EP0123496B1 - Verfahren zur Herstellung eines Anzeigepaneels - Google Patents

Verfahren zur Herstellung eines Anzeigepaneels Download PDF

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Publication number
EP0123496B1
EP0123496B1 EP19840302593 EP84302593A EP0123496B1 EP 0123496 B1 EP0123496 B1 EP 0123496B1 EP 19840302593 EP19840302593 EP 19840302593 EP 84302593 A EP84302593 A EP 84302593A EP 0123496 B1 EP0123496 B1 EP 0123496B1
Authority
EP
European Patent Office
Prior art keywords
layer
plate
apertures
electrode
etchable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
EP19840302593
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English (en)
French (fr)
Other versions
EP0123496A3 (en
EP0123496A2 (de
Inventor
Nicholas Cleanthis Andreadakis
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Unisys Corp
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Unisys Corp
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Filing date
Publication date
Application filed by Unisys Corp filed Critical Unisys Corp
Publication of EP0123496A2 publication Critical patent/EP0123496A2/de
Publication of EP0123496A3 publication Critical patent/EP0123496A3/en
Application granted granted Critical
Publication of EP0123496B1 publication Critical patent/EP0123496B1/de
Expired legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J11/00—Gas-filled discharge tubes with alternating current induction of the discharge, e.g. alternating current plasma display panels [AC-PDP]; Gas-filled discharge tubes without any main electrode inside the vessel; Gas-filled discharge tubes with at least one main electrode outside the vessel
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J17/00—Gas-filled discharge tubes with solid cathode
    • H01J17/38—Cold-cathode tubes
    • H01J17/48—Cold-cathode tubes with more than one cathode or anode, e.g. sequence-discharge tube, counting tube, dekatron
    • H01J17/49—Display panels, e.g. with crossed electrodes, e.g. making use of direct current
    • H01J17/492—Display panels, e.g. with crossed electrodes, e.g. making use of direct current with crossed electrodes

Definitions

  • a recently invented display panel which comprises a dot matrix display having memory is relatively complex and includes several support plates, insulating layers, and electrode arrays which must be prepared and assembled accurately.
  • This panel is described and claimed in copending application European Patent Application No. 0,023,082 claiming priority from United States Patent Application No. 0511,313 filed June 22, 1979.
  • the present invention relates to improvements in the panel which simplify its preparation.
  • United States Patent 4,352,040 discloses a gas discharge panel of the type wherein the present invention seeks to provide an improvement in the method of manufacture where insulating strips are recommended to be screen printed upon a slotted base plate.
  • the material of the insulating strip must be consistent in its melting points with the material of the base plate should the heating process be employed (as it must to fuse a screen printed material) such that the base plate shall not melt while the screen printed material shall melt.
  • the material of the insulating strips must be capable of screen printing and is thereby restricted yet further.
  • the insulating strips, the perforate electrode plate overlying the insulating strips and the aperture plate are separately assembled requiring multiple stages of precision mechanical alignment of inexact (in the case of screen printing) and fragile elements.
  • the present invention seeks to overcome these problems by providing that the insulating layers, the electrode plate and the overlying aperture plate are formed together by a precision process increasing the ease and robustness of assembly.
  • the present invention consists in a method for constructing a gas discharge display panel wherein an insulating base plate is provided with two sets of parallel wires mutually crossed and spaced in corresponding sets of crossed grooves on an inner surface of said base plate to form a plural array of D.C. discharge cells at the crossing points of the wires; wherein insulating strips aligned with and between one of the sets of crossed grooves are provided on said base plate on the same side as said wires; wherein an electrode plate having a plural array of first apertures is provided on said insulating strips such that one of each of said first apertures is adjacent to a corresponding one of said D.C.
  • an apertured plate comprising a plural array of second apertures is provided on said electrode plate such that each second aperture is larger than and overlies a first aperture; wherein a face plate assembly having a transparent plate with a transparent electrode on one face thereof and an insulating layer on the transparent electrode is provided with on the apertured plate with the insulating layer adjacent thereto for said transparent electrode to cover all of said second apertures; said method being characterised by including the steps of: forming said electrode plate with said first apertures; coating said electrode plate on a first surface with a first etchable dielectric layer; coating said electrode plate on a second surface with a second, etchable dielectric layer; coating said first etchable layer with a first layer of photoresist; coating said second etchable layer with a second layer of photoresist; exposing and curing said first layer of photoresist to leave etchable areas corresponding to said second apertures; exposing and curing said second layer of photoresist to leave etchable areas corresponding to the gaps between said
  • the present invention is used to manufacture a display panel 10 of the type described and claimed in copending European Patent application, inventors George Holz and James A. Ogle, Serial No. 0,023,082 with U.S.A. priority from 22 June 1979.
  • This application describes a dot matrix memory display panel including a D.C. scanning portion and an A.C. display portion.
  • the display panel 10 includes a gas-filled envelope made up of an insulating base plate 20 and a glass face plate 30, which are hermetically sealed together, as illustrated in Fig. 2, along a closed periphery which surrounds the operating inner portion of the panel and the various gas cells provided therein.
  • the base plate has a top surface 22, in which a plurality of relatively deep parallel longitudinal slots 40 are formd and in each of which a scanladdress anode electrode, for example a wire 50, is seated and secured.
  • a plurality of scan cathode electrodes in the form of wires or strips 60 are seated on the top surface of the base plate or in shallow slots 70.
  • the scan cathodes 60 are disposed transverse to the scan anodes 50, and each crossing of a scan cathode 60 and a scan anode 40 defines a scanning cell 72 (Fig. 2). It can be seen that the scanning cells are arrayed in rows and columns. More specifically, the cathode portions 61, the underlying portions of anodes 50, and the intermediate gaseous regions define the scanning cells.
  • the scan cathodes 60A, B, C, etc. form a series of cathodes which can be energized serially in a scanning cycle, with cathode 60A being the first cathode energized in the scanning cycle.
  • a reset cathode electrode 62 is disposed in a slot 64 in the top surface of the base plate adjacent to the first scan cathode 60A, so that, when it is energized, it provides excited particles for cathode 60A at the beginning of a scanning cycle to be described.
  • a reset cell is formed, and the crossing of all of the scan anodes by the reset cathode provides a column of reset cells.
  • These reset cells are turned on or energized at the beginning of each scanning cycle, and they expedite the turn-on of the first column of scanning cells associated with the first cathode 60A.
  • the cathodes 60 or at least the portions 61 thereof which are disposed in the scanning cells, be spaced uniformly from an electrode 80 positioned above the cathodes and decribed below.
  • the cathode grooves or slots 70 must be of uniform depth. It is also desirable to provide means for preventing the spread of cathode glow from the operating portions 61 of the cathodes to the intermediate portions. These conditions are satisfied by providing insulating strips 74 between the top surface 22 of the base plate and the cathodes 60 and adjacent electrode plate 80, the priming plate. The strips are aligned with the anode slots 40 and are seated on the lands between these slots.
  • the portions of the panel described up to this point comprise the base plate assembly. This is the D.C. portion and the scanning and addressing portion of the panel.
  • Adjacent to the base plate assembly is the second portion of the panel which is a quasi A.C. assembly; that is, it includes A.C. and D.C. features.
  • This portion of the panel includes an electrode in the form of a thin metal plate 80 having an array of rows and columns of relatively small apertures 92, each overlying one of the scanning cells.
  • the plate 80 is positioned close to cathodes 60 and is seated on insulating strips 74.
  • Electrode plate 80 includes a terminal 88 for making electrical connection thereto.
  • an apertured plate or layer 86 Adjacent to plate 80, and in contact with the upper surface thereof, is an apertured plate or layer 86 having rows and columns of apertures 94 which are considerably larger than apertures 92.
  • the apertures 94 comprise the display cells of panel 10.
  • the sheet 86 is made of insulating material, as shown in FIG. 2.
  • the quasi A.C. assembly also includes a face plate assembly which comprises face plate 30 and a large-area transparent conductive electrode 100 on the inner surface of the plate 30, together with a narrow conductor 110 of silver or the like which outlines and reinforces the electrode layer 100 to increase its conductivity.
  • the conductor 110 includes a portion 114, to which external connection can be made.
  • the large-area electrode 100 overlies the entire array of display cells 94 in plate 86.
  • An insulating coating 120 of glass or the lie covers electrode 100, and, if desired, a dielectric layer 132 of magnesium oxide, thorium oxide, or the like is coated on layer 120.
  • the apertures 94 in plate 86 comprise display cells, and, as can be seen in Fig. 2, each display cell has one end wall 134 formed by a portion of insulating layer 132, and an opposite end wall 136 formed by a portion of the top surface of plate 80.
  • a coating of the material of layer 132 should also be provided on the base or lower wall 136 of each display cell 94, such as the layer 133 shown in Fig. 2
  • Panel 10 has a keep-alive arrangement which includes an A.C. electrode 140 in the form of a linear conductive film or layer of opaque metal, such as silver, provided on the inner surface of the face plate 30 adjacent to one edge of the transparent conductive electrode 100.
  • the A.C. keep-alive electrode 140 is positioned so that it is in optimum operative relation with the column of reset cells and reset cathode 62, to which it supplies excited particles.
  • the A.C. keep-alive electrode 140 is covered by the insulating layers 120 and 132.
  • the plate 86 is provided with a slot 142
  • plate 80 is provided with a column of holes 150, the slot 142 overlying and being aligned with the column of holes 150, and both lie beneath and are aligned with the A.C.
  • Electrode 140 operates with plate 80 to produce glow discharge between them and produce excited particles in slot 142 and holes 150. These excited particles are available to the reset cathode 62 and assist the firing of the column of reset cells.
  • the gas filling in panel 10 is preferably a Penning gas mixture of, for example, neon and a small percentage of xenon, at a pressure of about 50,000 Pa (400 Torr).
  • the gas filling is introduced through a tubulation 24 secured to base plate 20 (Fig. 2), or a non-tubulated construction can be employed.
  • the base plate assembly including plate 20 and the anodes 50 and cathodes 60, is prepared in any suitable manner, for example, as described in United States Patent No. 4,352,040 of Nicholas C. Andreadakis.
  • the assembly of priming plate 80, glow isolator plate 86, and insulating strips 74 is prepared as a subassembly as follows.
  • the metal plate 80 having apertures 92 and 150 formed therein is coated on its top surface with a thin layer of glass or other etchable dielectric material such as Corning 7575 glass.
  • a similar layer 170 is provided on its bottom surface. Both dielectric layers 160 and 170 are coated with layers 180 and 190 of a suitable photoresist.
  • the bottom photoresist layer 190 is then exposed and developed to provide non-removable strip-like regions 200 which extend along the photoresist layer between the rows of holes 92 and will ultimately form strips 74.
  • the top photoresist layer 180 is exposed and developed to provide a pattern of regions which, when the layer is later etched, will form the apertures or cells 94.
  • the assembly thus described is then treated with a suitable acid to etch layers 170 and 180 at the same time to provide the strips 74 and the layer of cells 94, as shown in Fig. 4.
  • This subassembly is then joined with the base plate assembly and the face plate assembly described above, as illustrated in dash lines in Fig. 4, and the parts are sealed together and processed to form the completed panel.
  • the operation of the panel 10 is not set forth in detail herein since it is described in detail in the above-mentioned applications. However, a brief description of the panel operation is as follows: With the keep-alive electrodes generating excited particles, and with operating potential applied to the scan anodes 50, the reset cathode 62 is energized to fire the column of reset cells, and then the scan cathodes 60 are energized sequentially to carry out a scanning operation in the lower portion of the panel. At the same time, with sustaining pulses applied between the electrodes 80 and 100, as each column of scan cells is energized, information or display signals are applied to the proper scan anodes 50 to cause glow to develop in the associated display cells 94 where it is sustained by the sustaining pulses. When all of the columns of scan cells have been energized and the appropriate associated display cells have been energized, a sustained and visible message is present in the upper display portion of the panel.

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Gas-Filled Discharge Tubes (AREA)

Claims (2)

1. Verfahren zur Herstellung einer Gasentladungs-Anzeigeeinheit (10), mit einer isolierten Grundplatte (20), die zwei sich kreuzende Sätze von parallelen Drähten (50, 60, 62) aufweist, die im Abstand voneinander in entsprechenden, sich kreuzenden Sätzen von Nuten (40, 64, 70) auf der Innenfläche der Grundplatte (20) angeordnet sind und eine Mehrfachanordnung von Gleichstrom-Entladungszellen an den Kreuzungspunkten der Drähte bilden; mit Isolierstreifen (74) zwischen den Nuten (40) eines der sich kreuzenden Sätze von Nuten, welche Isolierstreifen gegenüber den Nuten (40) ausrichtet sind und auf derselben Seite der Grundplatte (20) wie die Drähte (50, 60, 62) angeordnet sind; mit einer auf den Isolierstreifen (74) angeordneten Elektrodenplatte (80), die ien Mehrfachanordnung von ersten Aussparungen (92, 150) aufweist, von denen jeweils eine über einer entsprechenden Gleichstrom-Entladungszelle liegt; mit einer auf der Elektrodenplatte (80) angeordneten Lochplatte (86), die eine Mehrfachanordnung von zweiten Aussparungen (94, 142) aufweist, die größer als die ersten Aussparungen (92, 150) sind und von denen jede jeweils eine der ersten Aussparungen überdeckt; mit einer auf der Lochplatte angeordneten Deckplattenanordnung (30, 100, 110, 120), die eine transparente Platte (30) mit einer transparenten Elektrode (100) auf einer ihrer Oberflächen und eine Isolierschicht (120) auf der transparenten Elektrode (100) aufweist, wobei die Isolierschicht (120) über der Lochplatte liegt und die transparente Elektrode (100) alle zweiten Aussparungen (94, 142) abdeckt; gekennzeichnet durch folgende Verfahrensschritte: Bildung der Elektrodenplatte (80) mit den ersten Ausparungen (92, 150); Überziehen einer ersten Oberfläche der Elektrodenplatte (80); mit einer ersten ätzbaren dielektrischen Schicht (160); Überziehen einer zweiten Oberfläche der Elektrodenplatte (80) mit einer zweiten ätzbaren dielektrischen Schicht (170); Überziehen der ersten ätzbaren Schicht (160) mit einer ersten Photoresistschicht (180); Überziehen der zweiten ätzbaren Schicht (170) mit einer zweite Photoresistschicht (190); Belichten und Entwickeln der ersten Photoresistschicht (180), um ätzbare Bereiche entsprechend den zweiten Aussparungen (94, 142) freizulassen; Belichten und Entwickeln der zweiten Photoresistschicht (190), um ätzbare Bereiche entsprechend den Zwischenräumen zwischen den Isolierstreifen (74) freizulassen; und Ätzen der ersten und zweiten dielektrischen Schichten (160, 170), wobei die stehenbleibenden Bereiche der ersten und zweiten dielektrischen Schichten (160, 170) im Verbund mit der Elektrodenplatte (80) verbleiben und die erste dielektrische Schicht (160) die Lochplatte (86) und die zweite dielektrische Schicht (170) die Isolierstreifen (74) bilden.
2. Verfahren nach Anspruch 1, dadurch gekennzeichnet, daß die ersten und zweiten dielektrischen Schichten Glasschichten sind und das Ätzen mit einem Säure-Ätzmittel erfolgt.
EP19840302593 1983-04-21 1984-04-17 Verfahren zur Herstellung eines Anzeigepaneels Expired EP0123496B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US48700783A 1983-04-21 1983-04-21
US487007 1983-04-21

Publications (3)

Publication Number Publication Date
EP0123496A2 EP0123496A2 (de) 1984-10-31
EP0123496A3 EP0123496A3 (en) 1985-11-21
EP0123496B1 true EP0123496B1 (de) 1988-07-13

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EP19840302593 Expired EP0123496B1 (de) 1983-04-21 1984-04-17 Verfahren zur Herstellung eines Anzeigepaneels

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EP (1) EP0123496B1 (de)
JP (1) JPS59205127A (de)
CA (1) CA1249120A (de)
DE (1) DE3472735D1 (de)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0770289B2 (ja) * 1991-11-29 1995-07-31 株式会社ティーティーティー 表示用放電管
JPH09199039A (ja) * 1996-01-11 1997-07-31 Hitachi Ltd ガス放電型表示パネル及びその製造方法
JP3627151B2 (ja) * 1996-09-18 2005-03-09 株式会社 ティーティーティー プラズマ表示放電管及びその駆動方法
TW392186B (en) * 1997-12-01 2000-06-01 Hitachi Ltd Plasma display panel and image display using the same

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4352040A (en) * 1980-07-14 1982-09-28 Burroughs Corporation Display panel with anode and cathode electrodes located in slots of base plate

Also Published As

Publication number Publication date
EP0123496A3 (en) 1985-11-21
DE3472735D1 (en) 1988-08-18
EP0123496A2 (de) 1984-10-31
JPS59205127A (ja) 1984-11-20
CA1249120A (en) 1989-01-24

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