EA199600050A3 - Ion source. - Google Patents

Ion source.

Info

Publication number
EA199600050A3
EA199600050A3 EA199600050A EA199600050A EA199600050A3 EA 199600050 A3 EA199600050 A3 EA 199600050A3 EA 199600050 A EA199600050 A EA 199600050A EA 199600050 A EA199600050 A EA 199600050A EA 199600050 A3 EA199600050 A3 EA 199600050A3
Authority
EA
Eurasian Patent Office
Prior art keywords
ion source
ion
source
Prior art date
Application number
EA199600050A
Other languages
Russian (ru)
Other versions
EA199600050A1 (en
EA000064B1 (en
Inventor
Владимир Федорович Суприянович
Николай Константинович Касинский
Владимир Степанович Томаль
Михаэль Фальц
Рудигер Вилберг
Original Assignee
Научно-Произвоственное Государственное Предприятие "Оптическое Станкостроение И Вакуумная Техника"
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE19531141A external-priority patent/DE19531141C2/en
Application filed by Научно-Произвоственное Государственное Предприятие "Оптическое Станкостроение И Вакуумная Техника" filed Critical Научно-Произвоственное Государственное Предприятие "Оптическое Станкостроение И Вакуумная Техника"
Publication of EA199600050A3 publication Critical patent/EA199600050A3/en
Publication of EA199600050A1 publication Critical patent/EA199600050A1/en
Publication of EA000064B1 publication Critical patent/EA000064B1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/08—Ion sources; Ion guns using arc discharge
    • H01J27/14—Other arc discharge ion sources using an applied magnetic field
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/08—Ion sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/30—Electron or ion beam tubes for processing objects
    • H01J2237/31—Processing objects on a macro-scale
    • H01J2237/3142—Ion plating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)
EA199600050A 1995-05-16 1996-07-19 Ion source EA000064B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
BY950242 1995-05-16
DE19531141A DE19531141C2 (en) 1995-05-16 1995-08-24 Ion source

Publications (3)

Publication Number Publication Date
EA199600050A3 true EA199600050A3 (en) 1996-12-30
EA199600050A1 EA199600050A1 (en) 1997-03-31
EA000064B1 EA000064B1 (en) 1998-04-30

Family

ID=25665740

Family Applications (1)

Application Number Title Priority Date Filing Date
EA199600050A EA000064B1 (en) 1995-05-16 1996-07-19 Ion source

Country Status (3)

Country Link
EP (1) EP0743669B1 (en)
DE (1) DE59602769D1 (en)
EA (1) EA000064B1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109216151A (en) * 2018-08-16 2019-01-15 兰州大学 A kind of built-in antenna type high frequency ion source device

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4862032A (en) * 1986-10-20 1989-08-29 Kaufman Harold R End-Hall ion source
EP0541309B1 (en) * 1991-11-04 1996-01-17 Fakel Enterprise Plasma accelerator with closed electron drift

Also Published As

Publication number Publication date
EA199600050A1 (en) 1997-03-31
EP0743669B1 (en) 1999-08-18
EA000064B1 (en) 1998-04-30
DE59602769D1 (en) 1999-09-23
EP0743669A1 (en) 1996-11-20

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Legal Events

Date Code Title Description
MM4A Lapse of a eurasian patent due to non-payment of renewal fees within the time limit in the following designated state(s)

Designated state(s): AM AZ BY KZ KG MD TJ TM

MM4A Lapse of a eurasian patent due to non-payment of renewal fees within the time limit in the following designated state(s)

Designated state(s): RU