EP0048884A3 - Vacuum evaporation system for deposition of thin films - Google Patents

Vacuum evaporation system for deposition of thin films Download PDF

Info

Publication number
EP0048884A3
EP0048884A3 EP81107266A EP81107266A EP0048884A3 EP 0048884 A3 EP0048884 A3 EP 0048884A3 EP 81107266 A EP81107266 A EP 81107266A EP 81107266 A EP81107266 A EP 81107266A EP 0048884 A3 EP0048884 A3 EP 0048884A3
Authority
EP
European Patent Office
Prior art keywords
deposition
thin films
vacuum evaporation
evaporation system
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP81107266A
Other versions
EP0048884B1 (en
EP0048884A2 (en
Inventor
Koichi Shinohara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Publication of EP0048884A2 publication Critical patent/EP0048884A2/en
Publication of EP0048884A3 publication Critical patent/EP0048884A3/en
Application granted granted Critical
Publication of EP0048884B1 publication Critical patent/EP0048884B1/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Thin Magnetic Films (AREA)
EP81107266A 1980-09-17 1981-09-15 Vacuum evaporation system for deposition of thin films Expired EP0048884B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP129737/80 1980-09-17
JP55129737A JPS5754269A (en) 1980-09-17 1980-09-17 Apparatus for forming film in vacuum

Publications (3)

Publication Number Publication Date
EP0048884A2 EP0048884A2 (en) 1982-04-07
EP0048884A3 true EP0048884A3 (en) 1982-07-28
EP0048884B1 EP0048884B1 (en) 1985-04-03

Family

ID=15016955

Family Applications (1)

Application Number Title Priority Date Filing Date
EP81107266A Expired EP0048884B1 (en) 1980-09-17 1981-09-15 Vacuum evaporation system for deposition of thin films

Country Status (4)

Country Link
US (1) US4380211A (en)
EP (1) EP0048884B1 (en)
JP (1) JPS5754269A (en)
DE (1) DE3169699D1 (en)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0082001A1 (en) * 1981-12-16 1983-06-22 General Engineering Radcliffe 1979 Limited Apparatus for and a method of metallising a length of material
JPS59156636A (en) * 1983-02-23 1984-09-05 Toyoda Mach Works Ltd Apparatus for controlling tool transfer
US4560462A (en) * 1984-06-22 1985-12-24 Westinghouse Electric Corp. Apparatus for coating nuclear fuel pellets with a burnable absorber
JPS62196367A (en) * 1986-02-25 1987-08-29 Ulvac Corp Cleaning device for vacuum treatment vessel
JPS62274080A (en) * 1986-05-21 1987-11-28 Hitachi Ltd Plasma treatment
US4867101A (en) * 1986-07-10 1989-09-19 Fuji Photo Film Co., Ltd. Apparatus for producing magnetic recording medium
JPS63282926A (en) * 1987-05-15 1988-11-18 Fuji Photo Film Co Ltd Device for producing magnetic recording medium
JPH01109043A (en) * 1987-10-19 1989-04-26 Hitachi Seiki Co Ltd Automatic tool replacing device for machine tool
US5140938A (en) * 1987-12-21 1992-08-25 Canon Kabushiki Kaisha Thin film forming device
DE4207525C2 (en) * 1992-03-10 1999-12-16 Leybold Ag High vacuum coating system
US6521101B1 (en) * 1995-11-04 2003-02-18 The Regents Of The University Of California Method for fabricating beryllium-based multilayer structures
JP3388664B2 (en) * 1995-12-28 2003-03-24 シャープ株式会社 Method and apparatus for manufacturing polycrystalline semiconductor
JP3614644B2 (en) * 1998-02-27 2005-01-26 松下電器産業株式会社 Manufacturing method of laminate
JP4268303B2 (en) * 2000-02-01 2009-05-27 キヤノンアネルバ株式会社 Inline type substrate processing equipment
JP2003286012A (en) * 2002-03-28 2003-10-07 Toshiba Corp Gas recycle system and method, gas insulation instrument, sulfur hexafluoride supply system and power industry system
JP4430506B2 (en) * 2004-10-14 2010-03-10 三菱電機株式会社 Vapor deposition equipment
CA2609075A1 (en) * 2005-05-20 2006-11-30 Cardinal Cg Company Deposition chamber desiccation systems and methods of use thereof
TW200907396A (en) * 2007-08-03 2009-02-16 Largan Precision Co Ltd Multilayer film vacuum evaporation method for a plastic optic assemble and optical image capture fro the same
US9751254B2 (en) * 2008-10-09 2017-09-05 Bobst Manchester Ltd Apparatus for treating substrates
EP2626144A1 (en) * 2012-02-07 2013-08-14 Nederlandse Organisatie voor toegepast -natuurwetenschappelijk onderzoek TNO Roll to roll manufacturing system having a clean room deposition zone and a separate processing zone
US9382614B2 (en) 2014-09-05 2016-07-05 Apple Inc. Defect reduction in meta-mode sputter coatings
US10720633B2 (en) * 2017-09-15 2020-07-21 Dyson Technology Limited Multilayer electrochemical device
KR20230018517A (en) * 2020-06-04 2023-02-07 어플라이드 머티어리얼스, 인코포레이티드 Temperature Controlled Shield for Evaporation Source, Material Deposition Apparatus, and Method for Depositing Material on a Substrate

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4214972A (en) * 1978-07-19 1980-07-29 Shatterproof Glass Corporation Sheet handling apparatus

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2332309A (en) * 1940-05-20 1943-10-19 Ohio Commw Eng Co Gaseous metal deposition
US3368523A (en) * 1965-05-13 1968-02-13 Bell Telephone Labor Inc Laminar flow work station
US4205623A (en) * 1978-05-15 1980-06-03 Cha Industries Vacuum deposition apparatus
US4223048A (en) * 1978-08-07 1980-09-16 Pacific Western Systems Plasma enhanced chemical vapor processing of semiconductive wafers
US4228004A (en) * 1979-04-12 1980-10-14 Thermco Products Corporation Method and apparatus for removal of by-products of chemical vapor deposition from oil for vacuum pump

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4214972A (en) * 1978-07-19 1980-07-29 Shatterproof Glass Corporation Sheet handling apparatus

Also Published As

Publication number Publication date
DE3169699D1 (en) 1985-05-09
US4380211A (en) 1983-04-19
JPS5754269A (en) 1982-03-31
EP0048884B1 (en) 1985-04-03
EP0048884A2 (en) 1982-04-07

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