DK397377A - Apparat til zonetraekning af ankrystalstave - Google Patents

Apparat til zonetraekning af ankrystalstave

Info

Publication number
DK397377A
DK397377A DK397377A DK397377A DK397377A DK 397377 A DK397377 A DK 397377A DK 397377 A DK397377 A DK 397377A DK 397377 A DK397377 A DK 397377A DK 397377 A DK397377 A DK 397377A
Authority
DK
Denmark
Prior art keywords
zone
rods
drawing zone
zone drawing
zone rods
Prior art date
Application number
DK397377A
Other languages
Danish (da)
English (en)
Inventor
J Floymayr
K Jericho
D Drechsel
F Bubeck
Original Assignee
Leybold Heraeus & Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Heraeus & Co filed Critical Leybold Heraeus & Co
Publication of DK397377A publication Critical patent/DK397377A/da

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B13/00Single-crystal growth by zone-melting; Refining by zone-melting
    • C30B13/32Mechanisms for moving either the charge or the heater
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10Apparatus
    • Y10T117/1024Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1032Seed pulling
    • Y10T117/1064Seed pulling including a fully-sealed or vacuum-maintained crystallization chamber [e.g., ampoule]
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10Apparatus
    • Y10T117/1024Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1032Seed pulling
    • Y10T117/1072Seed pulling including details of means providing product movement [e.g., shaft guides, servo means]
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10Apparatus
    • Y10T117/1024Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1076Apparatus for crystallization from liquid or supercritical state having means for producing a moving solid-liquid-solid zone

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
DK397377A 1976-09-08 1977-09-07 Apparat til zonetraekning af ankrystalstave DK397377A (da)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19762640377 DE2640377A1 (de) 1976-09-08 1976-09-08 Vorrichtung zum zonenziehen von einkristallstaeben

Publications (1)

Publication Number Publication Date
DK397377A true DK397377A (da) 1978-03-09

Family

ID=5987422

Family Applications (1)

Application Number Title Priority Date Filing Date
DK397377A DK397377A (da) 1976-09-08 1977-09-07 Apparat til zonetraekning af ankrystalstave

Country Status (6)

Country Link
US (1) US4218424A (de)
JP (1) JPS5332886A (de)
DE (1) DE2640377A1 (de)
DK (1) DK397377A (de)
IT (1) IT1107729B (de)
NL (1) NL7707753A (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2551470B1 (fr) * 1983-09-06 1985-11-08 Crismatec Tete de tirage de monocristaux

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1061527B (de) * 1953-02-14 1959-07-16 Siemens Ag Verfahren zum zonenweisen Umschmelzen von Staeben und anderen langgestreckten Werkstuecken
NL113496C (de) * 1959-06-12
US3291570A (en) * 1963-10-22 1966-12-13 Siemens Ag Apparatus for crucible-free zone melting of crystalline rods, particularly of semiconductor rods

Also Published As

Publication number Publication date
US4218424A (en) 1980-08-19
JPS5332886A (en) 1978-03-28
NL7707753A (nl) 1978-03-10
IT1107729B (it) 1985-11-25
DE2640377A1 (de) 1978-03-09

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Legal Events

Date Code Title Description
AHS Application shelved for other reasons than non-payment