DK3851904T3 - Fremgangsmåde, anordning og apparat til forbedret styring af bredbåndsstrålingsgenerering - Google Patents

Fremgangsmåde, anordning og apparat til forbedret styring af bredbåndsstrålingsgenerering Download PDF

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Publication number
DK3851904T3
DK3851904T3 DK20213776.6T DK20213776T DK3851904T3 DK 3851904 T3 DK3851904 T3 DK 3851904T3 DK 20213776 T DK20213776 T DK 20213776T DK 3851904 T3 DK3851904 T3 DK 3851904T3
Authority
DK
Denmark
Prior art keywords
improved control
radiation generation
broadband radiation
broadband
generation
Prior art date
Application number
DK20213776.6T
Other languages
English (en)
Inventor
Hendrik Sabert
Patrick Sebastian Uebel
Willem Richard Pongers
Original Assignee
Asml Netherlands Bv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from EP20156804.5A external-priority patent/EP3865931A1/en
Application filed by Asml Netherlands Bv filed Critical Asml Netherlands Bv
Application granted granted Critical
Publication of DK3851904T3 publication Critical patent/DK3851904T3/da

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/35—Non-linear optics
    • G02F1/365—Non-linear optics in an optical waveguide structure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/02—Optical fibres with cladding with or without a coating
    • G02B6/02214—Optical fibres with cladding with or without a coating tailored to obtain the desired dispersion, e.g. dispersion shifted, dispersion flattened
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/02—Optical fibres with cladding with or without a coating
    • G02B6/02295—Microstructured optical fibre
    • G02B6/02314—Plurality of longitudinal structures extending along optical fibre axis, e.g. holes
    • G02B6/02319—Plurality of longitudinal structures extending along optical fibre axis, e.g. holes characterised by core or core-cladding interface features
    • G02B6/02323—Core having lower refractive index than cladding, e.g. photonic band gap guiding
    • G02B6/02328—Hollow or gas filled core
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/0147—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on thermo-optic effects
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/35—Non-linear optics
    • G02F1/3528—Non-linear optics for producing a supercontinuum

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Radiation-Therapy Devices (AREA)
DK20213776.6T 2020-01-15 2020-12-14 Fremgangsmåde, anordning og apparat til forbedret styring af bredbåndsstrålingsgenerering DK3851904T3 (da)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP20151863 2020-01-15
EP20156804.5A EP3865931A1 (en) 2020-02-12 2020-02-12 Method, assembly, and apparatus for improved control of broadband radiation generation

Publications (1)

Publication Number Publication Date
DK3851904T3 true DK3851904T3 (da) 2023-02-27

Family

ID=73790121

Family Applications (1)

Application Number Title Priority Date Filing Date
DK20213776.6T DK3851904T3 (da) 2020-01-15 2020-12-14 Fremgangsmåde, anordning og apparat til forbedret styring af bredbåndsstrålingsgenerering

Country Status (7)

Country Link
US (1) US11372154B2 (da)
EP (1) EP3851904B1 (da)
CN (1) CN114945865A (da)
DK (1) DK3851904T3 (da)
IL (1) IL293985B2 (da)
TW (1) TWI747691B (da)
WO (1) WO2021144093A1 (da)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20220008912A (ko) * 2019-06-21 2022-01-21 에이에스엠엘 네델란즈 비.브이. 장착된 중공 코어 섬유 배열체
DK3851904T3 (da) * 2020-01-15 2023-02-27 Asml Netherlands Bv Fremgangsmåde, anordning og apparat til forbedret styring af bredbåndsstrålingsgenerering
EP4202508A1 (en) 2021-12-22 2023-06-28 ASML Netherlands B.V. Waveguides and manufacturing methods thereof
CN115165746B (zh) * 2022-07-08 2024-06-07 重庆大学 一种液相介质中溶解气体原位检测组件及制备方法
CN117725853B (zh) * 2023-12-25 2024-09-06 蓝箭航天空间科技股份有限公司 一种液体火箭喷流尾焰辐射热流预测方法及装置

Family Cites Families (44)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20010088803A (ko) 1998-09-15 2001-09-28 알프레드 엘. 미첼슨 축변화 구조를 가지는 도파관
DE60319462T2 (de) 2002-06-11 2009-03-12 Asml Netherlands B.V. Lithographischer Apparat und Verfahren zur Herstellung eines Artikels
SG121818A1 (en) 2002-11-12 2006-05-26 Asml Netherlands Bv Lithographic apparatus and device manufacturing method
SG125101A1 (en) 2003-01-14 2006-09-29 Asml Netherlands Bv Level sensor for lithographic apparatus
US7265364B2 (en) 2004-06-10 2007-09-04 Asml Netherlands B.V. Level sensor for lithographic apparatus
US7791727B2 (en) 2004-08-16 2010-09-07 Asml Netherlands B.V. Method and apparatus for angular-resolved spectroscopic lithography characterization
US7791724B2 (en) 2006-06-13 2010-09-07 Asml Netherlands B.V. Characterization of transmission losses in an optical system
US7701577B2 (en) 2007-02-21 2010-04-20 Asml Netherlands B.V. Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method
IL194839A0 (en) 2007-10-25 2009-08-03 Asml Netherlands Bv Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method
NL1036123A1 (nl) 2007-11-13 2009-05-14 Asml Netherlands Bv Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method.
NL1036245A1 (nl) 2007-12-17 2009-06-18 Asml Netherlands Bv Diffraction based overlay metrology tool and method of diffraction based overlay metrology.
NL1036476A1 (nl) 2008-02-01 2009-08-04 Asml Netherlands Bv Alignment mark and a method of aligning a substrate comprising such an alignment mark.
NL1036684A1 (nl) 2008-03-20 2009-09-22 Asml Netherlands Bv Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method.
NL1036685A1 (nl) 2008-03-24 2009-09-25 Asml Netherlands Bv Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method.
NL1036734A1 (nl) 2008-04-09 2009-10-12 Asml Netherlands Bv A method of assessing a model, an inspection apparatus and a lithographic apparatus.
NL1036857A1 (nl) 2008-04-21 2009-10-22 Asml Netherlands Bv Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method.
JP2011525713A (ja) 2008-06-26 2011-09-22 エーエスエムエル ネザーランズ ビー．ブイ． オーバレイ測定装置、リソグラフィ装置、及びそのようなオーバレイ測定装置を用いたデバイス製造方法
JP5584689B2 (ja) 2008-10-06 2014-09-03 エーエスエムエル ネザーランズ ビー．ブイ． ２次元ターゲットを用いたリソグラフィの焦点及びドーズ測定
EP2228685B1 (en) 2009-03-13 2018-06-27 ASML Netherlands B.V. Level sensor arrangement for lithographic apparatus and device manufacturing method
CN102498441B (zh) 2009-07-31 2015-09-16 Asml荷兰有限公司 量测方法和设备、光刻系统以及光刻处理单元
NL2006229A (en) 2010-03-18 2011-09-20 Asml Netherlands Bv Inspection method and apparatus, and associated computer readable product.
US8385699B2 (en) * 2010-07-29 2013-02-26 Jian Liu Amplified broadband fiber laser source
WO2012022584A1 (en) 2010-08-18 2012-02-23 Asml Netherlands B.V. Substrate for use in metrology, metrology method and device manufacturing method
NL2009004A (en) 2011-07-20 2013-01-22 Asml Netherlands Bv Inspection method and apparatus, and lithographic apparatus.
NL2010717A (en) 2012-05-21 2013-11-25 Asml Netherlands Bv Determining a structural parameter and correcting an asymmetry property.
US9606442B2 (en) 2012-07-30 2017-03-28 Asml Netherlands B.V. Position measuring apparatus, position measuring method, lithographic apparatus and device manufacturing method
CN103022880A (zh) 2012-12-17 2013-04-03 中国联合网络通信集团有限公司 超连续谱光谱宽度调整装置和方法
EP2802043A1 (en) * 2013-05-08 2014-11-12 Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V. Method and light pulse source for generating soliton light pulses
EP2942847B1 (en) * 2014-05-09 2019-07-03 Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V. Method and device for creating supercontinuum light pulses
KR102355347B1 (ko) 2014-11-26 2022-01-24 에이에스엠엘 네델란즈 비.브이. 계측 방법, 컴퓨터 제품 및 시스템
NL2015812A (en) 2014-12-22 2016-09-22 Asml Netherlands Bv Level sensor, lithographic apparatus and device manufacturing method.
JP6630369B2 (ja) 2015-06-17 2020-01-15 エーエスエムエル ネザーランズ ビー．ブイ． 相互レシピ整合性に基づくレシピ選択
DK3136143T3 (en) * 2015-08-26 2020-05-18 Max Planck Gesellschaft Hollow-Core Fibre and Method of Manufacturing Thereof
NL2019009A (en) * 2016-06-09 2017-12-13 Asml Netherlands Bv Radiation Source
CN106405727A (zh) * 2016-11-09 2017-02-15 哈尔滨工程大学 一种基于热变形方式的中空双芯长周期光纤光栅写入方法
KR102592778B1 (ko) * 2017-01-09 2023-10-24 막스-플랑크-게젤샤프트 츄어 푀르더룽 데어 비쎈샤프텐 에.파우. 광대역 광원장치 및 광대역 광 펄스 생성 방법
US11999645B2 (en) * 2018-10-24 2024-06-04 Asml Netherlands B.V. Optical fibers and production methods therefor
EP3767375A1 (en) * 2019-07-19 2021-01-20 ASML Netherlands B.V. A light source and a method for use in metrology applications
NL2023533A (en) 2019-07-19 2019-08-14 Asml Netherlands Bv A light source and a method for use in metrology applications
KR20220024908A (ko) * 2019-07-24 2022-03-03 에이에스엠엘 네델란즈 비.브이. 방사선 소스
DK3812807T3 (da) * 2019-10-24 2024-05-21 Asml Netherlands Bv Optisk komponent baseret på fotoniske krystalfibre med hul kerne til generering af bredbåndsstråling
EP3839586A1 (en) * 2019-12-18 2021-06-23 ASML Netherlands B.V. Hollow-core photonic crystal fiber based optical component for broadband radiation generation
DK3851904T3 (da) * 2020-01-15 2023-02-27 Asml Netherlands Bv Fremgangsmåde, anordning og apparat til forbedret styring af bredbåndsstrålingsgenerering
EP3913429A1 (en) * 2020-05-19 2021-11-24 ASML Netherlands B.V. A supercontinuum radiation source and associated metrology devices

Also Published As

Publication number Publication date
EP3851904B1 (en) 2023-02-01
TW202142973A (zh) 2021-11-16
IL293985A (en) 2022-08-01
IL293985B2 (en) 2024-10-01
KR20220113799A (ko) 2022-08-16
WO2021144093A1 (en) 2021-07-22
IL293985B1 (en) 2024-06-01
TWI747691B (zh) 2021-11-21
EP3851904A1 (en) 2021-07-21
US11372154B2 (en) 2022-06-28
US20210215872A1 (en) 2021-07-15
CN114945865A (zh) 2022-08-26

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