇ 2 it corresponds to the fact that a ray from point H, contained, at the exit of the source slit, in the axial plane (plane, or more exactly curved surface, perpendicular to the radial plane, which it cuts along the optical axis ) and making an angle Il with the optical axis, is not contained, after the magnetic sector, in the axial plane: the projection, parallel to Jz, of the intersection of this ray with the plane Jyz intersects the axis Jy at a distance RB ⁇ 2 from J.
  • the spectrometer according to FIG. 1 makes it possible to simultaneously correct the opening aberrations defined by the coefficients A and B which were discussed during the description of FIG. 2, and the angle of inclination i of the image plane P usually defined, in the specialized literature, by a coefficient I.
  • this transfer matrix is the one obtained by multiplying the transfer matrices of the different constituents (magnetic sector, sextupoles, spaces L3, L4, L5, L6 between the elements); these matrices can be found in the specialized literature (for example: KL BROWN "A First- and Second-Order Matrix Theory for the Design of Beam Transport Systems and Charged Particle Spectrometers". Advances in Particle Physics, vol.l, pages 71-134 , 1967).
  • Figure 3 shows how is made the sextupole 6 which was discussed in the description of Figure 1.
  • This sextupole has six metal bars, cylindrical, 60 to 65, regularly arranged around the optical axis XX, with their main axis , not shown, parallel to the optical axis; the bars 60, 62, 64 are joined, by metal spacers located at one third of their length, to a metal ring 66 brought to the potential + V; similarly the bars 61, 63, 65 are joined, by metal spacers located two-thirds of their length, to a metal ring 67 brought to the potential -V.
  • the insulating parts which join the crowns 66 and 67 to make the sextupole a rigid unit, have not been shown in order to better show the way in which the bars 60-66 are joined by two groups of three.
  • the present invention is not limited to the example described; it applies in particular as well to the use of electrostatic sextupoles as to that of magnetic sextupoles; it also applies to the use of several sextupoles arranged behind the magnetic sector (between the magnetic sector and the image plane) and even to the use of several sextupoles arranged in front of the magnetic sector. It should be noted that the sextupoles also bring, by their shape and their position on the optical axis XX, other parameters for adjusting the spectrometer, but these are parameters which are much more difficult to modify than the voltages d excitement of the sextupole.
  • the present invention also applies to mass spectrometers using, in addition to the magnetic sector considered in the description above, one or more electrostatic and / or magnetic sectors; it is used to correct the opening aberrations and the tilt angle of the image plane.

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)
EP84400846A 1983-05-03 1984-04-26 Spectromètre de masse à grande luminosité Withdrawn EP0124440A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR8307360 1983-05-03
FR8307360A FR2545651B1 (fr) 1983-05-03 1983-05-03 Spectrometre de masse a grande luminosite

Publications (1)

Publication Number Publication Date
EP0124440A1 true EP0124440A1 (fr) 1984-11-07

Family

ID=9288536

Family Applications (1)

Application Number Title Priority Date Filing Date
EP84400846A Withdrawn EP0124440A1 (fr) 1983-05-03 1984-04-26 Spectromètre de masse à grande luminosité

Country Status (3)

Country Link
EP (1) EP0124440A1 (enrdf_load_stackoverflow)
JP (1) JPS59209257A (enrdf_load_stackoverflow)
FR (1) FR2545651B1 (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2232813A (en) * 1989-05-19 1990-12-19 Jeol Ltd Simultaneous detection type mass spectrometer
WO2010089260A1 (fr) 2009-02-06 2010-08-12 Cameca Spectrometre de masse magnetique achromatique a double focalisation

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
OPTIK, vol. 51, no. 4, octobre 1978, Wissenschaftliche Verlagsgesellschaft mbH, Stuttgart (DE); N.W. PARKER et al.:"Design of magnetic spectrometers with second-order aberrations corrected. I: Theory", pages 333-351 *
OPTIK, vol. 57, no. 2, novembre 1980, Wissenschaftliche Verlagsgesellschaft mbH, Stuttgart (DE); R.F. EGERTON:"Design of an aberration-corrected electron spectrometer for the TEM", pages 229-242 *

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2232813A (en) * 1989-05-19 1990-12-19 Jeol Ltd Simultaneous detection type mass spectrometer
GB2232813B (en) * 1989-05-19 1993-09-29 Jeol Ltd Simultaneous detection type mass spectrometer
WO2010089260A1 (fr) 2009-02-06 2010-08-12 Cameca Spectrometre de masse magnetique achromatique a double focalisation
US8373121B2 (en) 2009-02-06 2013-02-12 Cameca Magnetic achromatic mass spectrometer with double focusing

Also Published As

Publication number Publication date
FR2545651A1 (fr) 1984-11-09
JPS59209257A (ja) 1984-11-27
JPS6148213B2 (enrdf_load_stackoverflow) 1986-10-23
FR2545651B1 (fr) 1986-02-07

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PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

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Effective date: 19850321

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Effective date: 19861224

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Inventor name: RASSER, BERNARD