DK3857278T3 - Integrerede varmestrukturer i et fotonisk integreret kredsløb til loddefastgørelsesanvendelser - Google Patents

Integrerede varmestrukturer i et fotonisk integreret kredsløb til loddefastgørelsesanvendelser Download PDF

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Publication number
DK3857278T3
DK3857278T3 DK19817508.5T DK19817508T DK3857278T3 DK 3857278 T3 DK3857278 T3 DK 3857278T3 DK 19817508 T DK19817508 T DK 19817508T DK 3857278 T3 DK3857278 T3 DK 3857278T3
Authority
DK
Denmark
Prior art keywords
integrated circuit
thermal structures
soldering applications
photonic
integrated
Prior art date
Application number
DK19817508.5T
Other languages
English (en)
Inventor
Kevin Yasumura
Lieven Verslegers
Jill Berger
Original Assignee
Google Llc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Google Llc filed Critical Google Llc
Application granted granted Critical
Publication of DK3857278T3 publication Critical patent/DK3857278T3/da

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4266—Thermal aspects, temperature control or temperature monitoring
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/124—Geodesic lenses or integrated gratings
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K1/00—Soldering, e.g. brazing, or unsoldering
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/34—Optical coupling means utilising prism or grating
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
    • G02B6/422—Active alignment, i.e. moving the elements in response to the detected degree of coupling or position of the elements
    • G02B6/4225—Active alignment, i.e. moving the elements in response to the detected degree of coupling or position of the elements by a direct measurement of the degree of coupling, e.g. the amount of light power coupled to the fibre or the opto-electronic element
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
    • G02B6/4228—Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements
    • G02B6/4232—Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements using the surface tension of fluid solder to align the elements, e.g. solder bump techniques
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
    • G02B6/4236—Fixing or mounting methods of the aligned elements
    • G02B6/4238—Soldering
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/02—Details
    • H05B3/03—Electrodes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/10—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor
    • H05B3/12—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12133—Functions
    • G02B2006/12135—Temperature control

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Mechanical Engineering (AREA)
  • Optical Couplings Of Light Guides (AREA)
  • Semiconductor Lasers (AREA)
  • Optical Integrated Circuits (AREA)
DK19817508.5T 2019-04-01 2019-11-14 Integrerede varmestrukturer i et fotonisk integreret kredsløb til loddefastgørelsesanvendelser DK3857278T3 (da)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US16/371,800 US10895702B2 (en) 2019-04-01 2019-04-01 Integrated heater structures in a photonic integrated circuit for solder attachment applications
PCT/US2019/061428 WO2020205002A1 (en) 2019-04-01 2019-11-14 Integrated heater structures in a photonic integrated circuit for solder attachment applications

Publications (1)

Publication Number Publication Date
DK3857278T3 true DK3857278T3 (da) 2024-04-02

Family

ID=68835342

Family Applications (1)

Application Number Title Priority Date Filing Date
DK19817508.5T DK3857278T3 (da) 2019-04-01 2019-11-14 Integrerede varmestrukturer i et fotonisk integreret kredsløb til loddefastgørelsesanvendelser

Country Status (7)

Country Link
US (1) US10895702B2 (da)
EP (1) EP3857278B1 (da)
CN (1) CN112789535A (da)
DK (1) DK3857278T3 (da)
FI (1) FI3857278T3 (da)
TW (1) TWI738129B (da)
WO (1) WO2020205002A1 (da)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11500151B2 (en) 2021-02-22 2022-11-15 Taiwan Semiconductor Manufacturing Company Limited Semiconductor arrangement and method of making

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6172997B1 (en) * 1998-06-16 2001-01-09 Aculight Corporation Integrated semiconductor diode laser pumped solid state laser
US20020181897A1 (en) 2001-02-20 2002-12-05 Mowry Gregory S. Optical module with electrical signal routing
US20080044128A1 (en) 2001-10-09 2008-02-21 Infinera Corporation TRANSMITTER PHOTONIC INTEGRATED CIRCUITS (TxPICs) AND OPTICAL TRANSPORT NETWORK SYSTEM EMPLOYING TxPICs
US20080260330A1 (en) * 2007-04-19 2008-10-23 Em4, Inc. Alignment with thin bonding layer of optical components
US8908723B2 (en) 2011-01-27 2014-12-09 Gideon Yoffe External cavity widely tunable laser using a silicon resonator and micromechanically adjustable coupling
JP6200642B2 (ja) 2012-11-30 2017-09-20 日本オクラロ株式会社 光学装置
US9171779B2 (en) 2013-08-29 2015-10-27 Industrial Technology Research Institute Semiconductor laser structure
CN106461890A (zh) * 2014-05-15 2017-02-22 纳米精密产品股份有限公司 用于光电装置的可拆卸光连接器
EP3170043A4 (en) * 2014-07-14 2018-06-20 Biond Photonics Inc. 3d photonic integration with light coupling elements
US9612401B2 (en) 2015-02-18 2017-04-04 Ciena Corporation Method and system for providing optical connections
US9606308B2 (en) * 2015-02-27 2017-03-28 International Business Machines Corporation Three dimensional self-alignment of flip chip assembly using solder surface tension during solder reflow
US9935424B2 (en) 2015-04-01 2018-04-03 Oracle International Corporation Integrated laser with back-reflection isolator
CN105259623B (zh) * 2015-10-30 2017-05-10 武汉电信器件有限公司 一种激光器与光栅耦合器的封装结构及其方法
US10146020B1 (en) 2017-05-30 2018-12-04 Google Llc MEMS steering mirrors for applications in photonic integrated circuits
US11239377B2 (en) 2017-08-07 2022-02-01 Rockley Photonics Limited Optoelectronic module package

Also Published As

Publication number Publication date
EP3857278A1 (en) 2021-08-04
CN112789535A (zh) 2021-05-11
WO2020205002A9 (en) 2021-04-15
US20200310053A1 (en) 2020-10-01
FI3857278T3 (fi) 2024-04-03
TWI738129B (zh) 2021-09-01
US10895702B2 (en) 2021-01-19
TW202038400A (zh) 2020-10-16
WO2020205002A1 (en) 2020-10-08
EP3857278B1 (en) 2024-01-03

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