DE69617417D1 - Single-potential ion source - Google Patents

Single-potential ion source

Info

Publication number
DE69617417D1
DE69617417D1 DE69617417T DE69617417T DE69617417D1 DE 69617417 D1 DE69617417 D1 DE 69617417D1 DE 69617417 T DE69617417 T DE 69617417T DE 69617417 T DE69617417 T DE 69617417T DE 69617417 D1 DE69617417 D1 DE 69617417D1
Authority
DE
Germany
Prior art keywords
ion source
potential ion
potential
source
ion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69617417T
Other languages
German (de)
Other versions
DE69617417T2 (en
Inventor
Marsbed Hablanian
Asoka Ratnam
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Varian Inc
Original Assignee
Varian Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Varian Inc filed Critical Varian Inc
Application granted granted Critical
Publication of DE69617417D1 publication Critical patent/DE69617417D1/en
Publication of DE69617417T2 publication Critical patent/DE69617417T2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/08—Ion sources; Ion guns using arc discharge
    • H01J27/14—Other arc discharge ion sources using an applied magnetic field
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/02—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas
    • H01J41/04—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas with ionisation by means of thermionic cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/12—Ion sources; Ion guns using an arc discharge, e.g. of the duoplasmatron type
    • H01J49/126—Other arc discharge ion sources using an applied magnetic field

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Tubes For Measurement (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
DE1996617417 1996-08-30 1996-08-30 Single-potential ion source Expired - Fee Related DE69617417T2 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP96306329A EP0827179B1 (en) 1996-08-30 1996-08-30 Single potential ion source

Publications (2)

Publication Number Publication Date
DE69617417D1 true DE69617417D1 (en) 2002-01-10
DE69617417T2 DE69617417T2 (en) 2002-08-08

Family

ID=8225070

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1996617417 Expired - Fee Related DE69617417T2 (en) 1996-08-30 1996-08-30 Single-potential ion source

Country Status (2)

Country Link
EP (1) EP0827179B1 (en)
DE (1) DE69617417T2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW503432B (en) * 2000-08-07 2002-09-21 Axcelis Tech Inc Magnet for generating a magnetic field in an ion source
US7459677B2 (en) * 2006-02-15 2008-12-02 Varian, Inc. Mass spectrometer for trace gas leak detection with suppression of undesired ions

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE689532C (en) * 1936-08-26 1940-03-27 Siemens & Halske Akt Ges Device for generating positive ions
CH480626A (en) * 1968-12-24 1969-12-15 Balzers Patent Beteilig Ag Ionization manometer tube with exchangeable hot cathode
US4862032A (en) * 1986-10-20 1989-08-29 Kaufman Harold R End-Hall ion source

Also Published As

Publication number Publication date
EP0827179A1 (en) 1998-03-04
EP0827179B1 (en) 2001-11-28
DE69617417T2 (en) 2002-08-08

Similar Documents

Publication Publication Date Title
DE69732364D1 (en) ION SOURCE
FI951910A (en) Ion rörbarhetsspektrometer
DE69525980D1 (en) ELECTRON SOURCE
ATE208395T1 (en) THIOPHENOPYRIMIDINES
DE69727259D1 (en) plane
ATE262512T1 (en) ARYLALKANOYLPYRIDAZINE
NO984559L (en) TrÕlskovl
ID19075A (en) CAPACIC PLACES FOR ASETALDEHIDA
DE69608594D1 (en) Ion drive
ATE353652T1 (en) ESTROPROGESTATIVE CONTRACEPTIONAL
DE69413793D1 (en) Power source
DE69516071D1 (en) Electron source
DE59711168D1 (en) positron source
DE69617417D1 (en) Single-potential ion source
DE69525563D1 (en) ion implanter
DE59602769D1 (en) Ion source
KR950025875U (en) Ion implanter
KR970056056U (en) Ion implanter
DE69716890D1 (en) STEREO ENDOSKOP
KR980001116U (en) plane
UA1367S (en) PLANE
KR960025303U (en) Ion implanter
KR960025305U (en) Ion implanter
NO984585D0 (en) Acoustic Source II
KR970050224U (en) Publication

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee