EP0058610A1 - Verfahren und Einrichtung zum Erreichen eines Hochvakuums mit Gebrauch einer Einstufen-Flüssigkeitsringpumpe - Google Patents

Verfahren und Einrichtung zum Erreichen eines Hochvakuums mit Gebrauch einer Einstufen-Flüssigkeitsringpumpe Download PDF

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Publication number
EP0058610A1
EP0058610A1 EP82400242A EP82400242A EP0058610A1 EP 0058610 A1 EP0058610 A1 EP 0058610A1 EP 82400242 A EP82400242 A EP 82400242A EP 82400242 A EP82400242 A EP 82400242A EP 0058610 A1 EP0058610 A1 EP 0058610A1
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EP
European Patent Office
Prior art keywords
stage
valve
pump
liquid
vacuum
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Granted
Application number
EP82400242A
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English (en)
French (fr)
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EP0058610B1 (de
Inventor
Pierre Robert Laguilharre
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Individual
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Individual
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Priority to AT82400242T priority Critical patent/ATE35721T1/de
Publication of EP0058610A1 publication Critical patent/EP0058610A1/de
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Publication of EP0058610B1 publication Critical patent/EP0058610B1/de
Expired legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B23/00—Pumping installations or systems
    • F04B23/04—Combinations of two or more pumps
    • F04B23/08—Combinations of two or more pumps the pumps being of different types
    • F04B23/12—Combinations of two or more pumps the pumps being of different types at least one pump being of the rotary-piston positive-displacement type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/005—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F5/00—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
    • F04F5/54—Installations characterised by use of jet pumps, e.g. combinations of two or more jet pumps of different type

Definitions

  • the present invention relates to a method and an installation for the rapid realization of a deep vacuum using two compression stages, the first of which is constituted by a liquid ring vacuum pump.
  • the rise in vacuum is very slow with equal energy consumption compared to the rise in vacuum obtained with a vacuum pump with double stage liquid ring.
  • the energy absorbed during operation after vacuum rise is also important.
  • the present invention therefore aims to remedy all of the above drawbacks, while retaining the main advantages mentioned above.
  • it proposes a process which is characterized in that it consists in first producing an intermediate vacuum by implementing a first compression stage constituted by a liquid ring vacuum pump then, this intermediate vacuum once reached, to continue the rise in vacuum by coupling a second compression stage in series with the first stage, the intermediate vacuum preferably corresponding to the best vacuum that can be obtained using the first stage with optimum efficiency.
  • the present invention also relates to an installation of the type defined in the first paragraph of this description and which is characterized in that means are provided for instantaneously coupling or dissociating the first stage and the second stage.
  • the second stage consists of a liquid jet ejector, the inlet of which is in working liquid is connected to the discharge pipe of a centrifugal pump supplied with this liquid.
  • the second stage of this double-stage liquid ring pump is replaced by a water jet ejector, the operation of which is ensured by pressurized water from the discharge of a centrifugal pump having a yield of approximately 0.75, it will result from this that, to discharge from 28.867.10 3 Pa to 100.10 3 Pa, the water jet ejector must have a water flow of approximately 0.0075 m 3 / s under a pressure of 275.10 3 Pa.
  • the effective power absorbed by the ejector will be approximately 2800 watts, that is to say substantially the effective power absorbed by the second stage of the liquid ring vacuum pump.
  • the rise in vacuum on the first stage of the installation is approximately 2)% faster than. vacuum mounted on the first stage of a double stage liquid ring vacuum pump.
  • the liquid jet ejector is coupled to the single stage liquid ring vacuum pump and from this moment the speed of the vacuum rise and the power absorbed join the characteristics of the double stage liquid ring pump.
  • the means making it possible to instantaneously couple or dissociate the liquid jet ejector and the single-stage liquid ring vacuum pump will for example comprise a device for adjusting the flow rate, such as a valve, arranged on the supply of driving liquid. from the liquid jet ejector or on the discharge pipe of the centrifugal pump. Setting the flow to zero, that is to say closing the valve, corresponds to the dissociation of the two stages of the installation, while opening this valve amounts to associating these two stages.
  • a device for adjusting the flow rate such as a valve, arranged on the supply of driving liquid. from the liquid jet ejector or on the discharge pipe of the centrifugal pump. Setting the flow to zero, that is to say closing the valve, corresponds to the dissociation of the two stages of the installation, while opening this valve amounts to associating these two stages.
  • the means according to the invention, - for coupling or dissociating the two stages of the installation may comprise a device ensuring the connection, preferably automatic, of the centrifugal pump with the vacuum created by the liquid ring vacuum pump, when this vacuum reaches a predetermined value, this predetermined value corresponding to the optimum vacuum can be created by the first stage alone with optimum efficiency. Therefore, as long as this value is not reached, the centrifugal pump remains deactivated during the rise in vacuum of the first stage, the liquid jet ejector is therefore out of operation and therefore, dissociated from the first stage. On the other hand, as soon as the predetermined vacuum is reached, the centrifugal pump is brought into contact with the vacuum created and therefore priming of the latter and putting into operation of the liquid jet ejector, that is to say association of the latter with the first floor.
  • the desired vacuum can be obtained with optimum efficiency, that is to say with a relatively low compression ratio (less than 9)
  • the means ensuring the automatic connection of the centrifugal pump with the vacuum created by the liquid ring pump will then be adjusted so that they are inoperative at this vacuum value. Under these conditions, there will be no priming of this centrifugal pump and it will remain inoperative.
  • said means allowing instantaneous coupling or dissociation of the first and the second stage comprising a valve with instantaneous opening or closing, preferably automatic, arranged on the conduit connecting the discharge of the first stage to the suction of the second stage, a first non-return valve arranged on a bypass leading to the open air and connected to said conduit upstream of the valve and a second non-return valve arranged on a pipe starting from the suction of the first stage and joining the suction of the second stage downstream of the valve, the first valve allowing the circulation of fluids only in the direction going from the first stage towards the open air, the second valve allowing the circulation of fluids only in the direction going from the suction of the first stage towards the suction of the second stage, these two valves opening when the valve closes and closing when the valve s open.
  • This particular arrangement makes it possible, up to the point of attachment, not only to dissociate the liquid jet ejector from the liquid ring pump (result produced by the valve when it is closed), but also to accelerate the high vacuum rise (around 30%) with only a slight excess power absorbed by coupling the two stages in parallel (result produced by the two non-return valves when they are open). By instant opening of the valve, the non-return valves close instantly and the two stages are coupled in series.
  • the liquid jet ejector can be of the single-nozzle type or of the multi-nozzle type.
  • the nozzle (s) advantageously comprise means making it possible to adjust their diameter and in the case of a multi-nozzle ejector, the latter preferably comprises means ensuring the reduction in the number of said nozzles.
  • the centrifugal pump is driven on the same shaft line as that of the liquid ring pump.
  • the centrifugal pump can in particular be driven by the same shaft as that of the liquid ring pump.
  • the centrifugal pump is mounted at the end of the liquid ring pump shaft, either directly or via a multiplier or a speed variator.
  • the interior of the liquid ring pump may be in relation to a coolant supply line, in order to avoid or reduce the heating of said liquid ring pump.
  • the discharge of the liquid ring pump is preferably connected directly to the suction of the liquid jet ejector.
  • the cooling water from the liquid ring pump which is discharged simultaneously with the gas, is introduced into the liquid jet ejector allowing the automatic removal of excess calories.
  • this pumped water may, for the sake of economy, be used, after it leaves the ejector, in whole or in part in the centrifugal pump.
  • the discharge pipe of the liquid jet ejector can lead into a liquid-gas separator comprising means connected to the suction pipe of the centrifugal pump and ensuring the return of all or part of the liquid collected in the separator , towards said centrifugal pump.
  • the separator may be constituted by a tank with two compartments, one supplied with refrigerant and connected to the refrigerant supply pipe, the flow of the refrigerant supplying said compartment being greater than that of the coolant in said supply line, the other receiving on the one hand, the liquid-gas mixture from the liquid jet ejector, and on the other hand, by overflow - full of the other compartment.
  • the coolant supply pipe can be in relation to a continuous source of coolant, such as the water distribution network for example.
  • said pipe carries a valve which closes or opens automatically respectively when the liquid ring pump stops or starts; similarly, the discharge of the centrifugal pump may carry, upstream of the flow adjustment device, a bypass constituted by a duct provided with a diaphragm ensuring the passage of a very low flow rate of liquid in this duct.
  • the second compression stage consists of a single stage liquid ring vacuum pump.
  • the liquid ring vacuum pump constituting the first stage and the liquid ring vacuum pump constituting the second stage can be driven by different motors.
  • the means making it possible to instantaneously couple or dissociate the first stage and the second stage will comprise for example a first non-return valve disposed on the duct connecting the discharge of the first stage to the suction of the second stage and a second non-return valve arranged on a bypass opening into the open air and connected to said pipe upstream of the first non-return valve, the latter allowing the circulation of fluids only in the direction going from the first stage to the second stage and the second valve allowing the circulation of the fluids only in the direction going from the first stage towards the open air.
  • the liquid ring vacuum pump constituting the first stage and the vacuum with liquid ring constituting the second stage can also be driven by the same motor, in which case the means making it possible to couple or dissociate instantaneously the first and the second stage can comprise a valve with instantaneous opening or closing, preferably automatic, arranged on the conduit connecting the discharge of the first stage to the suction of the second stage and a non-return valve arranged on a bypass leading to the open air and connected to said pipe upstream of the valve, the non-return valve not allowing the circulation of the fluids only in the direction going from the first stage towards the open air, this same valve opening when the valve closes and closing when the valve opens.
  • a valve with instantaneous opening or closing preferably automatic, arranged on the conduit connecting the discharge of the first stage to the suction of the second stage and a non-return valve arranged on a bypass leading to the open air and connected to said pipe upstream of the valve, the non-return valve not allowing the circulation of the fluids only in the
  • the means making it possible to instantaneously couple or dissociate the first and the second stage could also be constituted, whether the two liquid ring vacuum pumps are driven by the same motor or not, by an opening or closing valve.
  • the means thus designed are particularly interesting since, thanks to them, it is possible, at the start of the vacuum rise, to dissociate the two liquid ring pumps and to couple them instantly in parallel, which accelerates the vacuum rise in proportions important.
  • a single-stage liquid ring vacuum pump 1 comprises, in a manner known per se, a cylindrical body 2 partially filled with water (or any other low-volatility liquid of low viscosity) and in which an impeller 3 rotates without friction whose hub 4 is fitted onto an eccentric shaft 5 and rotated by a motor 6. This water, set in motion by the impeller 3, is projected against the body 2 and forms a sort of ring 7 which determines a cell 8 with the hub 4.
  • the rotating blades move in this cell 8 by delimiting spaces of variable volume, spaces whose volume increases in zone A (right zone) and decreases in zone B (left zone).
  • the gas or the air to be conveyed is therefore sucked in through a suction pipe 9 which opens into a suction chamber 10 (clear zone in FIG. 1) communicating with zone A, and discharged by a discharge pipe. 11 which opens into a discharge chamber 10a (dark zone in FIG. 1) communicating with zone B.
  • a suction pipe 9 which opens into a suction chamber 10 (clear zone in FIG. 1) communicating with zone A
  • discharge pipe. 11 which opens into a discharge chamber 10a (dark zone in FIG. 1) communicating with zone B.
  • the shaft 5 is extended and passes through the suction and delivery chambers 10, 10a and carries at its end the turbine 12 of a centrifugal pump 13 integral with the liquid ring pump 1.
  • the discharge conduit 11 of the latter is connected to the suction of a water jet ejector 14 provided with a conduit 15 for supplying motive water terminated by a nozzle 15a and connected by a valve 16 to the conduit discharge 17 of the centrifugal pump 13.
  • This nozzle 15a opens, in a manner known per se, into the convergent part of a convergent-divergent 15b, the diverging part of which is extended by a discharge conduit 18 terminating above the compartment 19 constituting one of the two compartments 19, 20 of a tank 21.
  • the two compartments 19, 20 are separated by a vertical partition 22 whose upper end is at the height of the axis of the pump 1.
  • the compartment 20 is supplied with cooling water by a conduit 23 provided with a flow control valve 24, the overflow of this compartment 20 flowing by overflow into the compartment 19 where the water is maintained at a level lower than that in compartment 20, by an overflow device 25 pr seen on the side wall of tank 21.
  • the compartment 20 is provided at its base with a duct 26 provided with a flow control valve 27, in relation to the body of the liquid ring pump 1. Furthermore, the suction duct 28 of the centrifugal pump 13 submerges in the water in compartment 19.
  • the centrifugal pump 13 is connected by a conduit 30 to the suction conduit 9, a valve 29 being disposed on this conduit 30; the valve 29 opens, preferably automatically, when the vacuum created in the conduit 9 reaches a certain threshold, this threshold being chosen to limit the power absorbed by the installation during the rise in vacuum and corresponding to the vacuum that can be obtained with optimum efficiency by the sole use of the liquid ring pump.
  • the centrifugal pump 13 is generally defused; there is therefore no liquid discharged into the conduit 17 and the liquid jet ejector 14 is inoperative. Consequently, when the motor 6 is started, the rise in vacuum only occurs in the liquid ring vacuum pump 1. If at the start of the installation, the centrifugal pump 13 is already primed, the same will be obtained result by completely closing the valve 16. When the vacuum created at the suction 9 of the liquid ring pump 1 reaches the predetermined threshold, the valve 29 is opened, which has the effect of causing the priming of the centrifugal pump 13 and therefore bringing the liquid jet ejector into operation 14. In the case where the centrifugal pump 13 is already primed but the valve 16 is closed, the liquid jet ejector 14 will be brought into operation by simple opening of this valve 16. Then, the rise in vacuum continues until reaching the finally desired vacuum.
  • the gas (air), for example at 8,333.10 3 Pa, sucked in through line 9 is discharged through line 11 (for example at 28,867.10 3 Pa) and then sucked in, together with the entrained fraction of the water refrigeration of the liquid ring pump, by the water jet ejector 14 operating with pressurized water from the discharge pipe 17 of the centrifugal pump 13.
  • the gas (air) -water mixture from the ejector 14 is then discharged through line 18 into compartment 19 (at atmospheric pressure) where there is separation of air (gas) and water.
  • the latter mixed with the cooling water coming from the compartment 20 and optionally from a cooling water make-up pipe (not shown), is then sucked by the suction pipe 28 of the centrifugal pump 13.
  • the flow of refrigeration water circulating in the conduit 26 is adjusted by the valve 27 so as to save the refrigeration water on the one hand, and / or to minimize the power absorbed by the pump. with liquid ring on the other hand.
  • the adjustment of the desired vacuum or the regulation of the power absorbed as a function of the volumetric capacity of the assembly can be carried out very simply using the manual or automatic valve 16 or alternatively by variation, manual or automatic. , of the diameter of the nozzle 15a of the water jet ejector 14.
  • conduit 30 has a very small diameter so that, once the priming of the centrifugal pump 13 has been carried out, it escapes through this conduit only a quantity of water sufficiently small to not not disturb the operation of the installation and in particular of the liquid ring pump.
  • the invention of Figure 3 differs from that of Figure 2 (a) in that the liquid ring vacuum pump 1 is mounted on double ball bearings 31, 32 and is rotated by a motor 6 coupled by a coupling sleeve 33 at one end of the shaft 5 of the liquid ring pump 1, the other end of the shaft 5 being connected by an extension 34 to a multiplier or a variable speed drive 35 which allows increase or decrease the speed of rotation of the centrifugal pump 13 compared to that of the liquid ring pump 1 and therefore easily adjust the pressure of the motive water of the ejector 14 and consequently achieve the best efficiency , this multiplier or variator 35 being for its part connected to the shaft 36 of the centrifugal pump 13, (b) in that the tank 21 is replaced by a single tank 37 connected by its side wall to the suction duct 28 of the centrifugal pump 13 and provided with an overflow 38, this being located at a higher level erieur to that where the suction duct 28 is connected to the side wall of the tank (37), (c) in that the pipe
  • the valve 43 is closed, the valve 27 is opened to supply the pump 1 with coolant sufficiently, the valve 16 and at least one of the shut-off valves 42 and starts the motor 6. Due to the play of pressures prevailing at the various points of the installation, the valves 44 and 46 open, thus coupling the pump 1 and the ejector 14 in parallel, which allows a faster rise in vacuum than that obtained in the installation of FIG. 2.
  • the valve 43 When the vacuum created reaches the predetermined threshold chosen (attachment point of the ejector 14), the valve 43 is opened (or it opens automatically if it has been designed to s '' open when this predetermined vacuum is reached) and this results in the immediate closing of the valves 44 and 46 and the instantaneous coupling in series of the pump 1 and the ejector 14, after which the rise in vacuum continues until obtaining of the final vacuum sought.
  • the opening of the valves 16 and 42 will be adjusted in order to consume the minimum power required.
  • the installation of FIG. 4 comprises, like the previous installations, a first compression stage, constituted by the liquid ring pump 1 actuated by the motor 6 and supplied with cooling water by the conduit 26 carrying the valve 27; on the other hand, the second compression stage is no longer constituted by a liquid jet ejector, but by another pump liquid ring vacuum 48 actuated by a motor 49 and supplied with refrigeration water by a conduit 50 carrying a flow control valve 51 and connected to an external network for distribution of pressurized refrigeration water (not shown).
  • the discharge conduit 11 of the pump 1 is connected by a valve 52 with instantaneous opening or closing, preferably automatic, to the suction 53 of the pump 48, the discharge 54 of the latter opening onto the open air.
  • the discharge conduit 11 carries, upstream of the valve 52, a bypass 55 leading to atmospheric pressure, preferably by means of a water guard intended to form a hydraulic seal and constituted by a tank 56 filled with water open to the open air and into which the end of the conduit 55 plunges.
  • a non-return valve 57 designed so as to allow the circulation of fluids only in the direction going from the conduit 11 towards the guard of water.
  • valve 52 At the start of the rise in vacuum, the valve 52 is closed, the motor 6 is started and the valve 27 is open.
  • the water-air mixture discharged by pump 1 causes the valve 57 to open.
  • a predetermined value which preferably corresponds to the maximum vacuum which can be obtained with optimum efficiency by means of pump 1
  • the motor 49 In operation the motor 49 and opens the valves 51 and 52 (this valve 52 opens automatically if it is designed to open when this predetermined vacuum is reached); this results in the instantaneous closure of the valve 57 and the series coupling of the pumps 1 and 48 which then work in a can until reaching the desired final vacuum.
  • the valve 52 could be replaced by a non-return valve designed so as to allow the circulation of fluids only in the direction going from the pump 1. towards pump 48.
  • the suction duct 9 of the pump 1. to the suction 53 of the pump 48, downstream of the valve 52, by a pipe 58 on which a valve is disposed non-return valve 59 designed so as to allow the circulation of fluids only in the direction going from the duct 9 towards the suction 53.
  • the installation operates in the following manner. At the start of the vacuum rise, the two pumps are separated by closing the valve 52, the motors 6 and 49 are started and the valves 27 and 51 are opened. This results in the opening of the valves 57 and 59 and l coupling in parallel of the two pump, which allows a vacuum rise even faster than previously.
  • valve 52 When the vacuum reaches the predetermined value defined above, the valve 52 is opened or opens automatically; this results in the instantaneous closing of the valves 57 and 59 and, consequently, the series coupling of the pumps 1, and 48 which then work in a can until the desired final vacuum is obtained.
  • the hydraulic efficiency of a liquid ring vacuum pump is all the better as the impeller of this pump rotates more slowly, especially beyond a certain sucked volume.
  • the volume drawn in by pump 1 is 300 m 3 / hour, and if the maximum vacuum is 8,333.10 3 Pa and the intermediate vacuum is 28,867,103 Pa, then the volume drawn in by pump 48 is substantially 3 , 46 times lower, i.e. (300 87 m 3 / h).
  • the pump 1 can rotate at 1400 rpm 3.46 with good efficiency and the pump 48 can rotate at 2800 rpm also with good efficiency.
  • the speed of 2800 rpm allows the dimensions and the cost price of the liquid ring pump constituting the second stage to be reduced in very large proportions.
  • the installation according to the invention which comprises a second stage smaller than the first, is more economical.
  • the two vacuum pumps 1 and 48 can be actuated by the same motor 6; in this case, it suffices simply to remove the motor 49 and to connect the shafts of these two pumps by means of a multiplier or variable speed drive which allows the pump 48, which is smaller than the pump 1, to rotate at a speed higher than that at which the pump turns 1.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Jet Pumps And Other Pumps (AREA)
  • Compressor (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
EP82400242A 1981-02-13 1982-02-10 Verfahren und Einrichtung zum Erreichen eines Hochvakuums mit Gebrauch einer Einstufen-Flüssigkeitsringpumpe Expired EP0058610B1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AT82400242T ATE35721T1 (de) 1981-02-13 1982-02-10 Verfahren und einrichtung zum erreichen eines hochvakuums mit gebrauch einer einstufenfl¨ssigkeitsringpumpe.

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR8102929 1981-02-13
FR8102929A FR2500086A1 (fr) 1981-02-13 1981-02-13 Installation pour la realisation d'une difference elevee de pression entre deux points, mettant en oeuvre une pompe a anneau liquide simple etage associee a un ejecteur a jet de liquide

Publications (2)

Publication Number Publication Date
EP0058610A1 true EP0058610A1 (de) 1982-08-25
EP0058610B1 EP0058610B1 (de) 1988-07-13

Family

ID=9255203

Family Applications (1)

Application Number Title Priority Date Filing Date
EP82400242A Expired EP0058610B1 (de) 1981-02-13 1982-02-10 Verfahren und Einrichtung zum Erreichen eines Hochvakuums mit Gebrauch einer Einstufen-Flüssigkeitsringpumpe

Country Status (5)

Country Link
US (1) US4505645A (de)
EP (1) EP0058610B1 (de)
AT (1) ATE35721T1 (de)
DE (1) DE3278768D1 (de)
FR (1) FR2500086A1 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8801037D0 (en) * 1988-01-18 1988-02-17 Plessey Co Ltd Improvements relating to fuel supply systems
US4880357A (en) * 1988-06-27 1989-11-14 Mathers Terrence L Method and apparatus for producing high vacuum
US20030236489A1 (en) * 2002-06-21 2003-12-25 Baxter International, Inc. Method and apparatus for closed-loop flow control system
DK200400409A (da) * 2004-03-12 2004-04-21 Neg Micon As Variable capacity oil pump
US20070248469A1 (en) * 2006-04-25 2007-10-25 Franklin Electric Co., Inc. Shallow-Well Pump with Interchangeable Nozzle
FR3008145B1 (fr) * 2013-07-04 2015-08-07 Pfeiffer Vacuum Sas Pompe a vide primaire seche
KR101424959B1 (ko) * 2014-04-08 2014-08-01 한국뉴매틱(주) 진공펌프
ITUB20152247A1 (it) * 2015-07-16 2017-01-16 Nuovo Pignone Tecnologie Srl Apparato di drenaggio per una turbomacchina.

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR875245A (fr) * 1941-05-13 1942-09-11 Rateau Soc Amorçage automatique d'une pompe centrifuge
FR1037582A (fr) * 1950-06-03 1953-09-21 Pompe à air à anneau de liquide et à deux étages
US3007322A (en) * 1961-04-03 1961-11-07 Adiel Y Dodge Low pressure exhauster
FR1451968A (fr) * 1963-03-18 1966-02-25 Nash Engineering Co Perfectionnements aux systèmes de pompage à vide poussé
FR1446099A (fr) * 1965-09-01 1966-07-15 Stork Koninklijke Maschf Pompe verticale à aspiration automatique
US3642384A (en) * 1969-11-19 1972-02-15 Henry Huse Multistage vacuum pumping system

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2599701A (en) * 1945-10-25 1952-06-10 Eaton Mfg Co Pumping system
US2492075A (en) * 1945-10-30 1949-12-20 Kinney Mfg Company Vacuum pump
US3221659A (en) * 1960-04-20 1965-12-07 Nash Engineering Co Liquid ring and centrifugal series pumps for varying density fluids
DE1428243A1 (de) * 1962-10-17 1969-07-10 Siemen & Hinsch Gmbh Fluessigkeitsring-Gaspumpe
US3420181A (en) * 1966-12-12 1969-01-07 Norman Berry Pumping system
FR1600217A (de) * 1968-03-15 1970-07-20

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR875245A (fr) * 1941-05-13 1942-09-11 Rateau Soc Amorçage automatique d'une pompe centrifuge
FR1037582A (fr) * 1950-06-03 1953-09-21 Pompe à air à anneau de liquide et à deux étages
US3007322A (en) * 1961-04-03 1961-11-07 Adiel Y Dodge Low pressure exhauster
FR1451968A (fr) * 1963-03-18 1966-02-25 Nash Engineering Co Perfectionnements aux systèmes de pompage à vide poussé
FR1446099A (fr) * 1965-09-01 1966-07-15 Stork Koninklijke Maschf Pompe verticale à aspiration automatique
US3642384A (en) * 1969-11-19 1972-02-15 Henry Huse Multistage vacuum pumping system

Also Published As

Publication number Publication date
ATE35721T1 (de) 1988-07-15
DE3278768D1 (en) 1988-08-18
FR2500086B1 (de) 1983-03-25
US4505645A (en) 1985-03-19
FR2500086A1 (fr) 1982-08-20
EP0058610B1 (de) 1988-07-13

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