EA202000047A1 - DEVICE AND METHOD FOR GENERATING LOW-TEMPERATURE PLASMA - Google Patents
DEVICE AND METHOD FOR GENERATING LOW-TEMPERATURE PLASMAInfo
- Publication number
- EA202000047A1 EA202000047A1 EA202000047A EA202000047A EA202000047A1 EA 202000047 A1 EA202000047 A1 EA 202000047A1 EA 202000047 A EA202000047 A EA 202000047A EA 202000047 A EA202000047 A EA 202000047A EA 202000047 A1 EA202000047 A1 EA 202000047A1
- Authority
- EA
- Eurasian Patent Office
- Prior art keywords
- energy
- temperature plasma
- generating
- atmospheric
- reduced pressure
- Prior art date
Links
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- Plasma Technology (AREA)
- Drying Of Semiconductors (AREA)
Abstract
Представлено устройство для генерации сильнонеравновесной низкотемпературной плазмы импульсных газовых разрядов при атмосферном и пониженном давлении, содержащее твердотельный импульсный генератор с датчиком тока, разрядный колебательный контур, получающий энергию от указанного генератора, а также управляющее компьютерное устройство для регулирования ввода энергии в разрядный контур в виде коротких импульсов путем независимой и динамической регулировки частоты и скважности подачи силовых импульсов на нагрузку через контур ударного возбуждения на основании данных, полученных по обратной связи от указанных датчиков тока. Регулирование ввода энергии осуществляют таким образом, чтобы постоянно поддерживать стабильные параметры плазмы. Также предложен способ генерации сильнонеравновесной низкотемпературной плазмы импульсных газовых разрядов при атмосферном и/или пониженном давлении с помощью устройства по изобретению. Технический результат заключается в возможности контролировать свойства среды в зоне обработки при сниженном энергопотреблении.A device for generating a highly nonequilibrium low-temperature plasma of pulsed gas discharges at atmospheric and reduced pressure is presented, containing a solid-state pulse generator with a current sensor, a discharge oscillatory circuit receiving energy from the specified generator, and a control computer device for regulating the input of energy into the discharge circuit in the form of short pulses by independently and dynamically adjusting the frequency and duty cycle of supplying power pulses to the load through the shock excitation circuit based on the data received through feedback from the specified current sensors. Energy input is controlled in such a way as to constantly maintain stable plasma parameters. Also proposed is a method for generating a strongly nonequilibrium low-temperature plasma of pulsed gas discharges at atmospheric and / or reduced pressure using a device according to the invention. The technical result consists in the ability to control the properties of the environment in the processing area with reduced energy consumption.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EA202000047A EA202000047A1 (en) | 2019-12-27 | 2019-12-27 | DEVICE AND METHOD FOR GENERATING LOW-TEMPERATURE PLASMA |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EA202000047A EA202000047A1 (en) | 2019-12-27 | 2019-12-27 | DEVICE AND METHOD FOR GENERATING LOW-TEMPERATURE PLASMA |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| EA202000047A1 true EA202000047A1 (en) | 2021-06-30 |
Family
ID=76807421
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| EA202000047A EA202000047A1 (en) | 2019-12-27 | 2019-12-27 | DEVICE AND METHOD FOR GENERATING LOW-TEMPERATURE PLASMA |
Country Status (1)
| Country | Link |
|---|---|
| EA (1) | EA202000047A1 (en) |
-
2019
- 2019-12-27 EA EA202000047A patent/EA202000047A1/en unknown
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